Piezoelectric diffuser/nozzle micropump with double pump chambers

To eliminate check valve fatigue and valve clogging, diffuser/nozzle elements are used for flow rectification in a valveless diffuser/nozzle micropump instead of valves. However, the application of this type of micropump is restricted because of its pulsating or periodic flow and low pump flux. In this paper, a diffuser/nozzle Si/Glass micropump with two pump chambers by IC and MEMS technology is designed. The fabrication process requires only one mask and one etch step, so that the fabrication has the advantages of low cost, short processing period, and facilitation of miniaturization. The pump is equipped with a glass cover board so as to conveniently observe the flow status. Pump-chambers and diffuser elements are fabricated by the anisotropic KOH-etch technique on the silicone substrate, and the convex corner is designed to compensate for an anisotropic etch. The driving force of the micropump is produced by the PZT piezoelectric actuator. The pump performance with both actuators actuated in anti-or same-phase mode is also researched. The result indicates that the micropump achieves great performance with the actuators working at anti-phase. This may be because the liquid flows steadily, pulse phenomenon is very weak, and the optimal working frequency, pump back pressure, and flow rate are both double that of the pump driven in same-phase.     

Design and analysis of a double superimposed chamber valveless MEMS micropump

The newly designed micropump model proposed consists of a valveless double chamber pump completely simulated and optimized for drug delivery conditions. First, the inertia force and viscous loss in relation to actuation, pressure, and frequency is considered, and then a model of the nozzle/diffuser elements is introduced. The value of the flowrate obtained from the first model is then used to determine the loss coefficients starting from geometrical properties and flow velocity. From the developed model IT analysis is performed to predict the micropump performance based on the actuation parameters and no energy loss. A single-chamber pump with geometrical dimensions equal to each of the chambers of the double-chamber pump was also developed, and the results from both models are then compared for equally applied actuation pressure and frequency. Results show that the proposed design gives a maximum flow working frequency that is about 30 per cent lower than the single chamber design, with a maximum flowrate that is 140 per cent greater than that of the single chamber. Finally, the influences of geometrical properties on flowrate, maximum flow frequency, loss coefficients, and membrane strain are examined. The results show that the nozzle/ diffuser initial width and chamber side length are the most critical dimensions of the design.     

Simulation of the fluidic features for diffuser/nozzle involved in a PZT-based valveless micropump

PZT-based valveless micropump is a microactuator that can be used for controlling and delivering tiny amounts of fluids, and diffuser/nozzle plays an important role when this type of micropump drives the fluid flowing along a specific direction. In this paper, a numerical model of micropump has been proposed, and the fluidic properties of diffuser/nozzle have been simulated with ANSYS. With the method of finite-element analysis, the increased pressure drop between inlet and outlet of diffuser/nozzle induces the increment of flow rate in both diffuser and nozzle simultaneously, but the increasing rate of diffuser is faster than that of nozzle. The L/R, ratio of L（length of cone pipe） and R （radius of minimal cross section of cone pipe） plays an important role in fluidic performance of diffuser and nozzle as well, and the mean flow rate will decrease with increment of L/R. The mean flow rate reaches its peak value when L/R with the value of 10 regardless the divergence angle of diffuser or nozzle. The simulation results in-dicate that the fluidic properties of diffuser/nozzle can be defined by its geometric structure, and accordingly determine the efficiency of micropump.     

基于MEMS的压电微泵建模与优化

以压电驱动的无阀微泵为研究对象,根据扩张管/收缩管的压力损失系数和连续方程,建立了无阀微泵的理论模型。利用有限元分析软件,建立了无阀微泵有限元模型,进行了耦合场仿真分析。模拟并分析了不同边界条件下驱动电压、电压频率、泵膜厚度、压电薄膜厚度和压电材料对无阀微泵输出特性的影响。仿真结果显示,无阀微泵具有很好的整流特性,并且驱动电压越大,输出特性越好。在局部固定边界条件下,当压电薄膜上施加电场强度为500 V/mm的驱动电压时,存在最优的压电薄膜厚度,使得微泵的输出流量最大。研究结果为无阀微泵的优化设计提供了依据。     

悬臂式微型压电泵的试验研究

利用压电晶片致动式压电泵的工作原理,提出一种整机采用迭片式结构,单向阀采用悬臂式薄片阀的新结构微型压电泵,设计、制作了试验样机,并对该泵的工作性能进行了较为系统的试验测试和研究。通过试验测试：该泵工作性能稳定,整机具有较高的体积功能比。该泵设计方法及制作工艺对研发适于大量生产的实用微型泵是一个有益的尝试。     

Fabrication and characterization of two-chamber and three-chamber peristaltic micropumps

Two-chamber and three-chamber peristaltic micropumps with straight channels or tapered channels are fabricated by UV photolithography. Piezoelectric buzzers are chosen as actuation elements because they are cheap and have high actuation amplitude. A negative photoresistive material, SU8-25, is used as a structure material, and PDMS is chosen to bond different parts of the micropump. The effects of working phases and channel geometries are investigated and the performance of two-chamber and three-chamber micropumps is compared. The results indicate that three-chamber micropumps have better flow rates than two-chamber counterparts. For three-chamber micropumps, four-working phases have the best flow rate, six-working phased are the second, and three-working phases are the last. The channel length may have no clear effect on the flow rate, while the channel width and the angle of nozzle/diffuser have evident effects on the flow rates.     

Simulation and optimization of a piezoelectric micropump for medical applications

We designed a valveless micropump excited by a piezoelectric actuator for medical applications. The complete electric–fluid–solid coupling model is built upon using ANSYS software (Canonsburg, PA) to investigate the behaviors of the micropump. The effects of the geometrical dimensions on the micropump characteristics and its efficiency are analyzed. The simulation results show that there is an optimal thickness of the piezoelectric layer to obtain a large pump flow, and that this optimal thickness is affected by the material and the thickness of the pump membrane. To enhance the performance of the micropump, some important diffuser parameters, such as the diffuser length, the diffuser angle, and the neck width, should be optimized. However, the variations of the diffuser’s geometrical dimensions do not affect the optimal thickness of the piezoelectric layer.     

Study of fluid damping effects on resonant frequency of an electromagnetically actuated valveless micropump

As fluid flow effects on the actuation and dynamic response of a vibrating membrane are crucial to micropump design in drug delivery, this paper presents both a mathematical and finite-element analysis (FEA) validation of a solution to fluid damping of a valveless micropump model. To further understand the behavior of the micropump, effects of geometrical dimensions and properties of fluid on the resonant frequency are analyzed to optimize the design of the proposed micropump. The analytical and numerical solutions show that the resonant frequency decreases with the slenderness ratio of the diffuser and increases with the opening angle, high aspect ratio, and thickness ratio between the membrane and the fluid chamber depth. A specific valveless micropump model with a 6-mm diameter and 65-μm thickness polydimethylsiloxane (PDMS) composite elastic membrane was studied and analyzed when subjected to different fluids conditions. The resonant frequency of a clamped circular membrane is found to be 138.11 Hz, neglecting the fluid. For a gas fluid load, the frequency is attenuated by slightly shifting to 104.76 Hz and it is significantly reduced to 5.53 Hz when the liquid fluid is loaded. Resonant frequency remarkably shifts the flow rate of the pump; hence, frequency-dependent characteristics of both single-chamber and dual-chamber configuration micropumps were investigated. It was observed that, although the fluid capacity is doubled for the latter, the maximum flow rate was found to be around 27.73 μl/min under 0.4-A input current with an excitation frequency of 3 Hz. This is less than twice the flow rate of a single chamber of 19.61 μl/min tested under the same current but with an excitation frequency of 4.36 Hz. The proposed double-chamber model analytical solution combined with the optimization of the nozzle/diffuser design and assuming the effects of damping proved to be an effective tool in predicting micropump performance and flow rate delivery.     

微型无阀泵的数值仿真与参数设计

介绍了无阀型微泵的特点及其工作原理，针对无阀微型泵收缩/扩散口的流动特征进行了数值分析，得出了流量，压力的分布特征和关系曲线，分析了收/扩散口的几何参数对泵的输出性能的影响，采用CFD（Computational Fluid Dynamics)技术对泵内流体进行了有限元仿真，并将仿真与计算结果进行限分析比较。     

动态被动阀微泵的设计优化和制造

研究的动态被动阀微泵是一种基于微机械技术的振膜型无阀微泵。相对于有阀微泵而言，有更高的工作频率和可靠性，结构简单，加工制造的成本比较低，更容易满足实际应用中的各种要求。讨论了动态被动阀的工作机理，结合流体力学的基本理论与动态被动阀微泵的特点，采用有限单元方法以及相关工具软件ANSYS/FLOTRAN，对整个动态被动阀微泵模型进行了计算、求解和模拟，并根据计算结果及加工工艺特点对其结构进行优化。用基于集成电路制造技术的微细加工工艺分别对动态被动阀微泵的各组成部分进行加工，并组装成完整的动态被动阀微泵。     

基于悬臂梁阀的微型压电泵的实验研究

利用压电晶片致动式压电泵的工作原理,提出一种整机采用迭片式结构,单向阀采用悬臂梁式薄片阀的新结构微型压电泵,设计、制作了实验样机,并对该泵的工作性能进行了较为系统的实验测试和研究,并提出了利用多腔体串联结构提高压电泵性能的优化设计方案。通过实验测试:该泵工作性能稳定,整机具有较高的体积功能比(样机尺寸:15 mm×1.8 mm;50 V正弦信号输入,80 Hz条件下,最大输出压力22 kPa,流量达到3.6 m l/m in)。该泵的设计方法及所用制作工艺对研发适于大量生产的实用微型泵是一个有益的尝试。     

FLOW DIRECTION OF PIEZOELECTRIC PUMP WITH NOZZLE／DIFFUSERELEMENTS

The piezoelectric pump with nozzle/diffuser-elements, which oscillating form differing from regular volumetric reciprocating or rotating pumps because there are nozzle/diffuser-elements substituted for regular valves, is a new type pump whose actuator is a piezoelectric ceramal part with verse piezoelectric effect. In recent year, piezoelectric pump is paid increasing attention to because it is an ideal candidate in application in such area as medical health, mechanical tools and micro-mechanism. The fundamental research on it, however, is still not made through. Focuses on the phenomenon of different directions of flow among Germany pump, Chinese pump and Swiss pump, which are all fitted with nozzle/diffuser-elements, and analyzes the cone angle of nozzle/diffuser-elements based on the flow equation of valve-less piezoelectric pump with nozzle/diffuser-elements. As a result, the concepts of diffuser loss coefficient and loss coefficient are introduced to explain these phenomena, from which a discussion     

非对称群峰结构无阀压电泵的理论分析

提出了一种新颖的非对称群峰结构无阀压电泵.利用泵底的空间,沿泵的出入口轴线方向开发出非对称群峰结构,从而在泵腔内部形成串联的渐扩/渐缩流道,替代了传统的安装在泵腔外的渐扩/渐缩流管.当泵工作时,非对称群峰结构能驱使流体向单一方向流动.建立了数学模型以表达该泵的平均能量损失与流量之间的关系,并分析了该泵的工作原理.实验验证了理论分析的正确性,当一个坡面角固定为90°,而另一坡面角在10°～60°之间变化时,实验数据与理论计算的误差<10%.     

静电微泵的3D流固耦合动态特性分析

采用任意拉格朗日—欧拉(ALE)描述建立了无阀微泵的静电-结构-流体全耦合三维模型,数值仿真表明:泵内流体的动态特性与泵膜的运动存在着密切的关系;扩散/收缩口单元两端的压力差必须达到一定值后才有"整流"泵送效用;泵腔内流体压力的分布几乎一致;流体流动的最大雷诺数远小于宏观条件下认定的临界雷诺数;流体黏滞损失的非线性不容忽视。     

Performance of a serial-connection multi-chamber piezoelectric micropump

1Introduction Micropumpsaretheessentialcomponentsin micro fluidicsystemwhichhasemergedasa popularareaofresearchwiththedevelopmentof micro electro mechanicalsystem(MEMS).Sinceoneoftheearlypiezoelectricmicropumps forinsulindeliverywasfabricatedin1978,more andmoreeffortshavebeenmadeintheresearch ofmicropumps[1].Duetotheirpreciselycon trolledflowrate,micropumpspresentpromising applicationsinanalyticalchemistry,medical treatment,pharmacy,bioengineering,fuel drop generatorforautomobileheater,etc.A…     

一种新型单腔双振子压电泵的结构设计和性能试验

为优化单腔双振子压电泵的结构,提高输出性能,设计了一种新型结构的单腔双振子压电泵。将新设计结构同前期设计结构进行了比较,并对两种结构的试验样机进行了输出流量测试。试验显示,新结构的输出流量是前期结构输出流量的2倍,最大流量可达800mL/min。将新结构加工了不同腔体初始容积样机,得到了压缩比对泵输出性能的影响。试验发现,当腔体高度为1.2mm,工作时的压缩比为1/46,此时单腔双振子压电泵整体输出效果最好。分析了单腔双振子压电输送液体和气体时工作特点,得到泵输送液体介质时最佳工作频率点远远低于输送气体介质。     

NiTi/Si薄膜驱动微型无阀泵的系统研究

介绍了形状记忆合金 /硅 (Ni Ti/Si)复合膜驱动的微型无阀泵的结构及工作原理 ,采用 Matlab对微泵的压力 P和流量 Q进行了计算和仿真 ,并将仿真结果与实验结果进行了对比。通过分析驱动膜的驱动频率与泵的几何结构对微泵性能的影响 ,得到微泵的优化方案。     

Electro-magnetically actuated valveless micropump with two flexible diaphragms

We present a parallel dynamic passive valveless micropump, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a polydimethyl siloxane (PDMS) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, this paper designed a micropump. And the relative length (L/d) of the micropump's nozzle is 4. A 7×7 array of permanent magnetic posts is embedded in the PDMS film. Two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS and Matlab are adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.     

新型压电无阀微泵效率分析及试验研究

提出了一种用于无阀压电微泵的新型效率模型,根据传统扩张/收缩管型结构设计出侧面带有环形面积新型锯齿型带锥度和无锥度两种微流道.用CFD软件对传统扩张/收缩型微流道及新型锯齿型微流道进行了三维流动模拟,绘制出几种微流道特性曲线,并用新型效率模型计算了三种微流道在两种限制条件(最大流量零压力头和最大压力头零流量)下的稳态效率,并进行了分析比较,结果表明由于结构改变,锯齿型微流道最大流量和压力损失实现了预期的变化,并且带锥度锯齿型微流道微泵稳态效率均大于标准扩张/收缩型微流道及无锥度锯齿型微流道微泵.最后制作出含有标准扩张/收缩及带锥度锯齿型微流道结构微泵,并对其进行试验,结果证明由于环形面积和锥度存在,带锥度锯齿形微流道微泵性能明显优于传统扩张/收缩型微泵.     

半柔性阀压电泵理论与实验

根据静脉瓣结构形式,设计了一种半柔性阀压电泵。首先,介绍了半柔性阀压电泵的结构及工作原理;其次,对阀体进行了理论分析;最后,加工了实验样机,对样机进行性能测试实验。实验结果表明:在驱动电压为220V、频率为7Hz时,半柔性阀压电泵的进出口压差可达到199mm;在驱动电压为220V、频率为11Hz时,半柔性阀压电泵的实验流量为44.5ml/min。随着驱动电压的升高,工作频率与流量出现单峰与双峰的现象。该研究证明了半柔性阀压电泵具有泵的功能并可以实现有阀和无阀状态,验证了其有效性和理论分析的正确性。