激光干涉波形解调测量振动相位新方法

激光干涉频比计数法广泛应用于绝对法振动标准装置,针对频比计数法只能测量振幅不能得到振动相位,提出一种利用激光干涉条纹与振动台运动位移之间的关系,实现测量振动相位的新方法,并给出激光干涉波形解调测量振动相位的数学模型。该方法基于零差的迈克尔逊激光干涉仪,利用高速采集器同步采集激光干涉信号和传感器信号,并在Lab VIEW虚拟仪器开发平台上,软件解调振动波形,实现振动幅值和振动相位的实时测量。测量结果与正弦逼近法相一致。     

一种新型单频激光干涉系统的研究

这种单频激光干涉系统采用共光路设计布局,通过偏振分束器以及1/4波长片等光学器件对干涉条纹进行空间移相,提取相位依次相差90°的三路干涉输出信号,进行比较放大,解决了常规单频激光干涉仪中的光强“零漂”问题。利用共模抑制技术,提高了干涉系统的测量稳定性和重复性。采用光程差放大技术,提高了干涉系统的分辨力。     

标准硅球直径精密测量系统的设计

基于多光束干涉的基本原理，导出了使用斐索干涉仪测量硅球直径多光束干涉光强分布的精确公式。针对目前的硅球直径测量系统忽略了多次反射对干涉信号造成的影响和系统中固有的条纹清晰度低的问题，研究了多次反射对干涉信号造成的误差，结果表明其最大光强误差可达到8％。通过对光学干涉系统结构设计和元件参数选择，最大限度地优化了干涉条纹的可见度，并设计出零背景光强标准硅球直径精密测量系统。数值模拟结果表明，该系统不仅极大地提高了干涉条纹对比度、消除了背景噪声，而且可通过改变透镜焦距调节干涉条纹的强度以达到CCD的最佳工作范围，从而提高了光强信号的测量准确度。     

高精度衍射光栅干涉仪的研制

提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率.由于光栅干涉测量系统以光栅栅距作为测量基准,相对于传统干涉仪,光栅尺系统受环境因素造成的测量误差影响较小.通过实验校正,得到不同行程范围内光栅干涉测量系统的纳米级重复性误差,新型的激光衍射光栅干涉仪测量系统适合于较长行程的高精度位移测量.     

利用数字散斑照相术测量面内位移

采用数字图像处理技术直接对双曝光散斑图进行全场分析,获取了杨氏条纹图．通过对条纹图的滤波增强、二值化、细化等操作,提取了条纹周期,实现了物体面内微小位移的测量．实验结果表明,该方法可获得高对比度的散斑干涉条纹,经过数字图像处理,条纹细化无断点和毛刺,有利于条纹判读,提高测量精度,其微位移测量误差小于4％．由于散斑图及条纹图像均是在计算机内存储、处理,实现了散斑照相术的数字化,具有一定的应用价值．     

基于非本征F-P干涉技术的全光纤位移测量系统北大核心CSCD

为解决传统分离镜组式干涉仪体积较大,无法在空间受限的环境条件下应用的问题,开展了全光纤F-P干涉位移测量技术研究。根据干涉原理分析了不同反射率条件对干涉信号形式的影响,计算得出:当反射率为4%时,多光束干涉的光强信号将近似为正弦函数,并利用有限元仿真对位移测量原理进行验证。设计搭建了基于非本征F-P干涉技术的全光纤位移测量系统。实验结果表明:该系统在1 min内静态噪声电压标准差为23.3 mV;在1 mm位移范围内,该系统与XL-80激光干涉仪的测量结果呈现高度线性关系,线性相关系数R 2为1,且该系统位移测量重复性优于XL-80激光干涉仪。     

单频激光干涉仪条纹的偏振移相细分技术

提出了一种用于单频激光干涉仪条纹细分的偏振移相技术.通过偏振分光镜、波片等光学元器件产生四路依次相差90°相位的激光干涉信号,经过硬件电路的整形、放大和比较后,可以解决常见的光强"零漂"问题.共光路设计有效地消除了由于环境因素给测量带来的误差,提高了干涉系统的稳定性和重复性.移相技术不仅充分地利用光能量,而且四路信号更便于干涉条纹的计数和判向,同时为电子细分技术奠定了基础.     

块状材料的折射率测量实验研究

利用迈克尔逊干涉仪对透明平板材料如玻片的折射率进行了测量研究,通过分析实验中的光程差,分别采用He-Ne激光器和白炽灯做光源,根据干涉条纹的吞吐变化规律、条纹形状与颜色,对测试结果进行分析。测试结果表明该方法改善了传统干涉法测量折射率时玻片瞬间条纹移动数目不易精确计数的弊端。     

激光双法布里--珀罗干涉纳米测量系统的理论分析

本文设计了一种基于双法布里-珀罗干涉仪、采用计算机实时处理、以轻拍式探针为传感器的新型纳米测量系统,描述了该系统的工作原理,详细进行了系统的理论分析.提出了通过测量双法布里-珀罗干涉仪透射光强基波幅值差或基波等幅值过零时间间隔的方法进行纳米测量的理论基础,分析了轻拍式探针的振动模型,给出了检测探针振幅变化的新方法及理论依据.     

新型移相量块干涉仪的研制

研制了一台用于0.5~100 mm量块测量的新型移相量块干涉仪,分别以波长为633 nm和543 nm的两台稳频激光器作为测量光源,通过一根单模光纤引入到干涉仪内。高精密移相器实现5步移相干涉测量,CCD相机采集干涉条纹并计算干涉条纹小数,被测量块长度采用多波长的小数重合法计算。移相量块干涉仪的测量不确定度达到U=0.015μm+0.07×10~(-6)L(L为量块长度,mm)。     

Measurement of changes in optical path length and reflectivity with phase-shifting laser feedback interferometry

The operating characteristics of a novel phase-shifting interferometer are presented. Interference arises by reflecting the light from a sample back into the cavity of a cw He-Ne laser. Changes in phase and fringe visibility are calculated from an overdetermined set of phase-shifted intensity measurements with the phase shifts being introduced with an electro-optic modulator. The interferometer is sensitive enough to measure displacements below 1 Hz with a rms error of approximately 1 nm from a sample that reflects only 3% of the 28 muW that is incident on its surface. The interferometer is applied to the determination of cantilever bending of a piezoelectric bimorph.     

Correlation-based speckle velocimeter with self-mixing interference in a semiconductor laser diode

We propose a novel self-mixing laser diode speckle velocimeter based on autocorrelation. The self-mixing laser diode launches and receives reflected light from a moving surface that has a random reflection profile. Some portion of the scattered light backcouples into the laser cavity and causes random intensity variations in the form of speckle signals. These speckle signals obtained from a self-mixing laser diode are processed by use of autocorrelation. The linear relation between the velocity and the reciprocal of the correlation time of the speckle intensity fluctuations allows us to determine the velocity easily if proper calibration is performed. The range of the investigated velocity is 20-450 mm/s. For an aluminum target that moves at a velocity of 350 mm/s, the measurement error is less than 2%.     

光热调制半导体激光波长降低干涉测量误差

本文首次将光源波长的光热调制技术用于正弦相位调制干涉仪中,消除了因直接调制激光波长引起的光强度变化对测量的影响,降低了测量误差。     

Balanced detector interferometric ellipsometer

A novel balanced detector interferometric ellipsometer (BDIE), composed of a polarized common-path optical heterodyne interferometer incorporating a novel balanced detector, provides an amplitude-sensitive method for measurement of the elliptical parameters of a thin film. The requirement for equal amplitude of the polarized heterodyne signals for balanced detection results in the simultaneous measurement of the elliptical parameters in terms of the azimuth angle of a half-wave plate and the output intensity from the differential amplifier, respectively. The common-path feature of BDIE shows a common phase noise rejection mode and this enhances the sensitivity of the phase measurement. At the same time, the balanced detector configuration of BDIE reduces excess noise of laser intensity fluctuation to give better sensitivity during measurement. The error of measurement of BDIE is derived and analyzed. Finally, the elliptical polarization effect of the laser beam is found to be independent of the measurement of the elliptical parameters.     

Surface profilometry with laser-diode optical feedback interferometer outside optical benches

A simple and robust interferometer with a laser diode subject to optical feedback from the interferometer is presented for surface testing of a spherical mirror. The fringe phase can be locked by the optical feedback within less than 0.2pi (peak-to-valley value) even when the interferometer is placed on a wooden table. The fringe locking is caused by the change of lasing wavelength that suppresses the net phase change to be much less than 2pi. The locked fringe pattern with spatial carriers can be analyzed by a fringe analyzer at a video rate, and the measurement results of the spherical mirror showed the same result as on an optical bench.     

Simultaneous measurement of velocity and length of moving surfaces by a speckle velocimeter with two self-mixing laser diodes

A novel laser speckle velocimeter with two self-mixing laser diodes (SM-LD's) for velocity and length measurements of moving surfaces is reported. The mean frequency of the speckle signal obtained in the measurement system depends on the surface path illuminated by the SM-LD. This behavior of the speckle signal in the SM-LD's is exploited to detect the front and the end edges of a target surface by sampling continuously the number of intensity changes in a speckle signal waveform. Once the edges are determined, the velocity and the length of the surface are calculated easily. The error for length and velocity measurements of a target with a homogeneous rough plane surface of 60-mm length, moving at a velocity of 200 mm/s, can be as low as 2.1% and 1.75%, respectively.     

Optimum determination of speckle size to be used in electronic speckle pattern interferometry

Characteristics of the fringe pattern detected by an electronic speckle pattern interferometer, in conditions in which a test object deforms in an arbitrary direction and the speckle intensity is detected over a pixel area in the TV camera to be used, have been investigated from two aspects: speckle noise reduction and fringe contrast. The main result is that the fringes are obtained with high contrast and low speckle noise, if the speckle size is selected by the optical system so as to be smaller than the pixel size. This result is applicable to highly accurate measurements of the out-of-plane displacements of the test object, whose in-plane displacement is small.     

Closed-loop phase stepping in a calibrated fiber-optic fringe projector for shape measurement

Active homodyne feedback control can be used to stabilize an interferometer against unwanted phase drifts introduced by, for example, temperature gradients. The technique is commonly used in fiber-optic sensors to maintain the fiber at its most sensitive (quadrature) position. We describe an extension of the technique to introduce stabilized, pi/2-rad phase steps in a full-field interferometer. The technique was implemented in a single-mode, fiber-optic interference fringe projector used for shape measurement and can be easily applied to other fiber- or bulk-optic interferometers, for example, speckle pattern and holographic interferometers. Fresnel reflections from the distal fiber ends undergo a double pass in the fibers and interfere at the fourth port of a directional coupler. The interference intensity (and hence phase) is maintained at quadrature by feedback control to a phase modulator in one of the fiber arms. Stepping between quadrature positions (separated by pi rad for light undergoing a double pass) introduces stabilized phase steps in the projected fringes (separated by pi/2 rad for a single pass). A root-mean-square phase stability of 0.61 mrad in a 50-Hz bandwidth and phase step accuracy of 1.17 mrad were measured.     

A displacement-measuring instrument utilizing self-mixing interferometry

We develop a self-mixing laser interferometer for the measurement of displacements on a generic target surface. The measurement is based on the bright-speckle tracking, a technique we have recently proposed to solve amplitude fading associated with the speckle statistics when the displacement to be covered is well in excess of the speckle longitudinal size. We implement the dynamical tracking of speckle maxima with piezo actuators and a phase-sensing loop. Also, we use an automatic gain control, based on a liquid crystal attenuator, to improve the amplitude statistics. Details of digital signal acquisition with adaptive signal processing through a field programmable gate array are discussed. The resulting instrument offers sub-/spl mu/m resolution in the measurement of displacement up to 500 mm of total shift, has virtually no need for alignment, and has very relaxed target-surface requisites, yet works with a very simple and inexpensive set-up.     

Electronic speckle pattern interferometry based on spatial information using only two sheets of speckle patterns

Abstract

Speckle interferometry is an important deformation measurement method for an object with a rough surface. In this paper, a novel fringe analysis method is proposed that uses a new optical system, which uses a plane wave as the reference beam of the speckle interferometer. When the optical system is employed in fringe analysis, the deformation information and the bias components of the speckle patterns are clearly separated in the frequency domain. Therefore, the deformation information can be readily extracted using a Fourier transform, which gives a pair of real and imaginary components concerning the information. The specklegram is calculated using such a pair of components, and the phase map is obtained from the specklegram. Experimental results confirmed that the resolution power of this measurement method is higher than 1/261 of the wavelength of the light source of the optical system.