Development of a high-frequency (> 50 mhz) copolymer annular-array, ultrasound transducer

The development of a high frequency (> 50 MHz) annular array ultrasonic transducer is presented. The array was constructed by bonding a 9 microm P(VDF-TrFE) film to a two-sided polyimide flexible circuit with annuli electrodes on the top layer. Each annulus was separated by a 30 microm kerf and had several electroplated microvias that connected to electrode traces on the bottom side of the flex circuit. In order to improve device sensitivity, each element was electrically matched to an impedance magnitude of 50 omega and 0 degrees phase at resonance using a serial inductor and high impedance coaxial cable. The array's performance was evaluated by measuring the electrical impedance, pulse echo response, and cross talk between elements. The average round trip insertion loss was -33.5 dB after compensating for diffractive and attenuative losses. The measured average center frequency and bandwidth for an element was 55 MHz and 47%, respectively. The measured cross talk between adjacent elements remained below -29 dB at the center frequency in water. A vertical wire phantom was imaged using a single focus transmit beamformer and dynamic focusing receive beamformer. This image showed a significant improvement in lateral resolution over a range of 9 mm after the dynamic focusing receive algorithm was applied. These results correlated well with predictions from a Field II simulation. After beamforming, the minimum lateral resolution achieved by the array (-6 dB) was 108 microm at the focus.     

Real-time 3-D ultrasound guidance of interventional devices

We have previously developed 2-D array transducers for many real-time volumetric imaging applications. These applications include transducers operating up to 7 MHz for transthoracic imaging, up to 15 MHz for intracardiac echocardiography (ICE), 5 MHz for transesophageal echocardiography (TEE) and intracranial imaging, and 7 MHz for laparoscopic ultrasound imaging (LUS). Now we have developed a new generation of miniature ring-array transducers integrated into the catheter deployment kits of interventional devices to enable real-time 3-D ultrasound scanning for improved guidance of minimally invasive procedures. We have constructed 3 new ring transducers. The first consists of 54 elements operating at 5 MHz. Typical measured transducer element bandwidth was 25%, and the 50 Ohm round trip insertion loss was -65 dB. Average nearest neighbor cross talk was -23.8 dB. The second is a prototype 108-element transducer operating at 5 MHz. The third is a prototype 108-element ring array with a transducer center frequency of 8.9 MHz and a -6 dB bandwidth of 25%. All transducers were integrated with an 8.5 French catheter sheath of a Cook Medical, Inc. vena cava filter deployment device.     

High-frequency ultrasound annular-array imaging. Part I: array design and fabrication

This is Part I of a series of two papers describing the development of a digital high-frequency, annular-array, ultrasonic imaging system. In this paper, the design and fabrication of a high-frequency annular array as well as its performance will be reported. A six-element, 50 MHz array, which incorporated an acoustic lens to provide an initial focal point, was designed and fabricated. A submicron size grain lead titanate piezoelectric ceramic was used to both reduce lateral coupling and keep the electrical impedance matched close to the 50 ohm receive electronics. The array elements were isolated using laser micromachining to fully separate the annuli, and electrical interconnection was achieved by directly soldering thin wires to the elements. The resulting array attained an average impulse response that exhibited a 43 MHz center frequency, 30% relative bandwidth, and an average insertion loss of 31 dB at 45 MHz. Maximum next-element crosstalk was -27 dB in water.     

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

Backscattering measurement from a single microdroplet

Backscattering measurements for acoustically trapped lipid droplets were undertaken by employing a P[VDF-TrFE] broadband transducer of f-number = 1, with a bandwidth of 112%. The wide bandwidth allowed the transmission of the 45 MHz trapping signal and the 15 MHz sensing signal using the same transducer. Tone bursts at 45 MHz were first transmitted by the transducer to hold a single droplet at the focus (or the center of the trap) and separate it from its neighboring droplets by translating the transducer perpendicularly to the beam axis. Subsequently, 15 MHz probing pulses were sent to the trapped droplet and the backscattered RF echo signal received by the same transducer. The measured beam width at 15 MHz was measured to be 120 μ m. The integrated backscatter (IB) coefficient of an individual droplet was determined within the 6-dB bandwidth of the transmit pulse by normalizing the power spectrum of the RF signal to the reference spectrum obtained from a flat reflector. The mean IB coefficient for droplets with a 64 μ m average diameter (denoted as cluster A) was -107 dB, whereas it was -93 dB for 90-μm droplets (cluster B). The standard deviation was 0.9 dB for each cluster. The experimental values were then compared with those computed with the T-matrix method and a good agreement was found: the difference was as small as 1 dB for both clusters. These results suggest that this approach might be useful as a means for measuring ultrasonic backscattering from a single microparticle, and illustrate the potential of acoustic sensing for cell sorting.     

2-D array for 3-D ultrasound imaging using synthetic aperture techniques

A two-dimensional (2-D) array of 256 X 256 = 65,536 elements, with total area 4 X 4 = 16 cm2, serves as a flexible platform for developing acquisition schemes for 3-D rectilinear ultrasound imaging at 10 MHz using synthetic aperture techniques. This innovative system combines a simplified interconnect scheme and synthetic aperture techniques with a 2-D array for 3-D imaging. A row-column addressing scheme is used to access different elements for different transmit events. This addressing scheme is achieved through a simple interconnect, consisting of one top, one bottom single-layer, flex circuits that, compared to multilayer flex circuits, are simpler to design, cheaper to manufacture, and thinner so their effect on the acoustic response is minimized. We present three designs that prioritize different design objectives: volume acquisiton time, resolution, and sensitivity, while maintaining acceptable figures for the other design objectives. For example, one design overlooks time-acquisition requirements, assumes good noise conditions, and optimizes for resolution, achieving -6 dB and -20 dB beamwidths of less than 0.2 and 0.5 mm, respectively, for an F/2 aperture. Another design can acquire an entire volume in 256 transmit events, with -6 dB and -20 dB beamwidths in the order of 0.4 and 0.8 mm, respectively.     

A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS

As ultrasound imagers become increasingly portable and lower cost, breakthroughs in transducer technology will be needed to provide high-resolution, real-time 3-D imaging while maintaining the affordability needed for portable systems. This paper presents a 32 x 32 ultrasound array prototype, manufactured using a CMUT-in-CMOS approach whereby ultrasonic transducer elements and readout circuits are integrated on a single chip using a standard integrated circuit manufacturing process in a commercial CMOS foundry. Only blanket wet-etch and sealing steps are added to complete the MEMS devices after the CMOS process. This process typically yields better than 99% working elements per array, with less than ±1.5 dB variation in receive sensitivity among the 1024 individually addressable elements. The CMUT pulseecho frequency response is typically centered at 2.1 MHz with a -6 dB fractional bandwidth of 60%, and elements are arranged on a 250 μm hexagonal grid (less than half-wavelength pitch). Multiplexers and CMOS buffers within the array are used to make on-chip routing manageable, reduce the number of physical output leads, and drive the transducer cable. The array has been interfaced to a commercial imager as well as a set of custom transmit and receive electronics, and volumetric images of nylon fishing line targets have been produced.     

Improvements in optical generation of high-frequency ultrasound

The thermoelastic effect in a black polydimethylsiloxane (PDMS) film is used to produce high-frequency, high-intensity ultrasound for applications in water and soft tissue. We show that the optoacoustic transduction efficiency is improved by about 10 dB by decreasing the thickness of the black PDMS film from 25 microm to 11 microm. The center frequency of the generated ultrasound is 60 MHz, with a -6 dB bandwidth of 80%. When a 5 ns laser pulse with energy of 50 microJ is delivered to a spot size of 25 microm, the acoustic pressure 10 mm away from the film surface is about 800 kPa. Furthermore, we demonstrate that the center frequency and bandwidth of the generated ultrasound is mainly determined by the temporal profile of the input optical pulse, and it has the potential to be easily improved to above 100 MHz.     

3-D ultrasound imaging using a forward-looking CMUT ring array for intravascular/intracardiac applications

Forward-viewing ring arrays can enable new applications in intravascular and intracardiac ultrasound. This work presents compelling, full-synthetic, phased-array volumetric images from a forward-viewing capacitive micromachined ultrasonic transducer (CMUT) ring array wire bonded to a custom integrated circuit front end. The CMUT ring array has a diameter of 2 mm and 64 elements each 100 microm x 100 microm in size. In conventional mode, echo signals received from a plane reflector at 5 mm had 70% fractional bandwidth around a center frequency of 8.3 MHz. In collapse mode, 69% fractional bandwidth is measured around 19 MHz. Measured signal-to-noise ratio (SNR) of the echo averaged 16 times was 29 dB for conventional operation and 35 dB for collapse mode. B-scans were generated of a target consisting of steel wires 0.3 mm in diameter to determine resolution performance. The 6 dB axial and lateral resolutions for the B-scan of the wire target are 189 microm and 0.112 radians for 8 MHz, and 78 microm and 0.051 radians for 19 MHz. A reduced firing set suitable for real-time, intravascular applications was generated and shown to produce acceptable images. Rendered three-dimensional (3-D) images of a Palmaz-Schatz stent also are shown, demonstrating that the imaging quality is sufficient for practical applications.     

Development of a real-time, high-frequency ultrasound digital beamformer for high-frequency linear array transducers

A real-time digital beamformer for high-frequency (>20 MHz) linear ultrasonic arrays has been developed. The system can handle up to 64-element linear array transducers and excite 16 channels and receive simultaneously at 100 MHz sampling frequency with 8-bit precision. Radio frequency (RF) signals are digitized, delayed, and summed through a real-time digital beamformer, which is implemented using a field programmable gate array (FPGA). Using fractional delay filters, fine delays as small as 2 ns can be implemented. A frame rate of 30 frames per second is achieved. Wire phantom (20 microm tungsten) images were obtained and -6 dB axial and lateral widths were measured. The results showed that, using a 30 MHz, 48-element array with a pitch of 100 microm produced a -6 dB width of 68 microm in the axial and 370 microm in the lateral direction at 6.4 mm range. Images from an excised rabbit eye sample also were acquired, and fine anatomical structures, such as the cornea and lens, were resolved.     

Fabrication and performance of endoscopic ultrasound radial arrays based on PMN-PT single crystal/epoxy 1-3 composite

In this paper, 0.7Pb(Mg(1/?)Nb(2/?)O?-0.3PbTiO? (PMN-PT) single crystal/epoxy 1/3 composite was used as the active material of the endoscopic ultrasonic radial array transducer, because this composite exhibited ultrahigh electromechanical coupling coefficient (k(t) = 0.81%), very low mechanical quality factor (Q(m) = 11) and relatively low acoustic impedance (Z(t) = 12 MRayls). A 6.91 MHz PMN-PT/epoxy 1/3 composite radial array transducer with 64 elements was tested in a pulseecho response measurement. The -6-dB bandwidth of the composite array transducer was 102%, which was ~30% larger than that of traditional lead zirconate titanate array transducer. The two-way insertion loss was found to be -32.3 dB. The obtained results show that this broadband array transducer is promising for acquiring high-resolution endoscopic ultrasonic images in many clinical applications.     

Finite-element analysis of temperature rise and lesion formation from catheter ultrasound ablation transducers

A model using finite-element analysis (FEA) has been developed to calculate the temperature rise in tissue from intracardiac ultrasound ablation catheters and to predict if this temperature rise is adequate for producing a lesion in the tissue. In the model, acoustic fields are simulated with Field II, and heat transfer is modeled with an FEA program. To validate the model, we compare its results to experimental results from an integrated, real-time three-dimensional (3-D) ultrasound imaging and ultrasound ablation catheter. The ultrasound ablation transducer is a ring transmitting at 10 MHz capable of producing an acoustic intensity of 16 W/cm2. It was used to ablate four lesions in tissue, and temperature rise as a function of time was monitored by embedded thermocouples. The average absolute difference between final temperatures predicted by FEA and those measured is 1.95 +/- 0.72 degrees C. Additionally, model and experimental lesion size are in good agreement. The model then is used to design a new ultrasound catheter with a 7.5 MHz linear phased array for ablation. Eight designs are modeled, and acoustic intensity, temperature rise, and ablation ability are compared.     

Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Frequency shift, design, and fabrication issues have been investigated for the realization of 8 GHz bandpass filters based on AlN thin film bulk acoustic wave resonators. Fabrication includes well-textured AlN thin films on Pt (111) electrodes and SiO/sub 2//AlN Bragg gratings for the solidly mounted resonators. The chosen ladder filter design requires the tuning of the shunt resonators with respect to the series one. For this purpose, mass loading of the shunt resonators with aluminum (Al) and SiO/sub 2/ were studied. Design simulations showed that the channel bandwidth can be doubled by shifting more than the difference of resonance and antiresonance frequency. Bandpass filters at 8 GHz were successfully fabricated with -5.5 dB insertion loss, -26 dB out-of-band rejection, 99 MHz (1.2%) /spl plusmn/0.2 dB channel bandwidth, and 224 MHz (2.8%) 3 dB bandwidth. The group delay variations within any 30 MHz channel inside the channel bandwidth amounts to <0.2 ns. Comparisons with simulation calculations and single resonator characteristics show that each /spl pi/-section includes a parasitic series resistance and inductance.     

一款宽带圆柱阵研究

圆柱阵换能器具有水平全向的优势,已广泛应用在水声探测领域。文章研究了一款宽带圆柱阵,利用匹配层技术拓宽圆柱阵阵元的带宽,通过有限元仿真优化单个换能器阵元带宽、发送电压响应和阻抗等参数。同时通过仿真以阵元错位密集方式形成圆柱阵,对阵元的个数及排列方式进行仿真优化,制作了一款宽带圆柱阵并进行了测量,圆柱阵直径为400 mm,高度为435 mm,圆柱阵的工作频段为20~30 kHz,频带内起伏3 dB,最大发送电压响应为160.5 dB,圆柱阵-3 dB水平波束宽度为360°。     

Fabrication of high frequency spherically shaped ceramictransducers

Difficulty in obtaining well focused efficient ultrasound transducers has limited the development of new high frequency applications of B-mode imaging. This paper describes a method for fabricating high frequency (53 MHz) spherically focused lead zirconate titanate (PZT) transducers. A transducer is fabricated by bonding a malleable backing layer onto a thin plate of PZT and then pressing the plate into a spherically shaped well. The backing layer evenly distributes stresses across the material when it is pressed into the well. Local concentrations of stress which lead to fracture are avoided and the material can be deformed without macroscopic cracking. The characteristics of a 2 mm diameter 53 MHz PZT transducer with a 4 mm focal length are described. A lateral beam width of 68 μm and a 12 dB depth of field of 1.5 mm were obtained. The minimum two-way insertion loss of the system was -25 dB and the 6 dB bandwidth of the pulse echo response was 30%. An image of a resolution phantom and an in vivo skin image illustrate the excellent imaging characteristics of the transducer     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers

Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, the authors have proposed the use of multi-layer 1-3 PZT/epoxy composites to increase both but have encountered significant fabrication challenges. These difficulties include making the bond thickness between the layers extremely small relative to the ultrasound wavelength and aligning the posts of the composite to increase the coupling coefficient. The authors have routinely achieved a bond thickness of less than 5 mum but aligning the posts is more complicated. Finite element (PZFlex; Weidlinger, Assoc., New York, NY and Los Altos, CA) simulations show that the pulse-echo SNR and bandwidth degrade significantly with misalignment of the posts. Alignment of greater than 90% of the post pitch (i.e., tolerance of 10 to 20 mum) is required to obtain significant increases in SNR and bandwidth relative to conventional transducer arrays. This will be a difficult tolerance for large-scale production. Thus, the authors have developed a multi-layer composite hybrid array that will not require post alignment. This structure consists of a layer of 5 MHz 1-3 composite material on top of conventional 5 MHz PZT, which will provide greater SNR relative to conventional composites and increased bandwidth over multi-layer PZT. PZFlex simulations show that for a 2 MHz linear array element, the 2 layer hybrid structure increases the pulse-echo SNR by 7.5 dB over that from a single layer PZT element. Even without a matching layer, an increase in the -6 dB pulse-echo fractional bandwidth from 22% for the PZT element to 35% for the hybrid element was also predicted. Experimentally, in a 32 element array, the authors achieved an increase of 5.2 dB in SNR and an increased -6 dB bandwidth from 23 to 30%. In vitro and in vivo images showed corresponding improvements.     

A miniaturized catheter 2-D array for real-time, 3-D intracardiac echocardiography

The design, fabrication, and characterization of a 112 channel, 5 MHz, two-dimensional (2-D) array transducer constructed on a six layer flexible polyimide interconnect circuit is described. The transducer was mounted in a 7 Fr (2.33 mm outside diameter) catheter for use in real-time intracardiac volumetric imaging. Two transducers were constructed: one with a single silver epoxy matching layer and the other without a matching layer. The center frequency and -6 dB fractional bandwidth of the transducer with a matching layer were 4.9 MHz and 31%, respectively. The 50 omega pitch-catch insertion loss was 80 dB, and the typical interelement crosstalk was -30 dB. The final element yield was greater than 97% for both transducers. The transducers were used to acquire real-time, 3-D images in an in vivo sheep model. We present in vivo images of cardiac anatomy obtained from within the coronary sinus, including the left and right atria, aorta, coronary arteries, and pulmonary veins. We also present images showing the manipulation of a separate electrophysiological catheter into the coronary sinus.     

Intracardiac catheter 2-D arrays on a silicon substrate

The design, fabrication, and characterization of a 7 MHz, two-dimensional (2-D) array transducer built on a silicon substrate is described. The array fits inside a 9-French (2.9 mm O.D.) catheter for use in real-time intracardiac volumetric imaging. The -6 dB fractional bandwidth of the transducer is 30%, the 50 /spl Omega/ pitch-catch insertion loss is 78 dB, and the interelement crosstalk is -25 dB. Realtime volumetric images in phantoms and in-vitro images of a sheep heart have been acquired yielding measured spatial resolution of 2 mm at a depth of 1 cm. The cardiac structures imaged include ventricular chambers, interventricular septum, mitral and tricuspid valves and real-time 3-D rendered volumes of the tricuspid valve in the open and closed position.     

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

Micromachining techniques, in combination with low temperature ceramic composite sol-gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUTs). The processing techniques of low temperature (710 degrees C) composite sol-gel ceramic (sol + ceramic powder) deposition and wet etching were used to deposit and structure 27-microm thick lead zirconate titanate (PZT) films on silicon substrates to produce annular array Tm-pMUTs. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT devices were shown to resonate at approximately 60 MHz in air and 50 MHz in water. From resonance measurements k(t) values ranging between 0.2 and 0.47 have been calculated and shown to depend on the level of porosity within the film. Lower values of kt were observed for films with higher levels of porosity, which was attributed to the relative decrease in the effective piezoelectric coefficient epsilon(33) with respect to stiffness and permittivity as a function of increasing porosity. This paper presents the successful micro-fabrication of a Tm-pMUT device and discusses the optimization of the poling conditions and effect of PZT microstructure on the coupling coefficient k(t). Pulse echo measurements in water, showing a -6 dB center frequency of 53 MHz and 47% -6 dB bandwidth, using a target 15 mm away from the transducer, have been included to demonstrate successful operation of the device. Full analysis of these results will be conducted in later publications.     

A 30-MHz piezo-composite ultrasound array for medical imaging applications

Ultrasound imaging at frequencies above 20 MHz is capable of achieving improved resolution in clinical applications requiring limited penetration depth. High frequency arrays that allow real-time imaging are desired for these applications but are not yet currently available. In this work, a method for fabricating fine-scale 2-2 composites suitable for 30-MHz linear array transducers was successfully demonstrated. High thickness coupling, low mechanical loss, and moderate electrical loss were achieved. This piezo-composite was incorporated into a 30-MHz array that included acoustic matching, an elevation focusing lens, electrical matching, and an air-filled kerf between elements. Bandwidths near 60%, 15-dB insertion loss, and crosstalk less than -30 dB were measured. Images of both a phantom and an ex vivo human eye were acquired using a synthetic aperture reconstruction method, resulting in measured lateral and axial resolutions of approximately 100 μm