光镊力谱系统双光束串扰因素研究

为了降低和消除光镊力谱系统中双光阱之间的干扰,进一步提高测试精度,本文对双光阱光镊系统中两光束间串扰的成因及其对力谱测量的影响展开了研究.研究发现,高倍物镜组与样品池构成的光学结构会引起光束偏振态的改变,是双光束串扰形成的主要因素;偏振分光棱镜自身的分光特性是串扰产生的另一因素;光阱捕获的微球,虽然改变了光束的形状和传播方向,但在光束串扰方面贡献很小.双光束的串扰信号叠加在探测的光强信号上,影响了光阱刚度和位移灵敏度的标定,最终导致力学测量的偏差.光镊系统中双光束的串扰量在同一次实验的一定时间内基本稳定.根据双光阱光镊系统的这一特点,本文提出了实时测量双光阱光镊系统两光阱独立存在时和同时存在时双光阱的刚度和位移灵敏度的方法,并经多次实验求平均后得到两种情况下双光阱的刚度和位移灵敏度的比值,在后续实验中,将该比值作为修正参数对实测的力谱曲线进行修正.结果表明,该方法有助于减小双光束串扰的影响,优化力谱测量结果,测试精度提高3.4!.     

AFM定位系统动态误差补偿方法研究

原子力显微镜（AFM）是进行纳米测量和操作的重要工具。针对力测量过程中AFM定位系统的测量速度慢和窄带等问题,基于逆系统的迭代学习控制思想,设计一个前馈控制环节,补偿AFM定位系统中z轴方向上动态特性非线性影响。通过在一定带宽内对期望输入信号进行轨迹跟踪,使激励力（通过悬臂梁）无失真地施加在样本上,达到AFM准确测量的目的。该方法不仅拓宽了系统频带,而且提高了系统输出对期望输入的跟踪精度。     

用于减小控制对测量影响的AFM新工作模式

原子力显微镜（atomic force microscope，AFM）是纳米尺度线宽成像和测量的重要工具．但系统的非线性和控制器参数选择的多样性导致AFM控制的不确定性，影响了AFM测量结果的精确性和重复性．为克服这个缺点，分析了AFM的测量原理和工作模式的特点，在此基础上提出了一种新的工作模式——补偿模式．在这种工作模式中，结合了扫描器和悬臂梁的位置信息而得到被测试样表面的形貌图像．与恒力接触模式相比，在补偿模式下，AFM能够在高速度下以更好的精确性和重复性进行成像和测量．仿真和实验结果证明了这种新工作模式的可行性和适用性．实验结果说明该工作模式可以提高扫描速度16倍或减小均方根误差到约1／5．     

集成AFM测头的纳米测量机用于台阶高度的评价

利用纳米测量机(NMM)和原子力显微镜(AFM)实现了高精度的台阶高度评价,该系统的测量范围可以达到25 mm × 25 am×5 mm.文中描述了NMM和AFM的工作原理,说明了NMM的高精度定位性能,系统利用NMM实现x、y方向的扫描,AFM测头只是作为零点传感器,通过将AFM的悬臂梁反馈控制信号引人到NMM的数字信号控制器中,NMM实现在:方向的辅助测量,这种测量模式减小了AFM的PZT扫描器固有特性对测量的影响.根据ISO 5436-1:2000的评价方法对经过标定的台阶高度进行评价,14次测量的标准偏差为0.52 nm.     

基于涡流检测信号的金属曲面距离测量方法研究

为提高曲面试件的涡流测距精度,提出一种基于涡流信号差值的测距修正方法.该方法通过研究不锈钢平板试件与曲面试件涡流信号的不同,拟合计算出曲面涡流信号和平面涡流信号之间差值与曲面试件曲率的定量关系.利用这一函数关系,对不同曲率试件的测量结果进行补偿,可修正由于试件存在曲面造成的测量误差.通过实验进行可行性验证,对平板试件与...     

基于双反馈模式的大范围自感应AFM测量系统

为了提高原子力显微镜（AFM）的测量范围,设计了一种基于双反馈测量模式的大范围自感应原子力显微镜系统,测量系统中有两条反馈回路:一条反馈回路由压电陶瓷与AFM测头组成,动态响应较快的压电陶瓷位移台的运动量可以表征被测样品表面的高频信息;另一条反馈回路由压电陶瓷位移台和纳米测量机（NMM）的反馈控制器组成,利用压电陶瓷位移台的位移信号控制NMM运动,NMM的mm级z向测量范围使得被测样品较大变化范围的低频轮廓信息很容易地被表征出来。使用本系统对平面样品和一维栅格进行了测量实验,实验结果表明采用双反馈的测量模式的AFM测量系统能够有效地表征被测样品的低频轮廓信息和表面高频信息,测量范围能够达到mm级,纵向分辨率达到nm级,具有良好测量重复性。     

半导体激光器在尺寸测量系统中的应用

本文介绍的尺寸测量系统采用半导体激光器作光源,可对非回转体类零件的位置尺寸进行非接触在线测量,并可根据测量结果实时输出反馈控制信号,对生产过程实现闭环控制和在线检测.本文最后还给出了实验结果和误差分析,根据数据对比可知,该测量系统的测量误差≤±4μm.     

采用基于传感器信息组合串扰消除法的工况传递路径分析

传递路径分析法是一种分析噪声源贡献大小的有效方法,工况传递路径分析法不需要测量力,只需测量响应就可在机组运行状态下在线完成源贡献量测量与分析。但是串扰对测量精度影响很大,因此提出基于传感器信息组合串扰消除法的工况传递路径分析,在振源附近布置传感器,将测量得到的传感器信号进行频域组合;组合系数通过分步运转,测试振动噪声数据并建立方程,以其它振源振动引起某振源附近传感器的组合信号为0求解方程获得;将线性组合的传感器信号作为参考源信号参与工况传递路径分析,从而消除或减小串扰,准确获得各源的贡献。通过一个两声源的仿真和两个振源的平板试验,演示了分析方法,准确分析了各源贡献,表明采用传感器组合法消除串扰后可以提高激励源的辨识精度,并对传感器个数的影响进行了讨论。     

基于AFM的靶丸表面轮廓仪设计及其测量精度分析

基于商用原子力显微镜（AFM）建立了靶丸表面轮廓测量仪系统，并对该系统的精密回转轴系进行了结构设计．为了评价系统的测量不确定度，进行了气浮轴系回转精度测试，确定了回转轴系的误差曲线，其最小二乘圆度误差为48 nm；同时对安装回转轴系后AFM的测量噪声进行了测试，并通过结构改进使静态噪声幅值降为约10nm．应用这一系统进行了靶丸表面圆周迹线的测量实验，实验测量出该系统运转测量时噪声幅值约13 nm，综合测量误差约49．7 nm，此测量精度可以通过回转轴系的误差分离来进一步提高．     

新型恒力末端执行机构力学特性研究

单根纵向受载变形梁与线性螺旋弹簧并联使用,提出一种可实现恒力输出的新型末端执行机构。分别建立了单根受载变形梁和恒力末端执行机构的力学模型。利用解析方法参数化分析了单根受载变形梁设计参数和线性螺旋弹簧预载荷对恒力末端执行机构输出力学特性的影响。考虑恒力末端执行机构在未知环境精细操作过程中冲击载荷的影响,假设受到典型半正弦冲击载荷作用,利用四阶龙格-库塔法对恒力末端执行机构动力学方程进行求解。计算结果表明:单根受载变形梁的纵向预压缩量、自由长度和线性螺旋弹簧预载荷可调整恒力机构的输出力幅值和有效恒力范围;冲击脉冲持续时间长度和系统阻尼可影响恒力末端执行机构输出动态力的幅值和衰减时间。     

A method to quantitatively measure the elastic modulus of materials in nanometer scale using atomic force microscopy

A method is proposed for quantitatively measuring the elastic modulus of materials using atomic force microscopy (AFM) nanoindentation. In this method, the cantilever deformation and the tip-sample interaction during the early loading portion are treated as two springs in series, and based on Sneddon's elastic contact solution, a new cantilever-tip property α is proposed which, together with the cantilever sensitivity A, can be measured from AFM tests on two reference materials with known elastic moduli. The measured α and A values specific to the tip and machine used can then be employed to accurately measure the elastic modulus of a third sample, assuming that the tip does not get significantly plastically deformed during the calibration procedure. AFM nanoindentation tests were performed on polypropylene (PP), fused quartz and acrylic samples to verify the validity of the proposed method. The cantilever-tip property and the cantilever sensitivity measured on PP and fused quartz were 0.514?GPa and 51.99?nm?nA(-1), respectively. Using these measured quantities, the elastic modulus of acrylic was measured to be 3.24?GPa, which agrees well with the value measured using conventional depth-sensing indentation in a commercial nanoindenter.     

Determining Mechanical Properties of Carbon Microcoils Using Lateral Force Microscopy

Mechanical properties of amorphous carbon microcoil (CMC) synthesized by thermal chemical vapor deposition method were examined in compression and tension tests, using the lateral force mode of atomic force microscope (AFM). The AFM cantilever tip was manipulated by a piezoelectric scanner to contact, pull, and push an individual CMC. The lateral force that was exerted by the CMC deformation causes the twist of the AFM cantilever. It was monitored by the laser and photodetector of the AFM during the experiments. A linear response of the CMC was observed in the range of 25 nm to 5 mum of tension experiments. The results show that the spring constant of the CMC is reasonably proportional to the coil number. The shear modulus of the amorphous CMC is estimated to be 3 plusmn 0.2 GPa. The proposed method is promising to manipulate the compression and tension of the CMC and to measure the lateral force exerted in an ambient environment.     

Hydrogen-bonding layer protecting polyelectrolyte capsules and its mechanical property study with atomic force microscope

The hydrogen-bonding multilayered polyelectrolyte capsules with sizes around 6 microm were fabricated by layer-by-layer self-assembly method. The morphology of the obtained capsules was observed with Scanning Electron Microscope (SEM), Confocal Laser Scanning Microscope (CLSM) and Atomic Force Microscope (AFM), respectively. The elastic properties of the capsules were studied with AFM. The capsule was pressed by cantilever with different lengths, a glass bead glued at the end of the cantilever. The force curves were measured on the capsule in air. The Young's modulus of the capsule was obtained (E = 170 MPa for the loading). Results show that this model can predict the elastic deformation of the microcapsule. The accuracy of the elastic deformation of polymer capsule can be ensured using a cantilever of mediate stiffness. Our results show that the existence of the hydrogen-bonding layer makes the multilayered polyelectrolyte harder in comparison with the pure multilayered polyelectrolyte capsules.     

Accuracy of the spring constant of atomic force microscopy cantilevers by finite element method

Atomic force microscopy (AFM) probe with different functions can be used to measure the bonding force between atoms or molecules. In order to have accurate results, AFM cantilevers must be calibrated precisely before use. The AFM cantilever's spring constant is usually provided by the manufacturer, and it is calculated from simple equations or some other calibration methods. The spring constant may have some uncertainty, which may cause large errors in force measurement. In this paper, finite element analysis was used to obtain the deformation behavior of the AFM cantilever and to calculate its spring constant. The influence of prestress, ignored by other methods, is discussed in this paper. The variations of Young's modulus, Poisson's ratio, cantilever geometries, tilt angle, and the influence of image tip mass were evaluated to find their effects on the cantilever's characteristics. The results were compared with those obtained from other methods.     

具有溯源性的原子力显微镜探针法向弹性常数标定系统

原子力显微镜(AFM)悬臂梁探针的弹性常数在微纳米尺度力学测试中十分重要,其准确程度直接影响力学测量结果的可靠性,故需对其进行精确标定.因天平法的测量结果可溯源,本文在已有天平法的基础上,研制了一套新型标定系统.该系统将AFM测头与超精密电磁天平相结合.微悬臂梁在精密位移台的带动下接触天平并产生弯曲,接触力由天平测得,微悬臂梁的弯曲量由光杠杆检测,并通过反馈系统进行精确控制,最后根据胡克定律计算出弹性常数.利用本系统对4种不同型号商用微悬臂梁探针的法向弹性常数进行了标定,标定结果表明本系统具有良好的测量重复性.通过进行不确定度分析,得到测量结果的相对标准不确定度优于2%.     

Intrinsically high-Q dynamic AFM imaging in liquid with a significantly extended needle tip

Atomic force microscope (AFM) probe with a long and rigid needle tip was fabricated and studied for high Q factor dynamic (tapping mode) AFM imaging of samples submersed in liquid. The extended needle tip over a regular commercially available tapping-mode AFM cantilever was sufficiently long to keep the AFM cantilever from submersed in liquid, which significantly minimized the hydrodynamic damping involved in dynamic AFM imaging of samples in liquid. Dynamic AFM imaging of samples in liquid at an intrinsic Q factor of over 100 and an operational frequency of over 200?kHz was demonstrated. The method has the potential to be extended to acquire viscoelastic material properties and provide truly gentle imaging of soft biological samples in physiological environments.     

A new method for the analysis of compaction processes in high-porosity agglomerates

Mechanical properties of high-porous microscopic agglomerates have been investigated. For this purpose we installed an atomic force microscope (AFM) cantilever in a scanning electron microscope (SEM) using a nanomanipulator. The nanomanipulator is piezoelectric controlled with increments of 5 nm in the rotational and 0.5 nm in the translational direction. Thus, this tool allows the precise positioning and movement of an AFM cantilever under SEM observation. Depending on the spring constant of the cantilever and the step size of the motion—both quantities determining the sensitivity of the instrument—different aspects of the deformation of dust-aggregate structures, e.g., the behaviour of single particle chains, can be analysed.     

原子力声显微镜成像及分析

超声检测技术与原子力显微技术相结合,构成原子力声显微镜(AFAM),能够实现样品内部纳米结构的测量,并分析如局域弹性模量、刚度等力学性能.本文在传统的原子力显微镜(AFM)的基础上初步构建了AFAM,利用AFM轻敲模式下的微悬臂梁振动激励信号来驱动样品背面的压电超声换能器,并利用轻敲模式控制系统中的锁相环检测经过样品后由探针收集的振动信号,形成振幅及相位图像.这种AFAM方法不需外接信号发生器、锁相放大器及相关控制电路,从而避免AFM内、外部的仪器及控制电路的不同步而引起的AFAM振幅/相位与形貌图像间的偏移.此外,还分析了形貌结构对AFAM振幅图像的影响,为进一步研究AFAM亚表面成像奠定了基础.     

Error in dynamic spring constant calibration of atomic force microscope probes due to nonuniform cantilevers

Many common atomic force microscope (AFM) spring constant calibration methods regard the AFM probe as a uniform cantilever, neglecting the tip mass and any nonuniformity in the thickness of the probe along its length. This work quantifies the error in the spring constant estimated by the Sader and thermal calibration methods due to nonuniformity in the thickness of the cantilever and the influence of the mass loading effect of the probe tip. Formulae are presented that can be used to compute the uncertainty in cantilever calibration for an arbitrary thickness nonuniformity, or to correct the calibration methods if the thickness nonuniformity is known. The results show that both methods are quite sensitive to nonuniformity. When the first dynamic mode is used in the calibration, the error in the spring constant estimated by either method is between - 4% and 9% for a cantilever whose thickness increases or decreases linearly by 30% along its length. The errors are several times larger if the second or higher dynamic modes are used. To illustrate the proposed methods, a commercial AFM probe that has significant nonuniformity is considered and the error in calibrating this probe is quantified and discussed. For this particular probe, variations in the thickness of the probe over the last 15% of its length are found to significantly reduce the accuracy of the calibration when the thermal method is used, since that method is sensitive to changes in the shape of the eigenmode of the probe near its free end.     

高阻尼混凝土构件阻尼性能研究

首先测得了钢筋、高阻尼砂浆及高阻尼混凝土悬臂梁在不同初始顶点位移下的自由衰减曲线,得到了构件阻尼比随变形增大的变化规律。研究了聚灰比、乳液共混及不同纤维的掺入对高阻尼混凝土悬臂梁力学性能和阻尼性能的影响。在此基础上,提出了高阻尼混凝土构件阻尼比的计算理论与方法。通过与国内外相关研究的比较,校验了本文方法的科学性。