Gas sensing properties at room temperature of a quartz crystal microbalance coated with ZnO nanorods

Gas sensors based on a quartz crystal microbalance (QCM) coated with ZnO nanorods were developed for detection of NH₃ at room temperature. Vertically well-aligned ZnO nanorods were synthesized by a novel wet chemical route at a low temperature of 90 °C, which was used to grow the ZnO nanorods directly on the QCM for the gas sensor application. The morphology of the ZnO nanorods was examined by field-emission scanning electron microscopy (FE-SEM). The diameter and length of the nanorods were 100 nm and 3 μm, respectively. The QCM coated with the ZnO nanorods gas sensor showed excellent performance to NH₃ gas. The frequency shift (Δf) to 50 ppm NH₃ at room temperature was about 9.1 Hz. It was found that the response and recovery times were varied with the ammonia concentration. The fabricated gas sensors showed good reproducibility and high stability. Moreover, the sensor showed a high selectivity to ammoniac gas over liquefied petroleum gas (LPG), nitrous oxide (N₂O), carbon monoxide (CO), nitrogen dioxide (NO₂), and carbon dioxide (CO₂).     

Enhanced ammonia sensing performances of Pd-sensitized flowerlike ZnO nanostructure

We report the synthesis of flowerlike ZnO nanostructure using a facile hydrothermal process, and the investigation on the ammonia (NH₃)-sensing properties of the pure and palladium (Pd)-sensitized flowerlike ZnO nanostructure. The phase purity, morphology, and structure of the pure and Pd-sensitized ZnO nanostructure are investigated. The characterized results reveal that the flowerlike ZnO has a wurtzite structure and is composed of numerous aggregated single-crystalline ZnO nanorods with a diameter of about 60 nm. Having fabricated gas sensors based on the pure and Pd-sensitized flowerlike ZnO, we find that the Pd-sensitized sensor exhibits a response of 45.7-50 ppm NH₃ at 210 °C, which is about 8 times higher than that of pure ZnO at the optimal operating temperature of 350 °C. The enhanced NH₃-sensing performance demonstrates that the significant decrease in optimal operating temperature and the distinct increase in response are attributed to the sensitization effect of Pd.     

LPG sensing properties of ZnO films prepared by spray pyrolysis method: Effect of molarity of precursor solution

Nanocrystalline ZnO films were deposited onto glass substrates by spray pyrolysis of zinc nitrate solutions and used as a liquid petroleum gas (LPG) sensor. The dependence of the LPG sensing properties on the molar concentration of zinc nitrate solutions was investigated. The ZnO films were oriented along (0 0 2) with the hexagonal crystal structure. The grain size and grain density increased with an increase in molar concentration of zinc nitrate solutions. The gas sensing properties for LPG of the ZnO films for LPG with different grain sizes were measured at different temperatures. The maximum sensitivity of 43% at the operation temperature of 673 K was found for the ZnO film prepared by spraying a 0.1 M solution. The ZnO thin films exhibited good sensitivity and rapid response–recovery characteristics to LPG. Further, it has been shown the gas sensitivity of the ZnO gas sensor depends upon its grain size.     

Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN

We explore the growth of vertically aligned carbon nanofibers by plasma enhanced chemical vapor deposition, using lithographically defined Ni catalyst seeds on TiN. TiN is selected for being an electrically conducting diffusion barrier suitable for the realization of electronic devices. We show that the rate of Ni diffusion correlates to both the level of oxygen content in the TiN film and to the film resistivity. The synthesis of the nanofibers was characterized using electron microscopy with an emphasis on three growth parameters: substrate temperature, plasma power, and chamber pressure. We propose that a catalyst surface free from carbon deposits throughout the process will induce diffusion-limited growth. The growth will shift towards a supply-limited process when the balance between acetylene, as the effective carbon bearing gas, and atomic hydrogen, as the main etching agent, is skewed in favor of acetylene. This determines whether the dominating growth mode will be vertically aligned ‘tip-type’ or disordered ‘base-type’, by affecting the competition between the formation of the first graphitic sheets on the catalyst surface and at the catalyst-substrate interface.     

基于微通道的ZnO纳米棒生物荧光检测研究

利用种子法和水热合成技术,分别在常规条件下和阵列式微通道中制备氧化锌(ZnO)纳米棒.采用扫描电子显微镜(SEM)、X射线衍射(XRD)等分析方法表征ZnO纳米棒的表面形貌特点和晶体结构.结果表明:微通道中制备的ZnO纳米棒的比表面积、结晶度和c轴取向性均有较大程度的提高.同时,建立了基于阵列式微通道的ZnO纳米棒生物荧光检测方法,利用ZnO纳米棒可显著增强荧光信号,对异硫氰酸荧光素标记的羊抗牛IgG抗体的检测限为1×10-4 μg/mL.     

Vertically aligned ZnO nanorods and graphene hybrid architectures for high-sensitive flexible gas sensors

We present the fabrication and characterization of new type of flexible gas sensors, composed mainly of a bottom ZnO conductive layer on metal foil, vertically aligned ZnO nanorod channel, and graphene-based top conductive electrode. Multiple cycling tests demonstrated the ZnO nanorods (NRs) and graphene (Gr) hybrid architectures accommodated the flexural deformation without mechanical or electrical failure for bending radius below 0.8 cm under the repeated bending and releasing up to 100 times. In addition, the hybrid architectures fabricated on glass substrate showed good optical transmittance larger than ∼70% for visible light, indicating potential application in transparent devices. Furthermore, our gas sensors demonstrated the ppm level detection of ethanol gas vapor with the sensitivity (resistance in air/resistance in target gas) as high as ∼9 for 10 ppm ethanol.     

Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing

The humidity sensitive characteristics of a sensor fabricated from flower-like ZnO nanorods by screen-printing on a ceramic substrate with Ag–Pd interdigital electrodes have been investigated. The sensor shows high humidity sensitivity, rapid response and recovery, small hysteresis, and good stability. It is found that the impedance of the sensor decreases by about five orders of magnitude with increasing relative humidity (RH) from 11 to 95%. The response and recovery time of the sensor is about 5 and 10 s, respectively. These results indicate that the flower-like ZnO nanorods can be used in fabricating high-performance humidity sensors.     

Hydrothermal synthesis of hierarchical nanoparticle-decorated ZnO microdisks and the structure-enhanced acetylene sensing properties at high temperatures

Nanoparticle-decorated ZnO microdisks showing a hierarchical structure were successfully synthesized through a citric acid-assisted hydrothermal process. The ZnO microdisks had a hexagonal wurtzite structure with high crystallinity. Sensors based on these microdisks exhibited high response values, fast response-recovery, good selectivity and long-term stability to 1-4000 ppm acetylene at 420 °C. In addition, even 1 ppm acetylene can be detected with high response (S = 7.9). The hierarchical structure can facilitate to fix the ZnO nanoparticles leading to a less aggregated configuration, which is expected to contribute much to the excellent acetylene sensing properties at high temperatures.     

氧等离子体处理ZnO纳米纤维材料的制备及其对丙酮气敏性能的研究

采用静电纺丝法制备了ZnO纳米纤维材料并使用氧等离子体对其进行表面处理.通过X射线衍射(XRD),扫描电子显微镜(SEM),BET比表面积测试以及X射线光电子能谱分析(XPS)等手段对样品的结构与形貌进行了表征分析.将氧等离子体处理前后的ZnO纳米纤维分别制成气体传感器,对浓度为1×10-6~100×10-6(体积分数)丙酮气体的敏感特性进行了测试分析.测试结果表明,氧等离子体处理后的ZnO纳米纤维响应值较未处理的ZnO纳米纤维有大幅度的提升,最佳工作温度也有所降低,且对甲醛、苯、甲苯、二甲苯等几种干扰气体表现出更好的选择性.从晶粒间势垒和耗尽层厚度等角度初步分析了氧等离子体处理改善ZnO气敏特性的机理.     

LPG汽车发动机传感器参数采集

本文对LPG(液化石油气)汽车发动机传感器信号进行了分析,设计出高可靠性、高精度的传感器测试电路,在此基础上实现了发动机空燃比的精确控制,对于改善汽车尾气排放,提高发动机性能起到了重要的作用。     

Pd掺杂ZnO纳米线的乙醇气敏特性研究

研究以贵金属Pd作为掺杂剂的ZnO纳米线敏感元件的乙醇气敏性能。采用水热法在叉指电极上直接制备出具有c轴取向的ZnO多晶纳米线。用SEM,XRD和EDS分析手段观测了材料的微观结构,并对其乙醇气敏性能进行了测试。实验结果表明:对于体积分数为200×10-6的乙醇气体,Pd掺杂的ZnO纳米线在灵敏度(8.17)、工作温度(325℃)和响应恢复时间(15,8s)上优于纯的ZnO纳米线。最后,对Pd掺杂的气敏机理进行了讨论。     

类积木状ZnO气体传感器的制备及其气敏特性研究

采用水热法合成了类积木状ZnO纳米结构,利用X射线衍射仪(XRD)、X射线能谱分析仪(EDS)和扫描电子显微镜(SEM)对制备的ZnO纳米结构的物相、化学组分及微观形貌进行了表征与分析。对基于ZnO纳米结构的气体传感器进行甲烷气敏特性测试,测试结果表明:该传感器的最佳工作电压为5 V,在该电压下对体积分数为200×10-6甲烷气体的灵敏度可高达55.4%,最低检测限为1×10-6。     

Mg2+离子表面修饰ZnO传感器阵列的乙醚敏感机理研究

为研究金属离子对金属氧化物半导体的表面敏化作用,以均匀沉淀法制备了ZnO纳米颗粒,并通过金属离子表面微滴注以及二次退火的方法制备出金属离子表面修饰的平面型ZnO气体传感器阵列。并以乙醚蒸汽为目标气体,进行气敏性能测试。发现大部分传感器对乙醚响应性很好,并且经过表面修饰,ZnO的乙醚敏感性能大多得到提升。特别地,Mg2+表面修饰的ZnO膜层展现了最优的气敏性能。X射线光电子能谱和光致发光谱证实,经过Mg2+表面修饰之后,氧空位缺陷浓度明显增加,并且表面羟基基团的数量显著减少,二者的协同作用构成了Mg2+表面修饰ZnO的敏化机制。     

Improved selective acetone sensing properties of Co-doped ZnO nanofibers by electrospinning

Pure and Co-doped (0.3 wt%, 0.5 wt%, and 1 wt%) ZnO nanofibers are synthesized by an electrospinning method and followed by calcination. The as-synthesized nanofibers are characterized by X-ray powder diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and energy dispersive X-ray (EDX) spectroscopy. Comparing with pure ZnO nanofibers, Co-doped nanofibers exhibit improved acetone sensing properties at 360 °C. The response of 0.5 wt% Co-doped ZnO nanofibers to 100 ppm acetone is about 16, which is 3.5 times larger than that of pure nanofibers (about 4.4). The response and recovery times of 0.5 wt% Co-doped ZnO nanofibers to 100 ppm acetone are about 6 and 4 s, respectively. Moreover, Co-doped ZnO nanofibers can successfully distinguish acetone and ethanol/methanol, even in a complicated ambience. The high response and quick response/recovery are based on the one-dimensional nanostructure of ZnO nanofibers combining with the Co-doping effect. The selectivity is explained by the different optimized operating temperatures of Co-doped ZnO nanofibers to different gases.     

ZnO纳米棒修饰的QCM气体传感器检测NH_3研究

主要介绍了ZnO纳米棒修饰的石英晶体微天平(QCM)气体传感器的制备与测试。采用两步法在石英晶振片表面制备直径为100 nm的ZnO纳米棒敏感膜,构成QCM NH3传感器。检测系统为自主研发的基于LabVIEW平台的QCM气体传感器频率测试软件。检测NH3的体积分数为5×10-6~50×10-6,响应时间均在10 s以内,最大频差值为10.9 Hz,响应最大频差值与NH3体积分数呈现良好的线性关系。室温条件下,ZnO纳米棒敏感膜可以完全实现吸附解吸过程,具有可逆性。该传感器性能稳定,响应灵敏,具有重复性。     

Synthesis of quantum size ZnO crystals and their gas sensing properties for NO2

Quantum size ZnO crystals have been synthesized successfully by a room temperature sol-gel process. Oleic acid (OA) has been used as capping agent to control the particle size of ZnO. The crystal structure and size of the ZnO are characterized by the X-ray diffraction (XRD) and transmission electron microscope (TEM). The XRD results show the as-synthesized ZnO has hexagonal wurtzite structure and the average crystallite size is 5.7 nm which is little less than TEM result. It is testified by photoluminescence (PL) and Raman spectra that the quantum size ZnO keeps the crystal structure of the bulk ZnO and possesses more surface defects. The quantum size ZnO has the highest response of 280 to NO₂ and the highest selectivity of 31 and 49 corresponding to CO and CH₄ at operating temperature of 290 °C. The effect of calcination temperatures on sensing property and transient response of the ZnO sensor are also investigated.     

La掺杂ZnO和SnO2薄膜的气敏特性

真空蒸发沉积薄膜再经热氧化获得n型掺La的ZnO和SnO2薄膜(玻璃衬底)研究掺La含量与热氧化工艺对薄膜的物相结构、表面形貌和气敏特性的影响.实验给出:掺La使薄膜表面颗粒细化,随La含量增加,ZnO,SnO2薄膜平均晶粒尺寸均增大.掺La可明显降低2种薄膜的气敏工作温度相比之下,掺La对ZnO薄膜的灵敏度改善明显优...     

Fabrication of gas sensing devices with ZnO nanostructure by the low-temperature oxidation of zinc particles

A method for low-temperature synthesis of a mixture of high-density ZnO nanoflakes and nanowires was developed to produce low-cost and high-efficiency gas sensors with ZnO nanostructures. ZnO nanoflakes and nanowires were grown on glass substrates by the RF sputter deposition of Zn particles and localized oxidation at a low temperature of 300 °C. The synthesized ZnO nanoflakes and nanowires were polycrystalline and had nanometer dimensions, as revealed by X-ray diffraction (XRD) and field emission scanning electron microscope (FESEM) measuring. A gas sensor based on the mixture of ZnO nanoflakes/nanowires responded rapidly and sensitively to ethanol. The sensing properties of the ZnO nanostructure sensor were approximately 72% for 50 ppm ethanol gas at an operating temperature of 100 °C. The response to 10 ppm of ethanol gas was 42% at the same temperature.     

EPR and DRS evidence for NO2 sensing in Al-doped ZnO

Zinc oxide (ZnO) is a well-known semiconducting multifunctional material wherein properties right from the morphology to gas sensitivity can be tailor-made by doping or surface modification. Aluminum (Al)-incorporated porous zinc oxide (Al:ZnO) exhibits good response towards NO₂ at low-operating temperature. The NO₂ gas concentration as low as 20 ppm exhibits S = 17% for 5 wt.% Al-incorporated ZnO. The NO₂ response increases with operating temperature and concentration and reaches to its maximum at 300 °C without any interference from other gases such as SO₃, HCl, LPG and alcohol. Physico-chemical characterization likes differential thermogravimetric analysis (TG-DTA) electron paramagnetic resonance (EPR) and diffused reflectance spectroscopy (DRS) have been used to understand the sensing behavior for pure and Al-incorporated ZnO. The TG-DTA depicts formation of ZnO phase at 287 °C. The EPR study reveals distinct variation for O⁻ (g = 2.003) and Zn interstitial (g = 1.98) defect sites in pure and Al:ZnO. The DRS studies elucidate signature of adsorbed NO_x species in aluminium-incorporated zinc oxide indicating its tendency to adsorb these species even at low temperatures. This paper is an attempt to correlate the gas sensing behavior with the physico-chemical studies such as EPR and DRS.     

Ammonia sensing properties of polypyrrole thin films at room temperature

Polypyrrole thin films were synthesized in situ by chemical polymerization. Fourier transform infrared spectroscopy revealed formation of polypyrrole. The morphological studies by scanning electron microscopy showed formation of uniform granular structure with average grain size of 0.6 μm. The film composition was characterized by X-ray photoelectron spectroscopy for chemical composition in polypyrrole film. These films were investigated for their sensing behaviour towards NH₃ and NO at room temperature. It has been observed that these films are selective for NH₃ and the sensitivity exhibited a linear response in range of 4-80 ppm.