A new architecture for the NVRAM-an EEPROM backed-up dynamic RAM

An architecture for a nonvolatile RAM (NVRAM) suitable for high-density applications is described. In the cell, a dynamic RAM cell is merged into an EEPROM cell. A capacitor is constructed between the control gate and the drain diffusion layer of the FLOTOX-type EEPROM memory cell. The equivalent circuit in the dynamic RAM mode consists of two transistors and a capacitor, which eliminates a dummy cell. A dynamic RAM sense amplifier is used in both modes, and it works as a data latch when data are transferred between the dynamic RAM and the EEPROM. The process of the NVRAM is compatible with ordinary EEPROMs     

A new fabrication technology for AlGaAs/GaAs HEMT LSIs using InGaAsnonalloyed ohmic contacts

The authors studied the nonalloyed ohmic characteristics of HEMTs (high electron mobility transistors). At high integration levels, nonalloyed ohmic contacts were found to have two advantages: an extremely short ohmic length with low parasitic source series resistance and direct connection between the source/drain and gate with the same metal. The propagation delay in a ring oscillator with a single-metal source/drain and gate formed simultaneously was 37 ps/gate (L _g=0.9 μm). The very short ohmic metal contacts and just three contact holes made it possible to reduce the memory cell area greatly. The cell is 21.5×21.5 μm², one of the smallest ever reported for a GaAs-based static RAM. Using smaller load HEMTs or resistor loads in the memory cell, combined with nonalloyed ohmic technology with quarter- or subquarter-micrometer-gate HEMTs it is possible to fabricate a very-high-speed LSI such as a 64-kb static RAM with a reasonable chip size     

1-Mbit virtually static RAM

The 1-Mb RAM utilizes a one-transistor, one-capacitor dynamic memory cell. Since all the refresh-related operations are done on chip, the RAM acts as a virtually static RAM (VSRAM). The refresh operations are merged into the normal operation, called a background refresh, the main feature of the VSRAM. Since the fast operation of the core part of the RAM is crucial to minimize the access-time overhead by the background refresh, 16 divided bit lines and parallel processing techniques are utilized. Novel hot-carrier resistant circuits are applied selectively to bootstrapped nodes for high hot-carrier reliability. N-channel memory cells are embedded in a p-well, which gives a low soft error rate of less than 10 FIT. 1-/spl mu/m NMOSFETs with moderately lightly doped drain structures offer fast 5-V operation with sufficient reliability. An advanced double-level poly-Si and double-level Al twin-well CMOS technology is developed for fast circuit speed and high packing density. The memory cell size is 3.5/spl times/8.4 /spl mu/m/SUP 2/, and the chip size is 5.99/spl times/13.8 mm./SUP 2/. Address access time is typically 62 ns, with 21-mA operating current and 30-/spl mu/A standby current at room temperature.     

Elimination of surface state induced edge transistors in high voltage NMOSFETs for flash memory devices

The abnormal leakage failure in high voltage NMOSFETs is investigated by measuring the subthreshold hump characteristics. Gated diode, width and substrate bias dependence of the I_D-V_GS characteristics, and two-terminal I-V measurements between the source and the drain reveal that the hump characteristic is caused by the surface states, not by the gate field crowding at STI edges. The numerical calculation shows that the high voltage NMOSFETs are very delicate to leakage failure by a small amount of surface state (10¹¹ /cm²), due to the thick gate oxide and very low doping concentration for high voltage operation (>25 V). A thermal oxidation with the thickness of 1.0 nm successfully eliminates the parasitic corner transistors without changing electrical characteristics of the targeted transistors in current state of the art flash memory devices.     

用二维全带组合Monte Carlo方法模拟纤锌矿相GaN静电感应晶体管(SIT)特性

报告了用二维全带组合Monte Carlo方法模拟纤锌矿相GaN静电感应晶体管(SITs)交直流特性的结果.SIT的栅极长度为0.13μm,源极和漏极之间距离为0.5μm.模拟得到了SIT的输出特性,跨导和特征频率特性.模拟得到的跨导最大值为140ms/mm(Vgs=-1.5V),器件特征频率最大值为123GHz(I_ds=3.15A/cm).模拟结果表明纤锌矿相GaN SIT具有大功率和高频工作的潜力.     

High-frequency high-power static induction transistor

The principal operating mechanism of the static induction transistor (SIT) that shows exponential rather than the saturatedI-Vcharacteristics, is based on the static induction of both gate and drain voltages. It is known that the SIT has low noise, low distortion, and high audio-frequency power capability. The SIT is also a very promising device for high-frequency and high-power operation because of its short channel length, low gate series resistance, small gate-source capacitance, and small thermal resistance. Si SIT's which generate a 40-W output power at 200 MHz and 10 W at 1 GHz, with a cutoff frequency higher than 2.5 GHz, have been fabricated. This is the first step toward the realization of a power microwave SIT. Future developments of a higher power higher frequency SIT can be realized by employing a distributed electrode structure and traveling-wave operation.     

UHF频段高功率SiC SIT

采用导通SiC衬底上的SiC多层外延材料,成功制作出了国内首个SiC SIT(静电感应晶体管).该器件研制中,采用了自对准工艺、高能离子注入及高温退火工艺、密集栅深凹槽干法刻蚀工艺、PECVD SiO:和SizNy介质钝化工艺,有效抑制了漏电并提高了器件击穿电压,器件功率输出能力由此得到提升.最终28 cm栅宽SiC ...     

MOSFET's with PolySilicon gates self-aligned to the field isolation and to the source and drain regions

The fabrication procedure and device characteristics of MOSFET's having a unique gate electrode structure are described. The polysilicon gate electrode of the structure is self-aligned on its ends with respect to the conductive source and drain regions, and is also self-aligned on its sides with respect to the nonconductive field oxide isolation regions. This double self-alignment feature results in a polysilicon gate electrode area that matches the channel region of the FET. Another novel feature of this "recessed-gate" device is a self-registering electrical connection between the gate and the metallic interconnection pattern. Compared to MOSFET's fabricated using more conventional methods, smaller FET's with increased packing density result from this misregistration-tolerant contacting technique and the doubly self-aligned gate electrode structure. The new FET structure may be applied to various integrated circuits such as ROM's, PLA's, and dynamic RAM's. The use of a second layer of polysilicon and the addition of a fifth masking operation yields a dynamic RAM cell of small area with a diffused storage region.     

The charge-coupled RAM cell concept

A new concept in MOS dynamic RAM cells is described and demonstrated. The charge-coupled RAM (CC RAM) cell combines the storage capacity and transfer gate of the one-transistor cell into a single gate. The resulting cell is simpler than the conventional one-transistor cell and possesses significant advantages in packing density and potentially higher yield. One of the variations of the CC RAM cell concept results in a cell whose operation is identical (voltage and timing) to that of the present one-transistor cell. In addition, the CC RAM cell fabrication is essentially the same as the present one-transistor cell process. The CC RAM is an attractive candidate for the next generation RAM's.     

A new cell structure with a spread source/drain (SSD) MOSFET and acylindrical capacitor for 64-Mb DRAM's

A new cell structure for realizing a small memory cell size has been developed for 64-Mb dynamic RAMs (DRAMs). The source/drain regions of a switching transistor are raised by using a selective silicon growth technique. Because of lateral growth of the silicon over gate and field regions, the bitline contact can overlap the gate and field regions. The shallow source/drain junction by the raised source/drain structure realizes a reduction of gate length and isolation spacing. As a result, the DRAM memory cell area can be reduced to 37% of that using the conventional LDD MOSFET. In the fabrication of an experimental DRAM cell, a new stacked capacitor structure has been introduced to maintain enough storage capacitance, even in the small-cell area. The new capacitor is made by a simple and unique process using a cylindrical silicon-nitride sidewall layer. It has been verified that this cell structure has the potential to realize multimegabit DRAMs, such as 64-Mb DRAMs     

The charge-coupled RAM cell concept

A new concept in MOS dynamic RAM cells is described and demonstrated. The charge-coupled RAM (CC RAM) cell combines the storage capacity and transfer gate of the one-transistor cell into a single gate. The resulting cell is simpler than the conventional one-transistor cell and possesses significant advantages in packing density and potentially higher yield. One of the variations of the CC RAM cell concept results in a cell whose operation is identical (voltage and timing) to that of the present one-transistor cell. In addition, the CC RAM cell fabrication is essentially the same as the present one-transistor cell process. The CC RAM is an attractive candidate for the next generation RAM's.     

0.5-μm 2 M-transistor BiPNMOS channelless gate array

A channelless gate array has been realized using 0.5-μm BiCMOS technology integrating more than two million transistors on a 14-mm×14.4-mm chip. A small-size PMOS transistor and a small-size inverter are added to the conventional BiNMOS gate to form the BiPNMOS gate. The gate is suitable for 3.3-V supply and achieves 230-ps gate delay for a two-input NAND with full-swing output. Added small-size MOS transistors in the BiPNMOS basic cell can also be used for memory macros effectively. A test chip with four memory macros-a high-speed RAM, a high-density RAM, a ROM, and a CAM macro-was fabricated. The high-speed memory macros utilize bipolar transistors in bipolar middle buffers and in sense amplifiers. The high-speed RAM macro achieves an access time of 2.7 ns at 16-kb capacity. The high-density RAM macro is rather slow but the memory cell occupies only a half of the BiPNMOS basic cell using a single-port memory cell     

Punching through device and its integration—Static induction transistor

Static induction transistor (SIT) having a short-channel structure is characterized by small gate capacitance, high transconductance, and nonsaturation current-voltage characteristic. The major mechanism of current transport in SIT is majority-carrier injection due to barrier height control at the intrinsic gate in the channel. When the channel is completely pinched off due to the gate-to-channel built-in voltage in a junction-gate SIT (JSIT), there appears a normally-off SIT. In the forward gate bias operation of JSIT, which is called bipolar mode SIT (BSIT), the switching speed is far more improved from the conventional JSIT. BSIT exhibits saturation current-voltage characteristic. In BSIT, the drain voltage for the onset of current saturation is lower than that of the bipolar transistor and the current density is very high, leading to characteristics of low impedance, high transconductance, and high current gain. Applications of SIT in LSI are discussed especially concentrating on the BSIT. SIT logic circuit (SITL) containing BSIT exhibits short propagation delay time and low power dissipation and is very promising in the future development of VLSI.     

Calculation Model for Current-voltage Relation of Silicon Quantum-dots-based Nano-memory

Based on the capacitive coupling formalism, an analytic model for calculating the drain currents of the quantum-dots floating-gate memory cell is proposed. Using this model, one can calculate numerically the drain currents of linear, saturation and subthreshold regions of the device with/without charges stored on the floating dots. The read operation process of an n-channel Si quantum-dots floating-gate nano-memory cell is discussed after calculating the drain currents versus the drain to source voltages and control gate voltages in both high and low threshold states respectively.     

A 209 K-transistor ECL gate array with RAM

A 12 K-gate ECL gate array with 36 kbit of dedicated RAM has been developed. An ECL logic cell structure with an extra transistor buried under a V/sub cc/ power bus is proposed to implement both the logic function and a memory cell. The logic part has the capability of implementing configurable RAM with up to 5.8 kbit. By employing 0.6- mu m double-polysilicon self-aligned technology, the intrinsic gate delay is 110 ps at a power consumption of 1.8 mW/gate. The address access times of dedicated RAM and configurable RAM are 3.0 and 1.8 ns, respectively. The gate array is applied to 9 K-gate logic circuitry with 35-kbit table look-aside buffer (TLB) memory using dedicated RAM and a 16-word*18-bit register file using configurable RAM.<>     

Novel Single Polysilicon EEPROM Cell With Dual Work Function Floating Gate

A novel single polysilicon electrically erasable programmable read-only memory cell with dual work function floating-gate (DWFG) structure is presented in this letter. The floating gate of the proposed DWFG cell is doped with p+ on the source side and n+ on the drain side. For DWFG devices, the floating gate on the source side has a higher work function than that on the drain side. The work function difference and the intrinsic doped region at the middle of the floating-gate affect the channel potential distribution and generate a peak lateral electric field inside the channel, improving the channel's hot electron programming characteristics. The experimental results show that the proposed DWFG cell gives faster programming speeds and program operation at lower voltage than conventional cells     

Excess gate current in the static induction transistor

In SIT devices an excess gate current flows at high drain-source voltages. This current originates from an impact multiplication of the drain current majority carriers. A simple method is presented for the calculation of this excess current. The method is based on a one dimensional analysis of the potential distribution and the ionization integral. Good agreement between measured and calculated results has been achieved.     

A 2K/spl times/8-bit static MOS RAM with a new memory cell structure

A 2K/spl times/8-bit static MOS RAM with a new memory cell structure has been developed. The memory cell consists of six devices including four MOSFETs and two memory load resistors. Two load resistors are fabricated in the second-level polysilicon films over the polysilicon gate MOSFET used as the driver. Thus the memory cell area is determined only by the area of four MOSFETs. By applying the new cell structure and photolithography technology of 3 /spl mu/m dimensions, the cell area of 23/spl times/27 /spl mu/m and the chip area of 3.75/spl times/4.19 mm have been realized. The RAM is nonclocked and single 5 V operation. Access time of about 150 ns is obtained at a supply current of 120 mA.     

An experimental study of the BO-MOS dynamic RAM cell

A novel structure of a one-transistor dynamic MOS RAM cell is developed for higher integration. The buried-oxide MOS (BO-MOS) RAM cell consists of a planar MOSFET transfer gate and a storage capacitor of buried N⁺diffusion. This three-dimensional structure results in a cell size of6F^{2}with a minimum feature sizeFand the large capacitance ratio of storage to bit-line which is about 4 times that of a typical commercial 64-kbit RAM cell. The soft-error-immunity cell structure is also taken into account. Static device characteristics of the planar MOSFET transfer gate built on an epitaxial layer and the buried storage capacitance are investigated relating to doses of boron implantation to the channel and substrate. Dynamic WRITE/READ operations are performed with an experimental 4 × 10 cell array implemented withF = 4-µm features. The technology offers the possibilities of a high density dynamic MOS RAM with a single poly-Si process.