高密度排列大功率垂直腔面发射激光器列阵

报道了980nm高密度排列大功率垂直腔面发射激光器列阵的研制.列阵单元为蜂窝状密堆积排列,单元台面直径为70μm,氧化孔径为30μm,相邻单元间隔为100μm.制作了含7,19,37个单元的列阵,讨论了它们的阈值电流和远场特性.在室温连续工作条件下,3种列阵的最大输出功率分别为0.26,0.5和0.6W.其中含37个单元的列阵在6A脉冲电流(脉宽30μs,重复频率100Hz)激发下,输出功率达到1.4W.     

出纤功率30W的激光二极管线列阵光纤耦合器件

用一根柱透镜对大功率半导体激光器线列阵输出光束的快轴方向进行准直,准直后的光束耦合到光纤列阵中.大功率半导体激光二极管线列阵的输出功率为40W,线列阵有19个发光单元,每个发光单元的发光区面积为100μm×1μm.大功率激光二极管线列阵耦合后出纤功率为30W,耦合效率为75%,光纤的数值孔径为0.11.     

11W准CW单片激光器及列阵

光谱二极管实验室研制出了目前最大输出功率的激光列阵。该激光列阵长1cm,它由20个单元组成,每个单元又由10个发光点组成,每个单元长度为100μm,单元间距离为40μm。该列阵已获得11W的准CW工作,(脉宽为150μs)。工作电流为17.3A,该列阵的激光器为量子阱结构,     

出纤功率30W的激光二极管线列阵光纤耦合器件

用一根柱透镜对大功率半导体激光器线列阵输出光束的快轴方向进行准直 ,准直后的光束耦合到光纤列阵中 .大功率半导体激光二极管线列阵的输出功率为 4 0 W,线列阵有 19个发光单元 ,每个发光单元的发光区面积为10 0μm× 1μm .大功率激光二极管线列阵耦合后出纤功率为 30 W,耦合效率为 75 % ,光纤的数值孔径为 0 .11     

高功率半导体激光器列阵光纤耦合模块

根据大功率半导体激光二极管列阵与光纤列阵耦合方式, 分别从理论和实验两方面讨论、分析了大功率半导体激光二极管列阵与微球透镜光纤列阵耦合。将19 根芯径均为200 μm 的光纤的端面分别熔融拉锥成具有相同直径的微球透镜, 利用V 形槽精密排列, 排列周期等于激光二极管列阵各发光单元的周期。将微球透镜光纤列阵直接对准半导体激光二极管列阵的19 个发光单元, 精密调节两者之间的距离, 使耦合输出功率达到最大。半导体激光二极管列阵与微球透镜光纤列阵直接耦合后, 不仅从各个方向同时压缩了激光束的发散角, 有效地实现了对激光束的整形、压缩, 而且实现30 W 的高输出功率, 最大耦合效率大于80%, 光纤的数值孔径为0.16。     

高功率半导体激光器列阵光纤耦合模块

根据大功率半导体激光二极管列阵与光纤列阵耦舍方式。分别从理论和实验两方面讨论、分析了大功率半导体激光二极管列阵与微球透镜光纤列阵耦舍。将19根芯径均为200μm的光纤的端面分别熔融拉锥成具有相同直径的微球透镜，利用V形槽精密排列，排列周期等于激光二极管列阵各发光单元的周期。将微球透镜光纤列阵直接对准半导体激光二极管列阵的19个发光单元，精密调节两者之间的距离．使耦合输出功率达到最大。半导体激光二极管列阵与微球透镜光纤列阵直接耦合后，不仅从各个方向同时压缩了激光束的发散角，有效地实现了对激光束的整形、压缩，而且实现30w的高输出功率，最大耦舍效率大于80％，光纤的数值孔径为0．16。     

980 nm高峰值功率微型化VCSEL脉冲激光光源

报道了输出波长980 nm的高峰值功率垂直腔面发射激光器(VCSEL)及其微型化脉冲激光光源.通过优化VCSEL单元器件的结构,有效抑制了宽面VCSEL结构中的非均匀电流分布,提高了单元器件的斜率效率,获得了直径400μm,峰值输出功率62 W的VCSEL单元器件;在此基础上,研制出由单元器件组合封装而成的VCSEL"准列阵"子模块以及集成驱动电路的微型化VCSEL脉冲激光光源,该光源在脉冲驱动条件为30 ns、2 k Hz、105 A条件下的峰值输出功率达到226 W,光脉冲宽度35 ns,中心波长979.4nm,斜率效率达到2.15 W/A.     

高光束质量新型垂直腔面发射激光器阵列

报道了一种具有新型排列方式的垂直腔面发射半导体激光器(VCSEL)阵列.通过调制阵列中各单元直径以及单元间距,得到1 kW/cm2的高功率密度和高斯远场分布,且在工作电流0～6 A内远场发散角均小于20°.阵列山直径分别为200 μm,150 μm和100 μm成中心对称分布的5个单元组成,单元圆心间距分别为250μm和200μm.在室温连续工作条件下.阵列在注入电流4 A时达最大输出功率880 mw,斜率效率为0.3 W/A,具有0.56 A的低阈值电流,微分电阻0.09 Ω.与具有相同出光面积的4×4二维阵列相比,这种新型阵列在出光功率、阈值电流、光谱特性及远场分布等方面均具有优越性.模拟了阵列各单元叠加后的近场远场光强分布,结果表明得到的新型阵列的远场分布与实验结果吻合较好.     

双波段红外HgCdTe焦平面列阵

本文综述法国原子能委员会LETI红外实验室在双波段红外焦平面列阵方面所做的研究工作.在工艺上,该实验室采用的是通过分子束外延法在晶格匹配的高质量CdZnTe衬底上生长的HgCdTe多层掺杂异质结构.器件的结构是n+ppn,而且在空间上是相干的.长波层是一个平面状的n+/p二极管,它是通过离子注入制成的,而波长较短的p-n二极管则是在分子束外延过程中通过掺铟在原位制成的.最后一个结是通过台面蚀刻而被隔离的,探测器通过铟丘与一个读出效率接近100%的读出电路互连.每个像元有一个或两个铟丘,用来按序或者同时访问两个波长,探测器的间距分别为50μm和60μm.每个波段中的单元探测器所呈现的性能接近用标准工艺制作的单色探测器的性能.为了优化双波段红外焦平面列阵的性能,LETI红外实验室专门为这种列阵设计了一种硅CMOS读出电路.本文介绍了128×128元(间距为50μm)中波红外(2μm～5μm)双色焦平面列阵在77K温度处操作时的光电性能.     

半导体列阵激光器波长复合设计及实验研究

利用半导体材料波长易调节的特点,设计了AlGaInAs/GaAs/AlGaAs压应变量子阱结构,得到760、800、860、930和976nm 5个波长激射的半导体列阵激光器,同时设计了4个短波通滤波片参数,开展了半导体列阵激光器的多波长光束复合技术的实验研究,最终实现了5个波长的半导体列阵激光器的光束复合,得到112W的激光功率输出,总体效率为88.5%,其中波长复合效率达92.4%,输出聚焦光斑尺寸为136μm×1 330μm,聚焦光功率密度达6.43×104 W/cm2。     

垂直腔面发射激光器

The development and application of vertical-cavity surface-emitting lasers (VCSELs) are summarized in this paper. The emphasis is focused on the high power single and 2-D arrays bottom-emitting VCSELs with a wavelength of 980nm. A distinguished device performance is achieved. The maximum continuous-wave (CW) output power of large aperture single devices with active diameters up to 500μm is as high as 1.95W at room temperature, which is to our knowledge the highest value reported for a single device. Size dependence of the output power, the threshold current and the differential resistance are discussed. A 16 elements array with 200μm aperture size (250μm center spacing) of individual elements shows a CW output power of 1.32W at room temperature.     

高功率窄脉冲垂直腔面发射激光器n-DBR反射率的优化

从理论上研究了n型分布布拉格反射镜(n-DBR)的反射率对器件阈值电流、输出功率以及转换效率的影响,得出了最佳反射率。在此基础上研制了垂直腔面反射激光器(VCSEL)单管和阵列器件,采用波形分析法对VCSEL器件的功率进行了测试。在脉冲宽度60ns,重复频率100Hz条件下,500μm口径单管器件在注入电流为110A时,峰值输出功率达102W,功率密度为52kW/cm2,4×4、5×5阵列器件在100A时,功率分别达到98W和103W。对比了单管器件在连续、准连续和脉冲工作条件下的输出特性和光谱特性,连续和准连续条件下激射波长的红移速率分别为0.92nm/A和0.3nm/A,6A时的内部温升分别为85℃和18℃,而脉冲条件下激射波长的红移速率仅为0.0167nm/A,6A时的温升为1.5℃,远小于连续和准连续的情况,这也是器件在脉冲条件下能得到很高输出功率的主要原因。     

Thermal crosstalk in 4/spl times/4 vertical-cavity surface-emitting laser arrays

We measured thermal crosstalk in 4/spl times/4 VCSEL arrays with a 30-/spl mu/m pitch between devices. The effective thermal resistance of laser diodes in two-dimensional (2-D) arrays is about 50% higher than that of single elements. The output power of the lasers is fairly temperature insensitive under constant voltage operation. From experiments we inferred values for the average thermal conductivity of AlAs-GaAs Bragg reflectors. We found anisotropy in the effective thermal conductivity with numbers of 0.28 W/(cmK) and 0.35 W/(cmK) for the transverse and lateral direction, respectively.     

910 nm高峰值功率垂直腔面发射激光光源

报道了910 nm高峰值功率垂直腔面发射半导体激光器列阵(Vertical Cavity Surface Emitting Laser,VCSEL)的设计方法及测试结果.所制备的910 nm VCSEL列阵在准连续工作时激光功率达到2 W;在重复频率10 kHz,脉冲宽度30 ns,工作电流60 A的电脉冲驱动条件下,VCSEL列阵峰值输出功率达到25.5 W.随着工作电流的增加,VCSEL列阵输出的激光光谱呈现明显办展宽现象,证实VCSEL列阵即使在窄脉冲工作时大的电流驱动仍然会产生严重的内部热效应;VCSEL列阵输出激光的光脉冲波形在驱动电流增大至60 A时脉宽仅展宽了6 ns左右,证实VCSEL阵列具有非常优越的脉冲响应特性.对VCSEL列阵进行光束准直处理后,在1 m距离处得到了近圆形的均匀光斑.我们相信这种高功率的910 nm面阵光源在未来汽车光探测测距(LiDAR)等智能驾驶领域具有很大的应用潜力.     

High-power vertical-cavity surface-emitting laser with an extra Au layer

We report the performance of a high-power vertical-cavity surface-emitting laser (VCSEL) with an extra Au layer. By using the extra Au layer, the far-field divergence angle from a 600-/spl mu/m diameter VCSEL device is suppressed from 30/spl deg/ to 15/spl deg/, and no strong sidelobe is observed in far-field pattern. There is a slight drop in optical output power due to the introduction of the extra Au layer. By improving the device packaging method, the VCSEL device produces the maximum continuous-wave optical output power of 1.95 W with lasing wavelength of 981.5 nm. The aging test is carried out under constant current mode at 60/spl deg/C, and the preliminary result shows that the total degradation of output power is less than 10% after 800 h.     

AlGaAs vertical-cavity surface-emitting laser responses to 4.5-MeV proton irradiation

We have irradiated single- and multimode AlGaAs vertical-cavity surface-emitting laser (VCSEL) arrays operating at a nominal wavelength of 780 nm with 4.5-MeV protons and doses ranging from 10 to 30 Mrad in the active region. We observed a peak power reduction of about 2% per Mrad in the 14-/spl mu/m aperture, multimode VCSELs. Single-mode VCSELs having an aperture of 6 /spl mu/m exhibited a smaller peak power reduction of 0.4%-1% per Mrad. A slight shift in the current threshold was observed only for the multimode VCSELs at dose levels above 10 Mrad. First results indicate a reduced VCSEL peak laser power output that is dominated by a temperature shift caused by the radiation induced increase in resistive heating. In contrast, the power reduction in edge-emitting lasers is dominated by the enhanced radiation induced nonradiative recombination rate. The VCSEL irradiation was performed with a focused ion micro beam that was rastered over the device surface, ensuring a very uniform exposure of a single device in the array.     

Long-wavelength (l ?1.55 lm) monolithic VCSEL array with > 3W CW output power

Monolithically integrated long-wavelength vertical-cavity surface- emitting high-power laser arrays emit continuous wave (CW) optical output power in excess of 3 W at 1.55 mum. Regardless of the wavelength, this is the highest CW output power reported from a monolithic VCSEL structure to date.     

High-power 2.3-/spl mu/m GaSb-based linear laser array

High-power 2.3-/spl mu/m In(Al)GaAsSb-GaSb type-I double quantum-well diode laser arrays were fabricated and characterized. Linear laser arrays with 19 100-/spl mu/m-wide elements on a 1-cm-long bar generated 10 W in continuous-wave (CW) mode and 18.5 W in quasi-CW mode (30 /spl mu/s/300 Hz) at a heatsink temperature of 18/spl deg/C. Array power conversion efficiency peaked at 30 A and was about 9%. Device internal efficiency was about 50%. Individual laser differential gain with respect to current was about twice as high as in InP-based laser heterostructures, demonstrating the potential of GaSb-based material system for high-power CW room-temperature laser diode arrays.     

Long-wavelength monolithic VCSEL arrays with high optical output power

Two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays at 1.55 /spl mu/m wavelength with parallel operation of single- or multimode devices are presented. 3/spl times/3 VCSEL arrays show maximum output powers beyond 30 mW and conversion efficiencies as high as 22%.     

259W准连续无铝808nm激光二极管线列阵

通过优化张应变量子阱外延结构和设计线列阵双沟道深隔离槽腐蚀工艺,采用低压金属有机化学气相沉积法(LP-MOCVD)生长了GaAsP/GalnP/AlGaInP单量子阱分别限制异质结激光器材料,并利用该材料制备r填充因子为50%的lcm宽线列阵激光巴条,用扫描电子显微镜(SEM)分析了隔离槽的形貌.在准连续工作条件(200μs脉宽,2%占空比)下,封装在被动制冷标准铜热沉上的器件在测试设备允许的最大驱动电流300A时可获得259W的输出功率,未观察到腔面光学灾变性损伤的发生.最高功率转换效率在工作电流为104A时达52%,此时输出功率为100W,激射光谱的中心波长为807.8nm,半高宽为2.4nm,快慢轴远场发散角分别为29.3°和7.5°.