Analytical modelling of threshold voltage for underlap Fully Depleted Silicon-On-Insulator MOSFET

In this article, surface-potential-based analytical threshold voltage model for underlap Fully Depleted Silicon-On-Insulator MOSFET (underlap-SOI) is developed by solving two-dimensional Poisson equation. The gate underlap at source/drain (S/D) has different boundary conditions as compared to channel region under the gate dielectric that divide the whole channel into three regions. It leads us to derive the new surface potential model for three different channel regions, i.e. the region under the gate dielectric and two gate underlap regions at S/D. The effects of underlap length, channel length, body thickness, channel doping concentration, metal gate work function and gate dielectric constant on threshold voltage have been included in our model. The threshold voltage dependence on different device parameters has been studied using analytical model and simulations. The closeness between the simulation results and model results show that the analytical model accurately calculate the threshold voltage values for large range of device parameters.     

Analysis and impact of process variability on performance of junctionless double gate VeSFET

This paper presents an in-depth analysis of junctionless double gate vertical slit FET (JLDG VeSFET) device under process variability. It has been observed that junctionless FETs (JLDG VeSFET) are significantly less sensitive to many process parameter variations due to their inherent device structure and geometric properties. Sensitivity analysis reveals that the slit width, oxide thickness, radius of the device, gate length and channel doping concentration imperceptibly affect the device performance of JLDG VeSFET in terms of variation in threshold voltage, on current, off current and subthreshold slope (Ssub) as compared to its junction based counterpart i.e. MOSFET, because various short channel effects are well controlled in this device. The maximum variation in off current for JLDG VeSFET due to variation in different devices parameters is 5.6% whereas this variation is 38.8% for the MOS junction based device. However, variation in doping concentration in the channel region displays a small deviation in the threshold voltage and on current characteristics of the MOSFET device as compared to JL DG VeSFET.     

A surface potential based drain current model for asymmetric double gate MOSFETs

In this paper, we present a generic surface potential based current voltage (I-V) model for doped or undoped asymmetric double gate (DG) MOSFET. The model is derived from the 1-D Poisson’s equation with all the charge terms included and the channel potential is solved for the asymmetric operation of DG MOSFET based on the Newton-Raphson iterative method. A noncharge sheet based drain current model based on the Pao-Sah’s double integral method is formulated in terms of front and back gate surface potentials at the source and drain end. The model is able to clearly show the dependence of the front and back surface potential and the drain current on the terminal voltages, gate oxide thicknesses, channel doping concentrations and the Silicon body thickness and a good agreement is observed with the 2-D numerical simulation results.     

Full quantum simulation study of a nano tri-material double gate silicon-on-insulator MOSFET

We present 2D full quantum simulation based on the self-consistent solution of 2D Poisson–Schrödinger equations, within the nonequilibrium Green’s function formalism, for a novel multiple region silicon-on-insulator (SOI) MOSFET device architecture – tri-material double gate (TMDG) SOI MOSFET. This new structure has three materials with different work functions in the front gate, which show reduced short-channel effects such as the drain-induced barrier lowering and subthreshold swing, because of a step function of the potential in the channel region that ensures the screening of the drain potential variation by the gate near the drain. Also, the quantum simulations show the new structure significantly decreases leakage current and drain conductance and increases on–off current ratio and voltage gain as compared to conventional and dual material DG SOI MOSFET.     

Effect of underlap and gate length on device performance of an AlInN/GaN underlap MOSFET

We investigate the performance of an 18 nm gate length AlInN/GaN heterostructure underlap double gate MOSFET, using 2D Sentaurus TCAD simulation. The device uses lattice-matched wideband Al_0.83In_0.17N and narrowband GaN layers, along with high-k Al₂O₃ as the gate dielectric. The device has an ultrathin body and is designed according to the ITRS specifications. The simulation is done using the hydrodynamic model and interface traps are also considered. Due to the large two-dimensional electron gas (2DEG) density and high velocity, the maximal drain current density achieved is very high. Extensive device simulation of the major device performance metrics such as drain induced barrier lowering (DIBL), subthreshold slope (SS), delay, threshold voltage (V_t), I_on/I_off ratio and energy delay product have been done for a wide range of gate and underlap lengths. Encouraging results for delay, I_on, DIBL and energy delay product are obtained. The results indicate that there is a need to optimize the I_off and SS values for specific logic design. The proposed AlInN/GaN heterostructure underlap DG MOSFET shows excellent promise as one of the candidates to substitute currently used MOSFETs for future high speed applications.     

Investigation of the source/drain asymmetric effects due to gate misalignment in planar double-gate MOSFETs

A planar double-gate SOI MOSFET (DG-SOI) with thin channel and thick source/drain (S/D) was successfully fabricated. Using both experimental data and simulation results, the S/D asymmetric effect induced by gate misalignment was studied. For a misaligned DG-SOI, there is gate nonoverlapped region on one side and extra gate overlapped region on the other side. The nonoverlapped region introduces extra series resistance and weakly controlled channel, while the extra overlapped region introduces additional overlap capacitance and gate leakage current. We compared two cases: bottom gate shift to source side (DG/spl I.bar/S) and bottom gate shift to drain side (DG/spl I.bar/D). At the same gate misalignment value, DG/spl I.bar/S resulted in a larger drain-induced barrier lowering effect and smaller overlap capacitance at drain side than DG/spl I.bar/D. Because of reduced drain-side capacitance, the speed of three-stage ring oscillator of DG/spl I.bar/S, with 20% gate misalignment length (L/sub mis/) over gate length (L/sub g/), or L/sub mis//L/sub g/=20%, was faster than that of two-gate aligned DG-SOI.     

Zero gate leakage current in the enhancement mode MOSFET

Gate leakage current measurements of the enhancement mode MOSFET taken with a vibrating reed electrometer in a carefully controlled environment indicate that zero gate leakage current can be achieved. The zero region is delineated by the change of sign in the gate leakage current when the drain-to-source voltage is increased.     

Experimental evaluation of gate architecture influence on DG SOI MOSFETs performance

Using a novel process flow, we managed to cointegrate several devices on the same wafer; single gate (SG), ground plane (GP), perfectly aligned double gate (DG), misaligned DG and oversized back-gate DG. This paper reports the experimental evaluation of the gate architectures influence on the performance of silicon-on-insulator MOSFETs. DG MOSFETs, with gate lengths down to 40 nm, are experimentally compared to SG and GP MOSFETs. Short-channel effect (SCE) control, static performance and mobility are quantified for each architecture. When compared to SG and GP transistors, the DG transistor shows the best SCE control and performance as predicted by simulations. Gate coupling is demonstrated to be a sensitive and a nondestructive method to evaluate the real on-wafer alignment. Using this method, we report an experimental analysis of gate misalignment influence on DG MOSFETs' performance and SCE. It is found that misalignment primarily affects the subthreshold parameters due to an electrostatic control loss. The DG MOSFET with a slightly oversized back gate (10 nm on each side of the top gate) is a promising solution, if a 10% loss in dynamic performance can be tolerated.     

How crucial is back gate misalignment/oversize in double gate MOSFETs for ultra-low-voltage analog/rf applications?

In the present work, by investigating the influence of source/drain (S/D) extension region engineering (also known as gate-underlap architecture) in planar Double Gate (DG) SOI MOSFETs, we offer new design insights to achieve high tolerance to gate misalignment/oversize in nanoscale devices for ultra-low-voltage (ULV) analog/rf applications. Our results show that (i) misaligned gate-underlap devices perform significantly better than DG devices with abrupt source/drain junctions with identical misalignment, (ii) misaligned gate underlap performance (with S/D optimization) exceeds perfectly aligned DG devices with abrupt S/D regions and (iii) 25% back gate misalignment can be tolerated without any significant degradation in cut–off frequency (f_T) and intrinsic voltage gain (A_VO). Gate-underlap DG devices designed with spacer-to-straggle ratio lying within the range 2.5 to 3.0 show best tolerance to misaligned/oversize back gate and indeed are better than self-aligned DG MOSFETs with non-underlap (abrupt) S/D regions. Impact of gate length and silicon film thickness scaling is also discussed. These results are very significant as the tolerable limit of misaligned/oversized back gate is considerably extended and the stringent process control requirements to achieve self-alignment can be relaxed for nanoscale planar ULV DG MOSFETs operating in weak-inversion region. The present work provides new opportunities for realizing future ULV analog/rf design with nanoscale gate–underlap DG MOSFETs.     

Analytical analysis of nanoscale multiple gate MOSFETs including effects of hot-carrier induced interface charges

As the channel length rapidly shrinks down to the nanoscale regime, the multiple gate MOSFETs structures have been considered as potential candidates for a CMOS device scaling due to its good short-channel-effects (SCEs) immunity. Therefore, in this work we investigate the scaling capability of Double Gate (DG) and Gate All Around (GAA) MOSFETs using an analytical analysis of the two dimensional Poisson equation in which the hot-carrier induced interface charge effects have been considered. Basing on this analysis, we have found that the degradation becomes more important when the channel length gets shorter, and the minimum surface potential position is affected by the hot-carrier induced localized interface charge density. Using this analysis, we have studied the scaling limits of DG and GAA MOSFETs and compared their performances including the hot-carrier effects. Our obtained results showed that the analytical analysis is in close agreement with the 2-D numerical simulation over a wide range of devices parameters. The proposed analytical approach may provide a theoretical basis and physical insights for multiple gate MOSFETs design including the hot-carrier degradation effects.     

Investigation of novel attributes of single halo dual-material double gate MOSFETs for analog/RF applications

Due to their excellent scalability and better immunity to short channel effects, double-gate (DG) MOSFETs are being earnestly assessed for CMOS applications beyond the 70 nm node of the SIA roadmap. However for channel lengths below 100 nm, DG MOSFETs still show considerable threshold voltage roll off and to overcome this effect, different gate or channel engineering techniques can be widely used. In this paper, the analog and RF performance of a single halo double gate MOSFET implemented with dual-material gate (DMG) technology is investigated with 2D device simulator. This novel structure shows better immunity to short-channel effects like DIBL and improved analog and RF performance. Moreover they exhibit better suppression of hot carrier effect and higher carrier transport efficiency than a single halo double gate MOSFET. The suitability of nanoscale single halo double gate MOSFETs with dual-material gate for circuit applications is examined by comparing the performance of a two stage cascode amplifier and a greater improvement is observed for single halo dual-material DG MOSFET compared to that of the single halo counterpart.     

Modeling and simulation of a nanoscale three-region tri-material gate stack (TRIMGAS) MOSFET for improved carrier transport efficiency and reduced hot-electron effects

Two-dimensional (2-D) analytical modeling for a novel multiple region MOSFET device architecture-Tri-Material Gate Stack MOSFET-is presented, which shows reduced short-channel effects at short gate lengths. Using a three-region analysis in the horizontal direction and a universal depletion width boundary condition, the 2-D potential and electric field distribution in the channel region along with the threshold voltage of the device are obtained. The proposed model is capable of modeling electrical characteristics like surface potential, electric field, and threshold voltage of various other existent MOSFET structures like dual-material-gate, electrically induced shallow junction/straddle-gate (side-gate), and single-material-gate MOSFETs, with and without the gate stack architecture. The 2-D device simulator ATLAS is used over a wide range of parameters and bias conditions to validate the analytical results.     

An analytical avalanche breakdown model for double gate MOSFET

An analytical model of avalanche breakdown for double gate (DG) metal-oxide-semiconductor field-effect transistor (MOSFET) is presented. First of all, the effective mobility (μ_eff) model is defined to replace the constant mobility model. The channel length modulation (CLM) effect is modeled by solving the Poisson’s equation. The avalanche multiplication factor (M) is calculated using the length of saturation region (ΔL). It is shown that the avalanche breakdown characteristics calculated from the analytical model agree well with commercially available 2D numerical simulation results. Based on the results, the reliability of the DG MOSFET can be estimated using the proposed analytical model.     

Suppression of short channel effects by full inversion in deep sub-micron gate SOI MOSFETs

Classical modeling of fully inverted SOI MOSFET (FI MOSFET) has been performed. In FI MOSFETs, the top Si layer is thinner than the thickness of the inversion layer at the conducting state and so the depleted region in the top Si layer is completely eliminated. It was found that the gate electric field induces carriers in the channel more effectively in FI MOSFET than in the fully depleted SOI MOSFETs (FD MOSFET), so that the short channel effects can be suppressed significantly.     

Analysis of flicker and thermal noise in p-channel Underlap DG FinFET

In this paper, we analyze the flicker and thermal noise model for underlap p-channel DG FinFET in weak inversion region. During the analysis of current and charge model, minimum channel potential i.e. virtual source is considered. Initially, the drain current for both long and short channel of DG FinFET are evaluated and found to be well interpreted with experimental results. Further, the flicker and thermal noise spectral density are derived. The flicker noise power spectral density is compared with published experimental results, which shows a good agreement between proposed model and experimental result. During calculation we have considered variation of scattering parameter and furthermore, the degradation of effective mobility is taken into account for ultrathin body. The variation of structural parameters such as gate length (L_g), body thickness (t_Si) and underlap length (L_un) are also considered. The degradation of gate noise voltage with frequency, underlap length and gate length signify that p-channel DG FinFET device can be a promising candidate for analog and RF applications.     

A fuzzy-logic-based approach to accurate modeling of a double gate MOSFET for nanoelectronic circuit design

正The double gate(DG) silicon MOSFET with an extremely short-channel length has the appropriate features to constitute the devices for nanoscale circuit design.To develop a physical model for extremely scaled DG MOSFETs,the drain current in the channel must be accurately determined under the application of drain and gate voltages.However,modeling the transport mechanism forthe nanoscale structures requires the use of overkill methods and models in terms of their complexity and computation time(self-consistent,quantum computations,...). Therefore,new methods and techniques are required to overcome these constraints.In this paper,a new approach based on the fuzzy logic computation is proposed to investigate nanoscale DG MOSFETs.The proposed approach has been implemented in a device simulator to show the impact of the proposed approach on the nanoelectronic circuit design.The approach is general and thus is suitable for any type of nanoscale structure investigation problems in the nanotechnology industry.     

A fuzzy-logic-based approach to accurate modeling of a double gate MOSFETfor nanoelectronic circuit design

The double gate (DG) silicon MOSFET with an extremely short-channel length has the appropriate features to constitute the devices for nanoscale circuit design. To develop a physical model for extremely scaled DG MOSFETs, the drain current in the channel must be accurately determined under the application of drain and gate voltages. However, modeling the transport mechanism for the nanoscale structures requires the use of overkill methods and models in terms of their complexity and computation time (self-consistent, quantum computations, ...). Therefore, new methods and techniques are required to overcome these constraints. In this paper, a new approach based on the fuzzy logic computation is proposed to investigate nanoscale DG MOSFETs. The proposed approach has been implemented in a device simulator to show the impact of the proposed approach on the nanoelectronic circuit design. The approach is general and thus is suitable for any type of nanoscale structure investigation problems in the nanotechnology industry.     

Gate leakage properties of MOS devices with tri-layer high-k gate dielectric

Gate leakage of deep-submicron MOSFET with stack high-k dielectrics as gate insulator is studied by building a model of tunneling current. Validity of the model is checked when it is used for MOSFET with SiO₂ and high-k dielectric material as gate dielectrics, respectively, and simulated results exhibit good agreement with experimental data. The model is successfully used for a tri-layer gate-dielectric structure of HfON/HfO₂/HfSiON with a U-shape nitrogen profile and a like-Si/SiO₂ interface, which is proposed to solve the problems of boron diffusion into channel region and high interface-state density between Si and high-k dielectric. By using the model, the optimum structural parameters of the tri-layer dielectric can be determined. For example, for an equivalent oxide thickness of 2.0 nm, the tri-layer gate-dielectric MOS capacitor with 0.3-nm HfON, 0.5-nm HfO₂ and 1.2-nm HfSiON exhibits the lowest gate leakage.     

Impact of gate metal work-function engineering for enhancement of subthreshold analog/RF performance of underlap dual material gate DG-FET

This work presents a systematic comparative study of analog/RF performance for underlap dual material gate (U-DMG) DG NMOSFET. In previous works, improved device performances have been achieved by use of high dielectric constant (k) spacer material. Although high-k spacers improve device performance, the intrinsic gain of the device reduces. For the analog circuits applications intrinsic gain is an important parameter. Hence, an optimized spacer material having dielectric constant, k = 7.5 has been used in this study and the gain is improved further by dual-material gate (DMG) technology. In this paper we have also studied the effect of gate material having different work function on the U-DMG DG NMOSFETs. This device exploits a step function type channel potential created by DMG for performance improvement. Different parameters such as the transconductance (g_m), the gain per unit current (g_m/I_ds), the intrinsic gain (g_mR_o), the intrinsic capacitance, the intrinsic resistance, the transport delay and, the inductance of the device have been analyzed for analog and RF performance analysis. Analysis suggested that the average intrinsic gain, g_m/I_d and g_m are increase by 22.988%, 16.10% and 27.871% respectively compared to the underlap single-material gate U-DG NMOSFET.     

High frequency characterization of gate resistance in RF MOSFETs

The gate resistances (R_g) of MOSEETs with various geometries have been characterized at various bias conditions at high frequency (HF). The results show that R_g decreases when either channel length (L_f) or per-finger-width (W_f) increases before reaching a critical L_f or W _f, and then starts to increase as L_f or W_f continues to increase. The irregular geometry dependence of R_g is caused by the combined distributed effects in both the gate and channel at HF. Stronger contribution from the distributed channel to the effective R_g is observed in the saturation region of devices with longer channel length (L_f) at lower gate bias (V_gs). The results show that an optimized design of the per-finger-width is necessary for an rf MOSFET to achieve the lowest effective R_g, which is desirable in rf applications