Low dark current quasi-Schottky barrier MSM-photodiode structures on n-Ga/sub 0.47/In/sub 0.53/As with p/sup +/-Ga/sub 0.47/In/sub 0.53/As cap layer

The p/sup +/-cap layer was used to fabricate a metal-semiconductor-metal (MSM) interdigitated photodetector on Ga/sub 0.47/In/sub 0.53/As. The measured barrier height was Phi /sub Bn=/0.52 V, the ideality factor n=1.1 and average dark current density 2 mA/cm/sup 2/. A rise time of 45 ps at lambda =1.3 mu m under 2 V bias was measured for an MSM photodiode with 3 mu m finger width and finger gaps and an active area of 100*100 mu m/sup 2/.<>     

A 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode (APD) array. The mean breakdown voltage of the APD was 57.9 V and the standard deviation was less than 0.1 V. The mean dark current was /spl sim/2 and /spl sim/300 nA, and the standard deviation was /spl sim/0.19 and /spl sim/60 nA at unity gain (V/sub bias/ = 13.5 V) and at 90% of the breakdown voltage, respectively. External quantum efficiency was above 40% in the wavelength range from 1.0 to 1.6 /spl mu/m. It was /spl sim/57% and /spl sim/45% at 1.3 and 1.55 /spl mu/m, respectively. A bandwidth of 13 GHz was achieved at low gain.     

Threshold voltage of submicron Ga/sub 0.47/In/sub 0.53/As HIGFETs

Presents threshold voltage data for Al/sub 0.48/In/sub 0.52/As/Ga/sub 0.47/In/sub 0.53/As/InP heterostructure insulated gate FETs (HIGFETs) with gate lengths from 1.2 mu m to 0.4 mu m. The refractory-gate, self-aligned fabrication process was applied to MBE-grown structures with 300 AA Ga/sub 0.47/In/sub 0.53/As channels and semi-insulating superlattice buffers to achieve sharp pinchoff with excellent threshold uniformity. HIGFETs with L/sub g/=1.2 mu m showed a threshold voltage of -0.076+or-0.019 V, making them well-suited to application in direct-coupled FET logic (DCFL) circuits.<>     

Direct optical injection locking of monolithically integrated In/sub 0.53/Ga/sub 0.47/As/In/sub 0.52/Al/sub 0.48/As MODFET oscillators

The authors have fabricated monolithically integrated In/sub 0.53/Ga/sub 0.47/As/In/sub 0.52/Al/sub 0.48/As 0.25 mu m gate modulation-doped field effect transistor (MODFET) oscillators. The results of direct optical subharmonic injection locking of these oscillator circuits at 10.159 and 19.033 GHz are presented.<>     

Long-wavelength In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As large-area avalanche photodiodes and arrays

Large-area (500-/spl mu/m diameter) mesa-structure In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiodes (APDs) are reported. The dark current density was /spl sim/2.5/spl times/10/sup -2/ nA//spl mu/m/sup 2/ at 90% of breakdown; low surface leakage current density (/spl sim/4.2 pA//spl mu/m) was achieved with wet chemical etching and SiO/sub 2/ passivation. An 18 /spl times/ 18 APD array with uniform distributions of breakdown voltage, dark current, and multiplication gain has also been demonstrated. The APDs in the array achieved 3-dB bandwidth of /spl sim/8 GHz at low gain and a gain-bandwidth product of /spl sim/120 GHz.     

Ga/sub 0.8/In/sub 0.2/As/GaAs/Ga/sub 0.51/In/sub 0.49/P buried ridge structure single quantum well laser emitting at 0.98 mu m

The first fabrication is reported of a buried ridge structure Ga/sub 0.8/In/sub 0.2/As/GaAs/Ga/sub 0.51/In/sub 0.49/P laser emitting at 0.98 mu m grown by two-step low pressure metal organic chemical vapour deposition. The width of the ridge is 2 mu m. Laser output power greater than 40 mW with a threshold current of 30 mA has been measured. A typical quantum efficiency of eta =60% was obtained without any facet coating. Excellent homogeneity and uniformity have been achieved over a wafer area of 10 cm/sup 2/.<>     

Optical tuning of monolithic In/sub 0.53/Ga/sub 0.47/As/In/sub 0.52/Al/sub 0.48/As/InP modulation-doped field-effect transistor oscillators at X and R band

The authors have experimentally studied the optical control and optical tuning characteristics of monolithically integrated In/sub 0.53/Ga/sub 0.47/As/In/sub 0.52/Al/sub 0.48/As modulation-doped field-effect transistor (MODFET) oscillators operating in the X and R bands. For a 20 mu W intrinsic photoexcitation on the device, the maximum frequency shift for the X- and R-band oscillators was 8.7 and 11.7 MHz, respectively.<>     

Considerations for polarization insensitive optical switching and modulation using strained InGaAs/InAlAs quantum well structure

It is shown that In/sub 1-x/Ga/sub x/As/In/sub 0.52/Al/sub 0.48/As MQW structures with the wells under tensile strain obtained by the appropriate selection of the Ga mole fraction and well size can achieve polarization-insensitive optical switching and modulation for a wide range of wavelengths between 1.0 and 1.6 mu m. For example, a change in refractive index of -0.5% at about 1.55 mu m will facilitate an intersectional angle of more than 10 degrees in a total internal reflection switch which can be readily fabricated. Hence, this material system is promising for long-wavelength polarization-insensitive semiconductor optoelectronic devices.<>     

Refractive index step and optical confinement in Ga/sub 0.86/In/sub 0.14/As/sub 0.13/Sb/sub 0.87//Ga/sub 0.73/Al/sub 0.27/As/sub 0.02/Sb/sub 0.98/ double heterostructure lasers emitting at 2.2 mu m

Using theoretical fitting to measured transverse far field patterns in Ga/sub 0.86/In/sub 0.14/As/sub 0.13/Sb/sub 0.87//Ga/sub 0.73/Al/sub 0.27/As/sub 0.02/Sb/sub 0.98/ DH lasers emitting at 2.2 mu m the authors estimated the value of the active layer refractive index as 3.78. This value, higher than assumed earlier based on theoretical calculations, ensures good optical confinement for this kind of heterostructure and provides a good theoretical fit with the authors' experimental data of threshold current density against active layer thickness.<>     

Effect of strain on microwave noise characteristics in In/sub 0.52/Al/sub 0.48/As/In/sub x/Ga/sub 1-x/As (0.53

Chough  K.B. Hong  W.-P. Florez  L. Song  J.I. 《Electronics letters》1993,29(15):1338-1340

Microwave performance of 0.4 mu m gate metamorphic In/sub 0.29/Al/sub 0.71/As/In/sub 0.3/Ga/sub 0.7/As HEMT on GaAs substrate

MBE grown metamorphic In/sub 0.29/Al/sub 0.71/As/In/sub 0.3/Ga/sub 0.7/As/GaAs high electron mobility transistors (HEMTs) have been successfully fabricated. A 0.4 mu m triangular gate device showed transconductance as high as 700 mS/mm at a current density of 230 mA/mm. The measured f/sub T/ was 45 GHz and f/sub max/ was 115 GHz. These high values are, to the authors knowledge, the first reported for submicrometre metamorphic InAlAs/InGaAs/GaAs HEMTs with an indium content of 30%.<>     

A novel InGaP/Al/sub x/Ga/sub 1-x/As/GaAs CEHBT

A new and interesting InGaP/Al/sub x/Ga/sub 1-x/As/GaAs composite-emitter heterojunction bipolar transistor (CEHBT) is fabricated and studied. Based on the insertion of a compositionally linear graded Al/sub x/Ga/sub 1-x/As layer, a near-continuous conduction band structure between the InGaP emitter and the GaAs base is developed. Simulation results reveal that a potential spike at the emitter/base heterointerface is completely eliminated. Experimental results show that the CEHBT exhibits good dc performances with dc current gain of 280 and greater than unity at collector current densities of J/sub C/=21kA/cm/sup 2/ and 2.70/spl times/10/sup -5/ A/cm/sup 2/, respectively. A small collector/emitter offset voltage /spl Delta/V/sub CE/ of 80 meV is also obtained. The studied CEHBT exhibits transistor action under an extremely low collector current density (2.7/spl times/10/sup -5/ A/cm/sup 2/) and useful current gains over nine decades of magnitude of collector current density. In microwave characteristics, the unity current gain cutoff frequency f/sub T/=43.2GHz and the maximum oscillation frequency f/sub max/=35.1GHz are achieved for a 3/spl times/20 /spl mu/m/sup 2/ device. Consequently, the studied device shows promise for low supply voltage and low-power circuit applications.     

Reliability investigation of 0.07-/spl mu/m InGaAs-InAlAs-InP HEMT MMICs with pseudomorphic In/sub 0.75/Ga/sub 0.25/As channel

The authors have investigated the reliability performance of G-band (183 GHz) monolithic microwave integrated circuit (MMIC) amplifiers fabricated using 0.07-/spl mu/m T-gate InGaAs-InAlAs-InP HEMTs with pseudomorphic In/sub 0.75/Ga/sub 0.25/As channel on 3-in wafers. Life test was performed at two temperatures (T/sub 1/ = 200 /spl deg/C and T/sub 2/ = 215 /spl deg/C), and the amplifiers were stressed at V/sub ds/ of 1 V and I/sub ds/ of 250 mA/mm in a N/sub 2/ ambient. The activation energy is as high as 1.7 eV, achieving a projected median-time-to-failure (MTTF) /spl ap/ 2 /spl times/ 10/sup 6/ h at a junction temperature of 125 /spl deg/C. MTTF was determined by 2-temperature constant current stress using /spl Delta/G/sub mp/ = -20% as the failure criteria. The difference of reliability performance between 0.07-/spl mu/m InGaAs-InAlAs-InP HEMT MMICs with pseudomorphic In/sub 0.75/Ga/sub 0.25/As channel and 0.1-/spl mu/m InGaAs-InAlAs-InP HEMT MMICs with In/sub 0.6/Ga/sub 0.4/As channel is also discussed. The achieved high-reliability result demonstrates a robust 0.07-/spl mu/m pseudomorphic InGaAs-InAlAs-InP HEMT MMICs production technology for G-band applications.     

Characteristics of In/sub x/Al/sub 1-x/N-GaN high-electron mobility field-effect transistor

GaN-based field effect transistors commonly include an Al/sub x/Ga/sub 1-x/N barrier layer for confinement of a two-dimensional electron gas (2DEG) in the barrier/GaN interface. Some of the limitations of the Al/sub x/Ga/sub 1-x/N-GaN heterostructure can be, in principle, avoided by the use of In/sub x/Al/sub 1-x/N as an alternative barrier, which adds flexibility to the engineering of the polarization-induced charges by using tensile or compressive strain through varying the value of x. Here, the implementation and electrical characterization of an In/sub x/Al/sub 1-x/-GaN high electron mobility transistor with Indium content ranging from x=0.04 to x=0.15 is described. The measured 2DEG carrier concentration in the In/sub 0.04/Al/sub 0.96/N-GaN heterostructure reach 4/spl times/10/sup 13/ cm/sup -2/ at room temperature, and Hall mobility is 480 and 750 cm/sup 2//V /spl middot/ s at 300 and 10 K, respectively. The increase of Indium content in the barrier results in a shift of the transistor threshold voltage and of the peak transconductance toward positive gate values, as well as a decrease in the drain current. This is consistent with the reduction in polarization difference between GaN and In/sub x/Al/sub 1-x/N. Devices with a gate length of 0.7 /spl mu/m exhibit f/sub t/ and f/sub max/ values of 13 and 11 GHz, respectively.     

Polarisation-insensitive Si/sub 3/N/sub 4/ strip-loaded BaTiO/sub 3/ thin-film waveguide with low propagation losses

A low-loss and polarisation-insensitive singlemode BaTiO/sub 3/ thin-film waveguide is reported. Polarisation-dependent loss as low as 0.1 dB/cm at a wavelength of 1.55 /spl mu/m has been achieved by a novel Si/sub 3/N/sub 4/ strip-loaded BaTiO/sub 3/ waveguide structure. Propagation loss of less than 0.9 dB/cm for both TE and TM polarisations was measured     

Ultrafast all-optical switching in GaAlAs integrated interferometer in 1.55 mu m spectral region

The first observation is reported of ultrafast all-optical switching in an integrated asymmetric Mach-Zehnder interferometer, using the nonresonant nonlinearity in Ga/sub 0.82/Al/sub 0.18/As below half the bandgap. A relative switching fraction of more than 80% has been achieved using 330 fs pulses at around 1.55 mu m from a coupled-cavity mode-locked colour centre laser.<>     

A 1 cm/spl times/1 cm In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 1 cm/spl times/1 cm array of 100 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiodes (APD). The average breakdown voltage was 28.7 V with a standard deviation of less than 0.5 V. The distribution of breakdown voltage across the area followed a radial pattern consistent with a slight epitaxial growth nonuniformity. The mean dark current at a gain of 10, or 6.1 A/W, was 10.3 nA, and none of the 100 APDs had a dark current of more than 25 nA. The bandwidth at a gain of 10 was 6.2 GHz, and the maximum gain-bandwidth product was 140 GHz. This technology is ideally suited for next-generation three-dimensional imaging applications.     

Metal-semiconductor-metal photodetector on p-type In/sub 0.53/Ga/sub 0.47/As

An MSM Schottky barrier photodetector based on p-type In/sub 0.53/Ga/sub 0.47/As suitable for detection in the 0.8-1.7 wavelength range is reported. Aluminium metallisation was used. The large area devices exhibited responsivity of about 0.4 A/W at 1.3 mu m and tau /sub on/>     

Ge/SiO/sub 2/ laminated optical polarizer for the wavelength region 0.6-1 mu m

A report is presented on laminated polarizers (LAMIPOLs) suitable for short wavelengths of light ( lambda <1 mu m). This new device consists of periodic alternative layers of ultrathin Ge (e.g., <8 nm thick) and SiO/sub 2/ (e.g., <1 mu m thick). The quality factor of the new laminated polarizer, defined by R= alpha /sub TE// alpha /sub TM/, is in excess of 200 at lambda =0.8 mu m and is a decreasing function of the wavelength lambda . This is in remarkable contrast to the fact that the quality factor for an Al/SiO/sub 2/ LAMIPOL is an increasing function of lambda .<>     

High-responsivity high-gain In/sub 0.53/Ga/sub 0.47/As-InP quantum-well infrared photodetectors grown using metal-organic vapor phase epitaxy

We report the growth and fabrication of bound-to-bound In/sub 0.53/Ga/sub 0.47/As-InP quantum-well infrared photodetectors using metal-organic vapor phase epitaxy. These detectors have a peak detection wavelength of 8.5 /spl mu/m. The peak responsivities are extremely large with R/sub pk/=6.9 A/W at bias voltage V/sub b/=3.4 V and temperature T=10 K. These large responsivities arise from large detector gain that was found to be g/sub n/=82 at V/sub b/=3.8 V from dark current noise measurements at T=77 K and g/sub p/=18.4 at V/sub b/=3.4 V from photoresponse data at T=10 K. The background-limited temperature with F/1.2 optics is T/sub BLIP/=65 K for 0相似文献