Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform

Micro-nano fusion gas sensors integrating two-beam micro-hotplatform with nanostructured porous film were fabricated in this study. The micro-hotplatform (MHP) was manufactured using standard micro-electro-mechanical systems technology in wafer runs. Based on a colloidal crystal template method, highly ordered porous tin dioxide films were in situ grown on the MHP. The as-fabricated sensors achieved the highest response at 250 °C with power consumption only 24 mW. Due to the low thermal capacity and ordered porous thin films of the sensor, the response time was about 2 s. The sensors are sensitive to ethanol in a large range from 0.1 to 250 ppm. The developed sensor here with high performance is an excellent candidate which can be incorporated into portable devices for alcohol detection such as breath analyzers.

     

Using a PEDOT:PSS modified electrode for detecting nitric oxide gas

PEDOT:PSS thick films, prepared by the drop-coated method, were used in this study for sensing nitric oxide (NO) gas. The thickness of PEDOT-PSS film was controlled by dropping different volumes of PEDOT-PSS solution to improve the response of PEDOT-PSS film. Due to its porous structure, the thicker the PEDOT-PSS film is, the higher the noticeable surface area. Thus, a larger response is found. However, since the concentration of NO gas used was low (10 ppm), the effect of the surface area was not noticeable when the thickness of the film was greater than 5 μm. In the range of 2.5–10 ppm NO, the relationship between the response of the PEDOT-PSS film and the NO concentration was linear. The limit of detection (S/N = 3), response time (t₉₅), and recovery time (t₉₅) were about 350 ppb, 527 s, and 1780 s, respectively. The response of PEDOT-PSS film to 10 ppm NO gas was dramatically affected by the presence of either O₂ or CO. The standard deviation, with respect to the sensitivity of the NO gas sensor based on PEDOT:PSS film, was 2.2%. The sensitivity of the sensor remained at about 74.5% that of a fresh one.     

Development of a continuous injection direct rolling imprint system for microstructure thin-plate

A prototype of a continuous injection direct rolling (CIDR) imprint system was developed and applied to CIDR tests to evaluate its feasibility for the large-area replication of an optical micro device. The developed system adopts the theories of injection compression and thermal imprinting and presents the capacity to fabricate a 200 mm-wide and over 10 m-long PMMA plate and to replicate ultra-precision structures on its surface at a rolling speed range of 1.1–11.5 mm/s. Under the given CIDR conditions (injection temperature, 280 °C; injection pressure, 6 MPa; rolling force, 13 MPa; roller temperature, 85 °C), complete fabricating of a 0.7 mm-thick Polymethyl methacrylate (PMMA) plate with 17.3 μm-deep and 35 μm-wide V-groove microstructures was achieved at a rolling speed of 3.4 mm/s. Finally, a light guide plate for a backlight panel was fabricated by CIDR. The light transmittance of this plate reached 90.8 %, the maximum birefringence was ~99 nm and its average haze was 0.51 %.

     

A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

This present work reports on the study of controllable aluminium doped zinc oxide (AZO) patterning by chemical etching for MEMS application. The AZO thin film was prepared by RF magnetron sputtering as it is capable of producing uniform thin film at high deposition rates. X-Ray diffraction (XRD) and atomic force microscopy (AFM) characterization were done to characterize AZO thin film. The sputtered AZO thin film shows c-axis (002) orientation, low surface roughness and high crystalline quality. To pattern AZO thin film for MEMS application, wet etching was chosen due to its ease of processing with few controlling parameters. Four etching solutions were used namely: 10 % Nitric acid, 10 % Phosphoric acid, 10 % Acetic acid and Molybdenum etch solutions. For the first time, chemical etching using Molybdenum etch that consist of a mixture of CH₃COOH, HNO₃ and H₃PO₄ was characterized and reported. The effect of these acidic solutions on the undercut etching, vertical and lateral etch rate were studied. The etched AZO were characterized by scanning electron microscopy (SEM) and stylus profilometer. The investigations showed that the Molybdenum etch has the lowest undercut etching of 7.11 µm, and is highly effective in terms of lateral and vertical etching with an etch ratio of 1.30. Successful fine patterning of AZO thin films was demonstrated at device level on a surface acoustic wave resonator fabricated in 0.35 μm CMOS technology. The AZO thin film acts as the piezoelectric thin film for acoustic wave generation. Patterning of the AZO thin film is necessary for access to measurement probe pads. The working acoustic resonator showed resonance peak at 1.044 GHz at 45.28 dB insertion loss indicating that the proposed Molybdenum etch method does not adversely affect the device’s operating characteristics.

     

Thick film sensors based on laccases from different sources immobilized in polyaniline matrix

Thick film electrode based biosensors containing Trametes versicolor (TvL) and Aspergillus niger (AnL) laccases and Agaricus bisporus tissues (AbT) were developed for the determination of phenolic compounds and the measurement was based on oxygen consumption in relation to analyte oxidation. The electrodeposited organic polymer; polyaniline was used as a matrix for the immobilization in the preparation of thick film sensors. The systems were calibrated for different phenolic substances. A linearity was obtained in concentration range between 0.4 and 6.0 μM phenol, 0.2 and 1.0 μM catechol, 2.0 and 20.0 μM l-DOPA for TvL based biosensor; for AnL based enzyme electrode 0.4 and 4.0 μM phenol, 0.4 and 15 μM catechol, 0.4 and 6.0 μM l-DOPA; for AbT electrode 1.0 and 10 μM phenol, 0.4 and 1.6 μM catechol, 1.0 and 10 μM l-DOPA, respectively, in the response time of 300 s. Furthermore, as well as sample application and accuracy, optimum pH, temperature and thermal stabilities of the proposed systems were also detected.     

Design and optimization of MEMS based piezoelectric actuator for drug delivery systems

In this paper, piezoelectric principle based an actuator is design for a micropump, which is suitable for drug delivery systems. The natural frequency and stress analysis have been performed to determine the reliability of the device in terms of minimum safety factor. We have observed the uniform deflections of the actuators by varying the thicknesses of the piezoelectric layer of the actuator. The design of the actuators is considered in circular and rectangular geometry. The materials are selected appropriately such that the component is biocompatible and can be used in biomedical applications. Among the various considerations made on dimensions and geometry, it is observed that the circular piezoelectric actuator undergoes a high displacement of 2950 μm at an infinitesimal thickness of 0.1 μm. At minimum safety factor of one, the maximum stress and voltage the actuator can hold is 596 GPa and 8500 V respectively.

     

A thermal-calorimetric gas flow meter with improved isolating feature

This paper presents design and characterization of a novel thermal-calorimetric flow-meter using suspended-cantilever-structure. There is an air gap between the heater and each individual thermistor providing a good thermal isolation. Due to the suspended-structure which consists of three cantilevers, the thermal convection effect is present on both sides of the active area. Also the velocity boundary layer thickness of the cantilever is much less than closed-membrane one. This characteristic enhances the sensitivity of sensor. The simulation results indicate that the average temperature difference between upstream and downstream thermistors are 36.5 and 1.04 K for flow rate of 1 m/s and the worst case of 0.1 m/s respectively. This solution significantly improves the sensitivity compared to the closed-membrane-structures. The maximum temperature difference causes 94 mV at the output of Wheatstone bridge with 3 V of voltage supply. The calculated and simulated results show that the maximum power consumption of sensor is 4.7 mW at the maximum flow velocity of 1 m/s. The operational range of the designed flow meter is from 0 to 1 m/s. The features of the device are analytically evaluated and simulated under various conditions.

     

Catheter sensor system for in-situ breathing and optical imaging measurements at airway in inside of lung

A catheter sensor system composed of a tube flow sensor with a medical basket forceps and an optical fiberscope was systemized for in-situ measurements in the airway in the lung system. The tube flow sensor was produced by assembling the sensor film containing two heaters onto the tube surface, and the basket forceps was installed into the inside space of the tube sensor. The assembled tube flow sensor with the basket forceps was inserted into the tube and was fixed at the center of the tube by expanding the basket. The flow detection characteristics of the tube flow sensor were experimentally evaluated. A calibration equation based on King’s law was derived from the sensor output vs. flow velocity curve, and a sufficiently short response time of 60 ms was obtained for the breathing measurements in a rabbit and a person. Finally, the tube flow sensor with the basket forceps and the optical fiberscope was systemized into a single tube with the diameter of 5.0 mm for in-situ measurements in the airway. The developed system successfully detected both a breathing airflow waveform and an optical image inside the airway in the rabbit.

     

Synthesis and performance evaluation of thin film PPy-PVDF multilayer electroactive polymer actuators

Bending-type microactuators less than 1 mm in length and comprising of two polypyrrole (PPy) layers separated by polyvinylidene fluoride (PVDF) membrane have previously been fabricated and was shown to operate both in air and aqueous media. The main limiting factor to increase the bending angle and to further miniaturise these actuators was the thickness of the commercially-available PVDF membrane used (～110 μm). In this study, we have synthesised a porous PVDF thin film with a thickness of 32 μm using a spin coating technique, and electrochemically deposited PPy layers on both sides of this thin film to make ultra thin film polymer actuators. The electromechanical and electrochemical properties are investigated and compared with those of the thicker actuator system using the commercially-available PVDF and under identical conditions. The thin film shows very promising performance compared to its thicker counterpart.     

Design optimization of capillary-driven micromixer with square-wave microchannel for blood plasma mixing

A numerical and experimental investigation is performed into the flow characteristics and mixing performance of three microfluidic polydimethylsiloxane blood plasma mixing devices incorporating square-wave, curved and zigzag microchannels, respectively. For each device, the plasma is introduced into the microfluidic channel under the effects of capillary action alone. Of the three devices, that with the square-wave microchannel is found to yield the best mixing performance, and is therefore selected for design optimization. Four microfluidic micromixers incorporating square-wave microchannels with different widths in the x- and y-directions are fabricated using conventional photolithography techniques. The mixing performance of the four microchannels is investigated both numerically and experimentally. The results show that given an appropriate specification of the microchannel geometry, a mixing efficiency of approximately 76 % can be obtained within 4 s. The practical feasibility of the micromixer is demonstrated by performing prothrombin time (PT) tests using a total liquid volume of 4.0 μL (2.0 μL of plasma and 2.0 μL of PT reagent). It is shown that the mean time required to complete the entire PT test (including loading, mixing and coagulation) is less than 30 s.

     

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

The micro-Raman method is a noncontact and nondestructive method for thin film thermal conductivity measurements. To apply the micro-Raman method, however, the thickness of the film must be at least tens of micrometers. An analytical heat transfer model is presented in this work to extend the micro-Raman measurement method to measure the thermal conductivity of thin films with submicrometer- or nanometer-scale thickness. The model describes the heat transfer process in the thin film and substrate considering the effects of thin film thickness, interface thermal resistance, thermal conductivity of the thin film and substrate. From this heat transfer model, an analytical expression for the thermal conductivity of the thin film is derived. Experiments were successfully performed to measure the thermal conductivity of 200, 300 and 500 nm thickness silicon dioxide films using the extended micro-Raman measurement method, with results confirming the accuracy and validity of the extended model.     

Design and analysis of novel micro displacement amplification mechanism actuated by chevron shaped thermal actuators

This paper presents design and analysis of microelectromechanical system (MEMS) based displacement amplification mechanism actuated using thermal actuators with enhanced performance. The proposed model consists of chevron shaped thermal actuators, an amplification mechanism capable of amplifying displacement 20 times and an electrostatic comb drives for sensing displacements. When voltage is applied to thermal chevrons, displacement is produced which is then amplified 20 times. Steady state static thermal electrical analysis is performed under variable resistivity and voltage bias of 2 V. In-plane reaction forces of magnitude 194.2 and 150.91 µN along X and Y-axis, respectively, thus producing displacement of 0.11 and 2.22 µm along X and Y-axis, respectively. Time domain simulations of device are carried with constant electrical resistivity, variable voltage and convective boundary conditions. Modal analysis of the mechanism is carried out to predict the natural frequencies and associated mode shapes of mechanism during free vibrations. The desired mode is at frequency of 286.160 kHz. Dynamic simulations including direct integration-transient, transient modal and steady state modal analysis are performed on the device for time span of 0.0006 s, under application of 25 g and frequency range of 200–300 kHz. Simulation results prove the viability of the mechanism as an amplification device with enhanced voltage–stroke ratio.

     

Motion‐blur‐free LCD for high‐resolution virtual reality displays

A new liquid crystal display device with fast response time, high transmittance, and low voltage for virtual reality is reported. When driven at 90 Hz with 17% duty ratio, the motion picture response time is 1.5 ms, which is comparable with cathode‐ray tube, leading to indistinguishable motion blur. Moreover, this device enables high‐resolution density because only one thin‐film transistor per pixel is needed and it has a built‐in storage capacitor.     

Shrink-induced ultrasensitive mercury sensor with graphene and gold nanoparticles self-assembly

Here we report an ultrasensitive trace mercury(II) micro sensor based on heat-shrinkable polymer (polyolefins, PO). The layer-by-layer self-assembly (LBL SA) method was employed to modify mixed gold nanoparticle (Au NPs) and graphene solution on a micro gold electrode with PO substrate. The unique wrinkle structure of the electrode surface and superior properties of modification film enhanced the performance of LBL SA graphene–Au NPs shrink sensor greatly in determination of Hg(II) using anodic stripping voltammetry (ASV): compared with a shrink gold electrode without surface modification, the sensitivity was improved for about 3.7 times from 0.197 to 0.721 μA/ppb; compared with a same-sized sensor without surface modification nor shrink, the sensitivity was improved for over 50 times. This sensor’s detection limit of Hg(II) was achieved as 0.931 ppb with a sensitivity of 0.721 μA/ppb. This simple but highly sensitive sensor can be widely used in applications of on-line environmental monitoring of Hg(II).

     

CuO nanowire-based humidity sensors prepared on glass substrate

The authors report the growth of CuO nanowires (NWs) on glass substrate and the fabrication of CuO NW humidity sensors. It was found that average length of the CuO NWs increased from 0.4 μm to 2.8 and 6 μm, respectively, as we increased the initial copper film thickness from 0.5 μm to 1 and 2 μm after oxidation. It was also found that resistance of the CuO NWs increased as we increased the relative humidity due to the p-type nature of CuO. Furthermore, it was found that samples with a larger initial copper film thickness and thus a longer average CuO NW length could provide a larger sensor response.     

Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding

Micro–nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro–nano fluidic chips is proposed. The nano-channels are fabricated by thermal nano-imprinting on an SU-8 photoresist layer followed by thermal bonding with a second SU-8 photoresist layer. The micro-channels are produced on the second layer by UV exposure and then thermal bonded by a third layer of SU-8 photoresist. The final micro–nano fluidic chip consists of micro-channels (width of 200.0 ± 0.1 μm and, depth of 8.0 ± 0.1 μm) connected by nano-channels (width of 533 ± 6 nm and, depth of 372 ± 6 nm), which has great potential in molecular filtering and detection.

     

Single‐layered multi‐color electrowetting display by using ink‐jet‐printing technology and fluid‐motion prediction with simulation

Abstract— This paper describes a single‐layered multi‐color electrowetting display (EWD) by using ink‐jet‐printing (IJP) technology and comparing different pattern electrodes with the use of the numerical investigations of ANSYS FLUENT®. This work consists of two parts: the first describes the design of implementing a single‐layered multi‐color EWD and the second demonstrates the application of ANSYS FLUENT® simulation in different pattern electrodes settings on the proposed EWD. The single‐layered multi‐color EW device was evaluated by using various colored oils without adopting a color filter. The single‐layered multi‐color EWD at a driving voltage of 25 V can achieve a maximum aperture ratio and reflectivity of 80% and 38.5%, respectively. The colored saturation of R, G, B oils can increase to 50% (NTSC: 13.3–27.8%). In addition, a radiate electrode at the required viewable area condition of 85% and force 5 * F^k, which results in ink stable contraction and a shorter response time of 50% (radiate vs. square), was proposed. The experimental results and simulation demonstrate that ink‐jet‐printing (IJP) technology along with the use of radiate electrodes can result in a single‐layered multi‐color EWD with a shorter response time.     

Moisture sensor at glass/polymer interface for monitoring of photovoltaic module encapsulants

A sensor developed for measurement of water concentration inside glass/polymer encapsulation structures with a particular application area in accelerated aging of photovoltaic module encapsulants is described. An approximately 5 μm thick porous TiO₂ film applied to a glass substrate with a conductive coating acts as the moisture-sensitive component. The response is calibrated with weather chamber experiments for sensors open to the environment and with diffusion experiments for sensors laminated under an encapsulant. For the interpretation of diffusion experiment results, a transport model describing the diffusion of water across the polymer/TiO₂ interface is developed. The logarithm of AC resistance shows a linear dependence on water concentration in both open and encapsulated calibration. The first measurable response from an encapsulated 3.5 mm × 8 mm size sensor is obtained when approximately 10 μg of water has entered the film. Implications of the calibration results for sensor usage in accelerated aging tests are discussed.     

Electrowetting optical switch with large aperture tuning range

In this paper, we propose an optical switch by deforming the shape of the liquid droplet. The optical switch consists of two immiscible liquids. The dye‐doped water is conductive, while the clear liquid is insulating. In the voltage‐off state, incident light can pass through the circular aperture formed of clear liquid. When the voltage is applied to the liquids, the surrounding dye‐doped water pushes to the side wall because of the effect of electric field force. So, the diameter of the circular aperture is rapidly reduced, and the incident light is absorbed by the dye‐doped water. Our results show that the device can obtain an optical attenuation (~350:1) and reasonable response time (~320 ms). The diameter of the aperture can be largely tuned from ~0.5 to ~6.2 mm as the applied voltage is changed from ~25 to ~65 V. The proposed optical switch has potential applications in light shutters, tunable irises, and variable optical attenuators.     

Ultraviolet irradiation of lubricant and additives thin films to reduce wear to the magnetic head

This paper examined the effects of using 1 nm thickness lubricant thin film combined with additives and deep ultraviolet (UV) irradiation at 185 nm wavelength on the magnetic hard disk to the wear of the magnetic head during contact. Different types and amount of additives were added into the lubricant thin film either with or without deep UV irradiation. A test involved burnishing the magnetic head on the lubricated magnetic hard disk was conducted. The experiment was conducted in a class 100 cleanroom. Contrary to previous studies, the addition of additives into the lubricant film did not lead to a decrease in the amount of wear to the magnetic head. Without deep UV irradiation, the lubricant film combined with additives causes more wear to the magnetic head. The effects of using different percentages of cyclotriphosphazene based additives in perfluoropolyether lubricant were also discussed in this paper. We conclude that deep UV irradiation needed if additives were added when the total lubricant thin film thickness is at 1 nm or below.