软X射线多层膜反射镜的设计、制备与检测

本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。     

18.2nm Schwarzschild显微物镜用多层膜带宽匹配问题分析

软X射线多层膜的进展使正入射高分辨率成像系统从红外、可见和紫外扩展到软X射线波段。由于软X射线多层膜的反射率还不能像其它波段反射镜反射率那样高,因此由两块同心球面反射镜组成的Schwarzschild物镜在软X射线波段得到了广泛的应用。本文从多层膜带宽匹配条件、Schwarzschild显微物镜的几何尺寸和多层膜镀制设备的性能出发,研究了实现Schwarzschild显微物镜带宽匹配条件的镀膜过程,为实际制备Schwarzschild显微物镜用多层膜提供理论指导。     

18.2nm Schwarzschild显微物镜用多层膜带宽匹配问题分析

软X射线多层膜的进展使正入射高分辨率成像系统从红外、可见和紫外扩展到软X射线波段.由于软X射线多层膜的反射率还不能像其它波段反射镜反射率那样高,因此由两块同心球面反射镜组成的Schwarzschild物镜在软X射线波段得到了广泛的应用.本文从多层膜带宽匹配条件、Schwarzschild显微物镜的几何尺寸和多层膜镀制设备的性能出发,研究了实现Schwarzschild显微物镜带宽匹配条件的镀膜过程,为实际制备Schwarzschild显微物镜用多层膜提供理论指导.     

8.0nm附近Mo／B4C软X射线多层膜初步研究

介绍研制８．０ｎｍ波长附近正入射Ｍｏ／Ｂ４Ｃ软Ｘ射线多层膜的初步研究结果。讨论了包括镀膜材料的选择、多层膜结构设计及多层膜性能模拟计算和用磁控溅射法制备以膜的镀膜工艺等在内的多层膜制备过程，并对制备的软Ｘ射线多层膜进行了结构测试。制备出的Ｍｏ／Ｂ４Ｃ软Ｘ射线多层膜将主要用于Ｘ射线激泖打靶实验中。这是目前国内首次开展的１０．０ｎｍ波长以下实用软Ｘ射线多层膜镜的研究工作。     

软X射线偏振光学元件的设计与制备

叙述了软X射线波段反射式多层膜起偏器和检偏器的设计原则和设计方法,优化计算了5.9nm波长处多层膜光学元件的偏振性能,阐述了其制备的过程,利用小角度衍射法对多层膜的厚度进行了测量,并对同步辐射测量的反射率结果进行了拟合分析。     

用磁控溅射法制备软X射线多层膜

本文介绍用直流-射频平面磁控溅射法制备软x射线多层膜的初步实验结果。在一定工艺条件下,采用计算机定时控制膜厚的方法,严格按照设计周期制备了多层膜样品,并给出了X射线衍射仪小角衍射的检测结果。     

类镍钽软X射线激光用多层膜反射镜的研制

设计并制备了工作波长为4.48 nm类镍钽软X射线激光用多层膜反射镜。选择C r/C、C r/Sc为多层膜材料对,模拟了多层膜非理想界面对多层膜反射率的影响。采用直流磁控溅射技术在超光滑硅基片上制备了C r/C、C r/Sc多层膜。利用X射线衍射仪测量了多层膜结构,在德国Bessy II同步辐射上测量了多层膜的反射率,C r/C,C r/Sc多层膜峰值反射率分别为7.50%,6.12%。     

用离子束溅射法制备X射线多层膜的实验和工艺

叙述了用离子束溅射镀膜机进行X射线波段多层膜镀膜实验及制备X射线多层膜光学元件方面的工作,简述离子束溅射镀膜机的工作原理,X射线多层膜的制备过程,主要工艺参数及注意事项,以及用X射线小角衍射仪对制备样品进行检测的部分结果。     

用离子束溅射法制备X射线多层膜的实验和工艺

叙述了用离子束溅射镀膜机进行X射线波段多层膜镀膜实验及制备X射线多层膜光学元件方面的工作，简述离子束溅射镀膜机的工作原理，X射线多层膜的制备过程，主要工艺参数及注意事项，以及用X射线小角衍射仪对制备样品进行检测的部分结果。     

软X射线激光多层膜均匀性控制技术

软 X射线激光技术在近年来得以较快的发展 ,而多层膜是其不可缺少的一项基础技术 ,软 X射线激光多层膜本身的要求使得多层膜的结构性需达到很高的水平。现就软X射线激光多层膜的均匀性控制技术进行研究 ,以期得到更加精确的膜层结构。     

软X射线光学系统曲面镀膜膜厚测量方法

软X射线光学系统需要在超光滑曲面上均匀镀膜.我们将超光滑曲面看作由若干个小平面拼接而成,通过小角衍射仪测量出各个小平面的周期膜厚,并拟和出整个曲面的镀膜速率.为提高控制精度,我们对同一片多层膜进行等精度多次测量,去除其中的粗大误差、系统误差,最后得到多层膜厚度的最佳估计值.     

28.4nm和30.4nm波段的C/Si多层膜

对于宇宙的探讨,特别是对太阳大气层的研究,需要用Ｘ射线、极紫外及远紫外波段望远镜来观测。我们报道了一种新的材料组合Ｃ／Ｓｉ用于２８．４ｎｍ（４３．６５ｅＶ）和３０．４ｎｍ （４０．７８ｅＶ）波段的多层膜反射镜,并且用离子束溅射装置制备了正入射条件下的Ｃ／Ｓｉ多层膜反射镜。同时,我们用软Ｘ射线反射计测量了其反射率,在正入射条件下测得最大反射率达１４％ （３０．４ｎｍ ）。     

中红外高反膜的激光热场分析

为了分析薄膜内部激光引起的电热场效应,提出了一种模拟锥形高斯光入射多层介质薄膜后电场和热场分布的方法。该方法能够分析薄膜中高斯光各个角谱分量叠加形成的电场的分布,进而得到由于薄膜本征吸收产生的热量沉积以及薄膜内部的温度场分布。针对三种中心波长为4.3μm高反膜进行了分析,比较了激光垂直入射和斜入射两种不同工作方式的全介质高反膜系以及金属加介质高反膜系的温度峰值,结果表明全介质高反膜的温度峰值明显低于金属加介质膜系。     

C/Al软X射线多层膜反射镜的制备与测量

在λ＝ ２８．５ｎｍ 波长处,我们选择了一种新的多层膜材料对Ｃ／Ａｌ。正入射Ｃ／Ａｌ多层膜在１５．０ｎｍ 附近有很低的二级衍射峰。磁控溅射法制备的Ｃ／Ａｌ多层膜样品,用Ｘ射线小角衍射法对其结构进行了测试,并测得Ｃ／Ａｌ软Ｘ射线多层膜的正入射反射率２２％ ±４％ 。     

Scratch tests to contribute designing performance maps of multilayer polymeric coatings

The scratching technique has gained interest in recent times because of the numerous inherent properties implied (adherence, hardness, elasticity, visco-elasticity, cohesion, etc.) during tests. Some singular mechanical responses have been noticed (cyclical slips and unsticking, degradation modes, etc.) and valued on multilayers polymeric coatings. The results allow differentiating them and illustrating the mare resistance for part. Scratch test is identified as one of the most efficient to build coating performance maps. The main purpose of our work related to the characterization of multilayers polymeric coatings, is to determine a set of experiments in order to compare their mar resistance. Experiments are made by indentation (hardness, creep, stress relaxation), scratch test (determination of the critical load), glossy reflection and wear. In this paper we describe the scratch experiments used to compare the mar resistance of the coatings. The parameters recorded are used to build a performance map relative to a specimen and this performance map is used to compare all characteristics of different multilayers coatings. Two organic systems are taken as samples to illustrate it. They are composed of three layers with a common steel sheet substrate and a common PET topcoat. The intermediary layer is soft and thick for the first product while it is hard and thin for the second one. The scratch results combined with other test results in performances maps underline the role of an intermediary layer in order finally to better design multilayer polymeric coatings.     

使用气体靶激光等离子体光源的软X射线反射率计

建立了一台使用气体靶激光等离子体光源的软X射线反射率计,并给出了使用该反射率计测量软X射线多层膜反射率的方法.与金属靶等离子体光源相比,由于使用了气体靶等离子体光源,该反射率计具有低碎屑、可长期连续运行等优点.针对单色仪的二级光谱对反射率测量结果产生的影响,提出了修正方法.并用此方法对实测的工作波长为17.1nm软X射线多层膜的反射率曲线进行了修正.     

极紫外与软X射线非周期多层膜优化设计及初步研制

以周期膜理论为基础 ,改进了已有的设计方法 ,通过采用随机数的方法 ,发展了一种普适的多层膜设计方法 ,这种方法除可设计一般的周期多层膜 ,更重要的是它可以根据选定评价因子 ,设计不同要求的非周期多层膜。根据实际要求 ,完成了积分反射率最大多层膜、宽带平坦型多层膜、校正光源发射不均匀性多层膜和选波长多层膜等。这些多层膜各有特点 ,可满足不同应用的要求。用磁控溅射方法对一种宽带多层膜进行了制备。最后的 X射线衍射测量和反射率的相对测试表明 ,与周期膜系相比 ,非周期多层膜的带宽展宽 ,反射率积分值增加 ,但峰值反射率略有降低。     

Corrosion-wear behaviour of PVD Cr/CrN multilayer coatings for gear applications

At present, one of the most important problems in automobile engines and transmission components is due to tribological processes (friction and wear) that in many cases come accompanied by corrosion processes due to the environmental conditions to which these materials are exposed during their lifetime. Both mechanisms can be minimized by means of the development and the application of adequate coatings that combine low friction with a high corrosion and wear resistance.The new tendencies in industrial PVD coatings to improve their properties are focused in the development of new multilayer and nanostructured coatings. These structures allow in a relatively simple way enhancing their tribological properties and the corrosion resistance that can not be reached by means of the traditional monolayer coatings. The background of this type of coatings consists of the stacking up of several layers with good individual tribological and mechanical properties, but every individual layer has a thickness that can be from hundreds of nanometres down to only 5-10 nm. The properties of these nanostructured coatings depend strongly on the thickness modulation of every individual layer.Concerning PVD coatings, the chrome nitride coatings have demonstrated to possess excellent wear resistance properties. In this work, multilayer Cr/CrN coatings with different individual layer thickness have been deposited on substrates of steel F1272 and silicon. The deposition has been carried out by means of the cathodic arc method alternating an atmosphere of pure Ar with a reactive mixture of N₂/Ar. The multilayers obtained have been analyzed by means of Glow Discharge Optical Emission Spectroscopy (GD-OES) and in some cases by means of FE-SEM obtaining bilayer (Cr/CrN) periods of the order of 220 and 45 nm. The coating characterization has been complemented with hardness and composition measurements as well as by the performance of several wear and corrosion-wear tests.     

软X射线多层膜成像系统带宽匹配条件研究

从多层膜反射软X射线的特性出发,分析了两块多层膜组成系统的光强传输效率和位相变化关系,给出了成像系统带宽匹配条件。