新型谐振式硅微机械加速度计

制作出一种新型结构的谐振式硅微加速度计，其输出频率信号可以克服微机电系统器件输出微弱信号检测的困难、采用双端固定音叉作为谐振器，在加速度作用下，质量块的惯性力通过悬臂梁施加于音叉轴向，利用音叉谐振频率的变化测量加速度．在每个音叉臂上制作了梳齿结构，用梳齿间的静电力激励音叉产生谐振，并利用其构成的电容检测其振动频率．该加速度计采用体硅工艺制作，文中给出了工艺流程、用有限元方法仿真估算，得到传感器的灵敏度约为2／gHz．     

高温环境下MEMS微构件动态特性测试技术研究

基于放电激励方法建立了高温环境下MEMS微构件动态特性测试系统,该系统主要由激励装置、激光多普勒测振仪、微构件温度控制系统组成.激励装置利用尖端放电产生的激波激励微构件,通过进给机构调节电极间距以改变激励能量.激励底座是用高温胶粘接而构成的多层结构,包括微构件安装板、十字载台、陶瓷绝缘片和板电极.微构件胶粘在底座上,其振动响应信号由多普勒测振仪测量,计算机对测量数据频谱分析后得到谐振频率.编写了基于LabVIEW的微构件温度控制软件,控制测试时温度.利用该测试系统,测试了微构件在室温~500℃环境下的谐振频率,得到了谐振频率随温度变化规律.     

一种用于复杂环境下的高精度微型谐振式压力传感器北大核心CSCD

微谐振式压力传感器因其体积小、精度高等特点而被广泛研究,本文基于谐振器在不同压力载荷下侧向振动时其等效刚度随轴向应力的改变而变化的原理,设计了一种静电激励/电容检测的谐振式压力传感器。本设计采用的谐振器结构与现有研究不同,通过在谐振梁的两边设计了两根侧梁用于抑制谐振器的Z向位移,提高了传感器的稳定性,并且双面梳齿结构和复合温敏梁可进一步优化传感器检测灵敏度等性能。在ANSYS WORKBENCH仿真平台下对其进行分析与验证,结果表明:侧梁可有效地抑制谐振器的Z向位移,在0~100 MPa范围内谐振器具有良好的正向应力特性;传感器基础谐振频率为29.834 kHz,在0~120 kPa范围内灵敏度可达29.6Hz/kPa,且最大过压1.5×FS时仍具备频率稳定性,这表明该传感器可应用于对灵敏度、抗过压等性能有更高要求的复杂环境中。     

一种用于复杂环境下的高精度微型谐振式压力传感器

微谐振式压力传感器因其体积小、精度高等特点而被广泛研究,本文基于谐振器在不同压力载荷下侧向振动时其等效刚度随轴向应力的改变而变化的原理,设计了一种静电激励/电容检测的谐振式压力传感器。本设计采用的谐振器结构与现有研究不同,通过在谐振梁的两边设计了两根侧梁用于抑制谐振器的Z向位移,提高了传感器的稳定性,并且双面梳齿结构和复合温敏梁可进一步优化传感器检测灵敏度等性能。在ANSYS WORKBENCH仿真平台下对其进行分析与验证,结果表明:侧梁可有效地抑制谐振器的Z向位移,在0～100 MPa范围内谐振器具有良好的正向应力特性;传感器基础谐振频率为29.834 kHz,在0～120 kPa范围内灵敏度可达29.6Hz/kPa,且最大过压1.5×FS时仍具备频率稳定性,这表明该传感器可应用于对灵敏度、抗过压等性能有更高要求的复杂环境中。     

激励功率对微机械谐振梁谐振频率的影响

对谐振式微机械传感器的敏感元件——微机械谐振梁的谐振频率特性进行了详细的实验研究,并从理论上分析了激励功率对谐振频率的影响．实验结果表明,谐振频率随着激励功率的增加而近似线性减小,当激励功率从1．1mW提高到10．1mW时,谐振梁的谐振频率降低了1．609kHz,灵敏度为0．179kHz／mW．实验结论与理论分析的结果基本一致．若要使激励功率对谐振频率的影响减小,则要求降低激励功率并减小梁的长度,增大梁的厚度和宽度．上述研究结论对优化谐振式微机械传感器敏感元件结构尺寸的设计有指导意义．     

一种新型的谐振梁频率测量方法研究

谐振梁是一种应用广泛的谐振器。谐振式传感器可以通过测量谐振梁谐振频率的变化,解算谐振梁所受的轴向载荷的大小,从而达到测量目的。目前谐振梁常用的频率测量方法对于动态测量问题的效果并不理想,在很多应用场合都受到限制。本文针对双端固支型谐振梁的频率测量问题,设计了一种基于希尔伯特变换的频率测量方法。使用数值方法对谐振梁振动方程进行求解,获得多种典型的测试信号。仿真实验表明,该方法能很好地获取动态信号频率。     

基于高阶谐振悬臂的轻敲式原子力显微镜测量特性

轻敲式原子力显微镜的悬臂为无限自由度系统,具有多阶谐振模态.为了提高动态原子力显微镜的测量特性,采用激励硅悬臂工作于高阶谐振模态的方法.相较于基础模态,高阶谐振悬臂的振动频率和品质因数有所提高,结合振型的不同以及光杠杆检测法的特性,从理论上对高阶谐振模态下动态原子力显微镜的测量特性进行了分析.构建了基于高阶谐振的动态原子力显微镜系统,围绕其主要测量特性,如表面探测垂直分辨力、时间扫描速度以及阻尼特性进行了研究和测试,理论分析和实验结果均表明,相较于一阶谐振模态,二阶谐振模态下的动态原子力显微镜系统的测量特性得到了提高:二阶谐振悬臂扫描速度约为一阶谐振悬臂的3.3倍;二阶谐振悬臂的探测垂直分辨力可达到0.5 nm,远远优于一阶悬臂的0.9 nm;并且二阶谐振悬臂的品质因数远高于一阶谐振状态,降低了大气阻尼对悬臂系统的影响.     

新型推挽激励的谐振式微机械静电场传感器

为了提高传感器的信噪比(signal-to-noise ratio,SNR),降低器件的耦合干扰,基于表面微机械工艺设计制作了一种新型推挽激励方案的谐振式微型静电场传感器.该传感器敏感结构主要包括静电梳齿激励电极、屏蔽电极和感应电极3部分.工作时,在该传感器敏感结构同一侧梳齿的固定端上加入反相相等的激励信号,实现差分激励,使屏蔽电极在谐振频率处振动,从而在感应电极上感应出差分电流信号,通过相关检测方式检测出传感器该输出信号的二次谐波分量,即可获得被测静电场强度大小.该传感器的新型结构设计和激励检测方案可获得最大电场响应灵敏度,并有效抑制了同频耦合串扰和共模噪声.常压室温(约25℃)测试结果表明,在量程(-15 kV/m～15 kV/m)内,只需要5 Vpp激励电压,其中线性度(端基线性度)达到了1.03%,分辨率优于200 V/m.     

基于单端口多模态微悬臂梁的谐振式大量程智能气体传感器(英文)

基于悬臂梁的谐振气体传感器可以通过测量悬臂梁谐振频率的偏移而检测相应气体分子.本文介绍了一种使用自激励自检测(SAD)电路驱动单端口多模态微悬臂梁的智能谐振式气体传感器.这种激励模式简化了悬臂梁结构和微加工过程.另外,还可以通过便捷地改变悬臂梁谐振模态实现大量程的气体浓度检测.通过仿真分析了不同模态下悬臂梁的模型和敏感度.通过测量这种基于单端口多模态悬臂梁的气体传感器对于气体的响应情况,展示了这种多模态SAD系统以及其改变模态增加测量量程的功能.     

多壁碳纳米管湿度传感器介电损耗模型（英文）

为揭示碳纳米管湿度传感器的介电损耗,制作了一种电阻型碳纳米管湿度传感器.使用介电损耗相关理论对其频率特性进行分析,并利用普适方程建立了传感器介电损耗模型.对实验数据与所建立模型进行拟合,得到拟合决定系数为0.994,表明可以使用普适方程对传感器介电损耗进行描述.由于测试频率引起的传感器电阻变化会改变传感器线性度,分析了不同测试频率下传感器的线性度,发现当测试频率为10 kHz时传感器的线性度最佳（1.52%）,此时传感器灵敏度为-7.83Ω/%RH.     

Frequency encoding of resonant mass sensors for chemical vapor detection

Chemical vapors can be detected by a resonant mass sensor array with selective absorption coatings implementing a frequency encoding method. The sensor array consists of sensor elements with different frequencies for their identifications in the frequency response obtained with a pulse Fourier transform detection scheme. Zero-loading resonance frequencies are chosen so that frequency shift due to absorption is bounded within a predefined region so that there is no overlap of peaks and all peaks can be assigned to the correct elements at any operation conditions. Mechanical oscillations of all or selected numbers of the sensor elements are excited by application of an excitation signal. Free oscillation decay signals from all or selectively excited sensor elements are detected and digitized. The free oscillation decay signal is subjected to a spectral analysis routine converting into a frequency spectrum, in which frequency shifts due to absorption of chemical vapors can be obtained. The implementation of the frequency encoding method with pulse Fourier transform detection to resonant mass sensors allows simultaneous multisensor detection, fast data acquisition speed, high signal-to-noise ratio by coaddition of raw data, flexible excitation, reduced complexity of electronic hardware, application of advanced data/spectral analysis algorithms, and realization of many other advantages by the introduction of the pulse Fourier transform method. A practical chemical vapor sensing system is demonstrated experimentally by use of nine frequency-encoded and polymer-coated sensors.     

Detecting and evaluating the signals of wirelessly interrogational passive SAW resonator sensors

The wireless sensing signal of a passive surface acoustic wave (SAW) resonator sensor is the response of the SAW resonator in a passive circuit to wireless radio frequency interrogation. The response is produced only in the case that the interrogation covers the operational frequency band of the resonator. The wireless response is transient and can only be detectable in a proximity after switching off the interrogation. Due to the fact that, while used as a sensor, the resonant frequency of the resonator is related to and varying with the measurand, the interrogation to a passive SAW resonator sensor has to trace and follow the correspondent variation of the frequency band of the device. The energy evaluation of the response is applied to detect the availability of the sensing response and is used as a feedback argument to roughly localize the operational frequency range of the sensor. A modified frequency estimation is employed to estimate the sensing characteristic frequency in the transient wireless sensing signal with a low signal-to-noise ratio. The estimation is used to further adjust the interrogation frequency to follow the frequency variation of the sensor until the response becomes optimal. The evaluation of signal energy along with the statistical quantity of frequency estimation gives a reference for the confidence of the estimated frequency.     

Liquid sensor utilizing a regular phononic crystal with normal incidence of sound

A phononic crystal device is investigated as sensor platform utilizing resonant transmission. Here, we use a phononic crystal plate consisting of a solid matrix and liquidfilled holes. The device is fully immersed into the liquid in such a way that the incidence direction of sound is normal to the plate. A characteristic transmission peak, calculated using finite-difference time-domain (FDTD) and determined with two different experimental setups, has been found to strongly depend on the liquid sound velocity. The peak maximum frequency serves as measure for liquid composition.     

The effect of annealing and gold deposition on the performance of magnetoelastic biosensors

Magnetoelastic materials have a mass-sensitive, characteristic, resonant frequency that make them an ideal choice for application as the platform for a biosensor. The biosensor is formed by immobilizing a bio-molecular recognition element directly onto the surface of the magnetoelastic material. When exposed to the analyte, this bio-molecular recognition element binds the target species (spore or bacteria of interest), thereby increasing the mass and decreasing the resonance frequency of the sensor. This change in characteristic resonance frequency can be determined by monitoring remotely the magnetic flux in response to an applied, time varying, magnetic field with a pick-up coil. However, the environmental stability and bioactivity of the biosensor platform material are very important to performance of the overall biosensor. This research investigates the effects of annealing and deposition of a gold layer on the environmental stability and detection sensitivity of a magnetoelastic biosensor platform. The results show that deposition of a gold layer by sputtering additionally improved bioreactivity while maintaining a balance of environmental stability and detection sensitivity. Two annealing steps in a vacuum oven, one before and one after gold deposition, can effectively increase the magnetoelastic platform's environmental stability, as well as the Q-factor of the resonance signal.     

一种采用激振器激励的扬声器振动部件共振频率测量方法及系统

提出了一种采用激振器激励方式的扬声器振动部件共振频率测量方法及系统。采用激振器作为激励被测部件振动的激励源,并通过加速度传感器实时检测夹具的振动加速度（包括幅度和相位）,以确保被夹具夹持住的被测部件在测量频率范围内上下平稳振动;通过激光位移传感器测量被测部件在不同频率点振动时的振动位移,可得到被测部件振动的频率响应（被测部件振动加速度和夹具振动加速度的比值的频率响应）;根据该频率响应进行计算最后可得到被测部件的共振频率。实验结果表明,实测频率响应的曲线与理论分析相一致,测量结果的可重复性和准确性良好,可测量的振动部件的种类和范围更广。     

基于电磁激励的SOI-MEMS谐振式加速度计的闭环检测系统(英文)

介绍了一种基于电磁激励方式,采用基于绝缘体上硅的微电子机械系统(SOI-MEMS)加工方法制作谐振式加速度计及其闭环控制电路系统.传感器芯片制作采用的是SOI材料(10μm+2μm+290μm),利用MEMS加工工艺制作.当外界z轴方向加速度作用于加速度计时,加速度计的两根"H"型谐振梁因受到弯曲应力而产生谐振频率的漂移,通过检测谐振梁频率的变化标定加速度的大小.电磁激励检测方式有利于加速度计的最终闭环控制.闭环电路控制系统主要由增益放大部分、自动增益控制(AGC)电路缓冲系统和移相器组成.测试结果显示,当有1g重力加速度作用于加速度计,闭环电路可稳定输出检测正弦频率信号58.958 kHz,与开环扫频结果一致.加速度计的"H"型谐振梁空气中检测Q值约为400,灵敏度可达584 Hz/g.     

Contributions of amplitude measurement in QCM sensors

The characteristics of the amplifier and the feedback loop of a quartz crystal series oscillating circuit are investigated. The fact that the change of the vibration amplitude of the quartz crystal is proportional to the change of its motional resistance is derived. The concept of a characteristic damping coefficient is introduced and the behavior of a quartz crystal vibrating in liquids is analyzed. The experiment shows that the effect of mass loading can be distinguished from that of the liquid damping of a quartz crystal microbalance (QCM) sensor in liquids by simultaneously measuring the amplitude and the frequency change     

The Dynamic Response of a Resonant Frequency Tracking System

A study of a resonant frequency tracking system, to be used in measurement systems where the sensing element is a resonant structure is presented. The tracking system was used to lock an oscillator to the resonant frequency of a cavity operating in the X-band. The resonant frequency of the sensor was assumed to be a function of the quantity being measured. A theoretical analysis of the resonant frequency tracking system was done for both linear and nonlinear operations resulting from the properties of the sensor. A model of the tracking system was designed and an analysis of the system response was performed using computer techniques.     

Long-range surface plasmon-enhanced fluorescence spectroscopy biosensor for ultrasensitive detection of E. coli O157:H7

A new biosensor platform for the detection of bacterial pathogens based on long-range surface plasmon-enhanced fluorescence spectroscopy (LRSP-FS) is presented. The resonant excitation of LRSP modes provides an enhanced intensity of the electromagnetic field, which is directly translated to an increased strength of fluorescence signal measured upon the capture of target analyte at the sensor surface. LRSPs originate from a coupling of surface plasmons across a thin metallic film embedded in dielectrics with similar refractive indices. With respect to regular surface plasmon-enhanced fluorescence spectroscopy, the excitation of LRSPs offers the advantage of a larger enhancement of the evanescent field intensity and a micrometer probing depth that is comparable to the size of target bacterial pathogens. The potential of the developed sensor platform is demonstrated in an experiment in which the detection of E. coli O157:H7 was carried out using sandwich immunoassays. The limit of detection below 10 cfu mL(-1) and detection time of 40 min were achieved.     

一种基于光纤F-P腔的石墨烯谐振式压力传感器

谐振式传感器具有良好的重复性、分辨率和稳定性,全光纤谐振式微型传感器则集合了微纳结构与光纤传感特性两者的优点。石墨烯作为近年来发现的一种新型材料,具有良好的热学和力学特性,可以作为谐振式传感器中的敏感元件。本文提出了一种基于光纤F-P结构的石墨烯谐振式压力传感器,其兼具微机械传感器和光纤谐振器的优点,具有较高的谐振频率,在测量压力的实验中展现出良好的性能,压力灵敏度最高可达2. 93Hz/Pa,具有重要的应用价值。