Titanium oxide thin film deposited on metallic Cr substrate by RF-magnetron sputtering

In order to develop a colored mirror with hydrophilicity, TiO₂ films are deposited on the Cr and amorphous-TiO₂ substrate. In TiO₂/Cr, a mixed phase comprising of anatase and rutile is formed. In TiO₂/amorphous-TiO₂/Cr, pure anatase phase is obtained. The amorphous-TiO₂ film as interlayer tends to induce micro-columnar-shaped anatase phase. The formation of anatase phase leads to an abrupt decrease of the contact angle by UV-irradiation. Hydrophilic to hydrophobic reconversion by electron-hole recombination is retarded, which seems to be due to pure anatase phase without rutile phase.     

High transparent sol-gel derived nanostructured TiO2 thin film

In this investigation, high transparent nanostructured TiO₂ thin film has been prepared by a dip-coating method. The prepared sol was obtained through the hydrolysis of titanium isopropoxide under the selected pH. The transmission of film as an optical parameter was characterized by spectrophotometer. With respect to other experimental results, a high transmission spectrum without any fluctuation in visible wavelength region has been recorded. According to transmission spectrum of film the refractive index and extinction coefficient has been determined. Experimental result has shown that the prepared film has high transmission and good optical parameters. SEM and AFM have been applied for morphology characterization of the film surface.     

Effect of sputtering pressure and post-annealing on hydrophilicity of TiO2 thin films deposited by reactive magnetron sputtering

A series of TiO₂ thin films was deposited onto glass substrates without intentional heating or biasing by magnetron sputtering of a titanium target using Ar/O₂ reactive mixtures over a broad range of total sputtering pressures from 0.12 Pa to 2.24 Pa. Each of the film types was deposited by the threshold poisoned mode at a specific given oxygen flow rate monitored in-situ by optical emission spectroscopy. Both the sputtering pressure and thermal annealing are the key factors for the TiO₂ films to yield fast-response superhydrophilicity with a water contact angle of 5°. The mechanism of superhydrophilicity for the TiO₂ films deposited by high-pressure sputtering will be discussed based on empirical studies of X-ray diffractometry, high-resolution scanning microscopy and atomic force spectroscopy.     

The seeding effect on the microstructure and photocatalytic properties of ZnO nano powders

Nano sized ZnO powders, with suitable amount of TiO₂ (P25), have been successfully synthesized via a novel modified hydrothermal method by using zinc acetate. Titania nano powder plays an important role in fabrication of ZnO nano structure. The structure and morphology of the product were characterized by X-ray diffraction and scanning electron microscopy, which show different morphologies and particle sizes. Photocatalytical properties of the product exhibit strong improvement in the reactivity of seeded powders. These powders have better properties because of coupling effect of semiconductors, small powder size and reduced recombination of electron-hole in the surface of a catalyst.     

Superhydrophilicity and photocatalytic activity of sol-gel deposited nanosized titania thin films

Nanosized TiO₂ thin films with anatase structure were synthesized by a sol-gel dip coating method using TiCl₄-ethanol solution as a precursor. The resulting solution was aged between 0 up to 24 h and characterized by the X-ray diffraction, atomic force microscopy (AFM), and UV-vis photospectroscopy. The AFM reveals that aging time incites the grain growth of crystal in the TiO₂ films. The effect of aging time on morphology, photocatalytic, and superhydrophilic behavior of the films was also studied. It was found that there is an optimum aging time that photocatalytic and superhydrophilic yields reach a maximum, simultaneously. Photocatalytic and photo-wettability mechanisms follow two kinds of behaviors, depending on whether the aging time is less or more than a threshold value of around 1 h.     

Study of the deposition parameters and Fe-dopant effect in the photocatalytic activity of TiO2 films prepared by dc reactive magnetron sputtering

The reactive magnetron sputtering method was used to prepare pure and Fe-doped titanium dioxide thin films. The films were deposited onto microscope glass slides and polycarbonate plates at different total pressure and Fe-doping concentrations. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and UV-visible spectroscopy (UV). For glass substrates a polycrystalline TiO₂ structure was verified with X-ray diffraction, which showed typical characteristic anatase reflections. An iron phase appeared in the highly Fe-doped samples. The absorption edges of the Fe-doped TiO₂ films shifted to visible region with increasing concentration of iron. For the polycarbonate substrate an amorphous TiO₂ structure was revealed for all deposition conditions. The effects of different Fe-doping and total pressure levels on the photocatalytic activity were obtained by the degradation rates of Rhodamine-B (RoB) dye under UV light irradiation. For the deposition conditions considered in this study the highest photodegradation rates were achieved for films deposited on the polymer substrates. Of these overall highest rates was achieved for deposition at 0.4 Pa and without doping. However, for both substrates, films prepared at the particular total pressure of 0.5 Pa and a low iron concentration showed better photocatalytic activity than the pure TiO₂ films prepared under the same deposition parameters. On the contrary, the photocatalytic degradation rates of RoB on the highly Fe-doped TiO₂ films decreased strongly.     

Photocatalytic properties of porous TiO2/Ag thin films

In this study, nanocrystalline TiO₂/Ag composite thin films were prepared by a sol-gel spin-coating technique. By introducing polystyrene (PS) spheres into the precursor solution, porous TiO₂/Ag thin films were prepared after calcination at a temperature of 500 °C for 4 h. Three different sizes (50, 200, and 400 nm) of PS spheres were used to prepare porous TiO₂ films. The as-prepared TiO₂ and TiO₂/Ag thin films were characterized by X-ray diffractometry (XRD) and by scanning electron microscopy to reveal structural and morphological differences. In addition, the photocatalytic properties of these films were investigated by degrading methylene blue under UV irradiation.When PS spheres of different sizes were introduced after calcination, the as-prepared TiO₂ films exhibited different porous structures. XRD results showed that all TiO₂/Ag films exhibited a major anatase phase. The photodegradation of porous TiO₂ thin films prepared with 200 nm PS spheres and doped with 1 mol% Ag exhibited the best photocatalytic efficiency where ∼ 100% methylene blue was decomposed within 8 h under UV exposure.     

Photocatalytic properties of Au/TiO2 thin films prepared by RF magnetron co-sputtering

Au/TiO₂ thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO₂ films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV-vis techniques. Au doping and UV treatment enhanced the photocatalytic efficiency of TiO₂ thin films. The optimal RF power of the Au target and UV treatment time were 5 W and 1 h, respectively. The enhanced photoactivity of Au(5 W)/TiO₂ thin films with UV treatment is found to result from the increased hydroxyl concentration.     

Photocatalytic activity of TiO2 thin films deposited by RF magnetron sputtering

Nano-TiO₂ thin films were deposited on silicon and glass substrates by radio-frequency (RF) magnetron sputtering using TiO₂ ceramic target and characterized by X-ray diffractometer, X-ray photoelectron spectrometer, atomic force microscope, and ultraviolet-visible spectrophotometer. Photocatalytic activity was evaluated by light induced degradation of 5 ppm methyl orange solution using a high pressure mercury lamp as lamp-house. It was found that the film as deposited is polymorph, with energy gap of 3.02 eV, and can absorb visible light. The film was repeatedly used for six times in degradation of 5 ppm methyl orange, and the degradation rates of methyl orange solution are 36.566%, 33.112%, 32.824%, 32.248%, 30.521% and 28.794%, respectively. After ultrasonic treatment in de-ionized water for ten minutes, the degradation rate of methyl orange solution resumes to 33.975%.     

预涂SiO2的二氧化钛薄膜光催化活性与结构关系

载玻片上浸涂一层常温常压合成的SiO2溶胶后再浸涂TiO2溶胶制备预涂SiO2的TiO2薄膜光催化剂,结果发现浸涂一层SiO2会诱导金红石相TiO2生成,并使TiO2光催化活性提高71．75％,但预涂二层SiO2的TiO2薄膜仅有锐钛型且光催化活性较纯TiO2薄膜降低。这说明适量金红石型／锐钛型的混晶型TiO2具有更好的光催化活性。对TiO2微结构分析显示,TiO2薄膜点阵应变越大,薄膜光催化性能越好。X射线光电子能谱研究表明,预涂一层SiO2的Ti02薄膜Ti^3 含量较纯TiO2薄膜高,预涂二层SiO2的TiO2薄膜Ti^3 含量较纯TiO2薄膜低。扫描电镜分析说明,预涂SiO2的TiO2薄膜表面颗粒粒径较纯TiO2薄膜更小,薄膜颗粒粒径与光催化活性不是简单的一一对应关系。     

Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system

This article reports on preparation, characterization and comparison of TiO₂ films prepared by sol-gel method using the titanium isopropoxide sol (TiO₂ coating sol 3%) as solvent precursor and reactive magnetron sputtering from substoichiometric TiO_2 − x targets of 50 mm in diameter. Dual magnetron supplied by dc bipolar pulsed power source was used for reactive magnetron sputtering. Depositions were performed on unheated glass substrates. Comparison of photocatalytic properties was based on measurements of hydrophilicity, i.e. evaluation of water contact angle on the film surface after UV irradiation. It is shown, that TiO₂ films prepared by the sol-gel method exhibited higher hydrophilicity in the as-deposited state but has significant deterioration of hydrophilicity during aging, compared to TiO₂ films prepared by magnetron sputtering. To explain this effect AFM, SEM and high resolution XPS measurements were performed. It is shown that the deterioration of hydrophilicity of sol-gel TiO₂ films can be suppressed if as-deposited films are exposed to the plasma of microwave oxygen discharge.     

Fabrication of TiO2 nanostructured films by spray deposition with high photocatalytic activity of methylene blue

TiO₂ films were successfully deposited onto hot quartz substrates by airbrush spraying using an aqueous dispersion. The films consisting of cubic or cauliflower-shaped structures expressed higher photodegradation efficiencies of methylene blue than those with prism-, flower- or fan-blade-shaped morphology due to the difference in the optical band gap energy. The photodegradation obeyed the pseudo-first-order Langmuir-Hinshelwood kinetic model with apparent rate constants ranging from 3.95 × 10^− 3 to 19.38 × 10^− 3 min^− 1 based on the film surface morphology.     

Photocatalytic properties of titanium dioxide sputtered on a nanostructured substrate

The effective one-step physical approach is demonstrated for the fabrication of anatase titanium dioxide nanotubes through r.f. magnetron sputtering of TiO₂ on a highly ordered nanoporous anodic alumina template. The nanostructured TiO₂ benefited from the combination of unique properties of both the sputtering technique that provided well-controlled environment for the fabrication of anatase phase TiO₂ and the porous anodic alumina (PAA) that provided uniform and ordered nanopores. The photocatalytic properties of TiO₂ films were characterized following the degradation of methylene blue molecules under UV light irradiation. The photocatalytic activity of the nanostructured TiO₂ films has been found to be approximately twice higher in comparison with the flat TiO₂ films fabricated at the same conditions.     

Influence of annealing on the structure and stoichiometry of europium-doped titanium dioxide thin films

This work presents the influence of annealing on the structure and stoichiometry of europium (Eu)-doped titanium dioxide (TiO₂). Thin films were fabricated by magnetron sputtering from a metallic Ti-Eu target in oxygen atmosphere and deposited on silicon and SiO₂ substrates. After deposition the selected samples were additionally annealed in air up to 1070 K.Film properties were examined by means of X-ray diffraction (XRD), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) and the results were analyzed together with the undoped TiO₂ thin films prepared under similar technological conditions.XRD results showed that depending on the Eu content, as-deposited thin films consisted of the TiO₂-anatase or TiO₂-rutile.An additional annealing will result in the growth of anatase crystals up to 35 nm, but anatase to rutile phase transformation has not been recorded. AFM images display high quality and a dense nanocrystalline structure. From the XPS Ti2p spectra the 4+oxidation state of Ti was confirmed. The O1s XPS spectra displayed the presence of an O²⁻ photoelectron peak accompanied by an additional broader peak that originates from hydroxyl species chemisorbed at the sample surface. It has been found that Eu dopant increases the OH⁻ content on the surface of prepared TiO₂:Eu thin films. The calculated O/Ti ratio was in the range of 1.85-2.04 depending on the sample.     

Mesoporous TiO2 thin films embedded with Au nanoparticles for the enhancement of the photocatalytic properties

Mesoporous TiO₂ thin films were prepared by hydrothermal-oxidation of titanium metal thin films, which were obtained by DC magnetron sputtering technique. Gold nanoparticles, which were prepared by reduction of HAuCl₄, were embedded into the holes of the mesoporous TiO₂ films by capillary method followed by annealing in air up to 400 °C. The size of pore of TiO₂ films is about 100 nm and that of Au nanoparticles is about 10 nm in average. The morphology of the films was analyzed by field emission scanning electron microscope (FE-SEM) and scanning probe microscopes (SPMs). Subsequently, the photocatalytic performances of the obtained nanosystems in the decomposition of methylene blue solution are discussed. The obtained results show that the dispersion of Au nanoparticles on the mesoporous TiO2 matrix will help enhancing the photocatalytic activity with respect to pure TiO₂ under visible light irradiation.     

Preparation of nitrogen co-doped SiO2/TiO2 thin films on ceramic with enhanced photocatalytic activity under visible-light irradiation

In this study, we have successfully deposited N-doped SiO₂/TiO₂ thin films on ceramic tile substrates by sol–gel method for auto cleaning purpose. After dip coating and annealing process the film was transparent, smooth and had a strong adhesion on the ceramic tile surface. The synthesised catalysts were then characterised by using several analytical techniques such as X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscope (AFM) and UV-vis absorption spectroscopy (UV-vis). The analytical results revealed that the optical response of the synthesised N-doped SiO₂/TiO₂ thin films was shifted from the ultraviolet to the visible light region. The nitrogen substituted some of the lattice oxygen atoms. The surface area of co-doped catalyst increased, and its photocatalytic efficiency was enhanced. The photocatalytic tests indicated that nitrogen co-doped SiO₂/TiO₂ thin films demonstrated higher than of the SiO₂/TiO₂ activity in decolouring of methylene blue under visible light. The enhanced photocatalytic activity was attributed to an increasing of the surface area and a forming of more hydroxyl groups in the doped catalyst.     

Nanoporous titanium oxide synthesized from anodized Filtered Cathodic Vacuum Arc Ti thin films

This paper describes the formation of self-organized nanopores in thin films of titanium prepared using a Filtered Cathodic Vacuum Arc (FCVA) deposition system. The post-deposition anodization was performed using 0.5% (wt) NH₄F in ethylene glycol and an aqueous based solution containing 0.5% (wt) NH₄F and 1 M (NH₄)₂SO₄ electrolytes. Homogenously distributed nanopores with dimensions in the range of 10 to 20 nm were obtained. Nanoporous TiO₂ thin films were obtained after annealing the anodized samples at 600 °C for 4 h. Scanning electron microscopy (SEM) and Raman spectroscopy were used to characterize these nanoporous films. Raman measurements revealed that the rutile TiO₂ polymorph dominates these structures along with imperfect titanium oxidation resulting in the formation of defect structures, particularly when aqueous electrolyte was used for the anodization.     

Preparation and enhanced daylight-induced photocatalytic activity of C,N,S-tridoped titanium dioxide powders

A simple method for preparing highly daylight-induced photoactive nanocrystalline C,N,S-tridoped TiO2 powders was developed by a solid-phase reaction. The as-prepared TiO2 powders were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), UV-vis diffuse reflectance spectra, N2 adsorption-desorption measurements and transmission electron microscopy (TEM). The photocatalytic activity was evaluated by the photocatalytic oxidation of formaldehyde under daylight irradiation in air. The results show that daylight-induced photocatalytic activities of the as-prepared TiO2 powders were improved by C,N,S-tridoping. The C,N,S-tridoped TiO2 powders exhibited stronger absorption in the near UV and visible-light region with red shift in the band-gap transition. When the molar ratio of CS(NH2)2 to xerogel TiO2 powders (prepared by hydrolysis of Ti(OC4H9)4 in distilled water) (R) was kept in 3, the daylight-induced photocatalytic activities of the as-prepared C,N,S-tridoped TiO2 powders were about more than six times greater than that of Degussa P25 and un-doped TiO2 powders. The high activities of the C,N,S-tridoped TiO2 can be attributed to the results of the synergetic effects of strong absorption in the near UV and visible-light region, red shift in adsorption edge and two phase structures of un-doped TiO2 and C,N,S-tridoped TiO2.     

Fabrication and photocatalytic property of ZnO nanorod arrays on Cu2O thin film

ZnO nanorod arrays were fabricated on Cu₂O thin film by a simple low-temperature liquid-phase-deposition method. The samples were characterized by X-ray powder diffraction (XRD) and field emission scanning electron microscopy (FESEM). The UV-Vis spectroscopy showed that the obtained sample was able to absorb a large part of visible light (up to 650 nm). Their photocatalytic activities were investigated by degradation of dye methylene blue (MB) under UV-Vis and visible light irradiation. It was found that the photocatalytic activity of the ZnO/Cu₂O NRs was higher than the ZnO/ZnO NRs under UV-Vis light. In a word, Cu₂O played an important role in enhancing the photocatalytic activity of the ZnO/Cu₂O NRs.     

Surface and nanoindentation studies on nanocrystalline titanium diboride thin film deposited by magnetron sputtering

A detailed study on the mechanical, structural and surface characteristics of nanocrystalline TiB₂ films deposited on Si-100 substrates by direct current (DC) magnetron sputtering was carried out. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM), nanoindentaion and X-ray diffraction (XRD) studies on these films were performed. Magnetron sputtered titanium diboride coatings had a maximum hardness of 36 GPa and elastic modulus of 360 GPa. From the XRD analyses, the films were found to grow in (00l) direction-oriented perpendicular to the substrate. The AFM analysis of the films showed the variation of grain size between 30 and 50 nm. The high-resolution AFM images revealed arrangements of atoms resembling lattice and the interplanar spacings measured on the image also showed the orientation of grains in the (001) direction. Nanoindentation studies at very shallow depths showed a continuous increase of hardness and modulus with indentation depth up to 40 nm due to tip blunting and presence of oxides on the film surface (confirmed from the XPS study). The elastic recovery was approximately 69% for 100 nm depth whereas it was 52% for 1000 nm depth.