片上电子源的研究现状（一）

本文主要回顾总结近数十年来片上电子源的研究工作及最新进展,包括场发射片上电子源、内场发射片上电子源以及新型热发射微型片上电子源。本文从这些片上电子源的基本原理、加工制备以及工作性能(包括工作电压、工作真空、发射电流、发射电流密度和发射效率)等方面进行比较,分析各种片上电子源的优劣点,为片上电子源的发展现状做一个简单的总结。     

场致电子发射薄膜材料研究评述

场致电子发射(场发射)薄膜材料由于在场发射平板显示器、电子源等诸多高性能真空微电子器件上具有广阔的应用前景,引起了人们广泛的关注与研究兴趣.综述了场发射薄膜材料的理论与实验研究进展,并评述了场致电子发射薄膜材料研究的瓶颈问题及未来发展方向与趋势.     

石墨烯在场发射器件中的应用与研究现状

场电子发射是一种独特的量子隧穿效应,也是真空微电子学的基础之一。基于场发射技术的冷阴极发射体一直被视为未来理想的电子发射阴极。石墨烯是一种具备单层碳原子结构的新型碳材料,其电子迁移率高、机械强度高、热导率高,具有稳定的物理化学特性,因此受到科研工作者的广泛关注。与此同时石墨烯具有较高的长径比(横向尺寸与厚度的比值),这一结构特性能够获得较大的场增强因子。石墨烯的上述特性使得其成为具有广阔应用前景的场发射阴极。本文主要综述石墨烯场发射理论的研究进展、石墨烯/石墨烯基场发射阴极的研究现状、场发射阴极结构以及场发射阴极的制备方法,并对场发射领域的石墨烯研究进行了展望。     

石墨烯纳米片及其场发射性能研究

两维石墨烯纳米材料是目前材料研究的热点之一,其中石墨烯纳米片的一个重要特征是有一条一维尖锐的刀口状边缘,电场增强系数大,是很好的电子场发射材料。本文介绍了石墨烯纳米片结构特点,综述了石墨烯纳米片的制备及电子发射性能,指出了目前研究存在的问题和研究方向。     

基于氧化锌纳米线表面传导场发射阴极的研究

利用热蒸发和丝网印刷技术在玻璃基底上成功制备了氧化锌纳米线表面传导场发射阴极阵列,并测试其场发射性能。扫描电镜表明,在氩气和氧气流量分别为60和1mL/min,反应温度550℃保温30min条件下制备的氧化锌纳米线均匀垂直生长在玻璃基底上,直径大约在80～200nm,长度〉7μm。场发射测试表明,在阳压2000V和阴阳间距为500μm时,ZnO纳米线表面传导场发射阴极的开启电压为70V;在栅压为96V时,电子发射效率为26.2%,高于传统报道的表面传导电子发射器件,在经过80min的老练后发射接近稳定,平均发射电流接近135μA,表明ZnO纳米线表面传导场发射阴极有着稳定高效的场发射性能。     

场发射枪透射电镜及有关技术

场发射枪提供亮度高、相干性好的电子源,使透射电子赤微镜在纳米尺度分析和获取更全面信息方面开拓了新的领域。本文在介绍肖脱基场发射枪和冷场发射枪基本特性的基础上,简述了场发射枪透射电镜在纳米全分析、能量选择成象、相干电子衍射效应及电子全息术中的应用。     

碳纤维复合石墨阴极的制备及电子发射性能

阴极作为强流电子束的起点，对高功率微波源的性能具有重要影响。石墨是高功率源用爆炸发射阴极的常用材料，具有高压重频条件下运行稳定和长寿命的优点。使用具有高长径比、低发射阈值的碳纤维对石墨阴极进行复合，采用场发射及高功率微波测试平台，对比分析纯石墨阴极及碳纤维复合石墨阴极的场发射性能、强流电子发射性能及输出微波特性，结合阴极的微观结构表征，研究碳纤维复合对石墨阴极电子发射性能的影响规律。研究表明：与鳞片石墨阴极相比，40%(质量分数)碳纤维复合石墨阴极的场发射阈值电场由143 kV/cm降低到119 kV/cm,降低了约16.8%,二极管电压为480 kV时输出的微波脉宽与峰值分别提高了13.5%,5.7%。同时考虑到碳纤维在爆炸电子发射过程中结构稳定性的特点，碳纤维的复合也有利于阴极使用寿命的提高。     

碳纤维复合石墨阴极的制备及电子发射性能EI

阴极作为强流电子束的起点,对高功率微波源的性能具有重要影响。石墨是高功率源用爆炸发射阴极的常用材料,具有高压重频条件下运行稳定和长寿命的优点。使用具有高长径比、低发射阈值的碳纤维对石墨阴极进行复合,采用场发射及高功率微波测试平台,对比分析纯石墨阴极及碳纤维复合石墨阴极的场发射性能、强流电子发射性能及输出微波特性,结合阴极的微观结构表征,研究碳纤维复合对石墨阴极电子发射性能的影响规律。研究表明:与鳞片石墨阴极相比,40%(质量分数)碳纤维复合石墨阴极的场发射阈值电场由143 kV/cm降低到119 kV/cm,降低了约16.8%,二极管电压为480 kV时输出的微波脉宽与峰值分别提高了13.5%,5.7%。同时考虑到碳纤维在爆炸电子发射过程中结构稳定性的特点,碳纤维的复合也有利于阴极使用寿命的提高。     

碳纤维复合石墨阴极的制备及电子发射性能EI北大核心

阴极作为强流电子束的起点,对高功率微波源的性能具有重要影响。石墨是高功率源用爆炸发射阴极的常用材料,具有高压重频条件下运行稳定和长寿命的优点。使用具有高长径比、低发射阈值的碳纤维对石墨阴极进行复合,采用场发射及高功率微波测试平台,对比分析纯石墨阴极及碳纤维复合石墨阴极的场发射性能、强流电子发射性能及输出微波特性,结合阴极的微观结构表征,研究碳纤维复合对石墨阴极电子发射性能的影响规律。研究表明:与鳞片石墨阴极相比,40%(质量分数)碳纤维复合石墨阴极的场发射阈值电场由143 kV/cm降低到119 kV/cm,降低了约16.8%,二极管电压为480 kV时输出的微波脉宽与峰值分别提高了13.5%,5.7%。同时考虑到碳纤维在爆炸电子发射过程中结构稳定性的特点,碳纤维的复合也有利于阴极使用寿命的提高。     

模拟研究常闭和常开工作模式下的平面栅极型碳纳米管场发射电子源

采用数值模拟的方法对比性地研究了常闭和常开工作模式下平面栅极型碳纳米管场发射电子源.静电场的数值计算结果显示:常闭工作模式下该电子源中阴极电极的表面电场分布不均匀,边缘处的高电场易导致其上的碳纳米管烧毁,从而引起场发射电流衰减.为了解决此问题,提出将常开工作模式用于该电子源,并证实常开工作模式能够用于该电子源,并有利于解决电流衰减问题.因此,相对于常闭工作模式,常开工作模式更适合平面栅极型碳纳米管场发射电子源.     

High-Current-Density field emission from self-heating printed carbon nanotubes

High-current-density field emitters are considered as the potential and necessary components for compact high definition x-ray sources and high-power cold cathode microwave amplifiers. In this report, high-current-density field emission from self-heating printed carbon nanotubes is introduced. Large emission current causes large heat that increases the temperature of the emitters. The temperature is estimated to be more than ~1600 K. Localized surface field and high temperature both drive more electrons escaping from the emitters, and the maximum current density is larger than ~2.7 A/cm² that will satisfy the need of most vacuum electron devices including x-ray sources and microwave electron devices.     

新型碳纳米管微焦点电子源研究

介绍了一种基于碳纳米管场发射的新型微焦点电子源技术.利用激光烧蚀镍金属表面使内部未氧化的镍金属熔化喷出暴露于基底表面,再通过化学气相沉积制备出直径约为350μm的半球壳型碳纳米管薄膜阴极.场发射测试表明,电子源具有低开启电场(<1V/μm)、高发射电流(可达1A/cm2)和高压强发射稳定等特点.通过复合石墨烯和750℃...     

Ultrafast Field‐Emission Electron Sources Based on Nanomaterials

The search for electron sources with simultaneous optimal spatial and temporal resolution has become an area of intense activity for a wide variety of applications in the emerging fields of lightwave electronics and attosecond science. Most recently, increasing efforts are focused on the investigation of ultrafast field‐emission phenomena of nanomaterials, which not only are fascinating from a fundamental scientific point of view, but also are of interest for a range of potential applications. Here, the current state‐of‐the‐art in ultrafast field‐emission, particularly sub‐optical‐cycle field emission, based on various nanostructures (e.g., metallic nanotips, carbon nanotubes) is reviewed. A number of promising nanomaterials and possible future research directions are also established.     

氮离子注入CVD金刚石薄膜的场电子发射研究

对氮离子注入掺杂的微波等离子ＣＶＤ金刚石薄膜进行了场电子发射研究。结果表明,发射具有３特征,即当样品损伤层被击穿、发射体被激活后,稳定的发射建立起来,并表现出优异的发射性能,开启电压低（４５Ｖ）,发射电流大（１３０ｍＡ）。根据电介质的击穿模型和金属／电介质／真空的发射体模型对结果进行了讨论。     

Study on electron field emission enhancement from nitrogenated carbon nanotips synthesized by plasma-enhanced hot filament chemical vapor deposition

Nitrogenated carbon nanotips (NCNTPs) with different structures were synthesized by plasma-enhanced hot filament chemical vapor deposition using methane, hydrogen and nitrogen as the reactive gases. The structures and compositions of the NCNTPs were studied by field emission scanning electron microscopy (FESEM), micro-Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS). The XPS spectra reveal that nitrogen is incorporated into the carbon nanotips to form the NCNTPs under plasma condition. The Raman spectra and FESEM images show that the NCNTPs are amorphous structure and their morphologies change with the change in deposition conditions, respectively. The electron field emission (EFE) from the NCNTPs was measured and the EFE results indicate that the NCNTPs with the smooth surfaces and high density can emit a current density of 3 × 10³ μA/cm² at an electric field of 7.2 V/μm, which exhibits better EFE characteristic than the NCNTPs with the carbon nanowires on their surfaces due to small amount of oxygen adsorbed on the smooth surfaces of NCNTPs. According to the possible structures of nitrogen in sp² cluster in rings, the EFE enhancement of the NCNTPs compared with pure carbon nanotips was studied. The high emission current density (3 × 10³ μA/cm²) at low field (7.2 V/μm) suggests that the NCNTPs can serve as effective electron emission sources for numerous applications.     

基于碳纳米管薄膜构建场发射平面显示器的阴极结构

碳纳米管场发射平面显示器具有工作电压低、功耗低和制造成本低等优势,近年来基于碳纳米管场发射平面显示器的研究与应用研发已成为显示技术领域研究的热点之一,并已取得丰富成果。简要回顾了碳纳米管用于场发射的机理以及用于场发射平面显示器的优势,主要介绍了碳纳米管用于场发射平面显示器研究的一些进展和一些亟待解决的问题,包括碳纳米管阴极薄膜的制备、碳纳米管阴极工作稳定性与寿命的改进以及阴极结构的设计等,并展望了碳纳米管用于场发射平面显示器的发展前景。     

Field Electron Emission from Layers with Very Long and Sparse Carbon Nanotubes

For carbon layers with very long and sparse nanotubes (nanofilaments) field electron emission at very low average electric field was observed. Field emission current of 10 µA was obtained at the average electric field E_av=0.16 V/µm and the value of the field amplification coefficient β reached 45,000. At high emission currents (exceeding 30-50 µA) one or several luminous nanotubes (nanofilaments) heated by the emission cuurent have been observed in the gap between the sample and the anode.     

Synthesis of carbon nanotubes at low temperature by filament assisted atmospheric CVD and their field emission characteristics

Multiwalled carbon nanotubes (MWNTs) were synthesized using a hot filament assisted chemical vapor deposition (CVD) at the atmospheric pressure at a substrate temperature of 550 °C. The size of nanotubes was controlled by changing the size of catalyst particles. The structure and composition of these nanotubes were investigated using scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. The electron field emission current of MWNTs was also measured. It was found that the nanotubes with smaller the diameter had higher the emission current levels though synthesis conditions except catalyst particles were the same. These as-grown MWNTs had emission current densities of 6.5 mA/cm² and 2.5 mA/cm² at 1 V/μm for 5-8 nm and 20 nm size carbon nanotube samples, respectively. The results indicated that the MWNTs synthesized had low emission threshold voltages and high emission current levels that are favorable properties for field emission-based display device applications.     

Preparation and field emission study of low-dimensional ZnS arrays and tubules

In the present work, freestanding ZnS nanotipped arrays and hollow tubules have been generated using an electrodeposition technique via template synthesis. The structures and morphologies of the arrays and tubules were investigated using X-ray diffraction and scanning electron microscopy, respectively. Electron field emission properties of the ZnS nanotipped arrays and tubules have been studied in a good vacuum condition at room temperature and current–voltage characteristics were found to follow the Fowler–Nordheim theory.

It is found that ZnS tubules show good electron field emission properties at low voltage with large field enhancement factor compared to ZnS solid arrays. Optical properties of such synthesised structures were also studied using ultraviolet–visible spectrophotometery.