A piezoelectric motor using flexural vibration of a thin piezoelectric membrane

This paper describes a new implementation of a disk-type piezoelectric motor, whose stator is a commercial available piezomembrane composed of a nickel alloy disk to which a piezoceramic disk is bonded. The two disks are concentric, and the total thickness is very small. Ultrasonic motors are based on the concept of driving a rotor by mechanical vibration excited on a stator, via the piezoelectric effect. The rotor is in contact with the stator, and the driving force is the frictional force between rotor and stator. To transform the mechanical vibration of the stator in the rotor rotation, a traveling wave must be excited on the stator surface. The proposed motor can be regarded as a disk-type, single wavelength motor in which the traveling wave is due to the natural flexural vibration of the piezomembrane at low frequency. The behavior of the stator is analyzed both theoretically, by using the theory of isotropic and homogeneous vibrating plates, and by means of a commercial finite element computer code, finding a good agreement with the experimental results. The main features of the motor are very small thickness, appreciable torque, and high speed, obtained with low input power at low voltage; the intended application is to substitute the moving-coil in analogic instrumentation.     

Travelling wave ultrasonic motor using the B08 flexural mode of a circular membrane

This paper describes the design, construction, and performance of a piezoelectric motor that uses the travelling B₀₈ mode of an 80-mm diameter circular membrane to drive a rotor by frictional contact. The motor is of a thin planar design, giving high torque of up to 0.33 Nm at low speed and has been developed as a design that can be made with lithographic techniques for miniaturization. Investigations of the free stator with a vibration pattern imager and impedance analyser gave the resonance frequency, mode, and electromechanical coupling of the stator. Motor speed as a function of frequency for a constant voltage and performance charts of speed, output power, and efficiency against torque are presented for a particular input voltage and rotor pre-load. The effects of two different lead zirconate titanate (PZT) ring dimensions have been investigated. Excitation of the B₀₉ mode has been observed, incommensurate with the piezoelectric excitation of the stator. This is discussed with relation to edge-clamping of the stator. Single standing wave motoring was observed, believed to arise from asymmetry of the stator and its perturbation of the B₀₈ resonance mode. Sources of power loss, including frame vibration and friction interface slip, are considered and discussed     

Modeling of a piezoelectric rotary ultrasonic motor

A piezoelectric rotary ultrasonic motor is modeled for the purpose of predicting, a priori, motor performance as a function of design parameters. The Rayleigh-Ritz assumed mode energy method is used to model the distributed piezoceramics and the traveling wave dynamics of the stator. Natural frequencies and modeshapes are obtained for a generally configured motor. Nonlinear normal and tangential interface forces between the rotor and stator are incorporated into the forcing function along with the linear piezoelectric forcing. Given the applied torque, applied axial loading, and piezo drive voltages as inputs to the model, general motor performance measures are obtained-namely speed, input power, output power, and efficiency. The approach presented here provides a general framework for modeling these motors as well as a design tool for optimizing prototypes with the added flexibility of allowing for a wide variety of geometries and materials     

A piezoelectric motor using two orthogonal bending modes of a hollow cylinder

This paper proposes a compact ultrasonic motor with low manufacturing costs, a simpler driving circuit, and scalability. The stator of the motor presented in this paper consists of a hollow metal cylinder, whose outside surface was flattened on two sides at 90 degrees to each other, on which two rectangular piezoelectric plates were bonded. Because the cylinder has a partially square/partially circular outside surface, the stator has two degenerated bending modes that are orthogonal to each other. A wobbling motion is generated on the cylinder when only one piezoelectric plate is excited at a frequency between the two orthogonal bending modes. A rod through a pair of ferrules was used as the rotor of this motor. The prototype motor, whose stator was 2.4 mm in diameter and 10 mm in length, operated at 69.5 kHz, was experimentally characterized, and a maximum torque of 1.8 mNm was obtained.     

单振子二自由度球面马达的运动机理

利用矩形板形压电振子的两种振动模态,构建了一种采用单片压电振子驱动球形转子,形成两个旋转自由度的压电球面超声马达,对马达的作用机理进行了仿真分析和试验验证.利用有限元法对马达的矩形板压电振子的振动模态、共振频率进行了分析计算,仿真结果表明矩形板压电振子能够形成振型清晰的B32和B23振动模态,模态频率分别为49.127 kHz和49.756 kHz.对压电振子上每个凸起与球形转子之间的接触点的运动轨迹进行了计算机仿真,并对仿真结果进行了试验验证.分析结果表明各接触点能有效形成时序合理的椭圆运动轨迹,作为支撑足的一组凸起的变形量占作为驱动足的一组凸起的变形量的30%,能够用于驱动球形转子形成二自由度转动.仿真分析和试验结果证明了二自由度球面马达球形转子形成二维运动的作用机理.     

Piezoelectric stepper motor with direct coupling mechanism to achieve high efficiency and precise control of motion

The paper describes a piezoelectric motor that combines the merits of piezoelectric materials, such as high power density generated at electromechanical resonance, and a precise control of displacement. In the motor, a standing shear wave is excited at the resonance in the piezoelectric tube, and it produces high-frequency torsional vibrations of the stator. The vibrations are converted into unidirectional rotation of a rotor by using a direct coupling mechanism between the stator and the rotor in which a clutch drives the rotor via locking it. The direct coupling makes it possible to transmit the whole power generated in the piezoelectric tube to the rotor, and thus achieve the high efficiency of the motor. It also allows combining two regimes of operation: continuous rotation and a stepwise motion within a 360 degrees interval with a high resolution of angular displacement.     

Y形旋转超声波马达的设计与动态特性分析

为了探索和丰富旋转超声波马达的结构,使其满足响应精准且速度快以及控制简便的要求,设计了Y形旋转超声波马达,并对其结构及动态特性进行了分析。Y形旋转超声波马达将3组压电陶瓷片的横向振动复合成驱动足端面对转子的微幅驱动,通过摩擦耦合在惯性作用下推动转子顺时针或逆时针旋转。运用Workbench软件中的Design Exporation组件对Y形旋转超声波马达定子组件的结构尺寸进行了优化设计,提升了定子组件的性能。构建优化后Y形旋转超声波马达定子组件的有限元仿真模型,并通过模态分析获得了定子组件工作所需的固有振型,通过谐响应分析获得了定子组件的幅频特性曲线,通过瞬态分析获得了1个激励周期内定子组件的振动模态,验证了Y形旋转超声波马达的驱动机理。结果表明,Y形旋转超声波马达压电陶瓷片表面施加电压的最佳频率为20 739 Hz,对应的驱动足端面的振幅为6.95 μm。Y形旋转超声波马达结构简单且具有对称性,能效利用率高,对拓宽超声波马达的应用领域有重要参考价值。     

Force transfer model and characteristics of hybrid transducer type ultrasonic motors

The characteristics of longitudinal-torsional hybrid transducer-type ultrasonic motors (HTUSM) are low speed and high torque. The discontinuous-surface-contact mode between the stator and the rotor is different from the many-point-contact mode of traveling wave motors, which is also an essential cause for high torque. Therefore, it is important to analyze its force transfer model between the rotor and the stator. In this paper, issues of using the method of equivalent circuit model are addressed. The relationships between the contact angle, preload, and physical parameters of frictional materials are given, according to the impulse conservation law axially. The equations describing output torque, amplitudes of longitudinal and torsional vibration, and parameters of the rotor are derived according to the principle that the work done by the load is equal to that by the driving force in one vibrating cycle. All factors that influence the mechanical characteristics are analyzed, and accuracy and suitability of the force transfer model are verified by comparison with the prototype motor. The formula for transfer efficiency on the stator/rotor interface is given, and the low-efficiency of this type motor is explained. The wide-working frequency range property of this type motor is shown with experimental results. Based on this study, the parameters of the rotor and preload are determined. The maximum torque of the prototype motor is up to 13.2 nm, and no-load speed of this type of motor is 12.5 rpm.     

Improvement of the longitudinal vibration system for the hybrid transducer ultrasonic motor

This paper presents a symmetric hybrid transducer ultrasonic motor designed to produce large longitudinal vibration stress in the rotor/stator contact interface for high-torque operation. The nodal plane of the longitudinal vibration mode was adjusted to match the rotor/stator contact interface, and the piezoelectric ceramic disks for the longitudinal vibration were installed at the nodal plane of the longitudinal vibration mode for effective excitation. An experimental motor, 20 mm in diameter, using the first torsional vibration mode and the second longitudinal vibration mode was manufactured. A maximum torque of 0.8 N.m was achieved in the prototype, an improvement over previous versions.     

Modeling of a rotary motor driven by an anisotropic piezoelectric composite laminate

This paper proposes an analytical model of a rotary motor driven by an anisotropic piezoelectric composite laminate. The driving element of the motor is a three-layer laminated plate. A piezoelectric layer is sandwiched between two anti-symmetric composite laminae. Because of the material anisotropy and the anti-symmetric configuration, torsional vibration can be induced through the inplane strain actuated by the piezoelectric layer. The advantages of the motor are its magnetic field immunity, simple structure, easy maintenance, low cost, and good low-speed performance. In this paper, the motor is considered to be a coupled dynamic system. The analytical model includes the longitudinal and torsional vibrations of the laminate and the rotating motion of the rotor under action of contact forces. The analytical model can predict the overall characteristics of the motor, including the modal frequency and the response of motion of the laminate, the rotating speed of the rotor, the input power, the output power, and the efficiency of the motor. The effects of the initial compressive force, the applied voltage, the moment of rotor inertia, and the frictional coefficient of the contact interface on the characteristics of the motor are simulated and discussed. A selection of the numerical results from the analytical model is confirmed by experimental data.     

新型箝位式压电电机的设计研究

针对传统箝位式压电电机在谐振态下工作时,方波振动的箝位部分结构设计复杂问题,提出一种新型箝位式压电电机。该电机箝位部分与驱动部分均由同频正弦电压驱动实现正弦振动,通过定子对动子的箝位接触,实现动子单向输出运动。相较于传统箝位式压电电机和超声电机,该电机的定子结构设计无需采用模态简并,结构设计难度降低。利用有限元仿真确定定、动子结构参数,制造样机并搭建实验平台。对箝位部分分别采用正弦波与方波做激励,再对驱动部分进行波形对比,表明正弦波亦能达到预期效果。实验结果表明:准静态时,激励电压频率为250Hz、电压峰峰值Vp-p为10V时,步进距离为0.5μm,步进速度0.13mm/s;谐振态时,激励电压频率为540Hz、电压峰峰值Vp-p为70V时,步进距离为32μm,步进速度16.9mm/s;该电机可兼顾低频高分辨率和高频高速输出以实现跨尺度工作。     

Finite-element analysis of the rotor/stator contact in a ring-type ultrasonic motor

A way to understand mechanical characteristics of an ultrasonic motor is presented. First, the vibration mode of a stator is calculated using a finite-element method (FEM) code. The path of the elliptic motion of the stator's teeth is obtained. The computed vibration mode at the surface of the stator is compared with that measured by an electrooptical displacement transducer. Next, the contact condition of the rotor/stator is calculated. The displacement and velocity of the rotor/stator, the distortion of the stick/slip area, the rotational speed of the rotor, and the friction loss of the motor are obtained. The calculated rotor displacement and torque-rotational speed curve correspond closely to the experimentally measured ones. The internal loss of the rotor/stator and the loss of the supporting felt are measured. The total loss of these losses and the calculated friction loss agree with the measured total loss. The calculated and the measured efficiency of the motor also agree.     

A 1.6-mm,metal tube ultrasonic motor

A miniaturized metal tube ultrasonic motor, the dimensions of which are 1.6 mm in diameter and 6 mm in length, was developed. Two flattened surfaces with 90 degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1.6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.     

Hybrid transducer type ultrasonic motor

A type of ultrasonic motor whose stator is composed of a torsional vibrator and multilayered piezoelectric actuators is proposed and has been fabricated for trial. The stator is operated at the resonance frequency of the torsional vibration. The vibrator generates the mechanical output force and the actuators control the frictional force. The construction provides for arbitrary Lissajous's figures at the contacting surface and contributes to large mechanical output power with high efficiency and bidirectional motion. It also gives greater freedom of design. The prototype motor produced a maximum torque of 7 kg-cm and a maximum efficiency of 33%     

Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate

This paper presents the design, fabrication, and characterization of a new type of standing wave piezoelectric ultrasonic motor. The motor uses a metallic flextensional amplifier, or cymbal, to convert the contour mode vibrations of a square piezoelectric ceramic plate into flexural oscillations, which are further converted to produce rotary actuation by means of an elastic-fin friction drive. The motor operates on a single-phase electrical supply. A beryllium copper rotor design with three-fin configuration was adopted, and the geometry was varied to include different material thicknesses, fin lengths, and inclinations. The best stall torque and no load speed for a 25-mm square motor were 0.72 Nmm and 895 r/minute, respectively. The behavior of the stator structure was analyzed by ANSYS finite element software using harmonic and modal analyses. The vibration mode estimated by finite element modeling (FEM) was confirmed by laser Doppler vibration measurements.     

A stator for a self-running, ultrasonically-levitated sliding stage

Here we propose a self-running, ultrasonically-levitated sliding stage and investigate the levitation and propulsion characteristics of its stator. The stator consists of two aluminum beams and four PZT plates, which have two-paired bimorph configurations. A flexural standing wave was generated along the beam by applying an input voltage to the PZTs, and the stator could be levitated from a flat substrate by the acoustic radiation force generated by its own vibrating beam. The size of the stator was optimized using finite-element analysis (FEA) to maximize the vibration displacement amplitude of the beam. The flexural vibration modes at 24.3 and 102 kHz were the most prominent vibration modes having large displacement amplitudes. The stator was levitated at 23.2 and 96.1 kHz, which are close to the frequencies predicted by the FEA results. A standing wave was observed along the beam. The experimental and the simulated results showed good agreement. The levitation distance h was measured by varying the vibration displacement amplitude of the beam u, and was found to be proportional to u. When a traveling wave was excited along the beam by controlling the temporal phase difference of the two transducers, the stator could be made to hover and to move in the opposite direction to the traveling wave. The stator moved in the positive direction when the phase difference was in the ranges 0 degrees to 200 degrees and 310 degrees to 360 degrees, and in the negative direction when the phase difference was between 220 degrees and 260 degrees.     

A smooth impact rotation motor using a multi-layered torsional piezoelectric actuator

A smooth impact rotation motor was fabricated and successfully operated using a torsional piezo actuator. Yoshida et al. reported a linear type smooth impact motor in 1997. This linear motor demonstrated a high output force and a long stroke. A superior feature of the smooth impact drive is a high positioning resolution compared with an impact drive. The positioning resolution of SIDM (smooth impact drive mechanism) is equal to the piezo displacement. The reported positioning resolution of the linear type was 5 nm. Our rotation motor utilized a torsional actuator containing multi-layered piezoelectric material. The torsional actuator was cylindrical in shape with an outer diameter of 15 mm, an inner diameter of 10 mm, and a length of 11 mm. Torsional vibration performance was measured with a laser Doppler vibrometer. The obtained torsional displacement agreed with the calculated values and was sufficient to drive a rotor. The rotor was operated with a saw-shaped input voltage (180 V; 8 kHz). The revolution direction was reversible. The maximum revolution speed was 27 rpm, and the maximum output torque was 56 gfcm. In general, smooth-impact drives do not show high efficiency; however, the level of efficiency of our results (max., 0.045%) could be increased by improving the contact surface material. In addition, we are studying quantitative consideration, for example, about the optimum pre-load or frictional force.     

基于HHT的超声电机噪声源分析

对超声电机的噪声信号做希尔伯特一黄变换(HHT)，发现噪声中从始至终都含有10kHz左右的成分。在分析了电机运动机理后，以转子为对象建立碰撞摩擦模型，从系统的加速度响应中，同样分解出10kHz左右的成分。说明系统运动非线性产生的分数次谐波，是诱发噪声的直接原因。对定子作有限元分析，得到定子的一阶模态频率为10．74kHz，与噪声频率非常接近，表明分数次谐波激发了定子共振，为噪声输出提供了能量源。为了降低噪声，可以考虑降低定子、转子的碰撞强度或改进定子、转子的结构。     

Finite element simulation for a new disc-type ultrasonic stator

This paper is concerned with the development of a new disc-type piezoelectric ultrasonic stator. Linear piezoelectric, mechanical, and piezoelectro-mechanic behaviors of a metal disc structure embedded with piezoelectric actuator are considered. Using a finite element method, a dynamic formulary is modeled for the new disc-type piezoelectric ultrasonic stator. In this model, a 3-dimensional (D) mechanical element with an extra electrical degree of freedom is used to simulate dynamic vibration modes and analyze characteristic responses such as electrical impedance response, phase response, and mechanical frequency response for a new disc-type piezoelectric ultrasonic stator. An adaptive boundary condition, simple support condition with three nonequal-triangular fixed points near the edge for the mechanism design of a new disc-type piezoelectric ultrasonic stator is defined so that a lateral elliptical motion of the contact point between stator and rotor can be realized for driving the rotor. The finite element results have been compared with the experimental measurements. As a result, the analysis model seems to be similar to the real condition.     

Numerical analysis of the symmetric hybrid transducer ultrasonicmotor

In this paper, operation of a symmetric hybrid transducer ultrasonic motor with output produced by two rotors connected together via a drive shaft is numerically analyzed and compared with the traditional asymmetric hybrid transducer motor design that produces its output from only one rotor. A one-dimensional finite element model for torsional vibration in the stator and a Coulomb friction model for rotor/stator contact associated with the longitudinal vibration of the motor are introduced. The calculation results demonstrate that the symmetric design is capable of performance comparable with the traditional asymmetric design when an optimum static spring force in the rotor/stator contact interface is applied during operation