全视场外差白光干涉测量技术

为了解决传统白光干涉测量技术中对线性位移机构的位移精度要求过高的问题,本文提出了一种全视场外差白光干涉测量技术。该技术主要通过使用存在差频的白光干涉信号作为光源来实现在大扫描步长和低扫描精度条件下相干峰位置的高精度检测。本文首先建立了白光外差干涉的数学模型,再根据数学模型提供的光强信号特性提出了整体系统设计方案,然后对测量方案的可行性进行了实验验证。最后针对多种误差对算法计算精度的影响进行了理论分析和数据对比。误差分析的结果表明:白光外差干涉测量技术提供更高的测量精度和更好的抗干扰性能,有效地降低了传统白光干涉测量对线性位移机构精度的严苛依赖,为光学自由曲面检测技术提供了更多的可选解决方案。     

外差干涉信号的相位计数

本提出一种新的激光外差干涉条纹计数方法，它通过电路变换，将原来高频的外差信号转化为一直流信号，从而实现稳定准确的周期计数。中给出了具体电路方案。     

超声位移的激光外差干涉测量

本文介绍了超声位移的激光外差干涉测量的原理，装置和结果，分析了减小探测限和抑制噪声的途径，本装置采有和布喇格衍射盒作为激光的移频装置，锁相环作为调相信号的解调器。     

激光外差干涉测试

激光干涉测试具有测量准确度高、测量范围宽、测量速度快、测量过程容易实现自动化等优点。本文介绍一种抗干扰能力强、能在车间现场进行精密计量的激光外差干涉测试法和它的应用。     

光学倍频影响激光外差干涉测量精度的机理

为了同时提高激光外差干涉测量的分辨力和精度,必须深入分析光学倍频对激光外差干涉测量精度的影响机理。在此基础上,建立了光学倍频相位测量模型,从理论上证明,光学倍频能够实现对激光外差干涉信号的细分,提高测量分辨力。光学倍频改变非线性误差的相位而使非线性误差减小,但同时改变了激光干涉多普勒频移的v/c平方项,使得残余累计误差增大。仿真结果表明,光学N倍频使非线性误差减小到原来的1/N,但使残余累计误差增大N2倍。因此,光学倍频仅适用于低速测量的场合。     

激光外差干涉仪光电信号处理方法及特点

叙述和分析了外差激光干涉光电信号处理主其特点，指出了它们各自的应用范围，同时介绍了一处新型的光电信号处理方法，它不仅使外差干涉仪用于动态测量，而且可以同时实现高分辩率测量 。     

大范围光外差干涉测量的信号处理

本文依据相位测量和整周期相位计数相结合的思想，提出了大范围光外差干涉测量的信号处理方法，在保证高分辨力不降低的前提下，扩展了测量范围。给出的方法可用于动态测量     

外差式激光干涉振动一次校准

文章先扼要介绍ISO 16 0 6 3- 11中所列 3种激光干涉振动一次校准方法 ,以及用零差式迈克耳孙激光干涉仪正弦逼近法实现加速度的灵敏度和灵敏度相移的校准 ,然后在此基础上 ,从原理、结构和使用等方面介绍外差式激光干涉振动一次校准 ,以及PTB如何用外差式激光干涉技术较大幅度地提高与扩展振动校准频率、校准位移等技术。     

用外差偏振干涉法测量保偏光纤双折射率

提出一种基于半导体激光调频外差干涉原理的保偏光纤双折射率的测量方法，即通过测量由保偏光纤构成的偏振干涉仪输出的外差信号的频率，求得保偏光纤的相对双折射率，此方法具有较高的分辨率和潜在的高精度，以及系统结构简单，无运动部件和非破坏测量等优点。     

外差干涉定位系统中的锁相跟踪方法

以外差干涉定位系统为研究对象,提出一种基于锁相跟踪的定位方法,简化了传统定位系统结构;就整个定位系统的工作过程及原理进行了说明,证明了锁相跟踪方法的可行性;讨论了系统工作过程中的核心功能环节的实现方法,分别对高频信号的发生、移相脉冲抑制以及鉴相过程进行详细说明。本文就鉴相电路功能和干涉锁相跟踪定位系统的输出进行了测试实验,实验结果证明高频鉴相电路输出准确度达到0.07o,锁相跟踪系统定位输出的合成不确定度为10.1 nm。     

A heterodyne laser interferometer with digital phase conversion

The structure and metrological properties have been determined for processing with digital logic applicable to a wide range of heterodyne laser interference systems employing digital phase monitoring in the submicrometer and nanometer resolving power ranges. __________ Translated from Izmeritel’naya Tekhnika, No. 6, pp. 13–18, June, 2006.     

纳米级正弦振动幅相特性测量技术的研究

概述外差激光干涉测量技术的基本原理和特点，针对马赫-泽德外差式激光干涉仪在绝对法振动校准技术中的应用，介绍测量系统的构架以及完成数据采集和信号处理的虚拟仪器技术。详细介绍了测量系统频移变换部分和数字信号处理部分的组成原理和技术实现，论述了其中数据采集、数字解调、曲线拟合等技术难点。本文描述的这种振动测量技术运用正弦逼近的信号处理方法，可以对线性正弦振动量进行幅值和相位的纳米级精确测量。     

Quantum state measurement of any arbitrary entangled field-state via Ramsey interferometry

Multipartite entangled states are the key resource and play a crucial role in latest applications of quantum mechanics. We propose a scheme for the measurement of quantum state of multimode entangled field state trapped in multiple cavities. The scheme is based on the measurement of photon statistics of the displaced entangled field state in Ramsey type set-up. In this set-up, the atoms undergo a dispersive phase shift when they pass through the off-resonant entangled field in cavities. By measuring the internal states of the atoms, the photon statistics and the Wigner function can be reconstructed.     

On-machine measurement of tool nose radius and wear during precision/ultra-precision machining

The tool state exerts a strong influence on surface quality and profile accuracy during precision/ultraprecision machining. However, current on-machine measurement methods cannot precisely obtain the tool nose radius and wear. This study therefore investigated the onmachine measurement of tool nose radius on the order of hundreds of microns and wear on the order of a few microns to tens of microns during precision/ultra-precision machining using the edge reversal method. To provide the necessary replication, pure aluminum and pure copper soft metal substrates were evaluated, with pure copper exhibiting superior performance. The feasibility of the measurement method was then demonstrated by evaluating the replication accuracy using a 3D surface topography instrument; the measurement error was only 0.1%. The wear of the cutting tool was measured using the proposed method to obtain the maximum values for tool arc wear, flank wear, and wear depth of 3.4 lm, 73.5 lm and 3.7 lm, respectively.The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-022-00397-y     

Three dimensional displacement measurement using Moiré interferometry

Moiré interferometry is used to simultaneously measure the in plane and out of plane displacement components. The high sensitivity of displacement measurement is maintained and high contrast fringes are obtained without recourse to additional filtering.     

Effects of step slope on thickness measurement by optical interferometry for opaque thin films

Optical interferometry is a simple, quick and cheap method to measure the thickness of opaque thin films. The film edge, being formed as a step on the sample surface, is lighted with monochromatic light in an interference microscope, producing the interferogram that is recorded with a CCD camera. The film thickness (step height) is calculated by measuring offsets of the fringes across the step. However, the morphology of the film edge (step) significantly affects the thickness measurement, in some cases even yields false results. In this work, three kinds of methods were adopted to mask a part of the substrate surface during the deposition for fabrication of the step. The mask used was a thin silicon slice, a straight line of ink imprinted by a pen, or an Aluminum film. The step morphology recorded by a profilometer revealed large variation from one method to another. Accordingly, the accuracy of film thickness (step height) measurement by interferometry varies significantly. Results showed that large error occurs when the slope of the step is small and the step out spans the view field of the microscope. Therefore, the step should be fully visible in the view field of the microscope for reasonable measurement of thickness. A simple equation, in terms of geometrical configuration, is developed for this requirement.     

不透明薄膜厚度的光干涉法测量以及台阶的影响

提出使用数字CCD拍摄光干涉条纹,使用图像处理软件进行灰度值扫描分析光干涉条纹的方法,对不透明薄膜进行光干涉法测厚.数字CCD和图像处理软件的结合使用能够最大限度的降低目测带来的误差,并且也避免了使用复杂的干涉条纹提取算法,可以方便、准确地对不透明薄膜进行光干涉法测厚.同时我们使用光干涉法和轮廓仪法对不同高度遮挡物形成的台阶进行了对比测量,分析了不同台阶边缘斜坡对于光干涉法测量结果的影响,指出在制备台阶时遮挡物的高度必须满足一定的条件,并且根据这个条件推导出在我们的磁控溅射设备中,遮挡物高度小于50 μm可以得到满足光干涉法测厚条件的台阶.     

Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry

Speckle interferometry is generally known as a method for measuring the deformation of an object with rough surfaces. In this paper, a three-dimensional (3D) shape measurement method is proposed for superfine structures beyond the diffraction limit using the basic property of speckle interferometry. Since the differential coefficient distribution of the shape of such an object can be detected in speckle interferometry by imparting a known lateral shift to the measured object, the shape can be reconstructed by integrating the differential coefficient distribution. Based on experimental results obtained using diffraction gratings as measured objects, it is confirmed that the proposed method can measure 3D shapes that are beyond the diffraction limit of the lens.