Parametric characterization of piezoelectric valveless micropump

Experimental investigations are performed to determine the influence of electrical excitation and geometrical parameters on the performance of piezoelectric valveless micropumps fabricated on printed circuit board substrates. Strain gauges and shunt resistor are used in conjunction with a data acquisition system to form an effective transducer, capable of providing magnitude and phase response information pertaining to fluid–structure interaction. Effect of conical diffuser geometry on the displacement response and pressure flow characteristics are studied. With suitable variations in the design of the diffuser element and input excitation parameters, the ability of the valveless micropump can be extended to include forward, reversed and bidirectional flow features. The characteristic signatures of single and two peaks in flowrate or pressure data are captured in the displacement phase response. System identification approach is proposed to model and predict the performance of valveless micropumps.     

A PMMA valveless micropump using electromagnetic actuation

We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection (~200 m) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 µl/min and backpressures of up to 12 mbar. We study the frequency-dependent flow rate and determine a resonance frequency of 12 and 200 Hz for pumping of water and air, respectively. Our experiments show that the models for valveless micropumps of A. Olsson et al. (J Micromech Microeng 9:34, 1999) and L.S. Pan et al. (J Micromech Microeng 13:390, 2003) correctly predict the resonance frequency, although additional modeling of losses is necessary.     

串联压电微泵特性研究

介绍了一种压电驱动的串联无阀微泵.基于收缩管/扩展管整流特性的分析,建立了微泵输出特性的表达公式.采用有限元仿真软件ANSYS对微泵内流体的流动过成进行了数值模拟,结果显示,在相同的驱动条件下,串联无阀微泵的工作性能优于单腔无阀微泵的工作性能.泵流量随着驱动电压的增加而增加.当固定的驱动电压下,存在最优的压电层厚度使得泵流量最大.研究结果为串联微泵的优化设计提供了依据.     

一种低成本压电无阀微泵的研制

提出了一种低成本的由压电材料驱动的平面扩张/收缩管无阀微泵的制作工艺.通过数值模拟确定了扩张/收缩管扩张角的最优值,在此基础上,采用光刻和湿法刻蚀工艺,刻蚀了300μm深的泵腔基片和100 μm深的盖片;使用等离子体清洗技术将其与PDMS薄膜键合,完成了可以实现单向泵送的压电无阀微泵样机制作.研究了该压电无阀微泵样机的...     

Numerical analysis of high frequency pulsating flows through a diffuser-nozzle element in valveless acoustic micropumps

The concept of a valveless acoustic micropump was investigated. Two-dimensional, time-varying, axisymmetric, incompressible viscous flows through a planar diffuser-nozzle element were analyzed for applications in valveless acoustic micropumps. The diffuser divergence half-angles (θ), and the maximum pressure amplitudes (P) were independently varied. The inflow was periodic and the excitation frequency (f) was varied over the range 10 kHz ≤  f ≤  30 kHz. The net time-averaged volume flux and the rectification capability of the diffuser were found as functions of θ, f, and P. The phase difference between pressure and velocity waveforms, the life time and the size of large scale flow recirculation regions inside the microdiffuser, and energy losses were found to be strongly frequency dependent.     

A study of PZT valveless micropump with asymmetric obstacles

The results of a study on a new type of PZT valveless micropump with asymmetric obstacles are presented in this paper. The valveless micropump was made through a MEMS fabrication process by using simply only one photo mask. Asymmetric obstacles are used for the flow directing device instead of the diffuser/nozzle elements used in previous studies. In this study, numerical simulations were also carried out to evaluate the design and the performance of the new micropump. The main feature of the present micropump is that it has a uniform cross-section area across the micro-channel, which gives many advantages. The differential pressure head and the pumping flow rate can be adjusted easily by using obstacles of different shapes and changing the PZT operating frequency without changing the dimensions of the micro-channel. In this experiment, the performance of the micropump was evaluated by measuring the pressure head difference and the flow rate as the input voltage ranged from 20 to 40 V, a range much lower than those in previous studies. The pumping pressure can reach a maximum of 1.2 kPa, and the maximum net volume flow rate is 156 μl/min. These test data indicate that this micropump fulfills the demands for most micro-fluidic systems. Moreover, the present device can be easily applied to complex systems with combinations of several pumps and microchannels in the future.     

Study of an innovative one-sided actuating piezoelectric valveless micropump with a secondary chamber

Previous studies have indicated that a one-sided actuating piezoelectric micropump (OAPMP) combined with two valves may enhance the liquid flow rate to 4.1 ml/s and make it possible to reach the maximum pump head of 9807 Pa in a limited space. In this study, an innovative one-sided actuating piezoelectric valveless micropump (OAPMP-valveless) has been developed to actuate fluid at a higher flow rate in one direction by adding a secondary chamber. The secondary chamber plays a key role in the application of the valveless micropump: the flow rate of the pump can reach 0.989 ml/s by adding a secondary chamber. The maximum pump head is 1522.5 Pa when using the 0.3 mm-thick secondary diaphragm and the 0.5 mm-thick primary diaphragm. In addition, if a nozzle/diffuser element is applied to the OAPMP-valveless with a secondary chamber, the flow rate can be further improved to 1.183 ml/s at a frequency of 150 Hz. A three-dimensional numerical model of the valveless micropump has been built to compare the measured results with the simulated results.     

Flow characterization of valveless micropump using driving equivalent moment: theory and experiments

A valveless micropump, actuated by a PZT disk bonded to a glass plate, can generate positive flow. In order to estimate flow characteristics of micropumps, it is necessary to theoretically analyze the radial expansion (more specifically, the equivalent moment) of the PZT disk according to the voltage input. Using the equivalent moment, deflection equations are derived for the tri-layer disk (PZT, epoxy bonder and glass plate) and are confirmed to match well with experiments. The flow rate of the valveless micropump is also theoretically and experimentally investigated in terms of input voltage and oscillation frequency. The flow increased at a rate of 0.1 μL/min/V, and the maximum flow rate was obtained at the driving frequency of around 225 Hz.     

Unsteady flow behaviors in an obstacle-type valveless micropump by micro-PIV

In this paper, a PZT micropump excited by amplified squarewave signals with various frequencies was used to study the transient flow behaviors in an obstacle-type valveless micropump. A micro-particle-image-velocimetry (micro-PIV) with an external trigger was developed to obtain flow fields at the outlet and around the obstacle with various phases in a cycle. In comparison with previous studies on the pump performance, such as pump pressure and volume flow rate, more detailed information about the pump was obtained. The velocity profiles and periodic sectional mean velocities exhibited the unsteady flow nature. The total net flow generation efficiency per cycle was obtained experimentally by integrating the phase-dependent velocities. The flow recirculation around the obstacle was observed and quantified to investigate the influence on the pump performance. The duration, circulation, and the size of the recirculation regions indicated that this flow behavior could enhance the flow-directing capability. These results are very useful for the design and improvement of obstacle-type valveless micropumps.     

MEMS-based micropumps in drug delivery and biomedical applications

This paper briefly overviews progress on the development of MEMS-based micropumps and their applications in drug delivery and other biomedical applications such as micrototal analysis systems (μTAS) or lab-on-a-chip and point of care testing systems (POCT). The focus of the review is to present key features of micropumps such as actuation methods, working principles, construction, fabrication methods, performance parameters and their medical applications. Micropumps have been categorized as mechanical or non-mechanical based on the method by which actuation energy is obtained to drive fluid flow. The survey attempts to provide a comprehensive reference for researchers working on design and development of MEMS-based micropumps and a source for those outside the field who wish to select the best available micropump for a specific drug delivery or biomedical application. Micropumps for transdermal insulin delivery, artificial sphincter prosthesis, antithrombogenic micropumps for blood transportation, micropump for injection of glucose for diabetes patients and administration of neurotransmitters to neurons and micropumps for chemical and biological sensing have been reported. Various performance parameters such as flow rate, pressure generated and size of the micropump have been compared to facilitate selection of appropriate micropump for a particular application. Electrowetting, electrochemical and ion conductive polymer film (ICPF) actuator micropumps appear to be the most promising ones which provide adequate flow rates at very low applied voltage. Electroosmotic micropumps consume high voltages but exhibit high pressures and are intended for applications where compactness in terms of small size is required along with high-pressure generation. Bimetallic and electrostatic micropumps are smaller in size but exhibit high self-pumping frequency and further research on their design could improve their performance. Micropumps based on piezoelectric actuation require relatively high-applied voltage but exhibit high flow rates and have grown to be the dominant type of micropumps in drug delivery systems and other biomedical applications. Although a lot of progress has been made in micropump research and performance of micropumps has been continuously increasing, there is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future.     

Transport of drug particles in micropumps through novel actuation

Micropumps with various types of actuations have been used in lab-on-a-chip devices. In order to control the delivery of drug particles both in space and time and avoid clogging, other types of actuation mechanisms may be needed. In this study, a valveless micropump with novel actuation is proposed to transport particles for biomedical and environmental applications. The transport of drug particles through the designed valveless micropump is carried out through computational fluid dynamics combined with discrete particle transport methods. After convergence studies, the effects of actuation frequency, particle size and the resident times on the particle transport are investigated. Interestingly, both the actuation frequency and particle size have a strong effect in terms of resident times and the spatial distribution of the transported particles through the designed micropump. Based on the results obtained, the relationship between actuation frequency, fluid flow, and particle transport through the designed micropump is presented. The computational analysis presented demonstrates that it is possible to optimize the proposed valveless micropump design for specific delivery of drug particles for separation and sorting applications.     

Optimization design of multi-material micropump using finite element method

This paper presents a micropump fabricated from low cost materials with specific goal of cost reduction. The micropump does not require any valve flap and comprises one plastic pump polyether–ether–ketone (PEEK) body, one metal diaphragm, and three piezoelectric ceramics to form piezoelectrically actuated diaphragm valves. The valve actuation simplifies micropump structural designs and assembly processes to make the pump attractive for low cost bio-medical drug delivery applications. A detailed optimization design of geometric parameters of the piezoelectrically actuated diaphragm is undertaken by use of 3D finite element method (FEM) to maximize piezoelectric actuation capability and ensure actuation reliability. An optimized geometric dimensional design: the ratio of thicknesses between the piezoelectric ceramics and the metal diaphragm, and the lateral dimension of the piezoelectric ceramic, is obtained through simulations. Based on the optimized design, a good agreement has been reached between simulated and measured strokes of the micropumps. The tested results show that the micropump has a high pump flow rate for air, up to 39 ml/min, and for water, up to 1.8 ml/min, and is capable of ensuring diaphragm’s maximum stress and strain is within material strength for reliable work.     

Steady and unsteady flow analysis in microdiffusers and micropumps: a critical review

In recent research, there has been a growing interest in the analysis of flow through microdiffusers and micropumps in order to characterize and optimize the performance of these devices. In this review, the recent advances in the numerical and experimental analysis of the steady and pulsating flows through microdiffusers and valveless micropumps are surveyed. The differences between the performance of microdiffusers and micropumps in steady and unsteady flow regimes are described. Qualitative and quantitative discussions of the effects of different design parameters on the performance of microdiffusers and valveless micropumps in both steady and unsteady flow regimes along with the contradictory results reported in the literature in this regard are provided. In addition, a summary of the latest micropump technologies along with the advantages and disadvantages of each mechanism with the emphasis on the innovative and less-reviewed micropumps are presented. Two important types of fixed microvalves, as part of valveless micropumps are described in details. Experimental flow visualization of steady and pulsating flows through microdiffusers and micropumps as a useful tool for better understanding the underlying micro-fluid dynamics is discussed. The present review reveals that there are many possible areas of research in the field of steady and unsteady flows through microdiffusers and micropumps in order to understand the effects of all important design parameters on the performance of these devices.     

磁力驱动微泵设计及优化

为提高收缩/扩散管无阀微泵的性能,设计了磁力驱动式无阀微泵,并利用ANSYS软件对微泵的整流部件收缩/扩散管和单腔微泵整体结构进行流体仿真,得到了微泵的结构优化参数.仿真和实验结果表明,流量随着管长、最小宽度、扩张角、泵腔半径的增大存在极大值.磁驱动微泵的流量在驱动电压12 V、驱动频率为25 Hz时达到最大值.     

Valveless micropump with acoustically featured pumping chamber

This article presents a new design of a valveless micropump. The pump consists of a nozzle-shaped actuation chamber with acoustic resonator profile, which functions as both pumping chamber and flow rectification structure. The pump is fabricated by lamination of layers made of polymethyl-methacrylate (PMMA) and dry adhesives, and is driven by a piezoelectric disk. The performance of the pump has been studied by both experimental characterization and numerical simulations. Both the experimental and numerical results show that the pump works well at low frequencies of 20–100 Hz to produce relatively high backpressures and flowrates. Moreover, the numerical simulations show that in the pumping frequency range, the flow patterns inside the chamber are found to be asymmetric in one pumping cycle so as to create a net flowrate, while outside the pumping frequency range, the flow patterns become symmetric in the pumping cycle. The pumping frequency can be shifted by modifying the pump configuration and dimensions. The pump is suitable for microfluidic integrations.     

A novel thermo-pneumatic peristaltic micropump with low temperature elevation on working fluid

This work presents a novel thermo-pneumatic peristaltic micropump with low temperature elevation on working fluid. The proposed device, which consists of two separate zones for air-heating and fluid-squeezing, is realized by using micromachining techniques. Also, the device can be operated by using a small and simple actuation circuitry with low applied voltages. Under similar operational conditions, the proposed micropump shows similar fluid-pumping performance when compared with the conventional design of thermo-pneumatic micropumps. However, for the proposed design, the temperature elevation on the fluid-pumping area is as small as about 2.0 K, which is less than 8% of that generated by the conventional design. Furthermore, by applying higher voltages, larger flow rate can be achieved with relatively small increase in temperature elevation. Due to low temperature elevation on working fluid, the proposed device is suitable for the applications such as DNA chips or protein chips. In addition, because of its small size and simple actuation scheme, potentially the proposed device can be integrated into the devices for point-of-care applications.     

An Electrolysis-Bubble-Actuated Micropump Based on the Roughness Gradient Design of Hydrophobic Surface

A novel electrolysis-bubble-actuated micropump based on the roughness gradient design in the microchannel is reported in this paper. This micropump is implemented by taking advantage of both the electrolysis actuation and the surface tension effect. The surface tension effect is controlled via the periodic generation of electrolytic bubbles and the roughness gradient design of microchannel surface, which results in the specified variation of liquid contact angle along the microchannel. Our proposed micropump could resolve the disadvantages that exist in the early reported micropumps, such as the complicated time-sequence power control, the need of long nozzle-diffuser structure, and the choking/sticking phenomena of electrolytic bubbles in a microchannel. Due to the features of large actuation force, low-power consumption, and room temperature operation, our micropump is suitable for the development of low-power consumption and compact micropumps for various applications. Experimental results show that the liquid displacement and the pumping rate could be easily and accurately controlled by adjusting the amplitude and frequency of the applied voltage. With the applied voltage of 15 V at 4.5 Hz, a maximum pumping rate of 114 nl/min is achieved for one of our micropump designs with a microchannel of 100 x 20 mum. In this paper, we report the theoretical analysis, design, micromachining process, operating principles, characterization, and experimental demonstration of these micropumps.     

An experimental and numerical investigation into the effects of the PZT actuator shape in polymethylmethacrylate (PMMA) peristaltic micropumps

Utilizing a solvent-assisted bonding process, two diffuser-type polymethylmethacrylate (PMMA) peristaltic micropumps are fabricated with a linear array of circular microchambers with a depth and diameter of 15 m and 7 mm, respectively, actuated using either square or circular PZT actuators. Experimental trials are performed to characterize the performance of the two micropumps under driving frequencies ranging from 80 to 150 Vpp and actuation frequencies in the range of 10 Hz to 1 kHz. The results reveal that the micropump with square PZT actuators generates a maximum pumping rate and back pressure of 217 l/min and 9.2 kPa, respectively, while the micropump with circular actuators generates a maximum flow rate of 131 l/min and a back pressure of 2.7 kPa. ANSYS finite element simulations demonstrate two events. First, given an equivalent surface area, the circular actuators undergo a greater displacement than the square actuators under given actuation conditions. In other words, the circular actuator design is more efficient to represent a higher ratio of the displacement to the actuation area (d/A). However, the circular actuators with the surface area of 38.47 mm² are smaller than the square actuators (49 mm²). In addition, it is inferred that the relatively poorer performance of the circular actuators is due in part to thermal damage of the PZT patches during their removal from the bulk PZT chip using a laser cutting device in the pump fabrication process. Secondly, when the shape of the effective working area for the actuation is rectangular which is usual in a MEMS design, the rectangular actuator with length of 7 mm has significantly higher displacement (0.71 m) than that of the circular actuator with diameter of 7 mm (0.396 m). Consequently, a rectangular actuator design presents a more practical solution for higher performance of micro-actuators.     

Study on a piezoelectric micropump for the controlled drug delivery system

We present the design of a new controlled drug delivery system potential for in vitro injection of diabetics. The system incorporates some integrated circuit units and microelectromechanical system devices, such as micropump, microneedle array and microsensor. Its goal is to achieve safer and more effective drug delivery. Moreover, a valveless micropump excited by the piezoelectric actuator is designed for the drug delivery system, and a simple fabrication process is proposed. A dynamic model is developed for the valveless micropump based upon the mass conservation. To characterize the micropump, a complete electro-solid-fluid coupling model, including the diffuser/nozzle element and the piezoelectric actuator, is built using the ANSYS software. The simulation results show that the performance of micropump is in direct proportion to the stroke volume of the pump membrane and there is an optimal thickness of the piezoelectric membrane under the 500 V/mm electric field. Based on this simulation model, the effects of several important parameters such as excitation voltage, excitation frequency, pump membrane dimension, piezoelectric membrane dimension and mechanical properties on the characteristics of valveless micropump have been investigated.