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1.
陈文静  黄勇  王威  刘文峰  乐政  孙孪鸿 《半导体技术》2022,47(2):105-110,116
Cu2ZnSnS4(CZTS)薄膜因其元素储量高、较佳的光学带隙、优异的电学性能等优势而得到广泛关注。以硝酸铋为铋源、乙酸钠为钠源,采用溶胶-凝胶法制备Na-Bi掺杂的CZTS薄膜。研究Na-Bi共掺对CZTS薄膜的物相结构、微观形貌、光学性能以及光电性能的影响。结果表明,制备的薄膜为锌黄锡矿结构。Na和Bi元素的掺入对薄膜的微观形貌影响较大。固定Na的原子数分数为1%,随着Bi元素原子数分数的增加,薄膜的晶粒尺寸先增大后减小,均匀性逐渐提高,光敏性先增大后减小,光学带隙逐渐增大。当Na和Bi原子数分数分别为1%和0.5%时,薄膜的光学带隙为1.42 eV,光敏性最佳为1.17。  相似文献   

2.
It has been a general practice to dope thin films with suitable dopants to modify the properties of the films to make them more suitable for potential applications. When the dopant concentrations are low, they do not normally affect the structure and morphology of the films. However, it may lead to drastic changes in electronic properties of the films. This might result from the dopant getting incorporated into the lattice of the material of the films. Cadmium selenide is an important compound semiconductor material with an attractive energy band gap. The present work relates to an attempt made to dope CdSe thin films with silver. CdSe:Ag (1–5%) thin films were deposited on glass substrates at an optimized substrate temperature of 453 K using thermal evaporation technique. The grown films were analyzed using X-ray diffraction, scanning electron microscopy (SEM), energy dispersive analysis of X-ray (EDX) techniques. It is observed that undoped CdSe thin films and CdSe:Ag films have hexagonal structure. The grain size was found to increase marginally with an increase in the Ag concentration. The optical band gap of the films determined by optical transmission measurements agree with that of CdSe. Electrical conductivity is observed to increase from 10–4 to 3.66 (Ω cm)–1 on addition of silver. The variation of resistance with temperature indicates that the prepared films consist of CdSe and Ag existing as two separate phases coexisting and contributing individually to the resistivity of the films.  相似文献   

3.
Antimony (Sb) doped zinc oxide (ZnO) thin films were deposited on the glass substrate at 450°C using spray pyrolysis technique. Effect of Sb doping on surface morphology structural, optical and electrical properties were studied. X-ray diffraction (XRD) analysis showed that both the undoped and doped ZnO thin films are polycrystalline in nature with (101) preferred orientation. SEM analysis showed a change in surface morphology of Sb doped ZnO thin films. Doping results in a marked increase in conductivity without affecting the transmittance of the films. ZnO films prepared with 3 at % Sb shows the lowest resistivity of 0.185 Ohm cm with a Hall mobility of 54.05 cm2 V–1 s–1, and a hole concentration of 6.25 × 1017 cm–3.  相似文献   

4.
Structural, electrical, and optical properties of undoped and Zn doped lead sulfide (PbS) thin films are benign reported in this paper. The subjected films were grown on glass substrates at 25 °C by a chemical bath deposition (CBD) method. The concentration of Zn in the deposition bath represented by the ratio [Zn2+]/[Pb2+] was varied from 0% to 5%. It was found that the film׳s grains decreased in size with increasing Zn content in the film. XRD data showed the polycrystalline nature of the film its crystal orientation peak intensities decreased with higher doping concentration of Zn. Atomic force microscopy (AFM) measurements revealed that the surface roughness of the films decreased due to zinc doping as well. However, with increasing of the dopant concentration from 0% to 5%, the average transmittance of the films varied over the range of 35–75%. The estimated optical band (Eg) gaps of undoped and Zn doped PbS thin films were in the range of 0.72–1.46 eV. Hall Effect measurements electrical resistivity, carrier concentration and Hall mobility have been determined for the titled film as functions on the Zn content within the film׳s textures. The overall result of this work suggested that the Zn:PbS film is a good candidate as an absorber layer in the modern solar cell devices.  相似文献   

5.
退火温度对ZnO掺杂ITO薄膜性能的影响   总被引:2,自引:2,他引:0  
利用电子束蒸镀方法,在K8玻璃衬底上沉积ZnO掺杂ITO(ZnO-ITO)与ITO薄膜。研究不同退火温度对ZnO-ITO薄膜的微观结构的影响;对比分析了在不同退火温度条件下,ZnO-ITO和无掺杂ITO薄膜的光电性能。结果发现,ZnO-ITO薄膜具有较大的晶粒尺寸,随着退火温度的上升,晶体结构得到改善,表面粗糙度减小,薄膜的光电性能显著提高。ZnO-ITO薄膜经过500℃退火后得到最佳的综合性能,其表面均方根粗糙度(RMS)为32.52nm,电阻率为1.43×10-4Ω.cm;对442nm波长的光,透射率可达98.37%;与ITO薄膜相比,ZnO-ITO薄膜具有显著的抗PEDOT:PSS溶液腐蚀的能力。  相似文献   

6.
Undoped and Al doped lead sulfide (PbS) thin films were grown on soda lime glass substrates by Successive Ionic Layer Adsorption and Reaction (SILAR) deposition method. Al content in aqueous cationic solution was varied by adding 0.5–2% of aluminum nitrate in step of 0.5. The characterization of the film was carried out using X-ray diffraction, scanning electron microscopy, and optical and electrical measurement techniques. X-ray diffraction analysis revealed that both the undoped and doped films were polycrystalline and exhibited galena type cubic structure with average crystallite size in the range of 15.5–30.9 nm. The compositional analysis results indicated that Pb, S and Al were present in the samples. Optical studies revealed prominent blue-shift in the absorption edge of as-deposited samples upon doping as compared to that of bulk PbS and this shift was due to a quantum confinement effect. The room temperature conductivity of the PbS thin films was in the range of 1.343×10−7–1.009×10−6  cm)−1for doped samples and 5.172×10−8 for undoped PbS thin film sample. The optical band gap energy has inverse relation with grain size and electrical conductivity is closely related to structural parameters like grain size, crystallinity and microstrain. The estimated lattice parameter, grain size, optical band gaps and electrical properties were correlated with Al concentration in the cationic solution.  相似文献   

7.
The gas sensing behavior of thick films of Bi doped SnO2 has been investigated towards ethanol vapor. The screen printing technique was used to prepare the thick films. The films were sintered at 650 °C for 2 h. The structural, surface morphological, optical and gas sensing properties of undoped and Bi doped SnO2 thick films have been studied. X-ray diffraction and Raman spectroscopy confirmed that the films consisted exclusively of tetragonal tin oxide, without any impurity phases. FE-SEM studies revealed the formation of highly porous microstructure with grain size in few tens of nanometers. From the optical studies, the band gap was found to be decreased with bismuth doping (3.96 eV for undoped, 3.83 eV, 3.71 eV and 3.6 eV for 1 mol%, 2 mol% and 3 mol% Bi, respectively). The 3 mol % Bi doped SnO2 thick films exhibited the highest sensitivity to 100 ppm of ethanol vapor at 300 °C. The effect of microstructure on sensitivity, response time and recovery time of the sensor was studied and discussed.  相似文献   

8.
Bismuth doped tin sulfide (SnS:Bi) thin films were deposited onto glass substrates by the spray pyrolysis technique at the substrate temperature of 350 °C. The effect of doping concentration [Bi/Sn] on their structural, optical and electrical properties was investigated as a function of bismuth doping between 0 and 8 at%. The XRD results showed that the films were polycrystalline SnS with orthorhombic structure and the crystallites in the films were oriented along (111) direction. Atomic force microscopy revealed that the particle size and surface roughness of the films increased due to Bi-doping. Optical analysis exhibited the band gap value of 1.40 eV for SnS:Bi (6 at%) which was lower than the band gap value for 0 at% of Bi (1.60 eV). The film has low resistivity of 4.788×10−1 Ω-cm and higher carrier concentration of 3.625×1018 cm−3 was obtained at a doping ratio of 6 at%.  相似文献   

9.
Aluminium doped zinc oxide thin films were deposited on glass substrate by using spray pyrolysis technique. The X-ray diffraction study of the films revealed that the both the undoped and Al doped ZnO thin films exhibits hexagonal wurtzite structure. The preferred orientation is (002) for undoped and up to 3 at % Al doping, further increase in the doping concentration to 5 at % changes the preferred orientation to (101) direction. The surface morphology of the films studied by scanning electron microscope, reveal marked changes on doping. Optical study indicates that both undoped and Al doped films are transparent in the visible region. The band gap of the films increased from 3.24 to 3.36 eV with increasing Al dopant concentration from 0 to 5 at % respectively. The Al doped films showed an increase in the conductivity by three orders of magnitude with increase in doping concentration. The maximum value of conductivity 106.3 S/cm is achieved for 3 at % Al doped films.  相似文献   

10.
A consistent set of epitaxial, n-type conducting ZnO thin films, nominally undoped, doped with Ga or Al, or alloyed with Mg or Cd, was grown by pulsed laser deposition (PLD) on single-crystalline c-plane sapphire (0 0 0 1) substrates, and characterized by Hall measurement, and UV/VIS optical transmission spectroscopy.The optical band gap of undoped ZnO films at nearly 3.28 eV was shifted by alloying with Mg up to 4.5 eV and by alloying with Cd down to 3.18 eV, dependent on the alloy composition. In addition, highly doped ZnO:Al films show a blue-shifted optical absorption edge due to filling of electronic states in the conduction band.The Hall transport data of the PLD (Mg,Zn,Cd)O:(Ga,Al) thin films span a carrier concentration range of six orders of magnitude from 3 × 1014 to 3 × 1020 cm−3, which corresponds to a resistivity from 5 × 10−4 to 3 × 103 Ω cm. Structurally optimized, nominally undoped ZnO films grown with ZnO nucleation and top layer reached an electron mobility of 155 cm2/V s (300 K), which is among the largest values reported for heteroepitaxial ZnO thin films so far.Finally, we succeeded in combining the low resistivity of ZnO:Ga and the band gap shift of MgZnO in MgZnO:Ga thin films. This results demonstrate the unique tunability of the optical and electrical properties of the ZnO-based wide-band gap material for future electronic devices.  相似文献   

11.
Highly transparent, low resistive pure and Sb, Zn doped nanostructured SnO2 thin films have been successfully prepared on glass substrates at 400° C by spray pyrolysis method. Structural, electrical and optical properties of pure and Sb, Zn doped SnO2 thin films are studied in detail. Powder X-ray diffraction confirms the phase purity, increase in crystallinity, size of the grains (90–45 nm), polycrystalline nature and tetragonal rutile structure of thin films. The scanning electron microscopy reveals the continuous change in surface morphology of thin films and size of the grains decrease due to Sb, Zn doping in to SnO2. The optical transmission spectra of SnO2 films as a function of wavelength confirm that the optical transmission increases with Sb, Zn doping remarkably. The optical band gap of undoped film is found to be 4.27 eV and decreases with Sb, Zn doping to 4.19 eV, 4.07 eV respectively. The results of electrical measurements indicate that the sheet resistance of the deposited films improves with Sb, Zn doping. The Hall measurements confirm that the films are degenerate n-type semiconductors.  相似文献   

12.
We have grown 1 wt.%, 5 wt.%, and 10 wt.% Li-doped tungsten oxide thin films on glass substrate using the spray pyrolysis technique and investigated their morphological, structural, optical, and electrical properties. In addition to formation of nanograin coverage, we found that the doped films grew with polycrystalline monoclinic structure having preferred orientation along (200) plane instead of the amorphous undoped structure. The 10 wt.%-doped sample showed the highest visible transmittance (~95%) and lowest resistivity (~7.5 Ω cm), together with relatively high ultraviolet (UV) photoluminescence emission at room temperature.  相似文献   

13.
Cadmium selenide (CdSe) thin films have been successfully prepared by the electrodeposition technique on indium doped tin oxide (ITO) substrates with aqueous solutions of cadmium sulphate and selenium dioxide. The deposited films were characterized with X-ray diffraction (XRD), scanning electron microscope (SEM), energy dispersive analysis by X-rays (EDAX), photoluminescence (PL), UV spectrometry and electrical resistivity measurements. XRD analysis shows that the films are polycrystalline in nature with hexagonal crystalline structure. The various parameters such as crystallite size, micro strain, dislocation density and texture coefficients were evaluated. SEM study shows that the total substrate surface is well covered with uniformly distributed spherical shaped grains. Photoluminescence spectra of films were recorded to understand the emission properties of the films. The presence of direct transition with band gap energy 1.75 eV is established from optical studies. The electrical resistivity of the thin films is found to be 106 Ω cm and the results are discussed.  相似文献   

14.
In this study, undoped and Ag doped PbS thin films at different concentrations were deposited onto glass substrates at 225 °C by using ultrasonic spray pyrolysis technique, in order to investigate the effect of Ag doping on the physical properties of PbS thin films. Structural investigations revealed that all doped PbS:Ag thin films have cubic structure and Ag doping enhances crystalline level of PbS thin films. It was determined that average crystallite size of PbS:Ag thin films increased from 24 nm to 49 nm by increasing Ag doping concentration. Morphological studies showed that surfaces of the films become denser after Ag doping. Optical transmittance and absorption spectra revealed that all deposited thin films have low transmission and high absorbance within the visible region and band gap energy of the PbS:Ag thin films were determined to be in the range of 1.37 eV and 1.28 eV by means of optical method. Electrical conductivity type of PbS:Ag films was determined to be p-type and calculated electrical resistivity was found to be lowest for Ag-doped PbS thin films at 2%.  相似文献   

15.
We have investigated the origin of crystal orientation for nanocrystalline bismuth telluride-based thin films. Thin films of p-type bismuth telluride antimony (Bi–Te–Sb) and n-type bismuth telluride selenide (Bi–Te–Se) were fabricated by a flash evaporation method, with exactly the same deposition conditions except for the elemental composition of the starting powders. For p-type Bi–Te–Sb thin films the main x-ray diffraction (XRD) peaks were from the c-axis (Σ{00l}/Σ{hkl} = 0.88) whereas n-type Bi–Te–Se thin films were randomly oriented (Σ{00l}/Σ{hkl} = 0.40). Crystal orientation, crystallinity, and crystallite size were improved for both types of thin film by sintering. For p-type Bi–Te–Sb thin films, especially, high-quality structures were obtained compared with those of n-type Bi–Te–Se thin films. We also estimated the thermoelectric properties of the as-grown and sintered thin films. The power factor was enhanced by sintering; maximum values were 34.9 μW/cm K2 for p-type Bi–Te–Sb thin films at a sintering temperature of 300°C and 23.9 μW/cm K2 for n-type Bi–Te–Se thin films at a sintering temperature of 350°C. The exact mechanisms of film growth are not yet clear but we deduce the crystal orientation originates from the size of nano-clusters generated on the tungsten boat during flash evaporation.  相似文献   

16.
In the present work, transparent and conductive Nd doped SnO2 thin films were deposited via spray pyrolysis. Crystallographic, morphological, optical and electrical characterizations of SnO2 were researched as a function of Nd doping. The XRD analysis indicated the films had tetragonal cassiterite tin oxide structure and (211) preferential direction for NdTO-0, NdTO-1, NdTO-2 and NdTO-3 samples changed to (110) plane for NdTO-4 and NdTO-5 samples. The crystalline size and strain analysis were made by using a Williamson–Hall method. The SEM micrographs showed that all films had homogenously scattered pyramidal and small densely nanoparticles. The optical analysis indicated optical band gap value of undoped film increased with 1 at% Nd doping and then it decreased with more Nd content. The Hall measurements indicated that the highest electrical conductivity was obtained for 2 at% Nd doping content.  相似文献   

17.
We have studied the structural, electrical, optical, and optoelectronic properties of N-doped and Al-N co-doped ZnO films grown by sol–gel technique. Both the undoped and doped films have a hexagonal wurtzite-type structure. The undoped film shows a very low electron concentration. The N-doped film exhibits an anomalous conduction type, while the Al-N co-doped film shows relatively stable p-type conduction. Though the transparency in the visible region is retained in the doped films, its optical qualities are degraded as indicated by photoluminescence results. The N-doped film has better response to ultraviolet light compared with the undoped and co-doped films. These results are important for the growth and development of p-type ZnO films using the very low-cost sol–gel method.  相似文献   

18.
对采用Sol-Gel法制备的钇掺杂锆钛酸铅铁电薄膜的电性能进行了研究。实验结果表明,由于钇离子(Y^3 )的引入造成晶格畸变,使掺钇后的PZT铁电薄膜比未掺钇时具有更大的剩余极化强度、更小的矫顽场和漏电流。此外,钇掺杂锆钛酸铅铁电薄膜具有良好的介电性能,在室温和10kHz频率下,其介电常数和介电损耗分别为437和0.043。  相似文献   

19.
In this study, undoped and Ga doped ZnO thin films were synthesized by the sol–gel spin coating technique. The effect of Ga contribution on the structural, morphological and optical properties of the ZnO thin films was examined. XRD results showed that all films had a hexagonal wurtzite crystal structure with polycrystalline nature. The intensity of the (002) peak changed with the variable Ga content. The scanning electron microscopy (SEM) results revealed that the surface morphology of the ZnO thin films was affected by Ga content. Moreover, it consisted of nanorods as a result of the increased function of the Ga content. Additionally, the presence of Ga contributions was evaluated by energy dispersive x-ray (EDX) measurements. Although the transparency and the optical band gap of the ZnO thin films increased with Ga contribution, Urbach energy values decreased from 221 meV to 98 meV. In addition, these steepness parameters increased with the increased Ga content from 0% to 6%. The correlation between structural and optical properties was investigated and significant consistency was found.  相似文献   

20.
Cadmium selenide (CdSe) nanocrystalline thin films were prepared by chemical bath deposition (CBD) using ammonia and triethanolamine (TEA) as complexing agents, cadmium chloride and sodium selenosulphate as the sources of Cd2+ and Se2? ions, respectively. The structural and optical properties of CdSe nanocrystalline thin films were investigated as a function of the sodium selenosulphate concentrations or ammonia concentrations in precursors using scanning electron microscopy (SEM), energy dispersive spectrometer (EDS), X-ray diffraction (XRD) measurements, transmission electron microscopy (TEM) and UV–visible spectrophotometer measurements. The results reveal that the CdSe thin films are in the pure cubic phase, which composed of a large number of uniform spherical particles. Each spherical particle contains many nanocrystals 3–10 nm in crystallite size. An increase in both the average diameter of the spherical particles and the crystallite size of the nanocrystals occurs with an increase in ammonia concentrations. The Se/Cd atom ratios of CdSe thin films firstly increase and then decrease with an increase in ammonia concentration or sodium selenosulphate concentration. The optical band gap of CdSe thin films decrease with an increase in ammonia concentrations. The kinetics and reaction mechanism of the CdSe nanocrystalline thin films during deposition are discussed.  相似文献   

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