多孔硅层孔隙率对其热绝缘性能的影响

研究了多孔硅层孔隙率对其热绝缘性能的影响机制.以P 型硅片为基底,通过双槽电化学腐蚀法制备多孔硅.采用微拉曼光谱法对多孔硅的热导系数进行了测量,结果表明,多孔硅的热导系数随其孔隙率的增大而明显下降,实验中热导系数最低可达到0.624W/(m·K),从而通过降低热导系数使多孔硅的绝热性能得到了增强.     

多孔硅基热敏薄膜的制备与性能

对MEMS用具有绝热性能的多孔硅基底上沉积的热敏感薄膜进行了研究．首先用电化学方法制备多孔硅,分别在多孔硅基底和硅基底上通过溅射镀膜方法沉积氧化钒、Cu、Au热敏薄膜,测试多孔硅基底和硅基底上的氧化钒及金属薄膜电阻的热敏特性．结果表明,在多孔硅基底表面沉积的热敏薄膜具有与硅基表面热敏薄膜同样的热敏特性且表现出更高的灵敏度;此外,对沉积在不同制备条件得到的多孔硅上的氧化钒薄膜电阻热敏特性进行比较,发现随着孔隙率和厚度的增加,多孔硅的绝热性能提高,其上沉积的氧化钒薄膜电阻热敏特性增强．     

多孔硅的场发射特性研究

多孔硅是一种很有前途的场发射材料,研究多孔硅的场发射有着实际的意义.模仿制备了具有弹道电子发射的特殊结构的多孔硅,测试了其场发射性能,比较了腐蚀电流逐渐变小所制备的多孔硅与腐蚀电流不变所制备的多孔硅的场发射性能,发现前者是提高场发射性能的一种有效方法.     

纳米多孔二氧化硅绝热薄膜的研究进展

作为微电子机械系统(MEMS)技术中最有潜力的绝热材料,纳米多孔二氧化硅薄膜近年来引起了广泛的关注.研究表明其绝热性能与微观结构密切相关.综述了纳米多孔二氧化硅薄膜的制备方法、表征手段和绝热机理,并讨论了目前存在的一些问题和今后的发展方向.     

MEMS中多孔硅绝热技术

主要介绍了多孔硅的制备方法(化学法、电化学法及原电池法等)、多孔硅导热系数测试的几种常用手段(温度传感器法、显微拉曼散射法及光声法等)、导热系数的理论模型及影响因素．此外,采用不同方法制备了多孔硅样品,分析了其表面形貌并用显微拉曼光谱法测定了导热系数．结果发现,化学法制备的多孔硅孔径尺寸大于微米量级,而利用大孔硅电化学和原电池法得到的样品孔径尺寸小(约20nm),属于介孔硅．由于腐蚀条件的不同,多孔硅的孔隙率和厚度也不同,多孔硅的导热系数随孔隙率和厚度的增大而迅速减小．     

PI掺杂多孔SiO2薄膜的制备及性能研究进展

近年来对掺杂纳米SiO2的聚酰亚胺薄膜的各种性能进行了充分的研究,而对以少量PI掺杂的多孔SiO2薄膜的研究较少.介绍了PI掺杂多孔SiO2薄膜制备过程中影响薄膜性能及应用的两个关键因素(相分离和热处理固化成膜),理论分析了PI掺杂多孔SiO2薄膜的力学性能和绝热性能,最后讨论了目前存在的一些问题和今后的发展趋势.     

多孔硅的电化学制备与研究

以电化学方法制备了多孔硅材料并通过表面轮廓测试仪、原子力显微镜、显微拉曼光谱仪等设备对制备多孔硅的孔隙率、厚度、表面形貌、以及热导率进行了表征.结果发现,本实验制备的多孔硅属于介孔硅(15～20nm),其孔隙率随腐蚀时间和腐蚀电流的变化有先增大后减小的趋势.增加多孔硅的厚度和孔隙率,可以使得多孔硅的热导率显著降低(最低可低至0.62W/m·K).     

纳米多孔SiO2/PI杂化薄膜的制备与性能研究

采用碱催化正硅酸乙酯(TEOS)的溶胶-凝胶法与分子模板法相结合,通过旋转涂覆在硅衬底上制备了掺杂聚酰亚胺(PI)的纳米多孔SiO2薄膜,并利用差热分析(DSC-TGA)、红外吸收光谱(FTIR)、原子力显微镜(AFM)、X射线衍射(XRD)、台阶仪(Atom-ic-Profiler)等对薄膜的性能进行了分析表征.结果表明,所制备的SiO2/PI杂化多孔薄膜为多孔的无定型结构,具有较好的热稳定性及力学性能,一层膜和两层膜的平均孔径分别为68和72nm,厚度分别为917和1288nm.     

电化学腐蚀多孔硅表面形貌的结构特性

多孔硅作为微电子机械系统中重要的热绝缘层和牺牲层材料,其表面形貌结构特性是影响多孔硅上薄膜器件性能的重要因素,为此,利用双槽电化学腐蚀方法制备了多孔硅薄膜,并通过原子力显微镜和场发射扫描电子显微镜对制备多孔硅的表面形貌和孔径大小分布进行了观察．结果发现：腐蚀初期,在硅表面会有大量的硅柱形成,硅柱的直径、高度、分布密度与电流密度成正比关系;硅柱在进一步腐蚀过程中会消失,多孔硅的表面粗糙度随着腐蚀的进行,先减小再增大,最后达到稳定值0．52nm;多孔硅孔径大小分布区间随腐蚀时间增加变窄．     

图案化厚膜多孔硅制备与表征

图案化多孔硅是微电子、微机械、光电子器件的重要组成部分.实验以含Si3N4保护层的光刻单晶硅片为基底,采用电化学阳极氧化法制备图案化厚膜多孔硅,分析阳极氧化前后Si3N4保护层表面形貌变化特征和光刻尺寸对图案化多孔硅宽度、膜层厚度的影响规律,表征图案化多孔硅的结构、组成与发光性能.结果表明,氧化前Si3N4保护层局部区域出现枝晶,阳极氧化后形成不均匀孔状结构;制备的图案化多孔硅膜厚62～83μm,其横向扩展程度和膜层厚度均随光刻尺寸增大呈减小趋势;图案化多孔硅微结构含大量不规则裂纹和硅柱,新鲜制备的表面含Si-Hx键,其光致发光峰值波长650nm.     

梯度热障涂层热冲击性能研究

采用等离子喷涂的方法,分别获得了２ｍｍ ＺｒＯ２－ＮｉＣｒＡｌ和ＺｒＯ２－Ｎｉ／Ａｌ系梯度热障涂层。热冲击实验结果表明,两种涂层具有不同的失效机理。ＺｒＯ２－ＮｉＣｒＡｌ系的失效是由于基于基体氧化引起的涂层整体脱落;而ＺｒＯ２－Ｎｉ／Ａｌ系的失效是支径向裂纹扩展到Ｎｉ／Ａｌ底层氧化共同作用的结果。     

Anisotropic Thermal Diffusivities of Plasma-Sprayed Thermal Barrier Coatings

Thermal barrier coatings (TBCs) are used to shield the blades of gas turbines from heat and wear. There is a pressing need to evaluate the thermal conductivity of TBCs in the thermal design of advanced gas turbines with high energy efficiency. These TBCs consist of a ceramic-based top coat and a bond coat on a superalloy substrate. Usually, the focus is on the thermal conductivity in the thickness direction of the TBC because heat tends to diffuse from the surface of the top coat to the substrate. However, the in-plane thermal conductivity is also important in the thermal design of gas turbines because the temperature distribution within the turbine cannot be ignored. Accordingly, a method is developed in this study for measuring the in-plane thermal diffusivity of the top coat. Yttria-stabilized zirconia top coats are prepared by thermal spraying under different conditions. The in-plane and cross-plane thermal diffusivities of the top coats are measured by the flash method to investigate the anisotropy of thermal conduction in a TBC. It is found that the in-plane thermal diffusivity is higher than the cross-plane one for each top coat and that the top coats have significantly anisotropic thermal diffusivity. The cross-sectional and in-plane microstructures of the top coats are observed, from which their porosities are evaluated. The thermal diffusivity and its anisotropy are discussed in detail in relation to microstructure and porosity.     

车室内人体热舒适性的计算模型

在车室内热环境计算的基础上,借助于人体热调节系统以及人体生物热方程计算了人体温度场的分布,并且利用当量温度Teq去评价不同环境下人体的热舒适性。文中完成了一个典型算例,预测了司机与乘客的热舒适性问题,并与国外提供的热舒适范围作了比较,结果令人满意。显然,这一研究对进一步改进车室内环境的控制方法具有重要的指导意义。     

Characterization of Thermal Barrier Coatings Using Thermal Methods

Although low thermal conductivity was one of the major reasons for the development of thermal barrier coatings (TBCs) based on yttria stablilized zirconia (YSZ), its mechanical properties are often considered crucial in failure analysis and assessment of coatings. Thermal properties usually are treated as just basic material parameters and have not been utilized widely in TBC characterization and failure analysis. In fact, thermal transport properties such as thermal conductivity and thermal diffusivity are closely related to the microstructural changes of the TBC. In this paper, a brief overview of characterization of TBCs using thermal thermophysical properties and temperature mapping is presented.     

热障涂层热导率的研究进展

简要回顾了热障涂层体系的发展,讨论了氧化锆陶瓷材料的传热规律,包括涂层微观结构、陶瓷成分等因素的影响.同时指出了改进陶瓷涂层热导率的方法和开发适用于更高温度下的陶瓷涂层材料的指导原则,并详细介绍了改善热障涂层热导率的研究现状.     

Influence of Thermal Strain on Thermal Properties of Composites

The temperature dependence of the thermal expansion characteristics of the AS21 magnesium alloy, AS21–25 vol% Saffil fiber composite and the Mg-10 vol% Saffil fiber composite has been measured in the temperature range from 20 to 380°C. The expansion characteristics were influenced by the residual and thermal strains. The residual strain was removed within the first thermal cycle. The relative elongation of the tensile pre-deformed AS21–25 vol% Saffil fiber composite is lower than that for the sample without deformation and for the composite pre-deformed in compression. The anisotropy of the thermal expansion is demonstrated on the Mg-10 vol% Saffil fiber composite. The coefficient of thermal expansion (CTE) in the transverse direction (TD) (the planes of the short Saffil fibers are laid perpendicular to the axis of the sample) is higher than the CTE in the longitudinal direction (LD) (the planes of the short Saffil fibers are laid parallel to the axis of the sample). The anisotropy and the thermal strain influence the thermal diffusivity for AS21 composites investigated at temperatures between 20 and 380°C.Paper presented at the Seventeenth European Conference on Thermophysical Properties, September 5-8, 2005, Bratislava, Slovak Republic.     

基于暖体假人的热环境评价指标

由于暖体假人的对流及辐射散热特性与实际人体非常接近，因此，在热环境工效学研究中发挥着突出的作用。该文介绍了几种通过暖体假人实验得到的热环境评价指标，提出了用暖体假人测定湿球黑球温度的好处，给出了各指标的计算公式，并对它们作了简单的分析。最后，将各指标与平均辐射温度进行了列表对比。     

A Method for Thermal Diffusivity Determination of Thermal Insulators

A so-called “three-point” (3P) method has been developed for thermal diffusivity measurements of thermal insulating materials. One side of a cylindrical specimen, sandwiched between two thin metal plates, is subjected to intense light from an incandescent lamp to generate a thermal perturbance. The temperature response is measured in three locations along the test specimen. Thermocouples are located at the front and rear faces of the specimen, and the third is placed inside the specimen at a known location. The two outside temperatures are used as boundary conditions, and the unknown thermal diffusivity is calculated from the third temperature versus time curve. The method combines the advantages of rapid transient non-contact heating methods with the well-defined boundary conditions of steady-state methods. The results of the 3P method are compared with those from steady-state methods for a micro-porous insulation material and for a honeycomb structure.