Large travel ultra precision x-y-/spl theta/ motion control of a magnetic-suspension stage

This paper presents an indirect adaptive-control approach and its implementation for realizing large travel ultra precision x-y-theta motion control of a magnetic-suspension stage, which is actuated by ten electromagnets and is capable of six-degrees-of-freedom motion. Feedback linearization of the nonlinear force relationship of the electromagnet in terms of the coil current and the air gap is implemented. Due to modeling errors, perfect feedback linearization is not possible, and parameter variations of the feedback-linearized system are demonstrated through closed-loop system identification. Each axis of the feedback-linearized system is then modeled as a double integrator having gain value depending on the position of the stage and subjected to a disturbance. For the purpose of large travel x-y-theta motion control, an indirect adaptive-control algorithm is designed and implemented for each axis of the feedback-linearized system. The developed control algorithm consists of three procedures: a) real-time parameter estimation; b) model cancellation; and c) nominal linear control. Experimental results demonstrate that the indirect adaptive controllers have superior tracking ability when compared to constant gain robust linear H/sup /spl infin// controllers.     

Adaptive displacement control with hysteresis modeling for piezoactuated positioning mechanism

An adaptive displacement control with hysteresis modeling for a piezoactuated positioning mechanism is proposed in this paper because the dynamic performance of piezosystems is often severely deteriorated due to the hysteresis effect of piezoelectric elements. First, a new mathematical model based on the differential equation of a motion system with a parameterized hysteretic friction function is proposed to represent the dynamics of motion of the piezopositioning mechanism. As a result, the mathematical model describes a motion system with hysteresis behavior due to the hysteretic friction. Then, by using the developed mathematical model, the adaptive displacement tracking control with the adaptation algorithms of the parameterized hysteretic function and of an uncertain parameter is proposed. By using the proposed control approach on the displacement control of the piezopositioning mechanism, the advantages of the asymptotical stability in displacement tracking, high-performance displacement response, and robustness to the variations of system parameters and disturbance load can be provided. Finally, experimental results are illustrated to validate the proposed control approach for practical applications.     

Adaptive positioning control for a LPMSM drive based on adapted inverse model and robust disturbance observer

The adaptive robust positioning control for a linear permanent magnet synchronous motor drive based on adapted inverse model and robust disturbance observer is studied in this paper. First, a model following two-degrees-of-freedom controller consisting of a command feedforward controller (FFC) and a feedback controller (FBC) is developed. According to the estimated motor drive dynamic model and the given position tracking response, the inner speed controller is first designed. Then, the transfer function of FFC is found based on the inverse model of inner speed closed-loop and the chosen reference model. The practically unrealizable problem possessed by traditional feedforward control is avoided by the proposed FFC. As to the FBC, it is quantitatively designed using reduced plant model to meet the specified load force regulation control specifications. In dealing with the robust control, a disturbance observer based robust control scheme and a parameter identifier are developed. The key parameters in the robust control scheme are designed considering the effect of system dead-time. The identification mechanism is devised to obtain the parameter uncertainties from the observed disturbance signal. Then by online adapting the parameters set in the FFC according to the identified parameters, the nonideal disturbance observer based robust control can be corrected to yield very close model following position tracking control. Meanwhile, the regulation control performance is also further improved by the robust control. In the proposed identification scheme, the effect of a nonideal differentiator in the accuracy of identification results is taken into account, and the compromise between performance, stability, and control effort limit is also considered in the whole proposed control scheme.     

Robust H/sub /spl infin// controller design with recurrent neural network for linear synchronous motor drive

In this paper, a robust controller design with H/sub /spl infin// performance using a recurrent neural network (RNN) is proposed for the position tracking control of a permanent-magnet linear synchronous motor. The proposed robust H/sub /spl infin// controller, which comprises a RNN and a compensating control, is developed to reduce the influence of parameter variations and external disturbance on system performance. The RNN is adopted to estimate the dynamics of the lumped plant uncertainty, and the compensating controller is used to eliminate the effect of the higher order terms in Taylor series expansion of the minimum approximation error. The tracking performance is ensured in face of parameter variations, external disturbance and RNN estimation error once a prespecified H/sub /spl infin// performance requirement is achieved. The synthesis of the RNN training rules and compensating control are based on the solution of a nonlinear H/sub /spl infin// control problem corresponding to the desired H/sub /spl infin// performance requirement, which is solved via a choice of quadratic storage function. The proposed control method is able to track both the periodic step and sinusoidal commands with improved performance in face of large parameter perturbations and external disturbance.     

Robust learning control of a high precision planar parallel manipulator

End-point positioning accuracy and fast settling time are essential in the motion system aimed at semiconductor packaging applications. In this paper, a novel robust learning control method for a direct-drive planar parallel manipulator is presented. A frequency-domain system identification approach is used to identify the high frequency dynamic of the manipulator. A robust control design method is employed to design a stable, fast tracking response feedback controller with less sensitivity to high frequency disturbance and the control parameters are determined using genetic algorithm. A Fourier-series-based iterative learning controller is designed and used on the feedforward path of the controller to further improve the settling time by reducing the dynamic tracking error of the manipulator. Experimental results demonstrate that the planar parallel manipulator has significant improvements on motion performance in terms of positioning accuracy, settling time and stability when compared with traditional XY-stages. This shows that the proposed manipulator provides a superior alternative to XY-motion stages for high precision positioning.     

Robust and precision motion control system of linear-motor direct drive for high-speed X-Y table positioning mechanism

In this paper, design and implementation of an H/sub /spl infin//-based precision motion control system is presented for a high-speed linear-motor direct-drive X-Y table positioning mechanism in semiconductor wire-bonding applications. The system works with a cascaded robust feedback control, which has an inner loop velocity controller and an outer loop position controller, and an autotuning feedforward compensator. The design aim is to achieve high and consistent tracking performance even in the presence of considerable resonance uncertainties and external disturbances. Toward this aim the velocity controller is designed using H/sub /spl infin// optimization technique, based on reduced-order modeling that considers three significant resonance modes and neglects all other resonance modes having an insignificant amplitude and/or too high frequency. These neglected modes and variations of the three resonance modes from machine to machine (due to manufacturing tolerance) and/or with different operating conditions are taken care of by appropriate additive uncertainty representation in the design phase. The resulting system is validated and implemented with a profile motion of a maximum acceleration of 5.2 g (1g=9.81 m/s/sup 2/) on mass-produced wire bonding machines.     

Second generation I/SUP 2/L/MTL: a 20 ns process/structure

A high performance, second generation I/SUP 2/L/MTL gate for digital LSI applications with TTL compatibility has successfully been designed, characterized, and demonstrated fully functional over a wide current range and the military temperature range of -55 to 125/spl deg/C. Performance is measured using an in-line five-collector gate having one end injector. The gate performed with the following characteristics at 100 /spl mu/A injector current: /spl beta//SUB U//SUP eff//spl ges/4 for all collectors at 25/spl deg/C and /spl ges/2.5 at -55/spl deg/C, /spl alpha//SUB rec///spl alpha//SUB F//spl cong/0.58 and /spl tau/~/SUB d/=18-20 ns from -55 to 125/spl deg/C, and a speed-power product of 1.4 pJ at 25/spl deg/C. At low injector currents, a constant speed-power product of 0.36 pJ at 25/spl deg/ was obtained.     

Micropositioning device using impact force of piezoelectric flying wires

In this paper, a micropositioning device for precision positioning of miniaturized parts is proposed. This device uses piezoelectric flying wires to generate impact forces for actuating a target object to be positioned. The proposed device features two main characteristics: the impact force can actuate a half-tightened object with a high degree of precision, and the thin flying wire is suitable for the actuation of miniaturized object. Fundamental properties of the proposed device were examined experimentally and theoretically based on a basic positioning unit. Furthermore, for the practical application in assembly works, the control system for a three degrees-of-freedom micropositioning device with positioning range of (/spl plusmn/250 /spl mu/m, /spl plusmn/250 /spl mu/m, /spl plusmn/30 mrad) along the X-, Y-, and /spl Theta//sub z/-axes was implemented. The target object (16/spl times/24/spl times/6 mm) was successfully positioned with positioning accuracies of (/spl plusmn/1 /spl mu/m, /spl plusmn/1 /spl mu/m, /spl plusmn/0.2 mrad), based on a derived heuristic control model.     

A CMOS 110-dB@40-kS/s programmable-gain chopper-stabilized third-order 2-1 cascade sigma-delta Modulator for low-power high-linearity automotive sensor ASICs

This paper describes a 0.35-/spl mu/m CMOS chopper-stabilized switched-capacitor 2-1 cascade /spl Sigma//spl Delta/ modulator for automotive sensor interfaces. The modulator architecture has been selected from an exhaustive comparison among multiple topologies in terms of resolution, speed and power dissipation. To obtain a better fitting with the characteristics of different sensor outputs, the circuit can be digitally programmed to yield four input-to-output gain values (/spl times/0.5,/spl times/1,/spl times/2, and /spl times/4) and has been designed to operate within the stringent environmental conditions of automotive electronics (temperature range of -40/spl deg/C to 175/spl deg/C). In order to relax the amplifier's dynamic requirements for the different modulator input-to-output gains, switchable capacitor arrays are used for all the capacitors in the first integrator. The design of the building blocks is based on a top-down CAD methodology which combines simulation and statistical optimization at different levels of the modulator hierarchy. The circuit is clocked at 5.12 MHz and the overall power consumption is 14.7 mW from a single 3.3-V supply and occupies 5.7 mm/sup 2/ silicon area. Experimental results show a maximum SNR of 87.3 dB within a 20-kHz signal bandwidth and 90.7 dB for 10-kHz signals, and an overall DR of 110 and 113.8dB, respectively. These performance features place the reported circuit at the cutting edge of state-of-the-art high-resolution /spl Sigma//spl Delta/ modulators.     

MISR stereoscopic image matchers: techniques and results

The Multi-angle Imaging SpectroRadiometer (MISR) instrument, launched in December 1999 on the NASA EOS Terra satellite, produces images in the red band at 275-m resolution, over a swath width of 360 km, for the nine camera angles 70.5/spl deg/, 60/spl deg/, 45.6/spl deg/, and 26.1/spl deg/ forward, nadir, and 26.1/spl deg/, 45.6/spl deg/, 60/spl deg/, and 70.5/spl deg/ aft. A set of accurate and fast algorithms was developed for automated stereo matching of cloud features to obtain cloud-top height and motion over the nominal six-year lifetime of the mission. Accuracy and speed requirements necessitated the use of a combination of area-based and feature-based stereo-matchers with only pixel-level acuity. Feature-based techniques are used for cloud motion retrieval with the off-nadir MISR camera views, and the motion is then used to provide a correction to the disparities used to measure cloud-top heights which are derived from the innermost three cameras. Intercomparison with a previously developed "superstereo" matcher shows that the results are very comparable in accuracy with much greater coverage and at ten times the speed. Intercomparison of feature-based and area-based techniques shows that the feature-based techniques are comparable in accuracy at a factor of eight times the speed. An assessment of the accuracy of the area-based matcher for cloud-free scenes demonstrates the accuracy and completeness of the stereo-matcher. This trade-off has resulted in the loss of a reliable quality metric to predict accuracy and a slightly high blunder rate. Examples are shown of the application of the MISR stereo-matchers on several difficult scenes which demonstrate the efficacy of the matching approach.     

Iron contamination in silicon wafers measured with the pulsed MOS capacitor generation lifetime technique

The pulsed MOS capacitor generation lifetime technique is used to determine the iron density in boron-doped silicon wafers. Effective generation lifetimes (/spl tau//sub g,eff/) are extracted from the Zerbst plots obtained from the measured capacitance-time (C-t) data. Upon thermal heating at 200/spl deg/C for 5 minutes and quenching to 23/spl deg/C, iron-boron (Fe-B) pairs dissociate into interstitial iron (Fe/sub i/) and substitutional boron (B). The post-heated /spl tau//sub g,eff/ decreases immediately after heating. As time elapses (pairing time t/sub p/ increases) after Fe-B dissociation, T/sub g,eff/ increases because Fe/sub i/ reforms into Fe-B pairs. It takes about four times the time constant (i.e., t/sub p//spl ap/4/spl tau/) of Fe-B pairing reaction before the post-heated /spl tau//sub g,eff/ recovers to the pre-heated /spl tau//sub g,eff/. An expression is developed to determine the iron density. The iron density obtained from this expression shows good agreement with that measured by deep-level transient spectroscopy.     

Ultra precision motion control of a multiple degrees of freedommagnetic suspension stage

A general framework for ultra precision motion control of magnetic suspension actuation systems with large travel ranges in multiple degrees of freedom (DOF) is presented. It encompasses the development of nonlinear electromagnetic force model for 6-DOF actuation, and the design of the necessary control architecture for ultra precision motion control of magnetic suspension actuation systems. A 6-DOF magnetic suspension stage (MSS) was designed and fabricated to illustrate the developed framework. The MSS consists of multiple electromagnets that are located around the flotor and are utilized to suspend and modulate its position and orientation. The control architecture takes the six control parameters provided by a laser measuring system and intends to control the 6-DOF motion by regulating the current in the electromagnets. The developed robust nonlinear control architecture consists of three components: 1) feedback linearization; 2) force distribution; and 3) H_∞ robust controllers for each DOF of motion. Several experiments are designed to illustrate the desired characteristics of the developed system     

Highly scalable 2-D fiber collimator array based on an array of through-holes in silicon

A highly scalable 4/spl times/4 fiber collimator array with long collimation length has been fabricated by utilizing a two-dimensional array of precision-controlled through-holes in silicon. A fiber array and a lens array were prepared by precisely positioning corresponding fibers and lenses utilizing the holes in separate silicon substrates, and the two arrays were integrated to implement the collimator array. The achieved average angular pointing accuracy and positioning accuracy of the collimator array were about 0.1/spl deg/ and better than 2 /spl mu/m, respectively. At a distance of 10 cm from the collimator, the measured collimated beam size was 400 /spl mu/m with its full divergence angle of 0.18/spl deg/.     

Dynamic sleep transistor and body bias for active leakage power control of microprocessors

In order to manage the active power consumption of high-performance digital designs, active leakage control techniques are required to provide significant leakage power savings coupled with fast time constants for entering and exiting idle mode. In this paper, dynamic sleep transistors and body bias are used in conjunction with clock gating to control active leakage for a 32-bit integer execution core in 130-nm CMOS technology. Measurements on pMOS sleep transistor reveal that lowest-leakage state is reached in less than 1 /spl mu/s, resulting in 37/spl times/ reduction in leakage power, while reactivation of block is achieved in less than two clock cycles. PMOS body bias reduces leakage power by 2/spl times/ with no performance penalty, and similar reactivation time. Power measurements at 4 GHz, 1.3 V, 75/spl deg/C demonstrate 8% total power reduction using dynamic body bias and 15% power reduction using a pMOS sleep transistor, for a typical activity profile.     

Thermal management of BioMEMS: temperature control for ceramic-based PCR and DNA detection devices

Integrated microfluidic devices for amplification and detection of biological samples that employ closed-loop temperature monitoring and control have been demonstrated within a multilayer low temperature co-fired ceramics (LTCC) platform. Devices designed within this platform demonstrate a high level of integration including integrated microfluidic channels, thick-film screen-printed Ag-Pd heaters, surface mounted temperature sensors, and air-gaps for thermal isolation. In addition, thermal-fluidic finite element models have been developed using CFDRC ACE+ software which allows for optimization of such parameters as heater input power, fluid flow rate, sensor placement, and air-gap size and placement. Two examples of devices that make use of these concepts are provided. The first is a continuous flow polymerase chain reaction (PCR) device that requires three thermally isolated zones of 94/spl deg/C, 65/spl deg/C, and 72/spl deg/C, and the second is an electronic DNA detection chip which requires hybridization at 35/spl deg/C. Both devices contain integrated heaters and surface mount silicon transistors which function as temperature sensors. Closed loop feedback control is provided by an external PI controller that monitors the temperature dependant I-V relationship of the sensor and adjusts heater power accordingly. Experimental data confirms that better than /spl plusmn/0.5/spl deg/C can be maintained for these devices irrespective of changing ambient conditions. In addition, good matching with model predictions has been achieved, thus providing a powerful design tool for thermal-fluidic microsystems.     

Development of liquid cooling techniques for flip chip ball grid array packages with High Heat flux dissipations

In this paper, development of single-phase liquid cooling techniques for flip chip ball grid array packages (FBGAs) with high flux heat dissipations is reported. Two thermal test chips with different footprints, 12 mm/spl times/ 12 mm and 10 mm /spl times/10 mm, respectively, were used for high heat flux characterizations. A liquid-cooled aluminum heat sink with an area of 15 mm (L) /spl times/12.2 mm (W) populated by microchannels was designed and fabricated. The microchannel heat sink was assembled onto the chip, using a thermal interface material to reduce the contact thermal resistance at the interface. A variable speed pump was used to provide the pressure head for the liquid cooling loop. The measured thermal resistance results ranged from 0.44 to 0.32/spl deg/C/W for the 12-mm chip case and from 0.59 to 0.44/spl deg/C/W for the 10-mm chip case, both under flowrates ranging from 1.67/spl times/10/sup -6/ m/sup 3//s to 1.67/spl times/10/sup -5/ m/sup 3//s. An analytical model of the flow and heat transfer in microchannel heat sinks is also presented. Computational predictions agree with the measurements for pressure drop within 15% and thermal resistances within 6%. The analytical results indicate that thermal interface resistance becomes a key limitation to maximizing heat removal rate from electronic packages.     

Robust speed control of an induction motor: an /spl Hscr//sub /spl infin// control theory approach with field orientation and /spl mu/-analysis

In this paper we present a robust speed control strategy for an induction motor under field orientation. The control framework employed properly represents the induction motor state-space model and its inherent variations, which are treated as structured uncertainties. Applying an /spl Hscr//sub /spl infin//, optimization methodology on this framework we derive a stabilizing controller to meet design objectives and then robust stability and performance against such variations are checked by using /spl mu/-analysis. No on-line tuning is required for the parameters of the derived controller, which is the dynamic system responsible to keep the rotor flux orientation as well as the speed regulation at design levels, irrespective of the motor operating points. A general methodology arose from the usage of the proposed strategy and simulated experiments showed satisfactory results for the robust speed control of an induction motor.     

Model identification and adaptive control of lower limb exoskeleton based on neighborhood field optimization

In lower limb exoskeletons, control performance and system stability of human–robot coordinated movement are often hampered by some model parametric uncertainties. To address this problem, Neighborhood Field Optimization (NFO) is proposed to identify the unknown model parameters of an exoskeleton for the model-based controller design. The excitation trajectory is designed by the NFO algorithm with motion constraints to improve the model identification accuracy. Meanwhile, the Huber fitness function is adopted to suppress the influence of the disturbance points in sampled dataset. Then an adaptive backstepping control scheme is constructed to improve the dynamic tracking performance of human–robot training mode in the presence of the identification error. Via Lyapunov technique and backstepping iteration, all the system state errors of the exoskeleton are bound and converge to zero neighborhood based on the assumption of bounded identified parameter error. Finally, the model identification results and comparative tracking performance of the proposed scheme are verified by an experimental platform of Two-degrees of freedom (DOF) lower limb exoskeleton with human–robot cooperative motion.     

Baseband stage for WCDMA direct conversion receiver with high dynamic range and accurate temperature compensation

A highly integrated baseband stage, which adopts a new configuration for the wideband code-division multiple access (WCDMA) direct conversion receiver (DCR), is described. The baseband stage satisfies all requirements of the WCDMA DCR and consists of opamp-RC channel select filters and variable gain amplifiers with linear-in-dB gain control. It achieves a high dynamic range of 85 dB with /spl plusmn/1.5 dB accuracy over a temperature variation from -25 to 85/spl deg/C, 16.5 nV//spl radic/Hz input-referred noise, +20 dBV out-of-band IIP3 and +70 dBV out of band IIP2. The baseband stage is fabricated using a 0.35 /spl mu/m SiGe BiCMOS process and consumes a total current of 11 mA/CH from a 2.7 V supply.     

High temperature dielectric stability of liquid crystal polymer at mm-wave frequencies

The temperature dependent dielectric stability and transmission line losses of liquid crystal polymer (LCP) are determined from 11-105 GHz. Across this frequency range, LCP's temperature coefficient of dielectric constant, /spl tau//sub /spl epsi/r/, has an average value of -42 ppm//spl deg/C. At 11GHz the /spl tau//sub /spl epsi/r/ is the best (-3 ppm//spl deg/C), but this value degrades slightly with increasing frequency. This /spl tau//sub /spl epsi/r/ average value compares well with the better commercially available microwave substrates. In addition, it includes information for mm-wave frequencies whereas standard values for /spl tau//sub /spl epsi/r/ are usually only given at 10 GHz or below. Transmission line losses on 3- and 5-mil LCP substrates increase by approximately 20% at 75/spl deg/C and 50% or more at 125/spl deg/C. These insertion loss increases can be used as a design guide for LCP circuits expected to be exposed to elevated operating temperatures.