Study of the deposition parameters and Fe-dopant effect in the photocatalytic activity of TiO2 films prepared by dc reactive magnetron sputtering

The reactive magnetron sputtering method was used to prepare pure and Fe-doped titanium dioxide thin films. The films were deposited onto microscope glass slides and polycarbonate plates at different total pressure and Fe-doping concentrations. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and UV-visible spectroscopy (UV). For glass substrates a polycrystalline TiO₂ structure was verified with X-ray diffraction, which showed typical characteristic anatase reflections. An iron phase appeared in the highly Fe-doped samples. The absorption edges of the Fe-doped TiO₂ films shifted to visible region with increasing concentration of iron. For the polycarbonate substrate an amorphous TiO₂ structure was revealed for all deposition conditions. The effects of different Fe-doping and total pressure levels on the photocatalytic activity were obtained by the degradation rates of Rhodamine-B (RoB) dye under UV light irradiation. For the deposition conditions considered in this study the highest photodegradation rates were achieved for films deposited on the polymer substrates. Of these overall highest rates was achieved for deposition at 0.4 Pa and without doping. However, for both substrates, films prepared at the particular total pressure of 0.5 Pa and a low iron concentration showed better photocatalytic activity than the pure TiO₂ films prepared under the same deposition parameters. On the contrary, the photocatalytic degradation rates of RoB on the highly Fe-doped TiO₂ films decreased strongly.     

Low-temperature processing of thin films based on rutile TiO2 nanoparticles for UV photocatalysis and bacteria inactivation

Using a low-temperature, simple, and economic processing technique, TiO₂ nanoparticles (rutile phase) are immobilized in an inorganic matrix and then deposited on glass for bacteria inactivation in water. Using this low thermal budget method (maximum processing temperature of 220 °C), thin films of immobilized TiO₂ nanoparticles are obtained so that practical water decontamination after UV radiation is possible by avoiding the additional step of catalyst separation from treated water. In order to validate the photocatalytic activities of these TiO₂ nanoparticles (prepared as thin films), they were tested for bacteria inactivation in water under UV–A radiation (λ > 365 nm), while extensive characterizations by dynamic light scattering, X-ray diffraction, ultra violet–visible absorption spectroscopy, fourier-transform infra red spectroscopy, and profilometry were also carried out. Despite previous reports on the low or lack of photocatalytic activity of rutile-phase TiO₂, inactivation of Escherichia coli in water was observed when thin films of this material were used when compared with the application of UV radiation alone. Physical characterization of the films suggests that size and concentration-related effects may allow the existence of photocatalytic activity for rutile-TiO₂ as long as they are exposed under UV–A radiation, whereas no effect on bacteria inactivation was observed for thin films in the absence of TiO₂ or radiation. In brief, a low thermal budget process applied to thin films based on TiO₂ nanoparticles has shown to be useful for bacteria inactivation, while possible application of these films on widely available substrates like polyethylene terephthalate materials is expected.     

Photocatalytic activity of pulsed laser deposited TiO2 thin films in N2, O2 and CH4

We report on pulsed laser deposition of TiO₂ films on glass substrates in oxygen, methane, nitrogen and mixture of oxygen and nitrogen atmosphere. The nitrogen incorporation into TiO₂ lattice was successfully achieved, as demonstrated by optical absorption and XPS measurements. The absorption edge of the N-doped TiO₂ films was red-shifted up to ∼ 480 nm from 360 nm in case of undoped ones.The photocatalytic activity of TiO₂ films was investigated during toxic Cr(VI) ions photoreduction to Cr(III) state in aqueous media under irradiation with visible and UV light. Under visible light irradiation, TiO₂ films deposited in nitrogen atmosphere showed the highest photocatalytic activity, whereas by UV light exposure the best results were obtained for the TiO₂ structures deposited in pure methane and oxygen atmosphere.     

Fabrication of SiO<Subscript>2</Subscript>/TiO<Subscript>2</Subscript> double layer thin films with self-cleaning and photocatalytic properties

Transparent antireflective SiO₂/TiO₂ double layer thin films were prepared using a sol–gel method and deposited on glass substrate by spin coating technique. Thin films were characterized using XRD, FE-SEM, AFM, UV–Vis spectroscopy and water contact angle measurements. XRD analysis reveals that the existence of pure anatase phase TiO₂ crystallites in the thin films. FE-SEM analysis confirms the homogeneous dispersion of TiO₂ on SiO₂ layer. Water contact angle on the thin films was measured by a contact angle analyzer under UV light irradiation. The photocatalytic performance of the TiO₂ and SiO₂/TiO₂ thin films was studied by the degradation of methylene blue under UV irradiation. The effect of an intermediate SiO₂ layer on the photocatalytic performance of TiO₂ thin films was examined. SiO₂/TiO₂ double layer thin films showed enhanced photocatalytic activity towards methylene blue dye.     

Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition

Titanium dioxide (TiO₂) thin films were prepared on Galvanized Iron (GI) substrate by plasma-enhanced atomic layer deposition (PE-ALD) using tetrakis-dimethylamido titanium and O₂ plasma to investigate the photocatalytic activities. The PE-ALD TiO₂ thin films exhibited relatively high growth rate and the crystal structures of TiO₂ thin films depended on the growth temperatures. TiO₂ thin films deposited at 200 °C have amorphous phase, whereas those with anatase phase and bandgap energy about 3.2 eV were deposited at growth temperature of 250 °C and 300 °C. From contact angles measurement of water droplet, TiO₂ thin films with anatase phase and Activ™ glass exhibited superhydrophilic surfaces after UV light exposure. And from photo-induced degradation test of organic solution, anatase TiO₂ thin films and Activ™ glass decomposed organic solution under UV illumination. The anatase TiO₂ thin film on GI substrate showed higher photocatalytic efficiency than Activ™ glass after 5 h UV light exposure. Thus, we suggest that the anatase phase in TiO₂ thin film contributes to both superhydrophilicity and photocatalytic decomposition of 4-chlorophenol solution and anatase TiO₂ thin films are suitable for self-cleaning applications.     

Study of Nd-doping effect and mechanical cracking on photoreactivity of TiO2 thin films

Pure and Nd-doped TiO₂ thin films were fabricated by reactive d.c. magnetron sputtering at low-temperature from a pure Ti target. The structure of films was analyzed by X-ray diffraction (XRD). In order to study the Nd-doping effect on TiO₂ photocatalytic activity, some films were deposited on microscope glass substrates under a constant total sputtering pressure and using different Nd-doping concentrations. The effect of different Nd-dopant concentrations and its influence on the photocatalytic efficiency has been explored by measuring the photodegradation of rhodamine-B (RhB) aqueous solution under radiation of UV light. It is principally that for comparison between heat treatment and doping process on TiO₂ photocatalytic efficiency (important under the point of view of energy costs related with industrial sputtering techniques), crystalline TiO₂ films were also produced by thermal annealing. It was found that comparing with annealed pure TiO₂ films, Nd-doping do not improve the photocatalytic activity. At the same time, it was observed that there seems to exist a dopant concentration band for optimal photoreactivity. In order to study the effect of the film mechanical strength on photocatalytic activity, fragmentation tensile tests were also done on TiO₂/PET (polyethylene terephthalate) substrates at increasing applied strains. It was found that increasing the magnitude of the applied tensile strain, pure TiO₂ becomes more photocatalytic efficient.     

Surface properties of doped and undoped TiO2 thin films deposited by magnetron sputtering

In this work, transparent titanium dioxide (TiO₂) thin films were deposited onto microscope glass slides by means of the d.c. reactive magnetron sputtering method. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), UV-visible spectroscopy (UV) and contact angle analysis using the Owens-Wendt method for the surface energy calculation. The photocatalytic activity of the films was tested by measuring the photodegradation of Rhodamine-B (RhB) dye under radiation of UV light. Iron-doped TiO₂ films were also prepared in order to study the Fe-doping effect on TiO₂ photocatalytic activity. The influences of different iron concentrations on the contact angle of the series of Fe-doped TiO₂ thin films, were investigated. The influences of total sputtering pressures on TiO₂ photocatalytic activity were also investigated. It was observed that the photocatalytic activity of the TiO₂ thin films was slightly improved by increasing the total sputtering pressure. Moreover, it was also observed that in general, iron-doping was detrimental for photocatalytic activity, nevertheless the films with low iron concentrations showed better photocatalytic activity than those with high iron concentrations. It was found that iron-doping has changed the wettability appetency of TiO₂ coated surfaces.     

Characterization of the aqueous peroxomethod for the synthesis of transparent TiO2 thin films

This article summarizes our progress made on an aqueous chemical solution deposition method used for the deposition of photocatalytically active TiO₂ thin films. Starting from Titanium(IV)butoxide we achieved a stable titanium precursor solution containing titanium-peroxo compounds by reaction between Titanium(IV)butoxide and hydrogen peroxide. We were able to deposit anatase TiO₂ films with good optical transparency and abrasion resistance. Dip-coating was used to deposit thin films on glass substrates from the solution. The occurring reaction mechanism was examined via thermal analysis, mass spectrometry and Raman spectroscopy. Decomposition of organic polluents was confirmed by the breakdown of ethanol. The obtained results show promising possibilities of this low-carbon containing synthesis method towards transparent, photocatalytic coatings. Presence of carbon was minimized by avoiding organic complexing agents. These materials are of great importance in the synthesis of self-cleaning materials.     

Visible light photocatalytic degradation of paraoxon and parathion pesticides on carbon-doped TiO<Subscript>2</Subscript> nanorod thin films

In the present work the nanostructured carbon-doped TiO₂ thin films with nanorod morphology were deposited on glass substrate by a combination of ultrasonic and chemical vapor deposition methods, and for the first time were applied for the photocatalytic degradation of paraoxon and parathion organophosphorus pesticides under visible light irradiation. X-ray Diffraction, X-ray photoelectron spectroscopy, diffuse reflectance spectroscopy, and scanning electron microscopy techniques were used for characterization of the prepared thin films. Obtained results show that presence of carbon element and also special nanorod morphology of the thin films remarkably improve the optical properties of TiO₂ in visible light region and results in the good visible light photocatalytic activity of the thin films for degradation of the pesticides. The photonic efficiencies of the prepared thin films were also examined based on the international ISO-10678:2010 standard protocol for photocatalytic degradation of methylene blue under UV light irradiation. The results show a maximum photonic efficiency of 0.0312% for the carbon-doped TiO₂ thin film with 570 nm thickness, which compared to a reference standard TiO₂ films indicates a 30% improvement in photonic efficiency.     

Preparation of nitrogen co-doped SiO2/TiO2 thin films on ceramic with enhanced photocatalytic activity under visible-light irradiation

In this study, we have successfully deposited N-doped SiO₂/TiO₂ thin films on ceramic tile substrates by sol–gel method for auto cleaning purpose. After dip coating and annealing process the film was transparent, smooth and had a strong adhesion on the ceramic tile surface. The synthesised catalysts were then characterised by using several analytical techniques such as X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscope (AFM) and UV-vis absorption spectroscopy (UV-vis). The analytical results revealed that the optical response of the synthesised N-doped SiO₂/TiO₂ thin films was shifted from the ultraviolet to the visible light region. The nitrogen substituted some of the lattice oxygen atoms. The surface area of co-doped catalyst increased, and its photocatalytic efficiency was enhanced. The photocatalytic tests indicated that nitrogen co-doped SiO₂/TiO₂ thin films demonstrated higher than of the SiO₂/TiO₂ activity in decolouring of methylene blue under visible light. The enhanced photocatalytic activity was attributed to an increasing of the surface area and a forming of more hydroxyl groups in the doped catalyst.     

Photocatalytic activities of Ion doped TiO2 thin films when prepared on different substrates

Pure and ion doped TiO₂ thin films were prepared by sol-gel dip coating process on metallic and non-metallic substrates. Test metal ion concentration ranged from 0.000002 to 0.4 at.%. The resulting films were annealed in air and characterized by optical spectroscopy and X-ray diffraction. The photodegradation of methyl orange under UV irradiation by pristine and ion-doped TiO₂ films was quantified in a photocatalytic reactor developed in this study. In general, both doped and undoped TiO₂ crystals appeared in anatase phase and the photocatalytic activities of the TiO₂ thin films varied with substrates, calcination temperature, doping ions and their concentrations. The best calcination temperature for different substrates ranged from 450 to 580 °C. Films prepared on the metallic substrates resulted in higher photocatalytic activities, while ion doping lowered their efficiencies. On the contrary, for non-metallic substrates except ceramic the photocatalytic efficiencies of undoped films were much lower (< 30%), while ion doping was shown to increase the photocatalytic efficiencies remarkably in some cases, e.g., Cr³⁺ with the tile substrate. Overall, ion doping affected the photocatalytic efficiency of TiO₂ films, and an optimal doping concentration of between 0.0002 and 0.002 at.%, close to an estimate by the Debye length equation, resulted in the highest efficiency for most substrates.     

Photocatalytic TiO2 films deposited on cenosphere particles by pulse magnetron sputtering method

In the present study, TiO₂ films were deposited on the surface of cenosphere particles using the modified magnetron sputtering equipment under different working conditions. The resulting films were characterized by field emission scanning electron microscopy (FE-SEM), Atomic Force Microscopy (AFM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The FE-SEM and AFM results show that the grain sizes and root-mean-square (RMS) roughness values of the TiO₂ films increase with the increase in deposition time and film thickness. The XRD results indicate that the film was TiO₂ film and sputtering time is an importance condition to influence the films crystal. With the increasing of sputtering time, the crystallization of the TiO₂ film was increased. The XPS results show that only TiO₂ films existed on the surface of cenosphere particles. In addition, the photocatalytic activities of these films were investigated by degrading methyl orange under UV irradiation. The results suggest that the photocatalytic activity of cenosphere particles with anatase TiO₂ films is remarkable and this catalyst can be applicable for the photocatalytic degradation of other organic compounds under UV lights.     

Fabrication and characterization of nano TiO2 thin films at low temperature

Anatase TiO₂ thin films were successfully prepared on glass slide substrates via a sol–gel method from refluxed sol (RS) containing anatase TiO₂ crystals at low temperature of 100 °C. The influences of various refluxing time on crystallinity, morphology and size of the RS sol and dried TiO₂ films particles were discussed. These samples were characterized by infrared absorption spectroscopy (FT-IR), X-ray diffraction (XRD), transmission electron microscopy (TEM), field emission-scanning electron microscopy (FE-SEM) and UV–vis absorption spectroscopy (UV–vis). The photocatalytic activities of the TiO₂ thin films were assessed by the degradation of methyl orange in aqueous solution. The results indicated that titania films thus obtained were transparent and their maximal light transmittance exceeded 80% under visible light region. The TiO₂ thin films prepared from RS-6 sol showed the highest photocatalytic activity, when the calcination temperature is higher than 300 °C. The degradation of methyl orange of RS-6 thin films reached 99% after irradiated for 120 min, the results suggested that the TiO₂ thin films prepared from RS sol exhibited high photoactivities.     

Photocatalytic properties of Au/TiO2 thin films prepared by RF magnetron co-sputtering

Au/TiO₂ thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO₂ films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV-vis techniques. Au doping and UV treatment enhanced the photocatalytic efficiency of TiO₂ thin films. The optimal RF power of the Au target and UV treatment time were 5 W and 1 h, respectively. The enhanced photoactivity of Au(5 W)/TiO₂ thin films with UV treatment is found to result from the increased hydroxyl concentration.     

Preparation, characterization and photocatalytic activity of in situ Fe-doped TiO2 thin films

Fe-doped TiO₂ thin films were prepared in situ on stainless steel substrates by liquid phase deposition, followed by calcination at various temperatures. It was found that some Fe³⁺ ions were in situ doped into the TiO₂ thin films. At 400 °C, the film became photoactive due to the formation of anatase phase. At 500 °C, the film showed the highest photocatalytic activity due to an optimal Fe³⁺ ion concentration in the film. At 900 °C, the photocatalytic activity of the films decreased significantly due to the further increase of Fe³⁺ ion concentration, the formation of rutile phase and the sintering and growth of TiO₂ crystallites.     

Photoinduced properties of nanocrystalline TiO<Subscript>2</Subscript> sol-gel derived thin films

In this paper, nanostructure TiO₂ thin films were deposited on glass substrates by sol-gel dip coating technique. X-ray diffraction and Fourier transform infrared spectroscopy were used to determine film behaviour. The super-hydrophilicity was assessed by contact angle measurement. Photocatalytic properties of these films were evaluated by degradation of methylene blue under UV irradiation. The XRD pattern of TiO₂ powder samples confirmed the presence of polycrystalline anatase phase with a crystal size of 17 nm. The results indicated that UV light irradiation had significant effect on super-hydrophilic and photocatalytic properties of TiO₂ thin films.     

Photocatalytic effects for the TiO2-coated phosphor materials

This study investigated the photocatalytic behavior of the coupling of TiO₂ with phosphorescent materials. A TiO₂ thin film was deposited on CaAl₂O₄:Eu²⁺,Nd³⁺ phosphor particles by using atomic layer deposition (ALD), and its photocatalytic reaction was investigated by the photobleaching of an aqueous solution of methylene-blue (MB) under visible light irradiation. To clarify the mechanism of the TiO₂-phosphorescent materials, two different samples of TiO₂-coated phosphor and TiO₂–Al₂O₃-coated phosphor particles were prepared. The photocatalytic mechanisms of the ALD TiO₂-coated phosphor powders were different from those of the pure TiO₂ and TiO₂–Al₂O₃-coated phosphor. The absorbance in a solution of the ALD TiO₂-coated phosphor decreased much faster than that of pure TiO₂ under visible irradiation. In addition, the ALD TiO₂-coated phosphor showed moderately higher photocatalytic degradation of MB solution than the TiO₂–Al₂O₃-coated phosphor did. The TiO₂-coated phosphorescent materials were characterized by transmission electron microscopy (TEM), Auger electron spectroscopy (AES) and X-ray photon spectroscopy (XPS).     

Photocatalytic activity of TiO2 nanofilms deposited onto polyvinyl chloride and glass substrates

Using Successive-Ionic-Layer-Adsorption-and-Reaction deposition technique, TiO₂ films on polyvinyl chloride (PVC) and glass substrates were prepared. The photocatalytic and antibacterial activities of TiO₂ films on PVC were evaluated by monitoring the photo-decomposition of 2-(phosphonomethylamino)acetic acid and Micrococcus lutes (odor causing bacteria). Photocatalytic degradation of methylene blue under UV source over as-made, hydrothermal and furnace annealed TiO₂ films, and commercial TiO₂ pellets were examined.     

Scalable production of ultra small TiO2 nano crystal/activated carbon composites by atomic layer deposition for efficient removal of organic pollutants

A high surface area photo-catalytic composite material is synthesized by depositing thin films of titanium dioxide (TiO₂) on activated carbon (AC) particles using atomic layer deposition (ALD). A rotary ALD reactor is developed for scalable fabrication of powder and grams of the catalyst is prepared in each batch. The processes of TiO₂ ALD are monitored by mass spectrometry. Saturated ALD surface reactions are confirmed so that the entire surface of the AC support is covered by conformal coatings of TiO₂. For composites fabricated by 3 or more ALD cycles of TiO₂, the amorphous oxide layers can be converted to crystalline films by high temperature annealing. The as-prepared TiO₂/AC composites are highly reactive in photo-catalyzed degradation of methyl orange. The excellent catalytic performance is attributed to the abundant and uniformly dispersed active phase, formation of very active ultra small (<5 nm) TiO₂ crystals, and easy accessibility of the active sites.     

Preparation of anatase TiO2 thin films by vacuum arc plasma evaporation

Anatase titanium dioxide (TiO₂) thin films with high photocatalytic activity have been prepared with deposition rates as high as 16 nm/min by a newly developed vacuum arc plasma evaporation (VAPE) method using sintered TiO₂ pellets as the source material. Highly transparent TiO₂ thin films prepared at substrate temperatures from room temperature to 400 °C exhibited photocatalytic activity, regardless whether oxygen (O₂) gas was introduced during the VAPE deposition. The highest photocatalytic activity and photo-induced hydrophilicity were obtained in anatase TiO₂ thin films prepared at 300 °C, which correlated to the best crystallinity of the films, as evidenced from X-ray diffraction. In addition, a transparent and conductive anatase TiO₂ thin film with a resistivity of 2.6 × 10^− 1 Ω cm was prepared at a substrate temperature of 400 °C without the introduction of O₂ gas.