球面晶体分析器在等离子体X射线诊断中的应用

为了诊断高温等离子体X射线,利用晶体布喇格衍射原理研制了新型的球面晶体分析器,α-石英为衍射晶体,球面的半径为250 mm.对球面晶体分析器分别进行静态X射线衍射实验和Z箍缩聚爆实验,富士磷屏(IP)成像板和感光胶片分别得到了清晰的Cu等离子体和Ti等离子体谱线.对实验所得谱线进行分析,石英球面晶体分析器光谱分辨力好于...     

基于级联卷积神经网络的疲劳检测

为了诊断热核聚变等离子体状态,研制了用于热 斑区等离子体诊断用的新型X射线光谱仪,能够同 时探测X射线光谱与聚爆靶图像信息。光谱检测功能由4块椭圆晶体分析器实现,材料分别 为α-石英(1010)、 α-石英(2023)、α-石英(1011)和Si(111),几乎能够覆盖2~20 keV能带范围内的X射线特 征光谱。光谱检测 结构为光源位于椭圆的一个焦点,其辐射光谱经过椭圆反射聚焦于椭圆另一焦点,由X射线 成像板(IP)接收。图 像检测功能由分幅相机匹配小孔阵列成像完成,理想状态能够得到20 幅不同时间的聚爆靶图像。在谱仪与 聚爆靶之间的调整台上设置厚为60μm的Be膜,以保护针孔与晶体避 免聚爆溅射碎片破坏。在中物院“神光- Ⅱ”升级装置上进行了打靶实验,获取了X射线光谱与聚爆靶图像信号。分析了光谱及图像 信息,并针对光谱 仪漏光问题改进了光谱仪结构,最后在神光-Ⅲ原型装置上进行了验证实验并获得比较理想 的图像信号,信噪比(SNR)数据达到15dB。     

球面弯晶实现X射线单能成像的研究

基于Bragg衍射原理,研制了一种对激光等离子体进行二维成像的球面晶体分析器。采用球面弯曲石英晶体作为分析器,X射线IP板作为成像器件。采用Cr靶X射线辐射金属网格（目标）,网格的网孔尺寸为200μm×200μm。通过球面弯晶对Cr靶Kα谱线的衍射,得到网格的二维单色衍射图像。实验结果表明,球面弯晶分析器具有较高的光谱...     

基于石英球面弯曲晶体的X射线成像研究

为了诊断惯性约束聚变的聚爆靶的尺寸、形状、分布和均匀性等情况,利用X射线布拉格衍射理论,搭建了基于球面弯曲晶体的X射线背光成像系统。其核心元件是α-石英球面弯晶,α-石英晶体性质稳定,结构完整,反射率和分辨率高。弯曲晶体尺寸为65mm×20mm,弯曲半径为143.3mm。利用该背光成像系统进行了单色X射线背光成像实验。成像物体为3×3阵列的正方形不锈钢网格,利用接收装置磷屏成像板,得到清晰的Cr KαX射线背光源二维空间分辨,在9.6mm×28.7mm的视场范围内,其像的空间分辨率大约为83.3μm。实验结果表明α-石英球面弯曲晶体适合于X射线的背光诊断研究。     

激光等离子体X射线成像诊断研究

为了诊断激光等离 子体X射线二维空间信息,基于Bragg衍射原理建立了等离子体X射线背光成像系统,其核心 元件为石英球面弯曲晶 体,弯曲半径为143mm。在中国工程物理研究院神光III原型激光装 置上,利用建立的系统,进行了单色X射线背光成像实验,激光聚焦到平面 Mg靶中心聚爆产生高温等离子体X射线为背光源,成像物体为15μm ×15μm网格阵列,X射线CCD得到了清晰的Mg靶 单色X射线二维网格图像。通过对背光图像分析,在7.8mm×2.6mm的视场范围,成像系统得到空间分辨率为5μm。实验 结果表明,基于石英球面弯曲晶体的X射线背光成像系统可以用于等离子体X射线诊断研究。     

晶体位错处理对X射线衍射性能的影响

为提高晶体对波长为0.1~20 nm的X射线的衍射效率,通过特殊工艺对特定晶体表面进行位错处理。将云母、α-石英和LiF晶体劈成80 mm×10 mm的晶体薄片,其中LiF晶体厚度研磨到1 mm,其余三种晶体厚度为0.2 mm。将LiF晶体加热到400 ℃,然后用椭圆型折弯机进行多次弯曲,自然冷却降到室温,使晶格发生位错现象。在波长为0.154 nm的Cu靶X射线衍射仪上进行衍射试验,经晶体后利用成像板或X射线CCD获得衍射谱线,其中Mica球弯晶获得多级衍射谱线,经过表面处理的LiF晶体获取的X射线光子数比未处理的高2倍。结果表明晶体表面经过位错处理后提高了衍射效率,更适合X射线诊断研究。     

X射线分光晶体高阶衍射效率标定方法

包含高阶衍射的X射线分光晶体积分衍射效率是X射线光谱准确辨识、X射线分光晶体性能研究、X射线光谱定量测量和高分辨X射线单能成像的基础。基于X射线衍射仪,选择适当厚度的镍滤片和控制X射线管电压,极大地抑制Cu K及韧致辐射,将X射线管光源Cu K单能化。以常用的X射线分光晶体季戊四醇[PET（002）]为样品,对X射线分光晶体的高阶积分衍射效率进行标定其结果表明,在 Cu K能点,PET（002）晶体的积分衍射效率,二阶为一阶的14.36%,三阶为一阶的4.07%;Cu K1最大峰值比,二阶衍射为一阶的7.7%,三阶衍射为一阶的1.3%。基于X射线衍射仪的X射线分光晶体高阶衍射效率实验标定具有快速高效、方便灵活的特点。     

肝脏和肺组织的太赫兹光谱成像

与红外辐射、X射线、核磁共振、超声波等传统医疗诊断技术相比,太赫兹技术具有能量低、空间分辨力高和带宽宽等独特分析能力,成为人体成像或人体组织癌症诊断技术的补充技术。分别对肝脏和肺的正常组织与肿瘤组织做了太赫兹光谱检测与太赫兹成像研究,通过肝脏的光谱检测与成像实验总结出相关经验,使得肺癌组织太赫兹成像得到了明显的效果,并且发现肺癌肿瘤组织在1.0 THz~1.75 THz频率范围内的太赫兹成像能够明显区分出正常组织与肿瘤组织,且频率越高,成像分辨力越高。     

成像光谱仪光谱定标

成像光谱仪是谱像合一的新型光学遥感器.成像光谱仪的光谱定标是辐射定标的基础,准确的光谱定标是获得地物正确光谱信息的必要条件.介绍了成像光谱仪光谱定标的原理和几种光谱定标方法,并对国内成像光谱仪光谱定标技术进行了展望.     

双通道衍射计算成像光谱仪系统

常规衍射光谱成像系统采用单通道方案,主要针对简单图形目标或光谱特征已知的气体目标进行模拟仿真和光谱成像实验。而当目标为自然场景等复杂景物时,成像系统的光谱解算效果和精度难以保证。针对复杂景物成像,设计了一套双通道可见近红外衍射计算成像光谱仪系统,在常规单通道衍射成像光谱仪系统的基础上,增加一路全色相机成像,可以为衍射成像通道提供复杂景物的全色信息和先验知识。将两个通道的数据进行联合处理,提升最终的光谱数据反演效果和反演精度。介绍了系统组成和基本原理,分析了系统性能,利用仿真程序模拟了系统成像过程。在实验室搭建了可见近红外衍射计算成像光谱原理验证装置。对实验得到的450~800 nm的可见近红外混叠光谱数据进行光谱复原。利用海洋光学光谱仪测试色板的光谱曲线作为标准谱线,与复原得到的光谱数据进行对比,反演的光谱数据平均精度优于90%。通过衍射计算成像原理分析、模拟仿真和原理实验,验证了双通道衍射计算成像系统原理的正确性,能够反演得到精度优于90%的复杂景物光谱数据,提升了衍射成像光谱系统应用潜力和应用价值。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.