氧离子束辅助激光淀积生长ZnO/Si的XPS探究

为了探究ZnO/Si内部化学成分及有关信息,用氧离子束辅助(O+-assisted)脉冲激光淀积(PLD)法在不同实验条件下生长成ZnO/Si(111)样品.利用X射线光电子能谱(XPS)对长成的ZnO/Si异质结构进行了异位测试.通过对O1s峰及其肩状结构进行拟合、分析,得到了原子数密度比n(O)∶n(Zn),进而探究了原子数密度比与生长质量的关系.结果表明,用氧离子束辅助PLD法,可在较低的衬底温度190℃和适当O+束流条件下,生长出正化学比接近于1,且c轴单一取向最佳的ZnO/Si薄膜.用氧离子束辅助PLD淀积法生长ZnO薄膜,可以改善缺氧状况,能提供一个富氧环境.     

氧离子束辅助激光淀积生长ZnO/Si薄膜深度剖析

对于在Si(111)上用氧离子束辅助(O -assisted)脉冲激光淀积(PLD)生长的ZnO薄膜,用X射线光电子能谱(XPS)深度剖析方法对长成的样品进行了异位测试,分析了导致各峰峰位能移的因素;通过异位与原位XPS谱图的比较,指出O -assisted PLD法生成的ZnO薄膜中存在孔隙;指出生长出的ZnO薄膜中含si成分的厚度不超过18 nm;同时探讨了在长成的ZnO/Si上继续生长GaN薄膜的可行性.     

PLD法制备ZnO/Si异质结的I-V特性研究

用脉冲激光沉积法分别在不同电阻率的p型和n型Si( 100)衬底上制备了不掺杂ZnO薄膜,相应制成n-ZnO/p-Si和n-ZnO/n-Si异质结器件.利用X射线衍射和原子力显微镜对ZnO薄膜进行的结构和形貌测试表明,薄膜结晶情况良好,具有高度的c轴择优取向,表面颗粒大小、分布均匀.对器件的I-V特性测试表明,在无光条件下,制备的n-ZnO/p-Si异质结漏电流很低,而n-ZnO/n-Si同型异质结漏电流要稍大一些;随衬底电阻率的增大,上述器件的阈值电压变小;器件在光照下的漏电流明显比无光条件下的要大.     

PLD方法生长ZnO/Si异质外延薄膜的研究

用脉冲激光沉积法在Si(111)衬底上制备了ZnO薄膜。RHEED和XRD测试表明,直接沉积在Si衬底上的ZnO薄膜为多晶薄膜,且薄膜的结晶质量随衬底温度的升高而下降。相比之下,生长在一低温同质缓冲层上的ZnO薄膜则展现出规则的斑点状RHEED图像,说明它们都是外延生长的高质量ZnO薄膜。XRD与室温PL谱分析表明,外延ZnO薄膜的质量随衬底温度的升高得到明显的改善。在650℃生长的样品具有最好的结构和发光特性,其(002)衍射峰的半高宽为0.185°,UV峰的半高宽仅为86meV。     

Zr/Nb薄膜材料的制备及界面结构研究

通过直流磁控溅射法在单晶Si(100)基底上制备了Zr/Nb/Si薄膜材料。X射线衍射(XRD)研究表明Zr薄膜以多晶形式存在,而Nb薄膜则形成了(110)晶面择优生长。薄膜中Zr和Nb晶粒大小分别为14,6 nm。扫描电镜研究表明形成的薄膜表面平整光滑,没有微裂纹存在。扫描俄歇电子能谱及X射线光电子能谱的研究表明,Zr/Nb/Si薄膜样品具有清晰的界面结构。在薄膜表面形成了致密的氧化层物种,而在膜层内部少量氧则以吸附态形式存在。     

6H-SiC单晶表面ZnO薄膜的制备及其结构表征

利用脉冲激光淀积(PLD)技术在6H-SiC单晶衬底上制备了ZnO薄膜. 利用X射线衍射(XRD), 反射式高能电子衍射(RHEED)和同步辐射掠入射X射线衍射(SRGID)φ扫描等实验技术研究了ZnO薄膜的结构. 结果表明:在单晶6H-SiC衬底上制备的ZnO薄膜已经达到单晶水平, 不同入射角的SRGID结果, 显示了ZnO薄膜内部不同深度处a方向的晶格弛豫是不一致的, 从接近衬底界面处到薄膜的中间部分再到薄膜的表面处, a方向的晶格常数分别为0.3264、0.3272和0.3223nm. 通过计算得到ZnO薄膜的泊松比为0.504, ZnO薄膜与单晶6H-SiC衬底在平行于衬底表面a轴方向的实际晶格失配度为5.84%.     

脉冲激光沉积法在Si(111)衬底上生长高c轴取向LiNbO3薄膜

在氧压20Pa,衬底温度600℃,靶材与衬底距离4cm的最优化条件下,利用脉冲激光沉积(PLD)技术首次在无诱导电压和任何缓冲层的情况下,在单晶Si(111)衬底上生长具有优良结晶品质和高c轴取向的LiNbO3晶体薄膜.利用X射线衍射(XRD)、扫描电子显微镜(SEM)和原子力显微镜(AFM)对LiNbO3薄膜的结晶品质,择优取向性以及表面形貌进行了系统的分析.结果表明生长出了具有优异晶体质量的c轴取向LiNbO3薄膜,表面光滑平整且无裂纹产生,表面粗糙度约4.8nm,有利于硅基光电子器件的制备和利用.     

Effect of Annealing on the Optical Properties of GaN Films Grown by Pulsed Laser Deposition

In the present study,gallium nitride thin films were grown by using pulsed laser deposition.After the growth samples were annealed at 400 and 600℃in the nitrogen atmosphere.Surface morphology of the as-grown and annealed samples was observed by atomic force microscopy.Post-growth annealing results in an improved surface roughness of the films.Chemical analysis of the samples was performed by X-ray photoelectron spectroscopy.Stoichiometric gallium nitride thin films were obtained for the samples annealed at 600℃.Optical measurements of the samples were performed to measure the band gap and optical constants of the films.Effect of annealing on the band gap and optical constants of the films was studied.     

The fabrication of ZnO/MgO multilayer films on Si (1 1 1) by PLD

ZnO/MgO multilayer thin films were fabricated on Si (1 1 1) substrates by pulsed laser deposition (PLD) at 600 °C for 30 min. The oxygen pressure and laser repetition were kept at 20 Pa and 5 Hz, respectively. The PL measurements suggest that the UV peaks have a blue excursion of 4 nm from 379 to 375 nm, compared with ZnO films. The XRD analysis indicates that the position of ZnO (0 0 2) peaks from ZnO/MgO multilayer films have about 0.12° shift from 34.421°, that of ZnO films, to 34.545°. From TEM images, the thickness of the films is about 200 nm. By HRTEM and SAD images, the crystal phases and the polycrystalline state were observed in the multilayer films.     

PLD法生长高质量 ZnO薄膜及其光电导特性研究

采用脉冲激光沉积（PLD）法在单晶Si（100）衬底上生长ZnO薄膜，以X射线衍射（XRD）和场发射扫描电镜（SEM）等手段分析了所得ZnO薄膜的晶体结构和微观形貌．结果表明，随着衬底温度和薄膜生长时氧分压的增加，ZnO薄膜的晶体结构和化学计量比得到显著改善．优化工艺（700℃，20Pa）下生长的ZnO薄膜呈c轴高度择优取向，柱状晶垂直衬底表面生长，结构致密均匀．以不同暗电阻的ZnO薄膜为材料，利用剥离（1ift-off）技术制备了MSM结构ZnO光电导型紫外探测器．紫外光照射前后的I-V特性测试表明ZnO薄膜产生非常明显的光电导现象，分析了其光电响应机理．     

Growth and characterization of nitrogen-doped TiO2 thin films prepared by reactive pulsed laser deposition

Nitrogen-doped titanium dioxide (TiO₂) thin films were grown on (001) SiO₂ substrates by reactive pulsed laser deposition. A KrF* excimer laser source (λ = 248 nm, τ_FWHM ≅ 10 ns, ν = 10 Hz) was used for the irradiations of pressed powder targets composed by both anatase and rutile phase TiO₂. The experiments were performed in a controlled reactive atmosphere consisting of oxygen or mixtures of oxygen and nitrogen gases. The obtained thin film crystal structure was investigated by X-ray diffraction, while their chemical composition as well as chemical bonding states between the elements were studied by X-ray photoelectron spectroscopy. An interrelation was found between nitrogen concentration, crystalline structure, bonding states between the elements, and the formation of titanium oxinitride compounds. Moreover, as a result of the nitrogen incorporation in the films a continuous red-shift of the optical absorption edge accompanied by absorption in the visible spectral range between 400 and 500 nm wavelength was observed.     

Low temperature annealing effects on the structure and optical properties of ZnO films grown by pulsed laser deposition

ZnO thin films were deposited on glass substrates at room temperature (RT) ∼500 °C by pulsed laser deposition (PLD) technique and then were annealed at 150-450 °C in air. The effects of annealing temperature on the microstructure and optical properties of the thin films deposited at each substrate temperature were investigated by XRD, SEM, transmittance spectra, and photoluminescence (PL). The results showed that the c-axis orientation of ZnO thin films was not destroyed by annealing treatments; the grain size increased and stress relaxed for the films deposited at 200-500 °C, and thin films densified for the films deposited at RT with increasing annealing temperature. The transmittance spectra indicated that E_g of thin films showed a decreased trend with annealing temperature. From the PL measurements, there was a general trend, that is UV emission enhanced with lower annealing temperature and disappeared at higher annealing temperature for the films deposited at 200-500 °C; no UV emission was observed for the films deposited at RT regardless of annealing treatment. Improvement of grain size and stoichiometric ratio with annealing temperature can be attributed to the enhancement of UV emission, but the adsorbed oxygen species on the surface and grain boundary of films are thought to contribute the annihilation of UV emission. It seems that annealing at lower temperature in air is an effective method to improve the UV emission for thin films deposited on glass substrate at substrate temperature above RT.     

Comparison of ZnO Films Grown on before- and after-vapor Transport Equilibration （VTE） LiAlO2 Substrates by Pulsed Laser Deposition （PLD）

About φ45 mm LiAlO2 single crystal was grown by Czochralski （Cz） technique. However, the full-width at half-maximum （FWHM） value was high to 116.9 arcsec. After three vapor transport equilibration （VTE） processes, we can obtain high-quality LiAlO2 slice with the FWHM value of 44.2 arcsec. ZnO films were fabricated on as-grown slices and after-VTE ones by pulsed laser deposition （PLD）. It was found that ZnO films on the two slices have similar crystallinity, optical transmittance and optical band gap at room temperature. These results not only show that LAO substrate is suitable for ZnO growth, but also prove that the crystal quality of LAO substrate slightly affects the structural and optical properties of ZnO film.     

Effect of growth temperature on the structural and transport properties of magnetite thin films prepared by pulse laser deposition on single crystal Si substrate

Magnetite (Fe₃O₄) thin films are prepared by pulsed laser deposition using an α-Fe₂O₃ target on silicon (111) substrate in the substrate temperature range of 350 °C to 550 °C. X-ray diffraction (XRD) measurement shows that the film deposited at 450 °C is a single phase Fe₃O₄ film oriented along [111] direction. However, the film grown at 350 °C reveals mixed oxide phases (FeO and Fe₃O₄), while the film deposited at 550 °C is a polycrystalline Fe₃O₄. X-ray photoelectron spectroscopy study confirms the XRD findings. Raman measurements reveal identical spectra for all the films deposited at different substrate temperatures. We observe abrupt increase in the resistivity behavior of all the films around Verwey transition temperature (T_V) (125 K-120 K) though the transition is broader in the film deposited at 350 °C. We observe that the optimized temperature for the growth of Fe₃O₄ film on Si is 450 °C. The electrical transport behavior follows Shklovskii and Efros variable range hopping type conduction mechanism below T_V for the film deposited at 450 °C possibly due to the granular growth of the film.