Pressure-sensitive molecular film for investigation of micro gas flows

For the development of micro- and nano-technology, it has been strongly desired to understand thermo-fluid phenomena inside or around micro- and nano-devices. An optical measurement technique based on the absorption and the emission of photons by molecules is useful for experimental analyses of thermo-fluid phenomena of micro and nanoflows. The pressure-sensitive paint (PSP) technique is a potential diagnostic tool for pressure measurements of micro/nano gas flows because it works as a so-called “molecular sensor”. However, the micro-scale measurement of PSP has been limited by the aggregation of the luminescent molecules and their thick film due to the use of a polymer binder. In our previous work, we adopted the Langmuir–Blodgett (LB) technique to fabricate pressure-sensitive molecular film (PSMF) with ordered molecular assemblies, and investigated properties of PSMF. In this study, a novel approach to enhance the luminescent intensity of PSMF is proposed, and the pressure distribution in a micro-nozzle is successfully measured by using PSMF. Moreover, we compared the pressure distribution measured by PSMF with that numerically analyzed by the direct simulation monte carlo (DSMC) method, showing good agreement with each other.     

Measurement of periodic micro flows using micro-particle image velocimetry with phase sampling

A phase-sampling method has been developed to measure periodic flows at a high temporal resolution using conventional micro-particle image velocimetry (PIV). In this technique, the sampling is set such that each velocimetry dataset represents a unique point in phase of a periodic flow. The flow characteristics over a single cycle are reconstructed from measurements over a number of cycles, thus allowing measurement at a higher temporal resolution than the PIV system. The flow measurements were performed for AC electroosmotic flows and verified with results from the phase-locking technique. The temporal resolution is limited by the shortest camera exposure time and the time separation between laser pulses. The theoretical sampling resolution can be as low as 20 μs for 100 Hz periodic flows. A resolution of 200 μs was obtained in the experiment using 40 velocimetry datasets.     

Pressure-sensitive channel chip for visualization measurement of micro gas flows

We have developed a new pressure sensing tool named pressure-sensitive channel chip (PSCC) by combining the pressure-sensitive paint (PSP) technique with the poly(dimethylsiloxane) (PDMS) micro-molding technique. The PSP technique based on the oxygen quenching of luminescence is a potential diagnostic tool for pressure measurement of micro gas flows. However, the application of PSP to micro scale measurement is very difficult, because the thickness and the surface roughness of conventional PSPs cannot be neglected compared with the characteristic length of micro channels, and the spatial resolution is not enough for micro scale measurements due to the aggregations of luminophore. PSCC is fabricated with PDMS containing a pressure-sensitive luminophore; thus PSCC is a micro channel which itself works as a pressure “distribution” sensor. A micro converging-diverging nozzle with the throat width of 120 μm was demonstrated. The pressure distribution on the nozzle surface was successfully obtained by PSCC without the shortcomings of conventional PSPs.     

A slip model for micro/nano gas flows induced by body forces

A slip model for gas flows in micro/nano-channels induced by external body forces is derived based on Maxwell’s collision theory between gas molecules and the wall. The model modifies the relationship between slip velocity and velocity gradient at the walls by introducing a new parameter in addition to the classic Tangential Momentum Accommodation Coefficient. Three-dimensional Molecular Dynamics simulations of helium gas flows under uniform body force field between copper flat walls with different channel height are used to validate the model and to determine this new parameter.     

Micro molding for double-sided micro structuring of SU-8 resist

Advances in micro and nano fabrication technologies for MEMS require high-level measurement techniques with regard to sampling and sensitivity. For this purpose at the Institute of Microtechnology (IMT) highly sensitive piezoresistive 3D force sensors based on SU-8 polymer have been developed. In this paper we present an improved micro fabrication process for a double-sided micro structured design. The sensors are produced by multilayer processing techniques such as UV lithography and coating methods. The double-sided micro structured design demands a photoresist application method which simultaneously features a top side structuring and a casting from a mold. We use a new micro molding process to meet the demands. The micro fabrication technology is described, focusing on the development of the molding structure for shaping of the bottom side and a capable release process for the detachment of the molded structures. The fabrication process of the SU-8 mold layer is optimized to fabricate molding structures with heights from a few μm up to 350 μm. Therefore different SU-8 formulations, namely with classification numbers 5, 25, 50, and 100, have been used. The fundamental limitations for the mold design result from the lithography process, which defines the smallest lateral resolution, and from the characteristics of a molding process, e.g. the impossibility to realize an undercut. To allow for reliable release, the molding structures have to be coated with a sacrificial layer. Silicon nitride is deposited onto the substrate with accompanying monitoring of the deposition temperature during the PECVD process.     

Development and reliability analysis of micro gas sensor platform on glass substrate

In this paper, technology for a gas sensor platform with borofloat as the substrate material is presented. Comprehensive characterization of the platform, its comparison with silicon and alumina, fabrication yield improvement and a study of reliability of the micro-heater platform have been carried out. Usually, the chips are suspended in air to reduce power consumption. However, the presented technology is a non-MEMS technique and doesn’t require any complex packaging. Borofloat has much lower thermal conductivity in comparison to silicon and alumina, thereby reducing the thermal losses, making it possible to operate the device with low power consumption. The process adapted for the fabrication of the gas sensor platform has lesser complexities and the process cost is reduced compared to conventional gas sensor fabrication, as it does not require thermal oxidation and bulk micromachining. Different substrates (silicon, alumina and glass) have been simulated using COMSOL to depict the benefit of lower thermal conductivity. Micro-heater has also been fabricted on all the three above mentioned substrates and the power consumption is compared. Various reliability analysis have been carried out on the glass based platform such as maximum temperature test, long term ON test and ON–OFF pulse test.

     

Micro and macro scale technique for strongly coupled two-phase flows simulation

The calculation results for a direct-flow chemical vapor deposition (CVD) reactor model are presented. Chemical condensation is considered at a small volume fraction of the dispersed phase. Phase formation stages are simulated numerically for various values of the Damköehler number over a large time interval. The calculations made it possible to identify the structures of solid-phase nucleus growth on the channel wall and in the two-phase mixture flow.     

Realization and characterization of SU-8 micro cylindrical lenses for in-plane micro optical systems

This study presents a new method of fabricating and integrating micro cylindrical lenses (MCLs) into an in-plane micro optical system. The characterizations of MCLs, which are made of SU-8 negative photoresist, are also reported in this study. Many demands, especially for arbitrary lens shapes and accurate alignment, can be met by the proposed method. The measurements of size revealed that SU-8 MCLs swelled, but the amount of swelling maintained constant for at least six months. Two factors were demonstrated to govern the swelling of SU-8 structures, and can be compensated for in the design of the mask. The SU-8 MCLs are shown to exhibit function with a satisfactory optical property. Fluorescence is collimated and focused in a micro channel, demonstrating the potential of MCLs to detect laser-induced-fluorescence (LIF). The fluorescence behavior of SU-8 is also examined herein. The advantages of rapid prototyping and easy integration of SU-8 MCLs have a range of many applications, especially in in-plane micro optical configurations.The authors would like to thank the National Science Council of Taiwan, Republic of China, for financially supporting this research under Contract No. NSC 92–2212-E-097–001.Nanotechnology Lab and Vacuum Technology Research Lab in PIDC, as well as Micro Device Lab (MDL) in NTHU are appreciated for their assistance in measurements. The authors would also appreciate Ms Ming-Yu Lin and Dr. Murthy for their valuable discussion on LIF and polymer properties.     

Analytical and numerical description for isothermal gas flows in microchannels

Analytical solutions for the pressure and the velocity profiles in a microchannel are derived from the quasi gasdynamic equations (QGD). An expansion method according to a small geometric parameter ɛ is undertaken to obtain the isothermal flow parameters. The deduced expression of the mass flow rate is similar to the analytical expression obtained from the Navier-Stokes equations with a second order slip boundary condition and gives results in agreement with the measurements. The analytical expression of the pressure predicts accurately the measured pressure distribution. The effects of the rarefaction and of the compressibility on pressure distributions are discussed. The numerical calculations based on the full system of the QGD equations were carried out for different sizes of the microchannels and for different gases. The numerical results confirm the validity of the analytical approach.     

Analytical model of electrostatic actuators for micro gas pumps

We analytically predict the performance of electrostatic actuators for diaphragm micro gas pumps by combining energy minimization and the analytical solution for membrane deformation under uniform pressure. The tangential strain of the membrane is considered in the calculation of membrane deflection. Models for both single- and double-cavity pumps are established to define the restriction of the upper cavity on the membrane during actuation. The shape lines of the membrane in a double-cavity structure are demonstrated under different voltages. The influence of dielectric thickness and cavity geometry on pumping consequence is also discussed. In accordance with other simulation results on diaphragm displacement and chamber pressure rise, an electrostatic diaphragm micro gas pump with a relatively thin dielectric layer and a cavity of comparatively small depth and radius suitably generates high pressure rise. Furthermore, a double-cavity structure enhances pressure rise for the restriction of the upper cavity on the membrane during deformation.     

Analysis of laminar-to-turbulent transition for isothermal gas flows in microchannels

In this work the laminar-to-turbulent transition in microchannels of circular cross-section is studied experimentally. In order to single out the effects of relative roughness, compressibility and channel length-to-diameter ratio on the Reynolds number at which transition occurs, experimental runs have been carried out on circular microchannels in fused silica—smooth for all purposes—and in stainless steel (which possess a high surface roughness), with a diameter between 125 and 180 μm and a length of 5–50 cm through which nitrogen flows. For each tube the friction factor has been computed. The values of the critical Reynolds number have been determined plotting the Poiseuille number (i.e., the product of the friction factor, f, times the Reynols number, Re) as a function of the average Mach number between inlet and outlet. The transitional regime was found to start no earlier than at values of the Reynolds number around 1,800–2,000. It has been observed that surface roughness has no effect on the hydraulic resistance in the laminar region for a relative roughness lower than 4.4%, and that friction factor obeys the Poiseuille law, if it is correctly computed taking compressibility into account. It is found that recent correlations for the prediction of the critical Reynolds number in microchannels that link the relative roughness of the microtubes to the critical Reynolds number do not agree with the present results.     

Standby memory performance of a mini/micro computer in a computer communication system

the utilization of computer communication systems for distributed information processing is growing very fast due to the reduction of transmission time and cost. Keeping in view the user's demand for simultaneous transmission of documents and burst messages in a large user resource-sharing mode, a system model mainly consisting of a mini/micro computer and a switching mechanism is presented. The standby memory performance of the mini/micro computer is analyzed with facsimile and burst data input, synchronous transmission and random server interruption through Bernoulli sequences, and its performance is studied in terms of overflow probability and average queueing delay. Some of the computed results are portrayed in graphs for the use of computer communication system designer's as guidelines.     

Methods for simulating and optimizing molded micro components and systems

Casting production of metallic and ceramic micro components is still in the research phase, and the components obtained with the current technologies are suffering of a certain lack of reproducibility. Within the scope of Collaborative Research Center 499 “Design, Production and Quality Assurance of Molded micro components made of Metallic and Ceramic Materials”, basics in a persistent process chain for micro components are acquired. The development, process preparation, mass production and material and components behavior investigation is understood under consistent chain. This work presents computer simulation based methods that contribute to optimize micro molded systems on both a component and a system basis. The introduction of such methods allows studying the behavior of components and systems with regard to their grain structure and the wide geometric tolerances required.     

Micro and nano-platforms for biological cell analysis

In this paper some technological platforms developed for biological cell analysis will be presented and compared to existing systems. In brief, we present a novel micro cell culture chamber based on diffusion feeding of cells, into which cells can be introduced and extracted after culturing using normal pipettes, thus making it readily usable for clinical laboratories. To enhance the functionality of such a chamber we have been investigating the use of active or passive 3D surface modifications. Active modifications involve miniature electrodes able to record electrical or electrochemical signals from the cells, while passive modifications involve the presence of a peptide nanotube based scaffold for the cell culturing that mimics the in vivo environment. Two applications involving fluorescent in situ hybridization (FISH) analysis and cancer cell sorting are presented, as examples of further analysis that can be done after cell culturing. A platform able to automate the entire process from cell culturing to cell analysis by means of simple plug and play of various self-contained, individually fabricated modules is finally described.     

Process observation for the assembly of hybrid micro systems

The automation of micro assembly is becoming more and more important in micro technology. Especially the demands on handling and process observation of hybrid micro systems with optical and mechanical functions are quite high. Because of this process monitoring is inevitably necessary for a better understanding of what is really happening in the micro world. Process visualisation is very important in (micro electronic and mechanical systems) MEMS but does not guarantee an operative micro system. Therefore, instruments for quality control are required to secure a safe and reproducible assembly. The aim of this article is to give an overview over so far used and new devices for process observation and quality control.The authors gratefully acknowledge the financial support of the Deutsche Forschungsgemeinschaft (DFG) within the Collaborative Research Centre (SFB) 440 Assembly of hybrid microsystems.