基于SPM的纳米加工技术研究

扫描探针显微镜（SPM）纳米加工技术是当前非常活跃的纳米加工研究领域,其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法,以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。     

基于SPM的纳米加工技术研究

扫描探针显微镜(SPM)纳米加工技术是当前非常活跃的纳米加工研究领域,其研究成果有可能成为微纳米器件制作的主要方法。论文主要介绍了单原子操纵、阳极氧化法,以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展动向。     

基于SPM的纳米加工技术研究进展

扫描探针显微镜(SPM)使人们不仅可以观察到物质表面的微观形貌,还可以在微纳米尺度上对样品表面进行加工,这种方法有可能成为未来微纳米器件的主要制作方法,成为推动人类科学和技术发展的新动力。主要介绍基于SPM的三种纳米加工方法:单原子操纵法、阳极氧化法和机械刻蚀法。详细阐述了各自的原理、特点及发展状况,并指出阳极氧化法是目前最有可能应用在实际生产制造中的加工方法,而机械刻蚀法则不仅可以作为纳米加工的手段,还可以应用于纳米加工机理方面的研究。     

大气状态下STM电场加工机理分析

扫描探针显微镜（SPM）家族的拓展始于扫描隧道显微镜（STM）,它的发明使人类能够真正获得物质表面在原子尺度上的局域电子结构,并可揭示与之对应的原子结构,基于SPM的纳米加工技术同样是从STM开始的,本文主要介绍大气状态下STM在Au和Ti表面的电场加工结果,并对其作用机理进行较深入分析,确定表面结构的生成为准接触和电场诱导氧化的综合作用。     

动态电场诱导氧化实现纳米结构的加工

利用原子力显微镜 (AFM )进行表面的局部氧化加工是进行纳米结构加工的一种很有前途的方法。它具有广泛的应用范围 ,可以进行功能性纳米电子器件和纳米机械结构的加工。实验采用了动态电场作用下的AFM诱导氧化的方法 ,提高了氧化物的生长速度 ,并且改善了氧化结构的纵横比 ,能够更好地控制生成氧化物的结构和电属性。     

用于纳米光电子器件加工的纳米金属膜的制作

在利用Top-Down方式加工纳米电子器件和纳米光电子器件的研究中,纳米薄膜的制作和加工技术是一个关键环节.采用金属Ti-SOS结构的纳米器件,Ti膜的厚度和成膜质量成为影响基于AFM针尖诱导氧化加工Ti纳米氧化线/电路图形结构质量的重要因素.文中叙述了Ti膜的制备和检测方法,给出了纳米Ti膜的制备和在一定环境下对其进行氧化加工的结果.     

用于纳米级三维表面形貌及微小尺寸测量的原子力显微镜

SPM是在纳米尺度上进行测量的重要的测量仪器之一,随着SPM进入工业测量领域,SPM的校准、量值溯源和测量不确定度分析已经成为SPM能够作为计量仪器使用的关键所在.文章论述了一种计量型原子力显微镜的构成、校准以及在国际比对中的应用.     

纳米操作加工过程定位检测问题研究

微纳米操作、加工、检测和控制在各个领域获得广泛的研究和应用,在微纳米层次上进行原位、定位的操作、检测、加工是经常遇到的问题。扫描探针显微镜技术(Scanningprobemicroscope,SPM)提供强有力的工具,人们利用其不同类型的针尖与相应样品表面产生的化学或物理作用达到目的。但扫描探针显微镜针尖同时用于检测、加工和成像,会因为针尖磨损、状态的改变,影响检测信息的准确性、可靠性,直接影响结果的判定。本文提出一种在微操作加工过程的定位检测技术,即操作过程工具和探针承担不同任务,工具负责加工操作,探针用于检测并定位于操作加工位置,进行了实验并分析讨论定位过程相关问题。     

SPM适配器在风机上的安装

本文对纳米级测量技术作了简要的概述，详细介绍了SPM适配器的规格及在风机上的安装。     

铌酸锂晶片的化学机械抛光质量研究

采用化学机械抛光方法，在新型智能抛光机上用自制的抛光液对铌酸锂晶片进行抛光。结果证明选择适当的参数后可以得到一种超平滑表面，几乎无损伤层，且有较高的面形精度和加工效率。采用扫描探针显微镜(SPM)获得了铌酸锂晶片表面微观形貌，并测定了损伤层，分析了铌酸锂晶片的表面形成机理及其表面加工缺陷和损伤层的成因。     

Scanning tunneling microscopy nanofabrication of electronic industry compatible thermal Si oxide

We report here a nanofabrication result on a 2.7 nm thermal oxide layer using the low-energy e-beam/scanning tunneling microscope (STM) technique in conjunction with thermal annealing, in which line windows with average width of 50 nm can be formed. Comparing to the low-energy e-beam processing on thin layers of native Si oxide, this nanofabrication shows a uniform etching of the electronic industry compatible Si oxide, with which nanoscale trenches can be formed. In addition to demonstrating further the nanofabrication capability of this technique on the thermal oxide, the results present critical evidence to our previous discussions on the mechanism of the low-energy e-beam/STM nanofabrication.     

Friction-Induced Nanofabrication:A Review

As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improving the production and lifestyle of the human.Photo lithography and other alternative technologies,such as nanoimprinting,electron beam lithography,focused ion beam cutting,and scanning probe lithography,have brought great progress of semiconductor industry,IC manufacturing and micro/nanoelectromechanical system(MEMS/NEMS)devices.However,there remains a lot of challenges,relating to the resolution,cost,speed,and so on,in realizing high-quality products with further development of nanotechnology.None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time,and it is essential to explore new nanofabrication methods.As a newly developed scanning probe microscope(SPM)-based lithography,friction-induced nanofabrication provides opportunities for maskless,flexible,low-damage,low-cost and environment-friendly processing on a wide variety of materials,including silicon,quartz,glass surfaces,and so on.It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates,microfluidic devices,and micro/nano optical structures.This paper hereby involved the principals and operations of friction-induced nanofabrication,including friction-induced selective etching,and the applications were reviewed as well for looking ahead at oppor-tunities and challenges with nanotechnology development.The present review will not only enrich the knowledge in nanotribology,but also plays a positive role in promoting SPM-based nanofabrication.     

An investigation of redeposition effect for deterministic fabrication of nanodots by focused ion beam

Focused ion beam machining is a powerful technique for micro/nanofabrication. However its machined surface form accuracy will be degrade due to atoms redeposition in the nanofabrication process. In this paper, a 3D surface topography model and associated simulation program are developed to study redeposition effect for precise and deterministic fabrication of nanodots by focused ion beam. The simulation is implemented by level set method. The angular dependence of sputtering yield is calculated by a Monte Carlo simulation program - TRIDYN. The simulation results have been evaluated by focused ion beam fabrication of nanodots experiment on a silicon substrate. It demonstrates that the simulation method can precisely describe the generation of 3D surface in focused ion beam machining process (with less than 10% simulation error). Redeposition has made significant contribution to the surface generation in nanoscale fabrication by reducing more than 1/3 of intended depth. The model and simulation program developed has approved to be a good tool to determine proper machining parameter to achieve deterministic nanofabrication by focused ion beam.     

Measurement of properties of graphene sheets subjected to drilling operation using computer simulation

Drilling being one of the primary machining processes find wide spread applications in manufacturing of functional components. Optimization of drilling process performance requires critical understanding of process parameters which govern the mechanism of drilling process. Machining process at nanoscale level has been studied extensively using numerical modeling approaches owing to complexity in conducting experiments at nanoscale level. In this paper, we propose a new evolutionary approach based on multi-gene genetic programming (MGGP) to numerically model the drilling process of graphene sheet, a two dimensional nanoscale material. The performance of our proposed MGGP model is compared with that of the artificial neural network (ANN) and we observe that our predictions are well in agreement with the data obtained using conventional numerical approach for modeling machining process of nanoscale materials. We anticipate that our proposed MGGP model can find applications in optimizing the machining processes of nanoscale materials.     

Viscous heating and temperature profiles of liquid water flows in copper nanochannel

Journal of Mechanical Science and Technology - Understanding nanoscale fluidic transport becomes increasingly important due to the rapid development of nanotechnology and nanofabrication. By using...     

Study on nanoscale abrasive interaction between nanoprobe and self-assembled molecular surface for probe-based nanolithography process

Mechano-chemical scanning probe lithography (MC-SPL) is a nanofabrication technique that is based on the nanoscale abrasive interaction between a sharp nanoprobe and an ultrathin organic resist-coated surface. This work reviews the fundamental aspects of the MC-SPL process. The abrasive interaction at the tip-workpiece contact interface that occurs in the MC-SPL process was investigated by experimentally as well as by molecular dynamics simulation. Experimental results showed that severe wear of the tip that can generate just after coming into contact with the sample and the defects on the organic resists lead to the pattern broadening. In addition, the results from the simulation using the tips modeled with various shapes disclosed that the scribed pattern width was largely affected more by the shape of the tip rather than by the tip-surface contact area and thus the severe pattern broadening and large displacement of alkanethiol molecules around the tip could occur in the case of using the tip with large cone angle. It was found that these phenomena were due to the strong van der Waals interactions between the alkanethiol molecules.     

SPM用于超精加工领域的重要性及特殊性

讨论了扫描针显微镜作为一种显微工具的优势和不足,介绍了把ＳＰＭ应用于超精密加工检测领域所要注意的问题,指出纳米级加工机理的研究将依赖于ＳＰＭ的复合化及多功能化,只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择,从而引导超精密加工的发展。     

Tribology issues in nanoimprint lithography

Nanoimprint lithography (NIL) is one of the most promising technologies for nanofabrication because it can create nano- and microscale structures and devices in a cost-effective manner. In the NIL process, a mold with patterns on its surface comes in contact with a polymer film on a substrate. The patterns are transferred to the polymer film and then the mold is separated from the film. Mechanical contact between the mold and the polymer film, and between the film and the substrate, is inevitable. In some cases, during the separation process, adhesion and friction forces at the interfaces can deform and fracture the transferred patterns and detach the polymer film from the substrate. Thus, controlling the adhesion and friction between the materials in contact is very important in achieving a successful pattern transfer and making the NIL process a robust nanofabrication technique. Many theoretical and experimental research efforts have been made to clarify the tribological phenomena in NIL and to reduce defects due to adhesion and friction. This article describes the tribological problems encountered and reviews the related research.     

基于结构预映射的产品建模

零件建模和装配建模是产品建模的两个方面,对制造企业的竞争力有重要影响。在当前的计算机辅助设计系统（Computer-aided design,CAD）中,尽管两者已高度集成,它们在过程层面仍然存在相互割裂的现象。为此,提出一种基于结构预映射（Structure pre-mapping,SPM）的产品建模方法。首先对产品建模过程及SPM进行系统分析,明确实现SPM需要完成的主要任务;其次,详细阐述SPM的内涵,并对其进行形式化定义,以便于在CAD系统中描述;第三,基于前期发展的装配特征偶概念,对存在于设计者头脑中的设计意图（表现为抽象配合结构和配合行为）进行系统建模,形成实现SPM的基础;第四,提出基于SPM的产品建模原理,进而展示相应的框架,并分析框架的功能模块及其实现方法;最后,通过HP发动机空气过滤器头部组件的产品建模实例论证方法的可行性。该方法可在过程层面上提高产品建模的集成程度,对于现有CAD建模理论和技术体系的丰富和发展有一定的积极意义。