Studies on Al<Subscript>2</Subscript>O<Subscript>3</Subscript>/ZrO<Subscript>2</Subscript>/Al<Subscript>2</Subscript>O<Subscript>3</Subscript> high K gate dielectrics applied in a fully depleted SOI MOSFET

Al₂O₃/ZrO₂/Al₂O₃ gate stacks were prepared on ultrathin SOI (Silicon on insulator) substrates by ultrahigh vacuum electron beam evaporation and post-annealed in N₂ at 450°C for 30 min. Three clear nanolaminate layered structure of Al₂O₃(2.1 nm)/ZrO₂(3.5 nm)/Al₂O₃(2.3 nm) was observed with a high-resolution cross-sectional transmission electron microscope (HR-XTEM). High frequency capacitance voltage (C-V) characteristics of a fully depleted (FD) SOI MOS capacitor at 1 and 5 MHz were studied. The minority carriers determine the high frequency C-V properties, which is opposite to the case of bulk MOS capacitors. The series resistance of the SOI substrate is found to be the determinant factor of the high frequency characteristics of FD SOI MOS capacitors. This article is based on a presentation in “The 7th Korea-China Workshop on Advanced Materials” organized by the Korea-China Advanced Materials Cooperation Center and the China-Korea Advanced Materials Cooperation Center, held at Ramada Plaza Jeju Hotel, Jeju Island, Korea on August 24≈27, 2003.     

Cold spray of SiC and Al<Subscript>2</Subscript>O<Subscript>3</Subscript> with soft metal incorporation: A technical contribution

Al + SiC, Al + Al₂O₃ composites as well as pure Al, SiC, and Al₂O₃ coatings were prepared on Si substrates by the cold gas dynamic spray process (CGDS or cold spray). The powder composition of metal (Al) and ceramic (SiC, Al₂O₃) was varied into 1:1 and 10:1 wt.%, respectively. The propellant gas was air heated up to 330 °C and the gas pressure was fixed at 0.7 MPa. SiC and Al₂O₃ have been successfully sprayed producing coatings with more than 50 μm in thickness with the incorporation of Al as a binder. Also, hard ceramic particles showed peening effects on the coating surfaces. In the case of pure Al metal coating, there was no crater formation on hard Si substrates. However, when Al mixed with SiC and Al₂O₃, craters were observed and their quantities and sizes depended on the composition, aggregation and size of raw materials.     

Fabrication and Properties of Plasma-Sprayed Al<Subscript>2</Subscript>O<Subscript>3</Subscript>/ZrO<Subscript>2</Subscript> Composite Coatings

Al₂O₃ /xZrO₂ (where x = 0, 3, 13, and 20 wt.%) composite coatings were deposited onto mild steel substrates by atmospheric plasma spraying of mixed α-Al₂O₃ and nano-sized monoclinic-ZrO₂ powders. Microstructural investigation showed that the coatings comprised well-separated Al₂O₃ and ZrO₂ lamellae, pores, and partially molten particles. The coating comprised mainly of metastable γ-Al₂O₃ and tetragonal-ZrO₂ with trace of original α-Al₂O₃ and monoclinic-ZrO₂ phases. The effect of ZrO₂ addition on the properties of coatings were investigated in terms of microhardness, fracture toughness, and wear behavior. It was found that ZrO₂ improved the fracture toughness, reduced friction coefficient, and wear rate of the coatings.     

HVOF-Sprayed Coatings Engineered from Mixtures of Nanostructured and Submicron Al<Subscript>2</Subscript>O<Subscript>3</Subscript>-TiO<Subscript>2</Subscript> Powders: An Enhanced Wear Performance

In previous studies, it has been demonstrated that nanostructured Al₂O₃-13 wt.%TiO₂ coatings deposited via air plasma spray (APS) exhibit higher wear resistance when compared to that of conventional coatings. This study aimed to verify if high-velocity oxy-fuel (HVOF)-sprayed Al₂O₃-13 wt.%TiO₂ coatings produced using hybrid (nano + submicron) powders could improve even further the already recognized good wear properties of the APS nanostructured coatings. According to the abrasion test results (ASTM G 64), there was an improvement in wear performance by a factor of 8 for the HVOF-sprayed hybrid coating as compared to the best performing APS conventional coating. When comparing both hybrid and conventional HVOF-sprayed coatings, there was an improvement in wear performance by a factor of 4 when using the hybrid material. The results show a significant antiwear improvement provided by the hybrid material. Scanning electron microscopy (SEM) at low/high magnifications showed the distinctive microstructure of the HVOF-sprayed hybrid coating, which helps to explain its excellent wear performance. This article is an invited paper selected from presentations at the 2007 International Thermal Spray Conference and has been expanded from the original presentation. It is simultaneously published in Global Coating Solutions, Proceedings of the 2007 International Thermal Spray Conference, Beijing, China, May 14-16, 2007, Basil R. Marple, Margaret M. Hyland, Yuk-Chiu Lau, Chang-Jiu Li, Rogerio S. Lima, and Ghislain Montavon, Ed., ASM International, Materials Park, OH, 2007.     

The influence of cryogenic deformation on Bi2223 superconducting tapes

The influence of cryogenic deformation on Bi2223 superconducting tapes has been investigated in this paper. Mechanical deformation was carried out on Ag-sheathed mono- and multi- filamentary tapes and silver alloy-sheathed multi- filamentary tapes at liquid nitrogen temperature (77 K) and room temperature, respectively. Results show that the critical current of the Bi2223 tapes is significantly enhanced by cryogenic deformation. SEM microstructure observations show that the cryogenic-tapes have higher core density, smoother silver/superconductor interface, and better grain alignment. Tensile tests indicate that the tapes pressed at liquid nitrogen temperature have better tensile behavior than those pressed at room temperature. This article is based on a presentation in “The 7th Korea-China Workshop on Advanced Materials” organized by the Korea-China Advanced Materials Cooperation Center and the China-Korea Advanced Materials Cooperation Center, held at Ramada Plaza Jeju Hotel, Jeju Island, Korea on August 24–27, 2003.     

Dependency of fracture toughness of plasma sprayed Al<Subscript>2</Subscript>O<Subscript>3</Subscript> coatings on lamellar structure

The fracture toughness of plasma-sprayed Al₂O₃ coatings in terms of critical strain energy release rate G _Ic was investigated using a tapered double cantilever beam (TDCB) approach. This approach makes the fracture toughness be measured only using the critical fracture load disregarding crack length during test. The Al₂O₃ coatings were deposited under different spray distances and plasma powers to clarify the effect of spray parameters on the G _Ic of the coatings. The fracture surfaces were examined using scanning electron microscope. On the basis of an idealized layer microstructure model for thermal sprayed coatings, the theoretical relationship between the cohesive fracture toughness and microstructure is proposed. The correlation between the calculated fracture toughness and observed value is examined. It was found that the fracture toughness of plasma sprayed Al₂O₃ coatings is not significantly influenced by spray distance up to 110 mm, and further increase in spray distance to 130 mm resulted in large decrease in the fracture toughness of the coatings. The G _Ic value predicted based on the proposed model using lamellar interface mean bonding ratio and the effective surface energy of bulk ceramics agreed well with the observed G _Ic data. Such agreement evidently shows that the fracture toughness of thermally sprayed ceramic coatings at the direction along coating surface is determined by lamellar interface bonding.     

Effect of a surface treatment for LiNi<Subscript>1/3</Subscript>Co<Subscript>1/3</Subscript>Mn<Subscript>1/3</Subscript>O<Subscript>2</Subscript> cathode material in lithium secondary batteries

LiNi_1/3Co_1/3Mn_1/3O₂ cathode material was surface-treated to improve its electrochemical performance. Al₂O₃ nanoparticles were coated onto the surface of LiNi_1/3Co_1/3Mn_1/3O₂ powder using a sol-gel method. The as-prepared Al₂O₃ nano-particle was identified as the cubic structure of Al₂O₃. XRD showed that the LiNi_1/3Co_1/3Mn_1/3O₂ structure was not affected by the Al₂O₃ coating. With a coating of 3 wt.% Al₂O₃ on LiNi_1/3Co_1/3Mn_1/3O₂, the cyclic-life performance and rate capability were improved. However, heavier coatings (5 wt.%) on LiNi_1/3Co_1/3Mn_1/3O₂ resulted in a considerable decrease of the discharge capacity and rate capability. The thermal stability of LiNi_1/3Co_1/3Mn_1/3O₂ materials was greatly improved by the 3 wt.% Al₂O₃ coating.     

Up-Date of a Thermodynamic Database of the ZrO<Subscript>2</Subscript>-Gd<Subscript>2</Subscript>O<Subscript>3</Subscript>-Y<Subscript>2</Subscript>O<Subscript>3</Subscript>-Al<Subscript>2</Subscript>O<Subscript>3</Subscript> System for TBC Applications

The thermodynamic database of the ZrO₂-Gd₂O₃-Y₂O₃-Al₂O₃ system is up-dated taking into account new data on lattice stabilities of ZrO₂, Gd₂O₃ and Y₂O₃ and heat capacity measurements for the monoclinic phase Gd₄Al₂O₉ and phase with garnet structure Gd₃Al₅O₁₂. New data for the heat capacities of Gd₂Zr₂O₇ (pyrochlore) and GdAlO₃ (perovskite) as well as on the enthalpy of formation of fluorite solid solutions (Zr_1−x Gd _x )O_2−x/2 were found to be in good agreement with calculated results. In comparison with the previous assessment, taking into account new experimental data resulted in a change of the melting character of the Gd₄Al₂O₉ phase from a peritectic one to a congruent one in the Gd₂O₃-Al₂O₃ system. Correspondently, in the ternary system ZrO₂-Gd₂O₃-Al₂O₃, the melting character of the three-phase assemblage Gd₂O₃ (B), Gd₄Al₂O₉ and GdAlO₃ changed from eutectic to transition type U. The T ₀-lines for T/M and F/T diffusionless transformations and driving force of partitioning to equilibrium assemblage T + F were calculated in the ZrO₂-Gd₂O₃-Y₂O₃ system.     

A study on the structure and electrochemical characteristics of a Ni/Al double hydroxide

Aluminium-substituted nickel based layered double hydroxides (LDHs), Ni_0.78Zn_0.04Co_0.04Co_0.02Al_0.16(OH)₂(CO₃)_0.08· 1.0H₂O, were synthesized by a chemical co-precipitating process. It was shown that the structure of the LDHs is similar with that of α-Ni(OH)₂ investigated by X-ray diffraction and transmission electron microscopy. The electrode comprising the LDHs was charged/discharged according to a galvanostatic model, and displayed better discharge capacity than the common β-Ni(OH)₂ electrode. In addition, the effects of losing structure water on structure and electrochemical performance were investigated. This article is based on a presentation in “The 7th Korea-China Workshop on Advanced Materials” organized by the Korea-China Advanced Materials Cooperation Center and the China-Korea Advanced Materials Cooperation Center, held at Ramada Plaza Jeju Hotel, Jeju Island, Korea on August 24≈27, 2003.     

Dependence of Al<Subscript>2</Subscript>O<Subscript>3</Subscript> coating thickness and annealing conditions on microstructural and electrochemical properties of LiCoO<Subscript>2</Subscript> film

We studied the dependence of Al₂O₃ coating thickness and annealing conditions on the surface morphology and electrochemical properties of Al₂O₃ coated LiCoO₂ films. The optimum coating thickness allowing for the highest capacity retention was about 24 nm. A sample consisting of Al₂O₃ coated on annealed LiCoO₂ film with additional annealing at 400 °C had a uniform coating layer between the coating materials and cathode films. This sample showed the best capacity retention of ∼91 % with a charge-cut off of 4.5 V after 30 cycles, while the bare cathode film showed a capacity retention of ∼32 % under the same conditions. The formation of second phases such as Co-Al-O was observed in the coating films by X-ray photoelectron spectroscopy (XPS). The Co-Al-O containing samples showed a higher initial capacity because of their smaller grain size, but less capacity retention than the Al₂O₃ containing samples.     

Effect of Al<Subscript>2</Subscript>O<Subscript>3</Subscript> particles on the microstructure and sliding wear of 7075 Al alloy manufactured by squeeze casting method

Aluminum (Al) alloy 7075 reinforced with Al₂O₃ particles was prepared using the stir casting method. The microstructure of the cast composites showed some degree of porosity and sites of Al₂O₃ particle clustering, especially at high-volume fractions of Al₂O₃ particles. Different squeeze pressures (25 and 50 MPa) were applied to the cast composite during solidification to reduce porosity and particle clusters. Microstructure examinations of the squeeze cast composites showed remarkable grain refining compared with that of the matrix alloy. As the volume fraction of particles and applied squeeze pressure increased, the hardness linearly increased. This increase was related to the modified structure and the decrease in the porosity. The effect of particle volume fraction and squeeze pressure on the dry-sliding wear of the composites was studied. Experiments were performed at 10, 30, and 50 N with a sliding speed of 1 m/s using a pin-on-ring apparatus. Increasing the particle volume fraction and squeeze pressure improved the wear resistance of the composite compared with that of the monolithic alloy, because the Al₂O₃ particles acted as load-bearing constituents. Also, these results can be attributed to the fact that the application of squeeze pressure during solidification led to a reduction in the porosity, and an increase in the solidification rate, leading to a finer structure. Moreover, the application of squeeze pressure improved the interface strength between the matrix and Al₂O₃ particles by elimination of the porosity at the interface, thereby providing better mechanical locking.     

Tunneling magnetoresistance in sintered Fe<Subscript>3</Subscript>O<Subscript>4</Subscript> samples diluted with Fe and α-Fe<Subscript>2</Subscript>O<Subscript>3</Subscript>

Electric transport and magnetoresistance characteristics were investigated for Fe₃O₄-x Fe(x=0, 10, 20 wt.%) samples and Fe₃O₄-α-Fe₂O₃ samples sintered at 500°C. For composition dependence of Fe₃O₄-x Fe samples, the largest room temperature MR, 3.3% at 10 kOe, was obtained from a Fe₃O₄-10 Fe sample. For the surface heat treatment dependence of Fe₃O₄ powders, the largest room temperature MR, 4% at 10 kOe, was obtained from a Fe₃O₄-α-Fe₂O₃ sample sintered with Fe₃O₄ powders heated at 200°C in air. It was found that these enhanced MR ratios always appear together with the appropriate excess resistance which is regarded as the tunneling barrier. These enhanced MR ratios of Fe₃O₄-10 Fe and Fe₃O₄-α-Fe₂O₃ samples can be explained by the increased interparticle contact sites and the appropriate thickness of α-Fe₂O₃, respectively.     

Effect of Al<Subscript>2</Subscript>O<Subscript>3</Subscript> Content on Electrical Breakdown Properties of Al<Subscript>2</Subscript>O<Subscript>3</Subscript>/Cu Composite

Al₂O₃/Cu composites were prepared by external addition of Al₂O₃, and the effect of Al₂O₃ content on microstructure, density, hardness, electrical conductivity and vacuum electrical breakdown properties was studied. The results show that with increasing Al₂O₃ addition, the density of Al₂O₃/Cu composite significantly decreases, the hardness sharply increases and then slowly decreases, but the electrical conductivity invariably decreases. The vacuum breakdown test shows that with increasing Al₂O₃ addition, the breakdown strength first sharply increases and then decreases when the Al₂O₃ content exceeds 1.2 wt.%; the chopping current always exhibits a decreasing trend and the arc life first increases and then decreases. According to the morphology of arc erosion and analysis, the arc erosion resistance increases and then decreases sharply. In the range of experiments, the optimal arc erosion resistance of Al₂O₃/Cu composite can be obtained with the addition of 1.2 wt.% Al₂O₃.     

Growth of SiGe film by using a single-wafer rapid thermal processing UHV/CVD system

Ultra-high-vacuum chemical vapor deposition (UHV/CVD) system displays excellent performance for the growth of high-quality SiGe film. Investigations have shown that have shown that SiGe film grown by this system has high quality. A 10-finger SiGe hetero-junction bipolar transistor (HBT) device displayed good electrical performance. The current gain was about 500, and the f_T was 5.4 GHz with f_max 7.5 GHz under V_CB=3 V, I_C=10 mA. This article is based on a presentation in “The 7th Korea-China Workshop on Advanced Materials” organized by the Korea-China Advanced Materials Cooperation Center and the China-Korea Advanced Materials Cooperation Center, held at Ramada Plaza Jeju Hotel, Jeju Island, Korea on August 24–27, 2003.     

Phase Relations in the ZrO<Subscript>2</Subscript>-Nd<Subscript>2</Subscript>O<Subscript>3</Subscript>-Y<Subscript>2</Subscript>O<Subscript>3</Subscript> System: Experimental Study and Advanced Thermodynamic Modeling

Phase equilibria in the ZrO₂-Nd₂O₃-Y₂O₃ system at 1523-1873 K have been investigated by x-ray diffraction (XRD) and scanning electron microscopy combined with energy dispersive x-ray spectroscopy (SEM/EDX). Temperatures of phase transformations were determined by differential thermal analysis. Temperatures of invariant reactions in the ZrO₂-Nd₂O₃ system F = A + Pyr and H = F + A were determined as 1763 and 2118 K respectively and thermodynamic parameters of phases were re-assessed. Phase transformations in ternary systems were determined at 1732 K for composition ZrO₂-48.46Nd₂O₃-5.38Y₂O₃ (mol%) and at 1744 and 1881 K for composition ZrO₂-79.09Nd₂O₃-2.75Y₂O₃ (mol%). They were interpreted using XRD investigation before and after DTA as Pyr + B → F, Pyr → F and A → B, respectively. The solubility of the Y₂O₃ in pyrochlore phase was found to exceed 10 mol%. The thermodynamic parameters of the ZrO₂-Nd₂O₃-Y₂O₃ system were reassessed taking into account solubility of Y₂O₃ in the Nd₂Zr₂O₇ pyrochlore phase (Pyr). It is assumed that Y³⁺ substitutes Nd³⁺ and Zr⁴⁺ in their preferentially occupied sublattices. Ternary parameter was introduced into fluorite phase (F) for better reproducing of phase equilibria. Mixing parameters were reassessed for phase A (Nd₂O₃ based solution), monoclinic phase B and cubic phase C (Y₂O₃ based solution). The isothermal sections calculated for the ZrO₂-Nd₂O₃-Y₂O₃ system are in the reasonable agreement with experimental results.     

Tensile and wear properties of rolled Al5Mg-Al<Subscript>2</Subscript>O<Subscript>3</Subscript> or C particulate composites

Al5Mg alloy matrix composites reinforced with different percentages of Al₂O₃ (60 μm) or C (90 μm) particulates were prepared by the vortex method. The composites were then subjected to hot or cold rolling with different reduction ratios. The microstructures of the rolled composites revealed that the matrix grains moved around the particulate causing deformation. By continuing deformation, the particulates rearranged themselves in the matrix, leading to lensoid distortion. It was found that the addition of Al₂O₃ or C particulates increased the 0.2% proof stress and reduced both the tensile strength and ductility, compared with the monolithic alloy. Scanning electron microscopy (SEM) fractographic examinations showed that the composites reinforced with Al₂O₃ particulates failed through particulate fracture and matrix ligament rupture. However, the failure of the composites reinforced with C particulates was through particulate decohesion, followed by ductile failure of the matrix. Abrasive wear results showed that the wear rate of the Al5Mg alloy decreased with the addition of C particulates. However, increasing the volume fraction of C particulates did not have a prominent effect on the wear rate. The composites reinforced with Al₂O₃ particulates exhibited a higher wear rate than that of the unreinforced alloy. Furthermore, addition of both C and Al₂O₃ particulates into the Al5Mg matrix alloy did not significantly improve the wear resistance. For all composites studied in this work, hot or cold rolling had a marginal effect on the wear results.     

Microstructure Characterization of the FeAl<Subscript>2</Subscript>O<Subscript>4</Subscript>-Based Nanostructured Composite Coating Synthesized by Plasma Spraying Fe<Subscript>2</Subscript>O<Subscript>3</Subscript>/Al Powders

The microstructure of the coating prepared by reactive plasma spraying Fe₂O₃/Al composite powders was characterized by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. The results indicated that the coating exhibited nanostructured microstructure which consisted of FeAl₂O₄, Fe or Fe solid solution, Al₂O₃ and a little FeAl. In the composite coating, spherical Fe particles (tens of nanometers to hundreds of nanometers) were distributed uniformly within the equiaxed and columnar nanograins FeAl₂O₄ matrix. There were two kinds of Al₂O₃ phases present in the composite coating. One kind was nano-sized Al₂O₃ particles uniformly dispersed within the matrix, forming eutectic structure of (FeAl₂O₄ + γ-Al₂O₃); the other was 1-1.5 μm Al₂O₃ particles embedded individually within the matrix. The composite coating had higher toughness than the conventional microstructured Al₂O₃ coating.     

Phase Equilibria in the System Al<Subscript>2</Subscript>O<Subscript>3</Subscript>-CaO-CoO and Gibbs Energy of Formation of Ca<Subscript>3</Subscript>CoAl<Subscript>4</Subscript>O<Subscript>10</Subscript>

An isothermal section of the system Al₂O₃-CaO-CoO at 1500 K has been established by equilibrating 22 samples of different compositions at high temperature and phase identification by optical and scanning electron microscopy, X-ray diffraction, and energy dispersive spectroscopy after quenching to room temperature. Only one quaternary oxide, Ca₃CoAl₄O₁₀, was identified inside the ternary triangle. Based on the phase relations, a solid-state electrochemical cell was designed to measure the Gibbs energy of formation of Ca₃CoAl₄O₁₀ in the temperature range from 1150 to 1500 K. Calcia-stabilized zirconia was used as the solid electrolyte and a mixture of Co + CoO as the reference electrode. The cell can be represented as: From the emf of the cell, the standard Gibbs energy change for the Ca₃CoAl₄O₁₀ formation reaction, CoO + 3/5CaAl₂O₄ + 1/5Ca₁₂Al₁₄O₃₃ → Ca₃CoAl₄O₁₀, is obtained as a function of temperature: /J mol⁻¹ (±50) = −2673 + 0.289 (T/K). The standard Gibbs energy of formation of Ca₃CoAl₄O₁₀ from its component binary oxides, Al₂O₃, CaO, and CoO is derived as a function of temperature. The standard entropy and enthalpy of formation of Ca₃CoAl₄O₁₀ at 298.15 K are evaluated. Chemical potential diagrams for the system Al₂O₃-CaO-CoO at 1500 K are presented based on the results of this study and auxiliary information from the literature.     

Fabrication of Al matrix composite reinforced with submicrometer-sized Al<Subscript>2</Subscript>O<Subscript>3</Subscript> particles formed by combustion reaction between HEMM Al and V<Subscript>2</Subscript>O<Subscript>5</Subscript> composite particles during sintering

To fabricate an Al-V matrix composite reinforced with submicron-sized Al₂O₃ and Al_xV_y (Al₃V, Al₁₀V) phases, high energy mechanical milling (HEMM) and sintering were employed. By increasing the milling time, the size of mechanically milled powder was significantly reduced. In this study, the average powder size of 59 μm for Al, and 178 μm for V₂O₅ decreased with the formation of a new product, Al-Al₂O₃-Al_xV_y, with a size range from 1.3 μm to 2.6 μm formed by the in-situ combustion reaction during sintering of HEM milled Al and V₂O₅ composite powders. The in-situ reaction between Al and V₂O₅ during the HEMM and sintering transformed the Al₂O₃ and Al_xV_y (Al₃V, Al₁₀V) phases. Most of the reduced V reacted with excess the Al to form Al_xV_y (Al₃V, Al₁₀V) with very little V dissolved into Al matrix. By increasing the milling time and weight percentage of V₂O₅, the hardness of the Al-Al₂O₃-Al_xV_y composite sintered at 1173 K increased. The composite fabricated with the HEMM Al-20wt.%V₂O₅ composite powder and sintering at 1173 K for 2 h had the highest hardness.