阴极电弧沉积类金刚石膜在电声中的应用——高保真DLC／Ti高音扬声器振膜的研发和生产

阐述高保真类金刚石／钛高音振膜的研发和生产．在制备品质及外观兼优的纯钛振膜的基础上，利用阴极电弧沉积技术在钛膜上沉积类金刚石(DLC)膜层．结果显示各项物理性能及主观听感明显改善，并实现了批量生产，进入市场．     

阴极电弧沉积类金刚石膜在电声中的应用--高保真DLC/Ti高音扬声器振膜的研发和生产

阐述高保真类金刚石/钛高音振膜的研发和生产.在制备品质及外观兼优的纯钛振膜的基础上,利用阴极电弧沉积技术在钛膜上沉积类金刚石(DLC)膜层.结果显示各项物理性能及主观听感明显改善,并实现了批量生产,进入市场.     

真空阴极电弧沉积法沉积类金刚石膜在扬声器振膜上应用的研究

采用真空阴极电经反沉积技术，在纯钛球顶高音声声器振膜上镀类金刚石膜，为成类金刚石／钛复合振膜。研究了钛基体的材质、厚度、振膜的几何尺寸和形状、类金刚石镀膜工艺参数对复合振膜性能的影响。在镀膜过程中采用特殊的辅助夹具以及合理的遮挡技术，保证振膜不变形和最佳的类金刚石膜层厚度分布，使类金刚石／钛复合振膜的频响达到３０ｋＨｚ，并且能实现批量生产。     

碳氮膜的沉积工艺及其结构研究

以氨气为反应气体,用真空阴极电弧沉积法制备了CNx膜,研究了工艺参数对膜层的沉积速率,化学成分的影响及膜层结合状态,结果表明,沉积速率随着氨气分压的提高而下降,当氨气分压达到6．7Pa时将没有膜的沉积;CNx膜主要由碳和氮组成,降低真空系统的抽速,将反应气体导至靶面附近,提高氨气分压可以提高膜层中氮含量,氮是以化合态存在于膜层中。     

真空阴极电弧沉积TiB2薄膜的组织结构及其摩擦学性能的研究

用TiB2作阴极靶，采用优化的真空阴极电弧沉积工艺制备的TiB2薄膜是由TiB2，Ti2B5,TiB和Ti组成的多相结构。薄膜的摩擦磨损试验表明：TiB2薄膜的摩擦系数为0.139，膜层寿命超过60min，是TiN和（Ti,Al)N膜层的2倍。     

碳氮膜的沉积工艺及其结构研究

以氨气为反应气体,用真空阴极电弧沉积法制备了CNx膜,研究了工艺参数对膜层的沉积速率、化学成分的影响及膜层结合状态.结果表明:沉积速率随着氨气分压的提高而下降,当氨气分压达到6.7 Pa时将没有膜的沉积;CNx膜主要由碳和氮组成,降低真空系统的抽速、将反应气体导至靶面附近、提高氨气分压可以提高膜层中氮含量;氮是以化合态存在于膜层中.     

真空阴极电弧沉积TiB2薄膜的组织结构及其摩擦学性能的研究

用TiB2作阴极靶,采用优化的真空阴极电弧沉积工艺制备的TiB2薄膜是由TiB2,Ti2B5,TiB和Ti组成的多相结构.薄膜的摩擦磨损试验表明:TiB2薄膜的摩擦系数为0.139,膜层寿命超过60 min,是TiN和(Ti,Al)N膜层的2倍.     

用热灯丝辅助化学汽相沉积法在钼基板上沉积金刚石薄膜的研究

用热灯丝辅助化学汽相沉积（HFACVD）法，以H2＋CH4为原料在钼基板上沉积出了金刚石膜。用扫描电镜，X射线衍射，激光Raman光谱和光荧光谱对所得金刚石膜进行了分析。实验结果表明，钼基板表面先生成了1层Mo2C，然后，金刚石再在此Mo2C上形核生长。所沉积的金刚石膜中仍含有一定的SP^2态碳和中性空缺等缺陷。     

真空阴极电弧沉积TiN装饰膜工艺与应用研究

本文研究了真空阴极电弧沉积 TiN 装饰膜的工艺及其应用.利用 X 射线衍射、扫描电镜等方法,分析了膜层性能与沉积工艺之间的关系,结果表明:(1)适当增大气氛压力,可减少 Ti 液滴,从而提高了膜层的显微硬度和耐腐蚀性能;(2)膜层颜色与负偏压和氮分压有关.本文报导了工艺参数对膜层织构和品格畸变的影响.本文还对表壳、表带、餐具.陶瓷制品仿金镀等应用问题进行了讨论.     

YG6硬质合金表面火焰法沉积纳米复合碳涂层

采用火焰法在抛光的YG6硬质合金表面沉积碳涂层,用扫描电镜、X射线衍射及显微激光拉曼光谱等分析手段对其形态及结构进行了表征.结果表明,在火焰内焰长度为50 mm、基体离火焰喷嘴距离为30 mm、沉积温度约850℃、沉积时间为1 h的工艺条件下,可制备出纳米类球状金刚石聚晶和类金刚石复合碳涂层.     

硬质合金刀具的类金刚石涂层的研究

采用优化的沉积类金刚石（DLC）涂层工艺及过渡层技术,在硬质合金上制备出性能优良的DLC膜,实验室切削试验与工业生产现场切削表明：在切削铝青铜和共晶铝硅合金时,DLC膜涂层刀具使用寿命明显高于末涂层刀具。     

Study of relationship between structure and transmittance of diamond-like carbon (DLC) films

1IntroductionArtificial synthesis of diamond and diamond-like carbon(DLC)have beenthe advanced andfocused re-search aspect in materials science for about twenty years.As a wear-resistant protective fil m,diamond-likecarbon fil m has extensive applications.Due to different matrix and service conditions,different requestswere proposed to properties and deposition conditions of diamond-like carbon.There has been many methods to prepare DLCfil m,however,most of DLCfil ms were not transpar-ent.…     

Study of relationship between structure and transmittance of diamond-like carbon (DLC) films

In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90, in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.     

Study of relationship between structure and transmittance of diamond-like carbon (DLC) films

In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.     

机械功能硬质薄膜的研究及应用

广州有色金属研究院研究开发出二元氮化物、多元多层膜和本征超硬膜等多种类型的机械功能硬质薄膜,文中对其研发的膜层及其性能和应用进行了归纳和总结.     

Deposition of diamond like carbon films by using a single ion gun with varying beam source

Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample holder and could be avoided. The thickness of the films ranges from tens up to 200 nanometers, and the hardness is in the range 20 to 30 GPa. Raman analytical results reveal the films are in amorphous structure. The effects of different beam source on the films structure are further discussed.     

衬底类型对ZnO薄膜应用在太阳能电池上的影响

采用射频磁控溅射技术在硅衬底和石英玻璃衬底上制备了Al掺杂ZnO(AZO)薄膜,研究了不同衬底对AZO薄膜的结构、形貌、电学和光学性质的影响.结果表明:硅衬底上沉积的AZO薄膜具有更好的结晶质量;同时,硅衬底上AZO薄膜电阻率和载流子浓度较玻璃衬底上的性能提高10倍以上,其霍尔迁移率提高约17倍左右,硅衬底上AZO薄膜...     

H13钢等离子渗氮-类金刚石膜(DLC)复合处理的性能研究

研究了等离子渗氮-离子镀类金刚石膜复合处理工艺与未氮化离子镀类金刚石膜处理工艺对H13钢表面性能的影响.结果表明,经过等离子渗氮后镀类金刚石涂层复合处理的H13钢表面硬度、膜/基结合强度、耐磨性能等均优于未氮化镀类金刚石涂层的样品.