共查询到19条相似文献,搜索用时 296 毫秒
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扫描探针显微镜(SPM)纳米加工技术是当前非常活跃的纳米加工研究领域,其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法,以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。 相似文献
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扫描探针显微镜(SPM)纳米加工技术是当前非常活跃的纳米加工研究领域,其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法,以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。 相似文献
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微纳米操作、加工、检测和控制在各个领域获得广泛的研究和应用,在微纳米层次上进行原位、定位的操作、检测、加工是经常遇到的问题。扫描探针显微镜技术(Scanningprobemicroscope,SPM)提供强有力的工具,人们利用其不同类型的针尖与相应样品表面产生的化学或物理作用达到目的。但扫描探针显微镜针尖同时用于检测、加工和成像,会因为针尖磨损、状态的改变,影响检测信息的准确性、可靠性,直接影响结果的判定。本文提出一种在微操作加工过程的定位检测技术,即操作过程工具和探针承担不同任务,工具负责加工操作,探针用于检测并定位于操作加工位置,进行了实验并分析讨论定位过程相关问题。 相似文献
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We report here a nanofabrication result on a 2.7 nm thermal oxide layer using the low-energy e-beam/scanning tunneling microscope (STM) technique in conjunction with thermal annealing, in which line windows with average width of 50 nm can be formed. Comparing to the low-energy e-beam processing on thin layers of native Si oxide, this nanofabrication shows a uniform etching of the electronic industry compatible Si oxide, with which nanoscale trenches can be formed. In addition to demonstrating further the nanofabrication capability of this technique on the thermal oxide, the results present critical evidence to our previous discussions on the mechanism of the low-energy e-beam/STM nanofabrication. 相似文献
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As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improving the production and lifestyle of the human.Photo lithography and other alternative technologies,such as nanoimprinting,electron beam lithography,focused ion beam cutting,and scanning probe lithography,have brought great progress of semiconductor industry,IC manufacturing and micro/nanoelectromechanical system(MEMS/NEMS)devices.However,there remains a lot of challenges,relating to the resolution,cost,speed,and so on,in realizing high-quality products with further development of nanotechnology.None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time,and it is essential to explore new nanofabrication methods.As a newly developed scanning probe microscope(SPM)-based lithography,friction-induced nanofabrication provides opportunities for maskless,flexible,low-damage,low-cost and environment-friendly processing on a wide variety of materials,including silicon,quartz,glass surfaces,and so on.It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates,microfluidic devices,and micro/nano optical structures.This paper hereby involved the principals and operations of friction-induced nanofabrication,including friction-induced selective etching,and the applications were reviewed as well for looking ahead at oppor-tunities and challenges with nanotechnology development.The present review will not only enrich the knowledge in nanotribology,but also plays a positive role in promoting SPM-based nanofabrication. 相似文献
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Focused ion beam machining is a powerful technique for micro/nanofabrication. However its machined surface form accuracy will be degrade due to atoms redeposition in the nanofabrication process. In this paper, a 3D surface topography model and associated simulation program are developed to study redeposition effect for precise and deterministic fabrication of nanodots by focused ion beam. The simulation is implemented by level set method. The angular dependence of sputtering yield is calculated by a Monte Carlo simulation program - TRIDYN. The simulation results have been evaluated by focused ion beam fabrication of nanodots experiment on a silicon substrate. It demonstrates that the simulation method can precisely describe the generation of 3D surface in focused ion beam machining process (with less than 10% simulation error). Redeposition has made significant contribution to the surface generation in nanoscale fabrication by reducing more than 1/3 of intended depth. The model and simulation program developed has approved to be a good tool to determine proper machining parameter to achieve deterministic nanofabrication by focused ion beam. 相似文献
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《Measurement》2014
Drilling being one of the primary machining processes find wide spread applications in manufacturing of functional components. Optimization of drilling process performance requires critical understanding of process parameters which govern the mechanism of drilling process. Machining process at nanoscale level has been studied extensively using numerical modeling approaches owing to complexity in conducting experiments at nanoscale level. In this paper, we propose a new evolutionary approach based on multi-gene genetic programming (MGGP) to numerically model the drilling process of graphene sheet, a two dimensional nanoscale material. The performance of our proposed MGGP model is compared with that of the artificial neural network (ANN) and we observe that our predictions are well in agreement with the data obtained using conventional numerical approach for modeling machining process of nanoscale materials. We anticipate that our proposed MGGP model can find applications in optimizing the machining processes of nanoscale materials. 相似文献
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Dinh Quyen Van Vo Truong Quoc Kim BoHung 《Journal of Mechanical Science and Technology》2019,33(7):3257-3263
Journal of Mechanical Science and Technology - Understanding nanoscale fluidic transport becomes increasingly important due to the rapid development of nanotechnology and nanofabrication. By using... 相似文献
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Mechano-chemical scanning probe lithography (MC-SPL) is a nanofabrication technique that is based on the nanoscale abrasive interaction between a sharp nanoprobe and an ultrathin organic resist-coated surface. This work reviews the fundamental aspects of the MC-SPL process. The abrasive interaction at the tip-workpiece contact interface that occurs in the MC-SPL process was investigated by experimentally as well as by molecular dynamics simulation. Experimental results showed that severe wear of the tip that can generate just after coming into contact with the sample and the defects on the organic resists lead to the pattern broadening. In addition, the results from the simulation using the tips modeled with various shapes disclosed that the scribed pattern width was largely affected more by the shape of the tip rather than by the tip-surface contact area and thus the severe pattern broadening and large displacement of alkanethiol molecules around the tip could occur in the case of using the tip with large cone angle. It was found that these phenomena were due to the strong van der Waals interactions between the alkanethiol molecules. 相似文献
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Kwang-Seop Kim Jae-Hyun Kim Hak-Joo Lee Sang-Rok Lee 《Journal of Mechanical Science and Technology》2010,24(1):5-12
Nanoimprint lithography (NIL) is one of the most promising technologies for nanofabrication because it can create nano- and
microscale structures and devices in a cost-effective manner. In the NIL process, a mold with patterns on its surface comes
in contact with a polymer film on a substrate. The patterns are transferred to the polymer film and then the mold is separated
from the film. Mechanical contact between the mold and the polymer film, and between the film and the substrate, is inevitable.
In some cases, during the separation process, adhesion and friction forces at the interfaces can deform and fracture the transferred
patterns and detach the polymer film from the substrate. Thus, controlling the adhesion and friction between the materials
in contact is very important in achieving a successful pattern transfer and making the NIL process a robust nanofabrication
technique. Many theoretical and experimental research efforts have been made to clarify the tribological phenomena in NIL
and to reduce defects due to adhesion and friction. This article describes the tribological problems encountered and reviews
the related research. 相似文献
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零件建模和装配建模是产品建模的两个方面,对制造企业的竞争力有重要影响。在当前的计算机辅助设计系统(Computer-aided design,CAD)中,尽管两者已高度集成,它们在过程层面仍然存在相互割裂的现象。为此,提出一种基于结构预映射(Structure pre-mapping,SPM)的产品建模方法。首先对产品建模过程及SPM进行系统分析,明确实现SPM需要完成的主要任务;其次,详细阐述SPM的内涵,并对其进行形式化定义,以便于在CAD系统中描述;第三,基于前期发展的装配特征偶概念,对存在于设计者头脑中的设计意图(表现为抽象配合结构和配合行为)进行系统建模,形成实现SPM的基础;第四,提出基于SPM的产品建模原理,进而展示相应的框架,并分析框架的功能模块及其实现方法;最后,通过HP发动机空气过滤器头部组件的产品建模实例论证方法的可行性。该方法可在过程层面上提高产品建模的集成程度,对于现有CAD建模理论和技术体系的丰富和发展有一定的积极意义。 相似文献