AlGaSb三元化合物的液相外延生长及其参数测量

在 GaSb 衬底上用过冷却技术在550℃的饱和温度下生长了晶格匹配的AlGaSb 外延层。用金相显微镜测量了外延层的厚度并观察了形貌。用 X 射线双晶衍射和低温光致发光技术分别测量了材料的晶格常数和禁带宽度,并因此确定了外延层的组分。     

GaAs/Al_xGa_(1-x)As超晶格中的纵光学声子模

本文报道GaAs/Al_xGa_(1-x)As短周期超晶格结构中的纵光学声子模的室温Raman散射测量结果。除了限制在GaAs层中的GaAs LO限制模外,我们还首次观测到限制在Al_xGa_(1-x)As混晶层中的类AlAs LO限制模。根据线性链模型,我们把测量到的LO限制模的频率按照q=m/(n+1)(a_0/(2π))展开,给出了Al_xGa_(1-x)As混晶的类AlAs LO声子色散曲线。     

GaSb基的InAs/GaSbⅡ类超晶格背景载流子浓度的测量

高质量的InAs/GaSbⅡ类超晶格(SLs)材料生长在晶格匹配的GaSb衬底上,由于GaSb衬底具有良好的导电性,传统的霍尔测量难以直接得到外延超晶格材料的载流子浓度等电学参数,所以,如何准确地获得InAs/GaSb超晶格外延材料中的载流子浓度成为了研究人员关注的焦点之一。主要介绍了InAs/GaSbⅡ类超晶格背景载流子浓度测量的四种典型的方法:低温霍尔技术;变磁场霍尔技术以及迁移率谱拟合;衬底去除技术;电容-电压技术。并给出了各种方法的基本原理,评价了每种方法的优缺点。     

Hg_(1- x)Cd_x Te禁带宽度附近折射率增强效应

用红外椭圆偏振光谱测量了室温下 Hg1 - x Cdx Te(x=0 .2 76 ,0 .30 9,0 .378)体材料位于禁带宽度之下、附近和之上的折射率 .对每一种组份样品均观察到明显的折射率增强效应 .折射率峰值所对应的能量位置近似等于其禁带宽度 .禁带宽度之上折射率随波长 λ变化可用 Sellmeier色散关系 n2 (λ) =a1 + a2 / λ2 + a3/ λ4+ a4/ λ6进行拟合 .     

Measurement of the background carrier concentration of type-Ⅱ InAs/GaSb superlattices based on GaSb

高质量的InAs/GaSbⅡ类超晶格(SLs)材料生长在晶格匹配的GaSb衬底上,由于GaSb衬底具有良好的导电性,传统的霍尔测量难以直接得到外延超晶格材料的载流子浓度等电学参数,所以,如何准确地获得InAs/GaSb超晶格外延材料中的载流子浓度成为了研究人员关注的焦点之一.主要介绍了InAs/GaSbⅡ类超晶格背景载流子浓度测量的四种典型的方法:低温霍尔技术;变磁场霍尔技术以及迁移率谱拟合;衬底去除技术;电容-电压技术.并给出了各种方法的基本原理,评价了每种方法的优缺点.     

Cd_(1-x)Zn_xTe晶片中Zn组分的室温显微光致发光平面扫描表征

用显微光致发光 (μ- PL)平面扫描的方法对 Cd Zn Te(CZT)晶片进行了研究 .分别在 19μm× 16 μm的缺陷区域进行微米尺度和 7.9mm× 6 .0 mm的大面积范围内进行毫米尺度的逐点 PL 测量 .对测得每一点的 PL 谱进行了拟合 ,得到测量点的禁带宽度等参数 ,其平面分布对应于 CZT中 Zn的组分分布 .统计的结果给出禁带宽度的不均匀性 .对样品进行溴抛光后重复类似的测量 ,结果表明禁带宽度的均匀性大为改善 ,接近了材料组分的真实分布     

Ga_(1-x)In_xSb/GaSb应变层超晶格的MOVPE生长

本文报道用常压金属有机物气相外延方法在 GaSb衬底上生长 Ga_(1-x)In_xSb/GaSb应变层超晶格材料.X射线双晶衍射谱和反射电子显微像表明超晶格结构的周期性,GalnSb阱的组分均匀性和异质结界面质量较好.观察到当In含量提高时起源于超晶格-衬底界面处的失配位错.低温光荧光测量显示出因量子尺寸效应导致的带间跃迁向高能方向的移动.     

Hg1—xCdxTe禁带宽度附近折射率增强效应

用红外椭圆偏振光谱测量了室温下Hg1-xCdxTe(x=0.276,0.309,0.378)体材料位于禁带宽度之下、附近和之上的折射率。对每一种组份样品均观察到明显的折射率增强效应。折射率峰值所对应的能量位置近似等于其带宽度。禁带宽度之上折射率皮长λ变化可用Sellmeier色散关系n^2(λ)=a1 a2/λ^2 a3/λ^4 a4/λ^6进行拟合。     

MBE生长GaAs/AlGaAs量子阱材料结构及其光学性能研究

系统研究了Ⅰ类组分量子阱结构材料GaAs/AlGaAs的结构设计、材料表征及光学性能.利用分子束外延(MBE)技术生长量子阱材料,原子力显微镜(AFM)测量结果表明样品表面粗糙度达到10-1 nm数量级.X射线双晶衍射测试结果显示材料具备良好的生长质量及晶格完整性.室温光致发光谱探测出量子阱导带电子与价带轻重空穴的复合发光,及施主-受主(D-A)能级间距与GaAs禁带宽度.综合分析结果表明用MBE方法制备实现了与设计结构高度相符的GaAs/Alo.27Gao.73As量子阱样品,为后期器件设计的精确实现提供了理论依据.     

用于红外探测的短周期InAs/GaSb超晶格材料的生长

用金属有机物化学气相淀积法(MOCVD)在GaSb衬底上生长InAs/GaSb超晶格,探索了最佳的生长厚度,优化了各种生长参数,并且分析了源流量控制的重要性.得到的超晶格材料的光致发光(PL)谱、X射线双晶衍射图以及表面形貌图表明,生长的超晶格材料可以响应10μm的长波,且具有良好的表面形貌和外延层质量.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.