RF MEMS开关的静电斥力驱动研究

针对射频微机电系统(RF MEMS)开关工作时因介质充电而发生“粘连”失效的问题,提出了利用静电斥力驱动替代传统的静电引力驱动方式,使RF MEMS开关在工作时介质层不存在电势差,从根源上消除介质充电.通过COMSOL仿真软件,分析了静电斥力的产生机理,重点探究了静电斥力驱动结构中尺寸参数对可动极板位移的影响,并通过结构优化有效降低了驱动电压,为开关后续设计提供了参考.     

CAD/CAE系统中静电性能和机电性能仿真

在常规机械中很少考虑的微小静电力会对MEMS的电路产生一定影响,同时MEMS的元件在静电力作用下会发生变形,进而使得MEMS的几何结构和电容等产生变化,加之目前MEMS试制成本较高,因此,必须对整个系统的静电性能和机电性能进行分析.利用边界元素法,对MEMS各元件进行静电性能分析;采用有限元分析软件包对MEMS作机电性能分析,探讨了驱动电压与位移的关系、位移变化与电容的关系等.通过仿真测试发现,可提高设计质量,降低成本,缩短研制周期.     

基于力学描述的MEMS悬臂梁系统级动态模拟方法

提出基于受力分析与能量原理建立等效集总力学描述的思想,实现对机电耦合MEMS悬臂梁动态行为的系统级模拟.利用受控源的反馈作用实现耦合,所建立的等效电路可用于模拟静电驱动下悬臂梁的转移特性、瞬态响应与固有频率.与Saber模拟的数据进行对比,证实了该方法的有效性.     

应用于激光雷达的二维静电微镜设计

设计了一种应用于激光雷达的二维静电驱动谐振式微机电系统(MEMS)扫描微镜.基于MEMS技术对微镜加工工艺进行设计,简化了电隔离槽制备工艺,利用在绝缘体上硅(SOI)晶圆顶层硅刻蚀微镜结构的同时刻蚀电隔离槽,无需填充绝缘材料,实现动静梳齿的电绝缘;利用SOI晶圆底层硅的背面刻蚀结构,实现机械结构的连接,保证二维微镜结构...     

用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计

提出并设计了一种用于硅基氮化镓(GaN)可调微镜的静电梳齿型微驱动器.利用有限元软件建立了该器件的几何结构模型,对器件的结构进行了仿真优化.此外,采用微机电系统(MEMS)加工工艺,制作出了用于硅基氮化镓可调微镜的梳齿型微驱动器,并对其驱动特性进行测试.测试结果表明:所制作的微驱动器的位移随着电压的变化呈二次方关系,与仿真结果基本一致.当加载驱动电压为200 V时,微驱动器的驱动位移可达到1.08 μm.     

基于复合静电驱动结构的硅微机械扭转微镜

为了改善硅微机械扭转微镜的机电耦合特性,降低器件的驱动电压并提高其工作可靠性,提出了几种新颖的基于复合静电驱动结构的硅微机械扭转微镜.提出的硅微机械扭转微镜将垂直扭转梳齿静电驱动结构、侧壁平行板电容静电驱动结构有机结合,实现了两种静电驱动方式的复合驱动,同时设计了内外双镜面结构,通过内外双镜面结构,实现了微镜的差动复合驱动,理论分析、模拟仿真与测试结果表明,通过上述两个方面新颖的设计,新结构显著降低了器件的驱动电压.同时为了提高器件的工作可靠性,在设计折叠梁柔性支撑结构时,将梁的不同位置设计成不同的厚度,对于硅微机械扭转微镜扭转过程中容易疲劳的梁部分加大了其厚度,从而在不影响器件扭转性能的前提下,明显提高了器件的可靠性.利用有限元方法对器件的力学特性和机电耦合特性进行了系统的仿真,获得了影响器件机电特性的关键结构参数.器件基于SOI晶片,采用表面硅工艺与体硅工艺相结合的方式加工制造,采用SOI晶片显著降低了微镜镜面的表面粗糙度,提高了其光反射能力.最后利用原子力显微镜对微镜镜面的表面粗糙度进行了测量和分析,实验结果表面微镜表面具有16nm的表面粗糙度,完全可以满足光学应用的需要.     

系统级设计方法及其在力学特性集成测试中的应用

随着对微尺度下MEMS材料力学特性研究的深入,片上集成测试方法应用愈加广泛.针对MEMS系统具有多能量域耦合的特点,应用基于MEMS宏模型技术的系统级设计工具来获得整个系统的行为特性已成为研究热点.概述了几种建立MEMS宏模型的基本方法,并对其中的节点法进行了详细阐述,利用CoventorWare软件设计了一种测试多晶硅杨氏模量的集成测试结构,首次将系统级设计方法引入集成测试结构的设计,提高了设计效率,仿真结果可靠.     

基于Modelica的MEMS系统级多领域建模与仿真

分析了现有的MEMS系统级建模与仿真方法,讨论了运用Modelica语言进行面向对象的非因果关系建模方法,建立了基于Modelica的电容式微型静电致动器系统级模型,仿真结果证明了Modelica用于MEMS系统级多领域仿真的可行性.     

一种新型解耦陀螺的结构及电路设计

提出了一种新型的静电驱动微机械陀螺结构,采用两组对称的梳齿结构作为驱动电极,同时采用中央质量块栅格和另外一组梳齿两种结构检测感应模态的振动.该结构阻尼系数小,可达到较高的测量分辨率和准确率.本文采用解析方法和有限元法分析了该结构的振动阻尼特性、机械解耦和噪声特性以及梳齿结构的电磁学特性.提出了该结构的驱动电路和信号检测电路,并对电路特性进行了仿真分析.     

基于激光多普勒效应的MEMS的运动检测

提出了一种可以测量微机电系统（MEMS）面内瞬时速度和位移的测量系统。该系统利用差动激光多普勒效应,采用了频移技术和接收端的滤波技术将带有MEMS运动信息的光信号接收并解调,然后,利用LabVIEW和MaSab软件对采集的信号进行数字滤波和时频分析,从而得到被测器件的运动参量,为研究MEMS的动态特性提供了准确可靠的方法。     

具有输入非线性的MEMS振动陀螺零点校正方法

针对Micro-electro-mechanical system (MEMS)振动陀螺仪加工制造过程中产生的几何结构中心与质量块重心不重叠导致严重陀螺漂移和噪声的问题, 在考虑陀螺自身非线性、控制输入非线性和外部干扰的情况下, 提出一种基于超稳理论的非线性控制策略对MEMS陀螺仪进行零点校正. 该方法在MEMS 陀螺仪非线性模型中引入一Hurwitz矩阵对模型进行变换以满足系统的严格正实要求, 利用向量范数的性质得到合适的控制律以满足Popov不等式, 从而保证了闭环控制系统的全局渐近稳定性. 仿真结果显示, 提出的非线性控制策略可以使系统状态迅速收敛到零, 并且对系统参数摄动表现出较强的鲁棒性.     

Simple and accurate analytical solution to the post-buckling response of an electrostatically actuated MEMS curled cantilever

In this work, we propose to investigate the micro-electromechanical post-buckling response of an electrostatically-actuated curled cantilever microbeam. The analytical/numerical model is based on a nonlinear differential governing equation, derived via assuming a continuous Euler–Bernoulli beam model, combined with a multi-modes Galerkin decomposition of the beam deflection. The pull-in voltages which govern the stability of the micro-curled beam actuator are also obtained analytically. These approximate solutions show excellent agreements compared to solutions obtained by other computationally expensive numerical methods as well some previously reported experimental data, for a wide range of the microbeam length. The derived expressions of these analytical approximate solutions are easy to implement, quick to solve, and could be conveniently used by MEMS designers for quick estimations of the effects of the various micro-actuator parameters on its structural stability.     

MEMS陀螺随机漂移的状态空间模型分析及应用

利用Kalman滤波器对MEMS陀螺随机漂移进行估计和补偿,需要将随机漂移的自回归滑动平均(ARMA)模型转化为相应的状态空间模型,从而有必要对模型之间的转换问题进行深入研究。针对国内外有关文献提出的三种转化形式,从数学角度进行了证明,并结合MEMS陀螺的试验数据,分别采用这三种状态空间模型进行了随机漂移和角速率估计试...     

基于MEMS和GPS的驾驶行为和车辆状态监测系统设计

为了适应智能车辆辅助驾驶系统对驾驶和车辆状态监测的要求,利用MEMS惯性传感器自主设计了微惯性测量单元,并结合GPS设计了一种驾驶行为和车辆状态监测系统,实现对驾驶员操纵动作的感知、汽车6自由度运动状态参数和汽车运行车速的实时监测。介绍了MEMS传感器的选型,设计,安装和布置。实车道路实验结果表明:系统对驾驶员踩踏刹车踏板、离合器踏板和变换档位的操纵动作的感知效果较好,侧向加速度和方向盘转角的理论识别曲线与实车实验曲线在趋势上比较吻合。该系统为开发驾驶人员操纵动作自动识别系统提供理论基础和技术支持,也可为提高汽车行驶性和安全性提供重要的理论依据和工程应用指导。     

Robust output regulation of a triaxial MEMS gyroscope via nonlinear active disturbance rejection

This paper presents a nonlinear disturbance rejection–based controller for the robust output regulation of a triaxial microelectromechanical system (MEMS) vibratory gyroscope. In a MEMS gyroscope, parameter variations, mechanical couplings, suspension system nonlinearities, thermal noise, and centripetal/Coriolis forces are the main uncertainty sources. In the dynamical equations of the gyroscope, these uncertainties appear as a matched total disturbance, which does not coincide with the required structure of a standard output regulation problem. More specifically, the total disturbance is not guaranteed to belong to the solution space of a fixed dynamical system. Therefore, we propose a control system that comprises a nominal output regulator equipped with a disturbance rejection loop. On the basis of a suitable reference dynamics of the gyroscope, the control system is developed as the stabilization of a zero‐error invariant manifold in the tracking error space. In the disturbance rejection loop, a nonlinear extended state observer (ESO) is designed to estimate the total disturbance. The convergence of the ESO is analyzed in a Lyapunov‐Lurie framework by linear matrix inequalities (LMIs). In the nominal output regulation loop, the stabilization problem of the desired manifold is tackled by introducing a suitable distance coordinate. Next, to achieve guaranteed attenuation of the ESO estimation errors, an energy‐to‐peak design is pursued. On the basis of the center manifold theory, the stability of the overall closed‐loop system is guaranteed. The efficacy of the proposed control method is assessed through software simulations.     

量化状态反馈网络化系统的稳定性分析

针对网络控制系统(Networked Control System,NCS)中普遍存在的有限带宽和信息量化问题,采用基于模型的控制策略,研究了量化状态反馈下一类网络控制系统的稳定性.分析了量化误差、更新时间、模型误差对系统稳定性的影响,并给出了系统模型状态、对象状态的稳定域范围.仿真结果表明了结论的正确性.     

State and mode feedback control strategy for discrete‐time Markovian jump linear systems with time‐varying controllable mode transition probability matrix

In this article, the state and mode feedback control strategy is investigated for the discrete‐time Markovian jump linear system (MJLS) with time‐varying controllable mode transition probability matrix (MTPM). This strategy, consisting of a state feedback controller and a mode feedback controller, is proposed to ensure MJLS's stability and meanwhile improve system performance. First, a mode‐dependent state feedback controller is designed to stabilize the MJLS based on the time‐invariant part of the MTPM such that it can still keep valid even if the MTPM is adjusted by the mode feedback control. Second, a generalized quadratic stabilization cost is put forward for evaluating MJLS's performance, which contains system state, state feedback controller, and mode feedback controller. To reduce the stabilization cost, a mode feedback controller is introduced to adjust each mode's occurrence probability by changing the time‐varying controllable part of MTPM. The calculation of such mode feedback controller is given based on a value‐iteration algorithm with its convergence proof. Compared with traditional state feedback control strategy, this state and mode feedback control strategy offers a new perspective for the control problem of general nonhomogeneous MJLSs. Numerical examples are provided to illustrate the validity of the proposed strategy.     

一类线性不确定时滞混杂系统的稳定性

研究了一类具有不确定的线性参数及时滞的混杂系统，利用线性矩阵不等式策略和Riccati方法，给出了系统鲁棒稳定性和可稳定性的充分条件，并运用混杂状态反馈控制策略设计了控制器切换方案．最后的仿真实例表明了控制策略的有效性．     

理想状态下网络非线性交叉干扰激励价控策略

针对多用户多优先级网络系统的管理问题,利用对策论中的Nash平衡和激励Stackelberg策略等相关概念,提出了理想状态下的激励价控策略设计．在系统的动态平衡状态下,利用信息量的瞬时变化率及用户与平衡点的偏离,给出了非线性交叉干扰的多激励价控策略,加强了用户与网络管理者的合作性,激励和引导非合作用户选取对系统整体有益的服务请求,以提高网络资源的利用率．     

A new hybrid robust control of MEMS gyroscope

To control microelectromechanical systems (MEMS) gyroscope axis, we propose and investigate a new robust sliding mode controller (NRSMC). The sliding surface in the phase space converges to the equilibrium point within a finite period from any initial state. However, the main drawback of this control system is the chattering phenomenon, which is undesirable for the MEMS system. To solve this problem, we suggest a novel hybrid control system which improves trajectory tracking and eliminates the chattering. The dynamic stability of NRSMC against external disturbances is proved by applying the Lyapunov theory. The effectiveness of the proposed control method is verified by numerical simulation with a random noise applied to demonstrate the robustness of the proposed control system.