光信息存储与溅射靶材

在光盘制造过程中，需要使用多种溅射靶材。本文简介溅射靶材的制造及主要应用情况。     

ZAO薄膜使用射频溅射法生长之参数的研究

以氧化铝锌陶瓷为溅射靶材,在氩气环境下,使用射频溅射法在玻璃基片上制备氧化铝锌(ZAO)薄膜。通过调节气体压强、基片温度、溅射功率制膜,得到以C轴(002)为选择取向的氧化锌薄膜。由XRD、原子力显微镜(AFM)等对薄膜进行分析。结果表明,制备薄膜的最佳条件为:溅射压强0.4 Pa,溅射功率200 W,基片温度300℃。     

纯氧高气压溅射PZT铁电薄膜

用Pb(Zn0.55Ti0.45)O3烧结陶瓷作为靶材,在纯氧、高气压溅射条件下成功地原位沉积了锆钛酸铅(lead zirconate titanate,PZT)铁电薄膜。为了弥补靶材在烧结过程中Pb的挥发及溅射成膜过程中发生Pb的损失,以PbO计,加入了质量分数为5．0％的过量Pb3O4。实验发现：当最佳靶-基片距离一定时,n(Pb)／n(Zr Ti)成份偏析的比例随最佳靶-基片距离偏差的增加而降低。PZT铁电薄膜的X射线衍射分析表明,PZT铁电薄膜中存在PbO和钛锆固溶型氧化物,但无焦绿石相。PZT铁电薄膜的铁电性测量表明:剩余极化Px达到14．1μc／cm^2,矫顽电场Ec较小,Ec与Pb(Zr0.55Ti0.45)O2烧结陶瓷靶材的值相当,其电滞回线具有很好的对称性。     

浅谈溅射法在Low—E玻璃生产中的应用

溅射法是生产Low—E镀膜玻璃的主要方法之一。通过离子轰击靶材实现高速溅射,被溅射出的靶材沉积在玻璃基片上,形成薄膜。本文主要阐述了Low—E膜玻璃相对于普通玻璃的优势,Low—E膜的结构以及溅射法的生产工艺。     

高密度ITO靶材烧结方法及发展趋势

简要介绍了铟（In）的用途及国内铟产业的现状,对ITO薄膜的特性、应用领域及高密度ITO靶材溅射镀膜的优点进行了描述。重点对高密度ITO靶材的烧结工艺和成形方法的优缺点及发展现状进行了阐述。探讨了高密度ITO靶材生产技术的发展趋势。     

放电等离子体烧结下Nb掺杂量对TiO2陶瓷靶材性能的影响

采用放电等离子体(SPS)烧结制备了Nb掺杂TiO2(NTO)陶瓷靶材,运用X射线衍射分析、扫描电子显微镜、四探针测试仪等对NTO陶瓷靶材样品的各性能进行表征.研究了在1100℃下不同Nb掺杂量对NTO陶瓷靶材相对密度、抗弯强度、电阻率、表面形貌与微观结构等性能的影响.实验结果表明:不同Nb掺杂量对NTO陶瓷靶材的性能有显著的影响,在1100℃烧结的NTO陶瓷靶材样品,随着Nb掺杂量的升高,相对密度、抗弯强度和电阻率先增大后逐渐降低,在5wt％掺杂量处均达到了最大值,且此时结晶完好、晶粒大小分布均匀.综合而言,5wt％Nb掺杂量的NTO陶瓷靶材的各项性能表现最优,其电阻率为13.23 mΩ·cm,抗弯强度为139.1 MPa,相对密度达到99.9％.     

锆—钛陶瓷的研制

前言锆—钛陶瓷作为一种新型陶瓷材料,目前在一些科研单位已被广泛使用来作为“靶材”,从而制得各色光学薄膜。这种陶瓷材料应致密均匀,且较容易地被电子束轰击,蒸发溅射。要求其含杂量小于0.20％,外观平整,无其它染色污染,均匀一致,要求TiO_2和ZrO_2重量百分比为1∶1。     

ITO薄膜射频磁控溅射法制备及性能研究

以10%SnO2和90%In2O3(以质量计)烧结成的ITO氧化物陶瓷为靶材,采用射频磁控溅射法在玻璃基片成功地制备出光电性能优异的ITO透明导电薄膜。研究了基片温度和氧分压溅射工艺参数对ITO薄膜的结构和光电性能的影响。实验结果表明,采用氧化铟锡陶瓷靶射频磁控溅射制备的ITO薄膜沿(222)晶面生长,薄膜紫外透射光谱的吸收截止边带随着衬底温度和氧分压的升高向短波长方向漂移。     

激光分子束外延工艺用ZnO陶瓷靶材的研究

由改进的电子陶瓷工艺制备了ZnO(99．99％)高纯陶瓷靶材。用激光分子束外延(laser molecular beam epltaxy．L-MBE))工艺．采用这种靶材在蓝宝石基片上较低温度下生长了高结晶质量的ZnO半导体光电子薄膜。研究了ZnO高纯陶瓷靶材的烧结机理、微观结构及形貌，认为靶材的后期烧结速率主要决定于氧空位扩散机制。根据辐照后靶材的电镜分析结果，对L-MBE工艺中靶材表面与脉冲激光相互作用过程中等离子体羽辉的形成过程及其动力学特征进行了研究，认为该等离子体羽辉是激光支持的燃烧波，其波前传播速度为哑声速并且沿靶材法线方向，粒子的动力学特征使得L-MBE工艺适于ZnO薄膜的二维平面生长。     

旋转阴极支撑端头装置设计

介绍了一种可有效提高靶材利用率(可达80%以上),减少非溅射区沉积问题的磁控溅射旋转阴极的支撑端头的结构设计,使得真空镀膜的非溅射区面积减小60%以上,克服矩形平面阴极高成本、低质量的技术缺点。     

Engineered feldspar-based ceramics: A review of their potential in ceramic industry

Feldspars are the most abundant mineral in the earth’s crust, however, their interest in ceramic industry goes beyond their abundancy. The unique compositional and structural features as well as the many outstanding properties that feldspars own, make them to be widely used as raw material for the ceramic industry. Moreover, multiple works have demonstrated that engineered feldspar-based ceramics are very promising for their use in applications such as ceramic tiles, dielectrics or phosphors, among others, and therefore, in this article, a comprehensive review on their dielectric, mechanical, optical and thermal properties is presented. This review intends to provide an up-to-date outlook of the possibilities that engineered feldspars offer to their application in ceramic industry, discussing future prospects and challenges that might ease the opening up of new horizons for future applications in ceramic sector.     

Recent progress and technical improvement strategies for mitigating ceramic membrane bottlenecks in water purification processes: A review

Ceramic membranes offer considerable promise for future industrial applications due to their superior chemical, mechanical, and thermal stabilities, resistance to harsh operating conditions, and long-term operating processes. However, several bottlenecks still limit their commercial scale-up in filtration and separation applications, including brittleness, the high costs of conventional ceramic materials, and fouling. Despite several articles in the literature on ceramic membranes, this review focuses on recent progress, technical strategies, and methods to mitigate these limitations that significantly impact their separation and filtration performance. The use of alternative naturally occurring ceramic materials to mitigate the high costs of conventional ceramic materials is discussed, as well as strategies to improve the mechanical strength of brittle ceramic membranes by increasing sintering temperatures and using support materials. Additionally, advanced techniques to mitigate fouling accumulation and wetting in the pores and on the ceramic membrane surface, such as increasing membrane hydrophilicity and surface modification, are addressed. Despite progress in technical solutions for mitigating the bottlenecks of ceramic membranes, these limitations persist. Therefore, the present limitations and future research directions are highlighted.     

陶瓷零件的加工方法

工程陶瓷具有极高的硬度、良好的耐磨性和耐腐蚀性以及脆性大等特点，属于难加工材料，特别是加工高精度、形状复杂的构件非常困难。陶瓷材料作为工程材料的大规模推广应用，在很大程度上取决于陶瓷零件加工技术的发展。笔者综述了陶瓷零件的加工方法及最新进展。     

Insights on Ceramics as Dental Materials. Part I: Ceramic Material Types in Dentistry

Ceramics are widely used biomaterials in prosthetic dentistry due to their attractive clinical properties. They are aesthetically pleasing with their color, shade and luster, and they are chemically stable. The main constituents of dental ceramic are Si-based inorganic materials, such as feldspar, quartz, and silica. Traditional feldspar-based ceramics are also referred to as “Porcelain”. The crucial difference between a regular ceramic and a dental ceramic is the proportion of feldspar, quartz, and silica contained in the ceramic. A dental ceramic is a multiphase system, i.e. it contains a dispersed crystalline phase surrounded by a continuous amorphous phase (a glassy phase). Modern dental ceramics contain a higher proportion of the crystalline phase that significantly improves the biomechanical properties of ceramics. Examples of these high crystalline ceramics include lithium disilicate and zirconia.     

柔性陶瓷重防腐涂料的研制及性能研究

探讨了树脂和固化剂类型、颜基比以及陶瓷粉类型对柔性陶瓷涂料性能的影响。结果表明:选择酚醛环氧树脂与双酚F树脂混合使用,以异佛尔酮二胺为固化剂,颜基比选择3.5:1,以不同细度的碳化硅粉搭配氧化铝粉和云母粉作为陶瓷粉所制备的柔性陶瓷涂料的性能最佳。对该涂料各种性能进行测试并与进口陶瓷涂料进行性能对比,发现该涂料的性能与进口陶瓷涂料性能相当,具备良好的耐磨性能、耐温性能、耐化学品性能及其他物理机械性能。     

赤泥外排泥浆泵陶瓷缸套的应用

根据对活塞式泥浆泵缸套的失效分析,采用一种新型的增韧氧化铝陶瓷材料作为缸套的内衬套,并与金属缸套进行同机台运行比较。结果表明,其耐磨性能明显优于金属缸套,使用寿命也成倍增加。     

多孔陶瓷膜反应器用于非均相超细纳米催化的研究进展(英文)

Heterogeneous catalysts with ultrafine or nano particle size have currently attracted considerable attentions in the chemical and petrochemical production processes, but their large-scale applications remain challenging because of difficulties associated with their efficient separation from the reaction slurry. A porous ceramic membrane reactor has emerged as a promising method to solve the problem concerning catalysts separation in situ from the reaction mixture and make the production process continuous in heterogeneous catalysis. This article presents a review of the present progress on porous ceramic membrane reactors for heterogeneous catalysis, which covers classification of configurations of porous ceramic membrane reactor, major considerations and some important industrial applications. A special emphasis is paid to major considerations in term of application-oriented ceramic membrane design, optimization of ceramic membrane reactor performance and membrane fouling mechanism. Finally, brief concluding remarks on porous ceramic membrane reactors are given and possible future research interests are also outlined.     

陶瓷釉料基本评价系统概述

目前我国已经是公认的陶瓷产销第一大国,全球建筑卫生和日用陶瓷制造基地。釉料作为最重要的陶瓷原料,在提高陶瓷产品质量方面起到至关重要的作用,本文针对常规陶瓷的特点,从产品釉面质量、产品特性、产品使用性能等方面系统归纳总结了对釉料进行评价基本方法。     

Recent progress on low-cost ceramic membrane for water and wastewater treatment

Great progress in the development of low-cost ceramic membranes from alternative materials have been achieved recently towards various application especially water and wastewater treatment. However, their significance has not been fully recognized and understood especially in term of their microstructural analysis such as formation of grain growth and microcracks. This review paper summarizes fabrication method, alternative materials, microstructure, wettability, mechanical properties and application of low-cost ceramic membrane. The fabrication method including slip casting, tape casting, extrusion, pressing method and phase inversion technique are described. Alternative materials used in low-cost ceramic membrane fabrication are discussed and categorized into clays, agricultural waste, industrial waste and animal bone waste. The mechanisms of morphology formation, microstructure and wettability properties are analysed. Modification strategies for the surface of low-cost ceramic membrane are discussed, and classified into modification for separation application, modification for photocatalytic application and modification for membrane distillation and membrane contactor system. Modification improves the membrane structure by changing the pore size, porosity and wettability properties of low-cost ceramic membranes. Mechanical properties of low-cost ceramic membranes are also discussed in detail towards several mechanism, like grain growth phenomenon and formation of microcracks which also considered as membrane defects. Grain growth phenomenon can be divided into normal and abnormal grain growth. Meanwhile, formation of microcracks could be occurred in single-phase polycrystalline ceramics that have anisotropic grains or biphasic polycrystalline grains. The application of low-cost ceramic membrane in seawater desalination, oily wastewater treatment, heavy metal adsorption, textile separation and photocatalytic application are reviewed. Finally, some possible opportunities and challenges for further development of low-cost ceramic membrane are pointed out.