Bias voltage dependence properties of Nb-doped indium tin oxide thin films by RF magnetron sputtering at room temperature

Niobium doped indium tin oxide (ITO:Nb) thin films were fabricated on glass substrates by RF magnetron sputtering from one piece of ceramic target material at room temperature. The bias voltage dependence of properties of the ITO:Nb films were investigated by adjusting the bias voltage. Structural, electrical and optical properties of the films were investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), UV–visible spectroscopy, and electrical measurements. XRD patterns showed a change in the preferential orientations of polycrystalline crystalline structure from (222) to (400) crystal plane with the increase of negative bias voltage. AFM analysis revealed that the smooth film was obtained at a negative bias voltage of -120 V. The root mean square (RMS) roughness and the average roughness are 1.37 nm and 1.77 nm, respectively. The films with the lowest resistivity as low as 1.45×10⁻⁴ Ω cm and transmittance over 88% have been obtained at a negative bias voltage of −120 V. Band gap energy of the films, depends on substrate temperature, varied from 3.56 eV to 3.62 eV.     

Properties of fluorine-doped SnO2 thin films by a green sol–gel method

Fluorine doped tin oxide (FTO) films were fabricated on a glass substrate by a green sol–gel dip-coating process. Non-toxic SnF₂ was used as fluorine source to replace toxic HF or NH₄F. Effect of SnF₂ content, 0–10 mol%, on structure, electrical resistivity, and optical transmittance of the films were investigated using X-ray diffraction, Hall effect measurements, and UV–vis spectra. Structural analysis revealed that the films are polycrystalline with a tetragonal crystal structure. Grain size varies from 43 to 21 nm with increasing fluorine concentration, which in fact critically impacts resultant electrical and optical properties. The 500 °C-annealed FTO film containing 6 mol% SnF₂ shows the lowest electrical resistivity 7.0×10⁻⁴ Ω cm, carrier concentration 1.1×10²¹ cm⁻³, Hall mobility 8.1 cm²V⁻¹ s⁻¹, optical transmittance 90.1% and optical band-gap 3.91 eV. The 6 mol% SnF₂ added film has the highest figure of merit 2.43×10⁻² Ω⁻¹ which is four times higher than that of un-doped FTO films. Because of the promising electrical and optical properties, F-doped thin films prepared by this green process are well-suited for use in all aspects of transparent conducting oxide.     

Evaporated iron disulfide thin films with sulfurated annealing treatments

FeS₂ thin films were grown on a glass substrate using a physical vapor deposition technique at room temperature. Subsequently, the thin films were annealed in two different atmospheres: vacuum and vacuum-sulfur. In the vacuum-sulfur atmosphere a graphite box was used as sulfur container and the films were sulfurated successfully at 200–350 ºC. It was found that annealing in a vacuum-sulfur atmosphere was indispensable in order to obtain polycrystalline FeS₂ thin films. The polycrystalline nature and pure phase were determined by XRD and Raman techniques and the electrical properties by the Hall effect. Using the sulfurating technique, the n-type semiconductor was prepared at 200–350 °C and a p-type at 500 °C. The carrier concentrations were between 1.19×10²⁰ and 2.1×10²⁰ cm⁻³. The mobility was 9.96–5.25 cm² V⁻¹ s⁻¹ and the resistivity was 6.31×10⁻² to 1.089×10⁻² Ω cm. The results obtained from EDS showed that the films prepared in the vacuum-sulfur atmosphere were close to stoichiometric and that the indirect band gap varied between 1.03 and 0.945 eV.     

Optimization of N2/Ar gas flow ratio for the realization of nitrogen-doped p-type ZnCdO thin films synthesized by RF magnetron sputtering

Nitrogen doped ZnCdO films [ZCO:N] have been grown on quartz substrates by radio frequency (RF) reactive magnetron sputtering technique, and the effect of the ratio of nitrogen to argon gas flow [N₂:Ar] on their electrical, microstructure and optical properties were investigated by Hall effect, energy dispersive X-ray spectroscopy (EDX), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscope (TEM), optical absorbance and photoluminescence (PL) measurements. The results indicate that all the ZCO:N films are of hexagonal wurtzite structure with highly (002) preferential orientation. As the N₂:Ar increases from 0:1 to 4:1, the absorption edge for the samples exhibits blue shift. Hall effect measurement results indicate that the N₂:Ar exerts an immense influence on the p-type conduction conversion for ZCO:N film. It is found that ZCO:N film deposited at the N₂:Ar of 1:2 shows the optimal p-type behavior, which has a carrier concentration of 1.10×10¹⁷ cm⁻³, a mobility of 3.28 cm²V⁻¹s⁻¹ and a resistivity of 17.3 Ω cm. Compared with the other samples, ZCO:N film fabricated at the relatively lower N₂:Ar possesses the superior crystal quality, luminescent and electrical properties. Additionally, a possible mechanism of p-type conduction for ZCO:N film was discussed in this work.     

Investigation on Na-N dual acceptors doped p-type ZnCdO thin films synthesized by RF magnetron sputtering

Sodium and nitrogen dual acceptors doped ZnCdO [ZCO:(Na, N)] have been prepared by radio frequency (RF) reactive magnetron sputtering followed by rapid annealing treatment, and the influence of the ratio of argon to nitrogen gas flow (Ar:N₂) on the electrical, structure and optical properties of ZCO:(Na, N) films were investigated in detail. Hall-effect measurement results reveal that Na–N dual acceptors doping method is an effective path to realize the p-type conversion of ZnCdO (ZCO). When the Ar:N₂ was set to 1:2 (S3), ZCO:(Na, N) film possesses the optimal p-type conduction properties with carrier concentration of 7.84 × 10¹⁸ cm⁻³ and the resistivity of 30.9 Ω cm. It is demonstrated that the presence of Na_Zn and N_o acceptors are answerable for the p-type behavior in ZCO:(Na, N) film by the analysis of X-ray photoelectron spectroscopy (XPS) results. All the ZCO:(Na, N) films are of hexagonal wurtzite crystal structure with highly (002) preferential orientation. As Ar:N₂ increases from 1:4 (S1) to 2:1 (S5), the absorption edge gradually shifted to longer wavelength side. The observed p-type ZCO:(Na, N) films will open the door for practical applications in various optoelectronic devices.     

A study on phase transformation of SnOx thin films prepared by reactive magnetron sputtering

In the paper, SnO_x thin films were deposited by reactive magnetron sputtering from a tin target in O₂ containing working gas. The evolution from Sn-containing SnO to tetravalent SnO₂ films was investigated. The films could be classified into three groups according to their optical band gaps, which are E_g<2.5 eV, E_g=3.0–3.3 eV and E_g>3.7 eV. The electric measurements show that high conductivity can be obtained much easier in SnO₂ than in SnO films. A high electron mobility of 15.7 cm² V⁻¹ s⁻¹, a carrier concentration of 1.43×10²⁰ cm⁻³ and a resistivity of 2.8×10⁻³ Ω cm have been achieved in amorphous SnO₂ films. Films with the optical band gap of 3.0–3.3 eV remain amorphous though the substrate temperature is as high as 300 °C, which implies that °btaining high mobility in p-type SnO is more challenging in contrast to n-type SnO₂ films.     

Substrate temperature effect on structural,optical and electrical properties of vacuum evaporated SnO2 thin films

Tin oxide (SnO₂) thin films were deposited on glass substrates by thermal evaporation at different substrate temperatures. Increasing substrate temperature (T_s) from 250 to 450 °C reduced resistivity of SnO₂ thin films from 18×10⁻⁴ to 4×10⁻⁴▒ Ω ▒cm. Further increase of temperature up to 550 °C had no effect on the resistivity. For films prepared at 450 °C, high transparency (91.5%) over the visible wavelength region of spectrum was obtained. Refractive index and porosity of the layers were also calculated. A direct band gap at different substrate temperatures is in the range of 3.55−3.77 eV. X-ray diffraction (XRD) results suggested that all films were amorphous in structure at lower substrate temperatures, while crystalline SnO₂ films were obtained at higher temperatures. Scanning electron microscopy images showed that the grain size and crystallinity of films depend on the substrate temperature. SnO₂ films prepared at 550 °C have a very smooth surface with an RMS roughness of 0.38 nm.     

Influence of Mn doping on structural,optical and electrical properties of CdO thin films prepared by cost effective spray pyrolysis method

Transparent and conducting cadmium oxide (CdO) and manganese doped CdO (Mn: CdO) thin films were deposited using a low cost spray pyrolysis method on the glass substrate at 300 °C. For Mn doping, various concentrations of manganese acetate (1–3 wt%) was used in the spraying precursor solution. The structural, electrical and optical properties of CdO and Mn: CdO films were investigated using X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscope (AFM), UV–vis and Hall measurement. X-ray diffraction study reveals that the CdO and Mn: CdO films are possessing cubic crystal structures. SEM and AFM studies reveal that the grain size and roughness of the films are increased with increasing Mn doping concentration. Optical transmittance spectra of the CdO film decreases with increasing doping concentration of manganese. The optical band gap of the films decreases from 2.42 eV to 2.08 eV with increasing concentration of manganese. A minimum resistivity of 1.11×10⁻³ Ω cm and maximum mobility of 20.77 cm² V⁻¹ s⁻¹ is achieved for 1 wt% of manganese doping.     

Effect of thickness on the structural,optical and electrical properties of RF magnetron sputtered GZO thin films

Gallium-doped zinc oxide (GZO) thin films with very high conductivity and transparency were successfully deposited by RF magnetron sputtering at a substrate temperature of 400 °C. The dependence of the film properties over the thickness was investigated. X-ray diffraction (XRD) results revealed the polycrystalline nature of the films with hexagonal wurtzite structure having preferential orientation along [001] direction normal to the substrate. The lowest resistivity obtained from electrical studies was 5.4×10⁻⁴ Ω cm. The optical properties were studied using a UV–vis spectrophotometer and the average transmittance in the visible region (400–700 nm) was found to be 92%, relative to the transmittance of a soda–lime glass reference for a GZO film of thickness 495 nm and also the transparency of the films decreases in the near IR region of the spectra. The mobility of the films showed a linear dependence with crystallite size. GZO film of thickness 495 nm with the highest figure of merit indicates that the GZO film is suitable as an ideal transparent conducting oxide (TCO) material for solar cell applications.     

Growth and characterization of indium oxide diodes prepared by reactive magnetron sputtering

The electrical properties of Cr/Pt/Au and Ni/Au ohmic contacts with unintentionally doped In₂O₃ (U-In₂O₃) film and zinc-doped In₂O₃ (In₂O₃:Zn) prepared by reactive magnetron sputtering deposition are described. The lowest specific contact resistance of Cr/Pt/Au and Ni/Au is 2.94 × 10⁻⁶ and 1.49 × 10⁻² Ω-cm², respectively, as determined by the transmission line model (TLM) after heat treatment at 300 °C by thermal annealing for 10 min in nitrogen ambient. The indium oxide diodes have an ideality factor of 1.1 and a soft breakdown voltage of 5 V. The reverse leakage current prior to breakdown is around 10⁻⁵ A.     

Effect of doping concentration on the properties of bismuth doped tin sulfide thin films prepared by spray pyrolysis

Bismuth doped tin sulfide (SnS:Bi) thin films were deposited onto glass substrates by the spray pyrolysis technique at the substrate temperature of 350 °C. The effect of doping concentration [Bi/Sn] on their structural, optical and electrical properties was investigated as a function of bismuth doping between 0 and 8 at%. The XRD results showed that the films were polycrystalline SnS with orthorhombic structure and the crystallites in the films were oriented along (111) direction. Atomic force microscopy revealed that the particle size and surface roughness of the films increased due to Bi-doping. Optical analysis exhibited the band gap value of 1.40 eV for SnS:Bi (6 at%) which was lower than the band gap value for 0 at% of Bi (1.60 eV). The film has low resistivity of 4.788×10⁻¹ Ω-cm and higher carrier concentration of 3.625×10¹⁸ cm⁻³ was obtained at a doping ratio of 6 at%.     

Electrical and optical properties of Cu2ZnSnS4 grown by a thermal co-evaporation method and its diode application

Cu₂ZnSnS₄ (CZTS) is low cost and constitutes non-toxic materials abundant in the earth crust. Environment friendly solar cell absorber layers were fabricated by a thermal co-evaporation technique. Elemental composition of the film was stated by energy dispersive spectroscopy (EDS). Some optical and electrical properties such as absorption of light, absorption coefficient, optical band gap charge carrier density, sheet resistance and mobility were extracted. Optical band gap was found to be as 1.44 eV, besides, charge carrier density, resistivity and mobility were found as 2.14×10¹⁹ cm⁻³, 8.41×10⁻⁴ Ω cm and 3.45×10² cm² V⁻¹ s⁻¹, respectively. In this study Ag/CZTS/n-Si Schottky diode was fabricated and basic diode parameters including barrier height, ideality factor, and series resistance were concluded using current–voltage and capacitance–voltage measurements. Barrier height and ideality factor values were found from the measurements as 0.81 eV and 4.76, respectively, for Ag/CZTS/n-Si contact.     

Effect of NaOH solution on surface textured ZnO: Al films prepared by pulsed direct current magnetron sputtering

Transparent conducting Al-doped ZnO (ZnO:Al, AZO) thin films were prepared at substrate temperature of 270 °C by pulsed direct current magnetron sputtering. NaOH solution (5 wt%) was employed to etch the AZO films at room temperature, and the surface textured AZO films were obtained successfully. The relationship between the surface textured structures and the etching process controlled by etching time was discussed. The textured morphology of the etched AZO films became clear as increasing the etching time, and the AZO film etched for 30 min exhibited uniformly and distinctly crater-like surface textured structure. Correspondingly, the haze and the resistivity increased with the increasing etching time. And the resistivity of the AZO film etched for 30 min was 3.2×10⁻³ Ω cm.     

Nb-doped TiO2 sol–gel films for CO sensing applications

Nb doped titania (TiO₂:Nb) multilayered films (1–10 layers) with anatase structure were obtained by the low-cost sol–gel and dipping method on microscope glass substrates, followed by thermal treatment at 450 °C for 1 h. After each layer deposition, an intermediate annealing step was performed at 300 °C for 30 min. Doping TiO₂ sol–gel films with a low amount of Nb (0.8 at%) allows obtaining an improved CO sensor able to operate under environmental atmosphere (air). It was found that the sensor sensitivity is less dependent on the film thickness but is significantly influenced by Nb doping at the optimal working temperature of 400 °C. Good recovery characteristics were obtained for a wide CO detection range, between 0 and 2000 ppm. The gas-sensing behavior of the films was correlated with the structural, chemical and morphological properties of the multi-layered structures.     

Effects of oxygen content on the structural,optical, and electrical properties of NiO films fabricated by radio-frequency magnetron sputtering

Nickel oxide (NiO) films were deposited on Corning glass substrate with variable (0–100%) oxygen content by radio-frequency sputtering. Effects of different oxygen content on the structural, optical, and electrical properties of NiO films were studied. X-ray diffraction showed that the NiO film deposited on substrate with 0% oxygen content resulted in a random polycrystalline structure and small grain size. The introduction of oxygen gas leaded to a (200) preferential orientation and larger grain size. The transmittance decreases with oxygen content due to the increase of oxygen interstitials in NiO films. The 0%-O₂ deposited NiO film has a tensile strain and a small band gap. Upon introducing 33%-O₂ content, the NiO film exhibits a compressive strain, increasing the bandgap. However, the compressive strain is released and gradually turns into tensile strain, which leads to the narrowing of bandgap with the increase of oxygen content. Hall measurement shows the obtained NiO is p-type and the resistivity decreases from 4.3 × 10⁵ Ω-cm to 5.02 Ω-cm with increasing oxygen content from 0% to 100%. The carrier concentration increases from 6.3 × 10¹⁴ cm⁻³ to 4.6 × 10¹⁸ cm⁻³ and the mobility decreases from 26 cm²/V-s to 0.26 cm²/V-s for the NiO films deposited with oxygen content increasing from 50% to 100%. X-ray photoelectron spectroscopy showed that the Ni⁺³/Ni⁺² ratio is the origin of p-type NiO and the ratio increases from 1.32 to 2.63 by increasing the oxygen content from 0% to 100%, which caused more defects, oxygen interstitials and nickel vacancies.     

Effect of fluorine doping on the structural,optical and electrical properties of spray deposited cadmium stannate thin films

Cadmium stannate (Cd₂SnO₄) thin films were coated on Corning 1737 glass substrates at 540 °C by spray pyrolysis technique, from the aqueous solution of cadmium acetate and tin (II) chloride precursors. Fluorine doped Cd₂SnO₄ (F: Cd₂SnO₄) thin films were prepared by adding ammonium fluoride in the range of 0–5 wt% of the total weight of cadmium acetate and tin (II) chloride in the spray solution. Thickness of the prepared films is about 300 nm. X-ray diffraction analysis of the Cd₂SnO₄ and 3 wt% F: Cd₂SnO₄ films shows the signature for the growth along (222) direction. Scanning electron micrographs showed that fluorine doping effectively modifies the surface morphology of Cd₂SnO₄ films. Average optical transmittance in the visible region (500–850 nm) for Cd₂SnO₄ is ~79% and it is increased to ~83% for 1 wt% doping concentration of the NH₄F in the solution. Fluorescence spectra of F: Cd₂SnO₄ (1 wt% and 3 wt%) exhibit peak at 601 nm. F: Cd₂SnO₄ film (1 wt%) shows mobility of ~42 cm²/V s, carrier concentration of ~9.5×10¹⁹ cm^?3 and resistivity of ~1.5×10^?3 Ω cm.     

Low temperature Solution-Processed ZnO film on flexible substrate

Transparent conductive ZnO films were directly deposited on unseeded polyethersulfone (PES) substrates with a spin-spray method using aqueous solution at a low substrate temperature of 85 °C. All ZnO films were crystalline with wurtzite hexagonal structure and impurity phases were not detected. ZnO films deposited without citrate ions in the reaction solution had a rod array structure. In contrast, ZnO films deposited with citrate ions in the reaction solution had a continuous, dense structure. The transmittance of the ZnO films was improved from 11.9% to 85.3% as their structure changed from rod-like to continuous. After UV irradiation, the ZnO films with a continuous, dense structure had a low resistivity of 9.1×10⁻³ Ω cm, high carrier concentration of 2.7×10²⁰ cm⁻³ and mobility of 2.5 cm² V⁻¹ s⁻¹.     

Sol–gel derived nanocrystalline TiO2 thin films: A promising candidate for self-cleaning smart window applications

In the present work, anatase TiO₂ films are prepared by sol–gel spin coating method. The structural and optical properties of the films have been studied at different post-annealing temperatures. The photocatalytic activity and electrochromic performance of the films are investigated. The films annealed at 400 °C exhibit the highest photocatalytic activity with a rate constant of 4.56×10⁻³ min⁻¹. The electrochromic performance for the films annealed at 400 °C expressed in terms of difference in optical density (ΔOD) at 550 nm between coloured and bleached state is 0.5493. This combination of photocatalysis and electrochromism makes the sol–gel derived titania thin films as promising candidates for self-cleaning smart window applications.     

Effect of processing parameter on structural,optical and electrical properties of photovoltaic chalcogenide nanostructured RF magnetron sputtered thin absorbing films

The aim of this work was to develop high quality of CuIn_1−xGa_xSe₂ thin absorbing films with x (Ga/In+Ga)<0.3 by sputtering without selenization process. CuIn_0.8Ga_0.2Se₂ (CIGS) thin absorbing films were deposited on soda lime glass substrate by RF magnetron sputtering using single quaternary chalcogenide (CIGS) target. The effect of substrate temperature, sputtering power & working pressure on structural, morphological, optical and electrical properties of deposited films were studied. CIGS thin films were characterised by X-ray diffraction (XRD), Field emission scanning electron microscope (FE-SEM), Energy dispersive X-ray spectroscopy (EDAX), Atomic force microscopy (AFM), UV–vis–NIR spectroscopy and four probe methods. It was observed that microstructure, surface morphology, elemental composition, transmittance as well as conductivity of thin films were strongly dependent on deposition parameters. The optimum parameters for CIGS thin films were obtained at a power 100 W, pressure 5 mT and substrate temperature 500 °C. XRD revealed that thin film deposited at above said parameters was polycrystalline in nature with larger crystallite size (32 nm) and low dislocation density (0.97×10¹⁵ lines m⁻²). The deposited film also showed preferred orientation along (112) plane. The morphology of the film depicted by FE-SEM was compact and uniform without any micro cracks and pits. The deposited film exhibited good stoichiometry (Ga/In+Ga=0.19 and In/In+Ga=0.8) with desired Cu/In+Ga ratio (0.92), which is essential for high efficiency solar cells. Transmittance of deposited film was found to be very low (1.09%). The absorption coefficient of film was ~10⁵ cm⁻¹ for high energy photon. The band gap of CIGS thin film evaluated from transmission data was found to be 1.13 eV which is optimum for solar cell application. The electrical conductivity (7.87 Ω⁻¹ cm⁻¹) of deposited CIGS thin film at optimum parameters was also high enough for practical purpose.     

High photosensitivity with enhanced photoelectrical contribution in hybrid nanocomposite flexible UV photodetector

To devise a reliable strategy to develop an ultraviolet (UV) sensitive hybrid photodetector, plasma process is utilized as a single step method for production of large area nanocomposite films based on plasma polymerized aniline–titanium dioxide (PPani–TiO₂). The synthesis of PPani–TiO₂ nanocomposite films are made using reactive magnetron sputtering in combination with plasma polymerization. The deposited PPani–TiO₂ nanocomposite films are characterized and discussed in terms of structural, optical and electrochemical properties. A hybrid flexible nanostructured UV photodetector is constructed from PPani–TiO₂ nanocomposite and its optoelectronic properties are evaluated which exhibits a greatly enhanced photosensitivity resulting in high photoconductive gain (G = 4.56 × 10⁴) and high responsivity (R = 9.36 × 10³ AW⁻¹) under UV illumination of 254 nm. The flexible devices are successfully operated under bending up to 170° (bending radius, R = 8 mm) and showed a good folding strength and stability. The proposed plasma based method provides a green technology where the self-assembly of molecules, that is, the spontaneous association of atomic or molecular building blocks under plasma environment, emerge as a successful strategy to form well-defined structural and morphological units of nanometer dimensions.