钛过镀层对类金刚石薄膜的膜基结合力以及摩擦学性能的影响

采用双弧磁过滤真空弧源,在钴铬合金基体上成功地沉积了Ti/DLC多层膜,其钛过渡层利用不同的负偏压来制备.利用纳米划痕法来评价薄膜的膜基结合力,类金刚石薄膜的摩擦性能在销盘式摩擦磨损试验机进行测试.划痕法的结果均表明,增加钛的过镀层后薄膜的结合状况得到明显的改善,纳米划痕法测试膜基结合力表明其临界载荷可达到740mN,摩擦磨损实验可以看出镀膜后的样品的摩擦系数均在0.1左右,DLC薄膜可极大地改善钴铬合金的摩擦学性能.     

超高分子量聚乙烯表面金属化及类金刚石薄膜沉积复合处理研究

采用超高分子量聚乙烯(UHMWPE)表面金属化及类金刚石薄膜沉积复合处理工艺,提高超高分子量聚乙烯的耐磨性.首先采用磁过滤阴极真空弧源沉积技术(FCVA)在UHMWPE表面制备约30nm钛金属层,使UHMWPE表面金属化,然后再沉积DLC薄膜,研究结果表明,UHMWPE表面金属化后,DLC薄膜沉积过程中,电荷累积效应消...     

脉冲真空弧源沉积类金刚石薄膜耐磨特性研究

本文利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(100)基体上制备了类金刚石(DLC)薄膜,研究在不同基体偏压下,DLC薄膜的结构与性能.采用拉曼光谱和X射线光电子能谱(XPS)研究DLC薄膜的原子结合状态,利用CSEM销盘摩擦磨损试验机研究其耐磨性,利用HXD1000B显微硬度仪测试其显微硬度,并采用压痕法评价其结合力.研究结果表明:DLC薄膜与基体结合牢固.随着基体偏压的提高,DLC薄膜内sp3键含量增大,薄膜硬度提高.Cr17Ni14Cu4不锈钢表面沉积DLC薄膜后,耐磨性大幅度提高,本文探讨了DLC薄膜的耐磨机理.     

磁过滤真空弧源沉积C/C多层复合膜的结构和力学性能研究

采用磁过滤直流阴极真空弧源沉积技术在不锈钢基体表面制备了C/C多层复合膜,通过X射线光电子能谱、Raman光谱对薄膜的结构进行表征;C/C多层膜大气下的摩擦损性能在销盘式摩擦磨损试验机上进行;用洛氏压痕法研究了薄膜与基体的结合强度.结果表明：C/C多层复合膜为类金刚石结构.它与SiC球大气下的摩擦系数为0.10左右,其摩损性能由于多层膜的引入而显著提高.Ti过渡层的引入显著提高了膜基结合力.     

不锈钢表面沉积DLC膜的结构和性能

应用线性离子束复合磁控溅射技术在不锈钢和硅片基体上制备DLC膜,研究了基体偏压和过渡层的厚度和结构对DLC薄膜结构和性能的影响。结果表明,在过渡层相同偏压为-200 V的条件下,薄膜中的sp3键含量更低,但是薄膜结构致密性的提高使其硬度和膜基结合力反而提高;在偏压为-200V的条件下,随着过渡层厚度及层数的增加DLC薄膜中sp3含量均降低,同时过渡层和多层薄膜的硬度减小;在偏压为-100V条件下,过渡层厚度和层数对DLC薄膜sp3的含量没有明显的影响。当过渡层厚度为1.7μm、结构为Cr/CrC时,在11Cr17不锈钢基体上可制备出厚度为4.92μm、硬度为29.4 GPa、摩擦系数小于0.1、结合力高于70 N综合性能最佳的DLC薄膜。     

C／C多层类金刚石薄膜的热稳定性研究

采用磁过滤直流阴极真空弧源沉积技术,通过改变基体偏压,在单晶Si片和0Cr19Ni9基体表面制备了C/C多层类金刚石薄膜。为了考察多层膜的热稳定性,对薄膜进行了300℃及400℃退火处理,采用X射线光电子能谱、硬度实验及摩擦磨损性能测试分析了退火对薄膜结构及性能的影响。结果表明在400℃范围内多层膜具有较高的热稳定性。     

钛合金过渡层对燃料电池不锈钢双极板表面改性薄膜综合性能的影响北大核心CSCD

针对在燃料电池不锈钢双极板电堆上应用的Cr0. 23C0. 77非晶改性薄膜使用寿命低的问题,仍然采用脉冲偏压电弧离子镀技术,在Cr0. 23C0. 77薄膜与316L不锈钢基体之间增加制备一层耐点蚀钛合金过渡层,考察过渡层对改性薄膜表面综合性能的影响。首先在316L不锈钢基体上选择TA1、TA9、TA10和Ti35四种工业钛合金分别进行预选过渡层材料的沉积制备,对所得样品进行耐蚀性能的对比检测,结果显示,在模拟电池阴极环境下,四种样品中Ti35材料的耐蚀性能最优,可确定为过渡层的首选材料;之后再在不锈钢双极板样品上制备有Ti35过渡层的316L/Ti35/Cr0. 23C0. 77复合薄膜,与只有Cr0. 23C0. 77单层薄膜的样品一起进行表面综合性能的对比测试,结果表明,添加Ti35钛合金过渡层后,双极板在保持原有导电性能的接触电阻为3. 0 mΩ·cm2(0. 6 MPa下)左右和水接触角大于100°的疏水性能的基础上,耐蚀性能得到了明显的改善,在模拟阴极环境的动电位腐蚀测量条件下,腐蚀曲线中出现了一个明显的平台钝化区,从-0. 3～0. 9 V较宽的电位范围内腐蚀电流一直保持低于10-6A·cm-2水平,并且破钝电位高达1. 0 V以上。这将有利于提高双极板的表面防护性能和使用寿命。     

钛合金过渡层对燃料电池不锈钢双极板表面改性薄膜综合性能的影响

针对在燃料电池不锈钢双极板电堆上应用的Cr0. 23C0. 77非晶改性薄膜使用寿命低的问题,仍然采用脉冲偏压电弧离子镀技术,在Cr0. 23C0. 77薄膜与316L不锈钢基体之间增加制备一层耐点蚀钛合金过渡层,考察过渡层对改性薄膜表面综合性能的影响。首先在316L不锈钢基体上选择TA1、TA9、TA10和Ti35四种工业钛合金分别进行预选过渡层材料的沉积制备,对所得样品进行耐蚀性能的对比检测,结果显示,在模拟电池阴极环境下,四种样品中Ti35材料的耐蚀性能最优,可确定为过渡层的首选材料;之后再在不锈钢双极板样品上制备有Ti35过渡层的316L/Ti35/Cr0. 23C0. 77复合薄膜,与只有Cr0. 23C0. 77单层薄膜的样品一起进行表面综合性能的对比测试,结果表明,添加Ti35钛合金过渡层后,双极板在保持原有导电性能的接触电阻为3. 0 mΩ·cm2(0. 6 MPa下)左右和水接触角大于100°的疏水性能的基础上,耐蚀性能得到了明显的改善,在模拟阴极环境的动电位腐蚀测量条件下,腐蚀曲线中出现了一个明显的平台钝化区,从-0. 3～0. 9 V较宽的电位范围内腐蚀电流一直保持低于10-6A·cm-2水平,并且破钝电位高达1. 0 V以上。这将有利于提高双极板的表面防护性能和使用寿命。     

过渡层对TC4钛合金基类金刚石多层薄膜磨损特性的影响

在钛合金(TC4)表面制备类金刚石(DLC)薄膜是提高其耐磨损性能和使用寿命的一种有效方法。本文采用磁过滤阴极弧源技术在钛合金表面上制备软硬相间的类金刚石多层薄膜、Ti和Ti/TiC过渡层组成的类金刚石多层薄膜。利用光学显微镜和扫描电镜分析多层膜表面外观形态,并使用台阶仪、纳米压痕仪、摩擦实验机等分析多层膜的残余应力、纳米硬度、膜基结合力和摩擦磨损特性。研究结果表明：DLC多层薄膜的残余应力均低于单层DLC薄膜,残余应力从12.63 GPa降低到6.21 GPa,增加Ti/TiC过渡层的DLC多层薄膜的残余应力最小。压痕结合力研究结果表明,加入Ti/TiC过渡层的DLC多层薄膜的结合状况得到了显著提高。Ti/TiC过渡层构成的类金刚石多层薄膜,有较大的硬度和良好减摩耐磨性能。试验结果将为TC4钛合金基体上制备硬质耐磨损DLC多层薄膜提供技术方案和理论依据。     

磁过滤阴极真空弧法制备类金刚石膜的场致发射特性研究

采用磁过滤阴极真空弧沉积法,在Cu基底表面上制备了以钛(Ti)和碳化碳(TiC)作为过滤层的类金刚石膜层。利用自制的场致发射特性测试设备,研究了类金刚石膜层的场致发射特性。利用拉曼光谱仪(Raman)和扫描电子显微镜(SEM)等分析方法对类金刚石膜的键合结构和微观形貌进行了表征。研究发现,利用磁过滤阴极真空弧沉积法可以在沉积温度100℃下制备膜基结合力较好的类金刚石膜。沉积速率为15 nm/min。类金刚石膜具有较好的场致发射特性,开启电压约为40 V/μm。Raman分析得到不同基底偏压下的类金刚石膜的I_D/I_G为1.19～1.57;SEM分析显示薄膜的微观结构上具有微米级突起结构。实验表明,应用磁过滤阴极真空弧方法可以制备出高sp~3含量、表面具有微米级突起的类金刚石膜,这种类金刚石膜具有有利于场致发射的特性。     

不锈钢衬底两面同时液相电沉积类金刚石薄膜及其沉积机理研究

为了利用液相电沉积技术实现在金属衬底表面全方位电沉积类金刚石(DLC)薄膜,采用不同尺度的不锈钢片作为衬底,在表面电沉积了DLC薄膜,利用X射线光电子能谱、Raman光谱和扫描电子显微镜分别对衬底两面薄膜的化学成分、微观结构和表面形貌进行了分析。结果显示:对于尺度大于石墨阳极的不锈钢衬底,仅在衬底正对着阳极的一面实现了DLC薄膜的沉积;而对于尺度小于阳极的不锈钢衬底,在衬底两面都有DLC薄膜沉积,且两面薄膜结构相似,形貌相近。利用准静态电场理论对实验结果进行了解释,提出在金属衬底表面实现液相电沉积DLC薄膜的前提条件是存在垂直于衬底表面的电场分量,为进一步实现在复杂形状的导电性衬底表面沉积DLC薄膜提供了理论依据。     

脉冲真空电弧离子镀在不锈钢上沉积类金刚石薄膜的研究

利用脉冲真空电弧离子镀技术在3Cr13不锈钢上制备了类金刚石(DLC)薄膜,通过Raman光谱分析了膜的结构特征,采用摩擦磨损试验机测试了薄膜在不同载荷下的摩擦系数,运用划痕仪研究了膜基的结合强度.结果表明:所镀制的薄膜具有典型类金刚石结构特征,膜中ID/IG为1.33;摩擦系数随着载荷的增大而减小,载荷为5 N,转速120 r/min时的摩擦系数为0.12;Ti过渡层的引入显著地提高了膜基结合力.     

Improved electrochemical performance of nitrocarburised stainless steel by hydrogenated amorphous carbon thin films for bone tissue engineering

In this study, hydrogenated amorphous carbon thin films, structurally similar to diamond‐like carbon (DLC), were deposited on the surface of untreated and plasma nitrocarburised (Nitrocarburizing‐treated) stainless steel medical implants using a plasma‐enhanced chemical vapour deposition method. The deposited DLC thin films on the nitrocarburising‐treated implants (CN+DLC) exhibited an appropriate adhesion to the substrates. The results clearly indicated that the applied DLC thin films showed excellent pitting and corrosion resistance with no considerable damage on the surface in comparison with the other samples. The CN+DLC thin films could be considered as an efficient approach for improving the biocompatibility and chemical inertness of metallic implants.Inspec keywords: tissue engineering, bone, biomedical materials, electrochemistry, amorphous state, carbon, hydrogen, thin films, plasma CVD, adhesion, corrosion resistance, surface hardeningOther keywords: electrochemical performance, plasma nitrocarburised stainless steel medical implants, hydrogenated amorphous carbon thin films, bone tissue engineering, plasma‐enhanced chemical vapour deposition method, adhesion, corrosion resistance, biocompatibility, chemical inertness, metallic implants, C:H     

常温生长类金刚石薄膜的实验研究

利用射频等离子体增强化学气相沉积(RFPECVD)工艺在常温下实现在不锈钢、硅片、玻璃等基底上大面积沉积类金刚石(DLC)膜.薄膜表面光滑致密,与衬底的结合力较高.用Raman,FTIR,SEM,EDX研究了薄膜的形貌、结构与组分.用栓-盘摩擦磨损试验机测试了薄膜的摩擦系数.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.01.在摩擦过程中DLC膜的磨损机制借助SEM进行了研究.     

不锈钢基体预处理对合成类金刚石碳膜的影响

本文研究了在射频等离子体增强化学气相沉积工艺中不同的预处理方法对不锈钢基底上类金刚石碳膜生长的影响。所沉积的碳膜的结构和形貌分别用激光Raman光谱和扫描电子显微镜进行了分析，薄膜与基底的结合力通过划痕实验进行了表征。实验结果表明，通过采用合适的过渡层能显著提高类金刚石碳膜与基底的结合力，而通过化学腐蚀的方法对提高结合力的帮助不大。     

Comparing internal stress in diamond-like carbon films with different structure

Diamond-like carbon (DLC) films with different structures were deposited on Si (100) and stainless steel substrates in a hybrid deposition system with Ar and CH₄ as the feedstocks. The effects of the bias voltage, Ti-interlayer, Ti functional gradient layer and Ti-doping on the internal stress in DLC films were investigated. The results show that the internal stress in DLC films arises from both the intrinsic stress generated during the film growth and the thermal stress generated due to the mismatching of the thermal expansion coefficient between the DLC films and the substrate materials. The intrinsic stress can be released through doping titanium element at the expense of reducing the sp³/sp² ratio. The thermal stress in DLC films can be decreased through introducing Ti-interlayer or Ti functional gradient layer. Noticeably, DLC films with very low internal stress deposited on stainless steel can be obtained through the combination of Ti-doping and Ti functional gradient layer.     

基于RFPECVD方法不锈钢上沉积类金刚石薄膜的机械与摩擦特性

讨论用射频等离子体增强化学气相沉积(RFPECVD)工艺,在室温下实现在1Cr18Ni9Ti不锈钢基底上镀类金刚石(DLC)膜.为提高DLC膜的结合力,首先在不锈钢基底上沉积Ti/TiN/TiC功能梯度膜.借助所设计的界面过渡层,成功地在不锈钢基底上沉积了一定厚度的DLC膜.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.020.在摩擦过程中DLC膜的磨损机制借助SEM、Raman分析进行了研究.     

Deposition of diamond-like carbon films on the inner surface of narrow stainless steel tubes

Diamond-like carbon (DLC) films were deposited on the inner surface of 304-type stainless steel tube with an inner diameter of 10 mm by DC glow discharge plasma. The influence of the deposition time, pressure and the ratios of CH₄ in CH₄/Ar gas mixture on the DLC film deposition were investigated. The images of Scanning Electron Microscopy (SEM) show that the DLC films are featureless and free of porosity. Fibre-like structure was recognized on the film surface by Atomic Force Microscopy (AFM). The film deposition rate decreases with increasing the deposition time. Relative higher deposition rate (40 nm/min) can be obtained at 20-30 Pa, higher and lower pressure will significantly decrease the deposition rate. Raman spectrum analysis shows that the films deposited in 30 min at 20-30 Pa have more sp³ content. The corrosion resistance of the films was measured by potentiodynamic polarization test. The DLC films deposited on the inner surface of the 304-type stainless steel tube significantly improve its corrosion resistance.     

Advances in DLC coatings by hybrid PSII and PECVD as a barrier to corrosion in simulated body fluid*

In this study, diamond-like carbon (DLC) films were deposited on biomedical AISI316L stainless steel by hybrid plasma source ion implantation (PSII) and plasma-enhanced chemical vapour deposition (PECVD). Potentiodynamic polarization tests and Electrochemical Impedance Spectroscopy (EIS) have been employed to investigate the corrosion performance of different DLC films in Tyrode's simulated body fluid (pH = 7.4). The corrosion resistance of the DLC films by PECVD deteriorated rapidly after 24 h of immersion, but those made by hybrid PSII and PECVD offered more effective barrier for AISI316L stainless steel during 72 h of immersion. The test results demonstrated that the DLC film by hybrid PSII and PECVD possessed less corrosion current density, greater corrosion resistance, and more positive breakdown potential in simulated body fluid.