用Sol─Gel法制备PZT铁电陶瓷及薄膜

用Ｓｏｌ－Ｇｅｌ法制备了Ｐｂ（Ｚｒ＿（０．５）Ｔｉ＿（０．５））Ｏ＿３（ＰＺＴ）铁电陶瓷与薄膜，观察了它们的结晶情况并测定了它们的电学性能。利用Ｓｏｌ－Ｇｅｌ法，可降低ＰＺＴ陶瓷粉料的预烧温度约２００℃，所得陶瓷致密，晶粒均匀；具有较好的介电性能。ＰＺＴ陶瓷显示弥散相变特征。ＰＺＴ薄膜的晶化受基底影响很大。基底晶格越完整，与ＰＺＴ薄膜的晶格失配率越小，ＰＺＴ薄膜的晶化就越好。采用ＰｂＴｉＯ＿３过渡层促进ＰＺＴ薄膜在镀铂硅片上晶化。ＰｂＴｉＯ＿３过渡层与ＰＺＴ薄膜构成串联电路。其表现电学性能与相应的ＰＺＴ体材料相近。     

PLZT（28／0／100）薄膜的溶胶－凝胶制备技术及显微结构

用溶胶—凝胶技术及回旋法，在石英玻璃和单晶ｓｉ基片上制备ＰＬＺＴ（２８／０／１００）多晶薄膜；在ＳｒＴｉＯ３和α－Ａ１２Ｏ３单晶基片上外延生长择优取向薄膜．其外延关系分别为（１００）ＰＬＺＴ（２８／０／１００）／／（１００）ＳｒＴｉＯ３和（１００）ＰＬＺＴ（２８／０／１００）／／（０００１）Ａｌ２Ｏ３．用ＩＲ，ＸＲＤ．ＲＨＥＥＤ，ＳＥＭ和ＳＩＭＳ分析凝胶中杂质、凝胶的分子结构和薄膜的显微结构．结果表明，用溶胶—凝胶技术能制备出显微结构良好的多组份陶瓷薄膜．     

溶胶凝胶法制备的PbTiO3薄膜的表面层

利用Ｘ射线光电子能谱研究了溶胶凝胶法制备的ＰｂＴｉＯ３薄膜表面态。结果表明薄膜表面会出现一层在烧结过程中形成的富含ＰｂＯ的非计量的表面层，厚约４０ｎｍ。薄膜经溅射及空气中６００℃热处理后，其表面转化为化学计量比的ＰｂＴｉＯ３。     

用溶胶－凝法制备锆钛铅铁电薄膜

利用溶胶－凝胶法在镀铂硅片上制备了ＰＺＴ铁电薄膜。利用ＸＲＤ、ＳＥＭ和ＴＥＭ观察了ＰＺＴ薄膜的组成与形貌，测定ＰＺＴ薄膜的电学性能。为防止薄膜发生龟裂，在前体溶液中加入了干燥控制化学添加剂，并采用慢速变温的热处理过程。ＰｂＴｉＯ３过渡层保证了ＰＺＴ薄膜结晶完好。     

用溶胶—凝法制备锆钛铅铁电薄膜：1994年7月1日收到,8月20日修回

利用溶胶－凝胶法在镀铂硅片上制备了ＰＺＴ铁电薄膜，利用ＸＲＤ、ＳＥＭ和ＴＥＭ观察了ＰＺＴ薄膜的组成与形貌，测定了ＰＺＴ薄膜的电学性能。防防止薄膜发生龟裂，在前体溶液中加入了干燥控制化学添加剂，并采用慢速变温的热处理过程，ＰｂＴｉＯ３过渡层保证了ＰＺＴ薄膜晶完好。     

在(111)Si基底上直接溅射合成PbTiO3薄膜以及Pb损失的抑制

利用射频磁控溅射系统，采用Ｔｉ、Ｐｂ组合靶，以Ｏ２为反应气体，在（１１１）Ｓｉ基板上直接沉积ＰｂＴｉＯ３薄膜，通过对不同基底温度以及沉积后的薄膜在不同的氧气氛中采用不同的降温速率降温制备。通过对所得的薄膜的结构和组成以及光学和电学特性的测试１分析得出：在５３５℃时沉积、溅射后直接充入１０７Ｐａ的氧气并且以３℃／ｍｉｎ的速率降至室温，制备出了性能较好的具有钙钛矿结构的ＰｂＴｉＯ３薄膜，并对薄膜的形成     

c轴取向PbTiO3外延生长的研究

本文研究了ＭＯＣＶＤ法淀积过程中工艺条件对ＰｂＴｉＯ３膜ｃ轴取向度的影响，探讨了ＰｂＴｉＯ３膜的生长过程，通过调节氧气流量首次在ＭｇＯ（１００）单晶衬底上淀积出ｃ轴取向的ＰｂＴｉＯ３外延膜。ＰｂＴｉＯ３外延膜的介电常数为９０，折射率为２．６４，均和单晶性能一致。     

PZT纳米晶薄膜的Sol—Gel法制备及铁电性质

采用Ｓｏｌ－Ｇｅｌ法，以Ｚｒ的硝酸盐替代醇盐，引入ＰｂＴｉＯ３过渡层的方法成功的制备了纳米晶铁电薄膜。并进行了差热、热重、结构、组分、铁电性能的测定、分析。     

Si片上PbTiO3薄膜的XPS研究

用溶胶－凝胶方法在Ｓｉ上成功地制备了钙钛矿型的ＰｂＴｉＯ３薄膜。Ｘ射线衍射结果显示,在热处理温度为７５０￣９００℃范围内,随温度升高,薄膜由多晶转变为定向结晶。Ｘ射线光电子能谱分析发现,薄膜表面存在ＳｉＯ２薄层,其厚度大约为０．６ｎｍ,该薄层是在制膜过程中衬底Ｓｉ通过ＰｂＴｉＯ３薄膜扩散到表面与大气中的Ｏ２反应而形成的。在７５０℃热处理的薄膜,膜层中不含ＳｉＯ２,但温度升高,膜层中存在ＳｉＯ２成分     

SrTiO3（110）上水热法外延生长PbTiO3薄膜

利用低温水热合成工艺，在一定浓度皆Ｐｂ（ＮＯ）３，ＴｉＣｌｒ的混合强碱性水溶液中，和在（１２０℃，０．２５ＭＰａ）的水热反应条件下，首次成功地在ＳｒＴｅＯ３单昌衬底上生长出具有面积构的ＰｂＴｉＯ３外延薄膜。     

Structure and magnetic properties of sputtered FePtM (M = Ti,Nb) thin films

FePt thin films doped with various Ti and Nb concentrations ranging from 2.9 to 9.1 at.% were prepared by r.f. magnetron sputtering. The structural and magnetic properties of Ti- and Nb-doped FePt thin films were investigated. Structural studies revealed that the long range ordering in FePt thin films depends on the doping concentration and annealing temperature of FePt thin films. The addition of Ti and Nb is found to enhance the grain refining in FePt thin films. The effects of doping concentration on the magnetic properties of FePt thin films were studied and discussed.     

应用于MEMS的PZT铁电薄膜

薄膜制备工艺的发展使铁电薄膜很好的应用于MEMS, 使两者集成成为可能. 本文将详细论述铁电薄膜的优良性能, 及其与MEMS集成的关键工艺--图形化. 最后, 举例论述了PZT铁电薄膜在MEMS中的应用.     

化学水浴沉积时间对CdS薄膜性质的影响

采用CBD法在醋酸镉溶液体系中制备CdS半导体薄膜,通过XRD、XRF、SEM和光学透过率谱等测试手段研究了沉积时间对CdS薄膜沉积过程和性质的影响.结果表明,随着沉积时间的增加,薄膜增厚;S/Cd原子比增加,但都为富Cd的CdS薄膜;XRD研究表明,薄膜结构由立方、六方混合相向立方相转变,(111)方向成为择优生长方向;SEM研究表明,随沉积时间增加,薄膜变致密,薄膜表面出现的白色附着颗粒增多,尺寸增大;沉积时间对薄膜的光学性质也有很大的影响,随着沉积时间的增加薄膜透过率减小,而禁带宽度值增大.     

Effects of Al concentration on microstructural characteristics and electrical properties of Al-doped ZnO thin films on Si substrates by atomic layer deposition

Al-doped ZnO (AZO) thin films with various Al concentrations were synthesized on Si(001) substrates with native oxide layers by atomic layer deposition process. The effects of the Al concentration on the microstructural characteristics of the AZO thin films grown at 250 degrees C and the correlation between their microstructural characteristics and electrical properties of the AZO thin films were investigated by AFM, XRD, HRTEM and Hall measurements. The XRD and HRTEM results revealed that the crystallinity and electrical properties of the undoped ZnO thin films were enhanced by 2.48 at% Al doping. However, 12.62 at% Al doping induced the deterioration of their crystallinity and electrical properties due to the formation of nano-sized metallic Al clusters and randomly oriented ZnO-based nano-crystals. To enhance the electrical properties of the AZO thin films while maintaining their crystallinity and electrical properties, a moderate Al concentration has to be chosen under the solubility limit of Al in ZnO.     

Ba1—xSrxTiO3薄膜的制备及特性研究

用溶胶－凝胶方法制备Ｂａ１－ｘＳｒｘＴｉＯ３（ＢＳＴ）薄膜材料，研究薄的结构和电性能。用ＸＤＲ及ＳＥＭ分析了沉积在硅片上的ＢＳＴ薄膜的结构，测试了在室温下ＢＳＴ薄膜的电滞回线及介电特性。     

磁控溅射法制备高反射铝膜

通过先后调整溅射沉积时间、溅射功率以及溅射气压等镀膜参数,然后结合所镀样品的反射率测量,分析了镀膜参数对铝膜反射率的影响;通过调整不同的离子束清洗时间,结合所镀样品的太阳光谱反射率测量以及附着力测试,研究了离子束清洗对铝膜性能的影响。结果表明,在这些影响因素中离子束清洗对铝膜性能的影响很大。     

Fabrications of SnS thin films and SnS-based heterojunctions on flexible polyimide substrates

The flexible polyimide substrates were utilized to realize the flexibility of SnS thin films and SnS-based heterojunctions. The SnS thin films and ZnO/SnS heterojunctions were deposited on polyimide substrates by magnetron sputtering. The properties of SnS thin films and ZnO/SnS heterojunctions were studied. The experimental results show that the post annealing can enhance the degree of crystallinity of flexible SnS thin films. The annealed SnS thin films present polycrystalline structure with preferential orientation along the (040) plane and grain size of 18 nm. The compositions of as-deposited and annealed flexible SnS thin films are close to the stoichiometry of SnS. The direct band gaps are 1.48 and 1.32 eV for the as-deposited and annealed SnS thin films, respectively. The fabricated flexible ZnO/SnS heterojunctions show rectifying properties with the rectifying ratio of 6.85 and the diode ideal factor of 1.23. The experimental results indicate the feasibility of using polyimide as the substrates of SnS thin films and SnS-based heterojunctions.     

Effects of buffer layer thickness on properties of ZnO thin films grown on porous silicon by plasma-assisted molecular beam epitaxy

ZnO thin films with different buffer layer thicknesses were grown on Si and porous silicon (PS) by plasma-assisted molecular beam epitaxy (PA-MBE). The effects of PS and buffer layer thickness on the structural and optical properties of ZnO thin films were investigated by atomic force microscopy (AFM), scanning electron microscopy (SEM), X-ray diffraction (XRD), and photoluminescence (PL). The ZnO buffer layers, the intensity of the (002) diffraction peak for the ZnO thin films and its full width at half maximum (FWHM) decreased with an increase in the thickness of the ZnO buffer layers, indicating an improvement in the crystal quality of the films. On introducing PS as a substrate, the grain sizes of the ZnO thin films became larger and their residual stress could be relaxed compared with the ZnO thin films grown on Si. The intensity ratio of the ultraviolet (UV) to visible emission peak in the PL spectra of the ZnO thin films increased with an increase in buffer layer thickness. Stronger and narrower UV emission peaks were observed for ZnO thin films grown on PS. Their structural and optical properties were enhanced by increasing the buffer layer thickness. In addition, introduction of PS as a substrate enhanced the structural and optical properties of the ZnO thin films and also suppressed Fabry-Perot interference.     

热处理对钛酸锶钡薄膜光学性能的影响

采用无水溶胶-凝胶技术制备了钛酸锶钡光学薄膜,系统研究了预处理和退火温度对钛酸锶钡薄膜的相结构、微观形貌和光性能的影响,优化了薄膜的光学性能,结果表明,膜的结构和形貌直接影响其光学性能。通过150℃预处理和850℃退火获得了晶化程度良好、表面形貌平整致密的钛酸锶钡薄膜。该膜在350-1000nm的最大光透过率为80．72％,在600-1000nm的折射率稳定在-1．93左右,消光系数最小,最小值为4x10-5。     

Fabrication and characterization of epitaxial Ba0.7Sr0.3TiO3 thin films for optical waveguide applications

The optical properties of barium strontium titanate (Ba0.7Sr0.3TiO3; BST) thin films are described. The BST thin films were epitaxially grown upon MgO (001) substrates by pulsed laser deposition. The crystallographic properties of the BST thin films were examined by x-ray diffraction. The BST thin films were highly optically transparent in the visible region. The optical waveguide properties were characterized by a prism coupling technique. An inverse-WBK method was employed to determine the refractive-index profile along the thickness of the BST films. Optical losses were measured by a moving fiber method, and the optical losses were found to be 0.93 dB/cm for the TE0 mode and 1.29 dB/cm for the TM0 mode at 1550 nm. Electro-optic (E-O) properties were measured by a phase-modulation detection method at 632.8 nm, and the BST films exhibited a predominantly quadratic E-O effect with a quadratic E-O coefficient of 6.64 x 10(-18) m2/V2.