ZnO薄膜对于CdTe太阳电池的影响*

通过直流磁控溅射法在ITO薄膜上沉积的ZnO薄膜可以作为CdTe太阳电池的高阻层。通过XRD,可见-红外可见光谱仪和四探针法分析了制备薄膜的结构,光学和电学性质。通过紫外光电子能谱和X射线光电子能谱深度刻蚀法分析了ITO/ZnO和ZnO/CdS薄膜的界面性质。结果表明：ZnO 作为高阻层有良好的光学和电学性质。ZnO 薄膜降低了ITO和CdS之间的势垒。 制备出来电池有ZnO（没有ZnO）的能量转换效率和量子效率是12.77% (8.9%) 和 >90% (79%)。 进一步,通过AMPS-1D模拟分析了ZnO薄膜厚度对于CdTe太阳电池的影响。     

掺杂浓度对AZO薄膜结构和光电性能的影响

采用溶胶-凝胶(Sol-Gel)工艺在普通玻璃基片上成功地制备出高c轴择优取向性、高可见光透过率和低电阻率的Al3+掺杂型的ZnO透明导电薄膜,对这种薄膜进行了X-射线衍射和扫描电镜分析,并对其光电性能作了详细的研究。结果表明,制备的薄膜为钎锌矿型结构,呈c轴方向择优生长;其可见光透过率可达85%以上;Al3+掺杂型的ZnO透明导电薄膜的电阻率在1.5×10-2~8.2×10-2Ω.cm。     

ITO透明导电薄膜的制备及光电特性研究

以氯化铟和氯化锡为前驱物,采用溶胶 凝胶法在玻璃基片上制备了ITO薄膜。研究了掺锡浓度、热处理温度和热处理时间等工艺条件对ITO薄膜光电特性的影响。制备的ITO薄膜的方阻为300Ω/□,可见光平均透过率为80%,电阻率为4×10-3Ω·cm,其光电特性已达到了TN LCD透明电极的要求。     

薄膜厚度对直流溅射制备AZO薄膜的特性影响

采用直流磁控溅射法,当衬底温度为室温时,在普通玻璃衬底上制备出了低电阻率、高透过率的ZnO:Al透明导电薄膜.研究了薄膜厚度对薄膜结构以及光电特性影响.当薄膜厚度为930 nm,薄膜的光电特性最好,电阻率为4.65×10~(-4)Ω·cm,可见光范围内的平均透过率为85.8%,禁带宽度约为3.51 eV.     

ZnO/Ag/ZnO多层膜的制备和性质研究

采用射频磁控溅射ZnO陶瓷靶和直流磁控溅射Ag靶的方法制备了ZnO/Ag/ZnO多层膜。用X射线衍射仪、紫外–可见分光光度计、四探针测试仪和金相显微镜对ZnO/Ag/ZnO薄膜的结构、光学透过率、方阻和稳定性进行了研究。结果表明,ZnO(60nm)/Ag/(10nm)/ZnO(60nm)薄膜呈现多晶结构,薄膜在520nm处的光学透过率高达87.5%,方阻Rs为6.2Ω/□。随着顶层ZnO薄膜厚度的增加,ZnO/Ag/ZnO薄膜的稳定性提高。     

腐蚀法制备绒面ZnO透明导电薄膜

利用中频脉冲磁控溅射系统制备高透过率、高电导率的平面ZnO薄膜。对平面ZnO薄膜进行短时间弱酸腐蚀,可以获得绒面效果的ZnO透明导电薄膜。分析了工作气压和衬底温度对薄膜绒面结构的影响,获得了适合薄膜太阳能电池的绒面ZnO透明导电薄膜。当压力控制在1.92Pa左右,衬底温度150～170℃范围内沉积的薄膜具有最佳的绒面和较低的电阻率,电阻率可达5.57×10-4Ω·cm,载流子浓度2.2×1020cm-3,霍尔迁移率40.1cm2/V·s,在可见光范围平均透过率超过85%。     

快速热退火对ITO薄膜及LED芯片性能的影响

采用金属有机化学气相沉积(MOCVD)技术在蓝宝石衬底上制备了GaN基LED外延层,采用磁控溅射法制备了氧化铟锡(ITO)薄膜,ITO薄膜用于制作与p-GaN的欧姆接触.研究了快速热退火温度为550℃,退火时间为200 s时,不同氧气体积流量对ITO薄膜性能及LED芯片光电性能的影响.结果表明:不通氧气时,ITO薄膜的方块电阻和透过率分别为33 Ω/口和93.1％,LED芯片出现电流拥挤效应,其电光转换效率只有33.3％;氧气体积流量为1 cm3/min时,ITO薄膜的方块电阻和透过率分别为70 Ω/口和95.9％,LED芯片的电流扩展不佳,其正向电压较高,电光转换效率为43.8％;氧气体积流量为0.4 cm3/min时,ITO薄膜的方块电阻和透过率分别为58 Ω/口和95.4％,LED芯片的电流扩展最佳,其亮度最高、正向电压最低,电光转换效率较高,为52.9％.     

大面积ZnO:Al窗口层的制备与研究

采用磁控溅射方法,制备了大面积(300mm×300mm)ZnO:Al薄膜作为CIGS太阳电池的窗口层。设计以电阻率和透过率测试值的标准差乘积作为衡量大面积低阻ZnO窗口层的均匀性标准,确定4mm/s作为衬底与靶材最合适的相对行走速度,并进一步研究工作气压和溅射功率对ZnO:Al薄膜结构、电学特性和光学特性的影响,实现在400～1 200nm波长范围内平均透过率大于85%,电阻率ρ约1.0×10-3Ω.cm。试验结果表明,改善的工艺条件能得到大面积内厚度均匀、光电特性良好的低阻ZnO窗口层。     

磁控溅射NiO/ZnO透明异质结二极管及其光电特性研究

采用磁控溅射方法在ITO玻璃基板上沉积NiO,ZnO,AZO三层透明氧化物薄膜,成功制备了NiO/ZnO透明异质结二极管.实验结果表明,PN结展示出明显的I-V整流特性,正向开启电压1V;在氙灯光照条件下,二极管反向电流在5V偏置时,达到1.5 mA.二极管在可见光的平均透过率约为25%.     

PEN为衬底的柔性有机电致发光器件的光电性能

采用直流磁控溅射技术,在聚对萘二甲酸乙二醇酯(PEN)柔性衬底上制备了氧化物铟锡(ITO)导电薄膜,研究了衬底温度和薄膜厚度工艺参数对柔性衬底上导电薄膜光学性能与电学性能的影响.在优化工艺的条件下,所制备的PEN导电基板的方阻低至35 Ω/□,且可见光透过率大于95％;以此柔性ITO衬底为阳极,制备了结构为PEN/ITO/NPB/Alq3/Al的柔性有机电致发光器件.作为对比,选用多种不同的衬底材料制备了有机电致发光器件,并比较了各器件性能的差异.     

氧分压对PLD法生长Si(111)基ZnO薄膜性能的影响

在不同氧分压下用脉冲激光沉积(PLD)法在n型硅(111)衬底上生长ZnO薄膜。通过对其进行XRD、傅里叶红外吸收(FTIR)和光致发光谱(PL)的测量,研究了氧分压对PLD法制备的ZnO薄膜的结晶质量和发光性质的影响。XRD显示,氧分压为6.50Pa时可以得到结晶质量最佳的ZnO薄膜。PL谱显示,当氧分压由0.13Pa上升至6.50Pa时,位于380nm附近的主发光峰的强度最大。当氧分压进一步上升至13.00Pa时,主发光峰减弱,与氧空位有关的发光峰消失,显示出ZnO薄膜的PL谱和氧分压的大小密切相关。     

ZnSe/ITO thin films:candidate for CdTe solar cell window layer

The crystal structure, electrical and optical properties of ZnSe thin films deposited on an In₂O₃:Sn (ITO) substrate are evaluated for their suitability as the window layer of CdTe thin film solar cells. ZnSe thin films of 80, 90, and 100 nm thickness were deposited by a physical vapor deposition method on Indium tin oxide coated glass substrates. The lattice parameters are increased to 5.834 Å when the film thickness was 100 nm, which is close to that of CdS. The crystallite size is decreased with the increase of film thickness. The optical transmission analysis shows that the energy gap for the sample with the highest thickness has also increased and is very close to 2.7 eV. The photo decay is also studied as a function of ZnSe film thickness.     

氧分压对纳米ZnO薄膜光致发光特性的影响

采用射频反应磁控溅射法在玻璃衬底上成功制备出具有c轴高择优取向的ZnO薄膜,利用X射线衍射仪及荧光分光光度计研究了氧分压变化对ZnO薄膜的微观结构及光致发光特性的影响.结果表明,当工作气压恒定时,合适的氧分压能够提高ZnO薄膜的结晶质量.对样品进行光致发光测量时,所制备ZnO薄膜样品在400 mm左右出现较强紫光发射,在446 nm出现蓝光发射,经分析认为紫光发射来源于激子复合,而446 nm左右的蓝光发射来源于ZnO薄膜内部的Znj缺陷.     

ITO薄膜厚度和含氧量对其结构与性能的影响

在玻璃衬底上用直流磁控溅射的方法镀制ITO透明半导体膜,采用X射线衍射技术分析了膜层晶体结构与薄膜厚度和氧含量的关系,并测量了薄膜电阻率及透光率分别随膜厚和氧含量的变化情况。以低氧氩流量比(1/40)并控制膜厚在70nm以上进行镀膜,获得了结晶性好、电阻率低且透光率高的ITO透明半导体薄膜,所镀制的ITO膜电阻率降到1.8×10–4?·cm,可见光透光率达80%以上。     

改善玻璃衬底上ZnO薄膜特性的方法

利用磁控溅射法在玻璃衬底上淀积铝掺杂氧化锌(AZO)薄膜作为缓冲层,在其上制备了ZnO薄膜。重点研究了AZO薄膜作为缓冲层对玻璃衬底上ZnO薄膜特性的影响。扫描电子显微镜(SEM)图像和X射线衍射(XRD)图谱分析结果表明,玻璃衬底上加入厚度为1μm的AZO缓冲层后,提高了衬底材料和ZnO薄膜之间的晶格匹配程度,有助于增大ZnO薄膜晶粒尺寸,提高其(002)取向择优生长特性、薄膜结晶特性及晶格结构完整性。室温下的透射光谱结果表明玻璃/AZO和玻璃衬底上ZnO薄膜的透光特性没有显著不同。光致发光(PL)谱研究结果表明AZO缓冲层可以有效阻止衬底表面硅原子从ZnO薄膜中"俘获"氧原子,减少ZnO薄膜中的缺陷,改善ZnO薄膜的结晶质量。     

The effect of oxygen on interface microstructure evolution in CdS/CdTe solar cells

Microstructural changes at the CdS/CdTe solar cell interface where close‐spaced sublimation (CSS) is used as the growth technique to deposit the p‐type CdTe absorber layer are studied by systematic layer characterization at various stages during heterojunction growth. CdS layers grown by both chemical bath deposition (CBD) and CSS provide a basis for determining the effects of CdS crystallinity, grain size, and oxygen content on the subsequent CdTe layer. As‐grown CBD CdS films exhibit small grains and variations in optical properties attributed to film impurities. In contrast, CSS yields CdS films with good crystallinity, larger grains, and nearly ideal optical properties. The hexagonal nature of CSS‐grown CdS is seen to nucleate hexagonal CdTe during the initial stages of CdTe film growth. Cubic CdS deposited by CBD in contrast promotes cubic CdTe nucleation. Oxygen anneals in the latter case can aid hexagonal CdTe nucleation. Auger electron spectroscopy (AES) and transmission electron microscopy (TEM) of the CdS/CdTe interface show CdS‐dependent differences in interdiffusion at the interface. This interdiffusion appears to be determined by the oxygen level in the CdS. When low‐oxygen‐containing CSS CdS films are used, sulfur diffusion is substantial, leading to significant consumption of the CdS layer. When these same films are annealed in oxygen, the consumption is reduced. Te diffusion into the CdS layer is also observed to decrease with oxygen anneals. Optical modeling shows that Te alloying with the CdS layer can greatly reduce the short‐circuit current of CdS/CdTe devices. Copyright © 2002 John Wiley & Sons, Ltd.     

Effect of deposition power in fabrication of highly efficient CdS:O/CdTe thin film solar cell by the magnetron sputtering technique

Polycrystalline II–VI semiconductor materials such as oxygenated CdS have a wide and tunable band gap (≥2.5 eV) which plays an important role in increasing the light absorption capacity of CdTe absorber. In this study, the ultra-thin CdS:O and CdTe films were deposited by the sputtering technique and the optimum condition of deposition power is investigated. The prepared ultra-thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, X-ray photoelectron spectroscopy (XPS), UV–vis spectrometry, Hall Effect and current–voltage measurements techniques. The complete cell was then fabricated by the sputtering technique with a novel configuration of ‘glass/FTO/ZnO:Sn/CdS:O/CdTe/C:Cu/Ag’. To avoid the pin hole effect, the high resistive ZnO:Sn layer was deposited as a buffer layer in between the FTO and CdS:O films. It has been observed that the cell performance parameters are found to be varied with deposition power of CdO:S films and an overall conversion efficiency of 10.27% was achieved.     

Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer

ZnO thin films without and with a homo-buffer layer have been prepared on Si(1 1 1) substrates by pulsed laser deposition (PLD) under various conditions. Photoluminescence (PL) measurement indicates that the optical quality of ZnO thin film is dramatically improved by introducing oxygen into the growth chamber. The sample deposited at 60 Pa possesses the best optical properties among the oxygen pressure range studied. X-ray diffraction (XRD) results show that the films directly deposited on Si are of polycrystalline ZnO structures. A low-temperature (500 °C) deposited ZnO buffer layer was used to enhance the crystal quality of the ZnO film. Compared to the film without the buffer layer, the film with the buffer layer exhibits aligned spotty reflection high-energy electron diffraction (RHEED) pattern and stronger near-band-edge emission (NBE) with a smaller full-width at half-maximum (FWHM) of 98 meV. The structural properties of ZnO buffer layers grown at different temperatures were investigated by RHEED patterns. It is suggested that the present characteristics of the ZnO epilayer may be raised further by elevating the growth temperature of buffer layer to 600 °C.     

High Performance PbS Colloidal Quantum Dot Solar Cells by Employing Solution‐Processed CdS Thin Films from a Single‐Source Precursor as the Electron Transport Layer

CdS thin films are a promising electron transport layer in PbS colloidal quantum dot (CQD) photovoltaic devices. Some traditional deposition techniques, such as chemical bath deposition and RF (radio frequency) magnetron sputtering, have been employed to fabricate CdS films and CdS/PbS CQD heterojunction photovoltaic devices. However, their power conversion efficiencies (PCEs) are moderate compared with ZnO/PbS and TiO₂/PbS heterojunction CQD solar cells. Here, efficiencies have been improved substantially by employing solution‐processed CdS thin films from a single‐source precursor. The CdS film is deposited by a straightforward spin‐coating and annealing process, which is a simple, low‐cost, and high‐material‐usage fabrication process compared to chemical bath deposition and RF magnetron sputtering. The best CdS/PbS CQD heterojunction solar cell is fabricated using an optimized deposition and air‐annealing process achieved over 8% PCE, demonstrating the great potential of CdS thin films fabricated by the single‐source precursor for PbS CQDs solar cells.