硬X射线聚焦波带片的设计及制作

针对惯性约束性聚变(ICF)实验中高分辨靶源辐射成像的需要,对结合电子束光刻和X射线光刻制作大高宽比菲涅尔波带片的制作工艺进行了研究。首先采用带有自支撑薄膜的衬底进行电子束光刻和微电镀技术来制作X射线光刻掩膜,以此来降低电子束光刻过程中的背散射,然后采用多次X射线曝光和全水电镀的方法来增强大高宽比图形的抗倒性,从而完成了大高宽比波带片结构的制作。对所制作的自支撑波带片最外环宽度为350 nm,厚度为3.5μm,高宽比达到10,侧壁陡直且具有优良的结构质量,可用于10 keV~30 keV波段的硬X射线成像。     

带支撑结构的大高宽比硬X射线波带片制作

对利用X射线光刻制作大高宽比硬X射线波带片的设计和制作工艺进行了研究.采用电子束光刻制作X射线光刻掩模,并利用X射线光刻制作最终的硬X射线波带片.采用对光刻胶结构加入支撑点的方法,大大提高了X射线光刻制作硬X射线波带片的高宽比.对所加入支撑点的布置策略进行了优化,使得支撑点所占的面积比例减小.所制作的波带片最外环宽度为200 nm,厚度为2.8μm,具有优良的结构质量,预期可用于10 keV到25 keV波段,并具有优于250 nm的成像分辨率.     

下一代光刻技术展望

介绍了下一代光刻技术的技术要点,国外研究概况和进展。重点讨论了极紫外（软Ｘ射线）光刻、电子束光刻和离子束光刻技术的进展,提出了我国开展下一代光刻技术研究的技术路线。     

迈向21世纪的光刻技术

介绍了紫外光刻技术,电子束光刻技术,Ｘ射线光刻技术以及与这些技术相关的一些单元技术的最新进展,概要介绍了这些技术最热门的研究课题,阐述了这些技术的发展前景。     

0.1-0.3μmX射线光刻技术在GaAs器件制作中的应用

对同步辐射Ｘ射线光刻及在ＧａＡｓ ＰＨＥＭＴ器件制作中的应用进行了研究,并制作出栅长０．１５μｍ的ＡｌＧａＡｓ／ＩｎＧａＡｓ／ＧａＡｓ ＰＨＥＭＴ晶体管。研究结果表明,Ｘ射线光刻在肃离图形册结构制作工艺中具有极好的光刻图形质量,在混合光刻工艺中,抑止ＧａＡｓ合金点的形成是取得良好的对准标记的关键。     

X射线镂空硅掩模在同步辐射X射线深层光刻中的应用

阐述了X射线镂空硅掩模的研制及其在同步辐射深层光刻中的应用。在北京同步辐射国家实验室X射线光刻装置上，采用本文研制的X射线镂空硅掩模获得胶厚为30～40μm、侧壁很陡、边缘很直的X射线深层光刻胶图形。     

深紫外和X射线光刻技术

阐述了深紫外光刻技术和Ｘ射线光刻技术的发展，一些相关单元技术，以及深紫外和Ｘ射线光刻技术的前景。     

高能 X 射线工业 CT 技术的研究进展

目的 研究分析了国内外高能X射线工业CT技术的进展情况，方法 通过有关文献资料，对目前国际上主要的高能X射线工业CT技术及设备进行评述。结果和结论 对美国、德国等发达国家的高能X射线工业CT设备、线阵探测器、面陈探测器及重建算法进行了分析。     

采用激光和波带板的电视对准光学系统工程研究

本文从X射线光刻自动对准特点出发,探讨采用圆形菲涅尔波带片做为标记,以激光做相干光源的电视对准原理。重点讨论其中光学系统工程问题,如总体考虑、精度分析、能量计算和均化、激光偏振态的传输和控制、激光背景噪音的抑制等。     

X射线镂空硅掩模在同步辐射X射线深层光刻中的应用

阐述了Ｘ射线镂空硅掩模的研制及其在同步辐射深层光刻中的应用。在北京同步辐射国家实验室Ｘ射线光刻装置上，采用本文研制的Ｘ射线镂空硅掩模获得胶厚为３０－４０μｍ、侧壁很陡、边缘很直的Ｘ射线深层光刻胶图形。     

Analysis of Carbon Materials by X‐ray Photoelectron Spectroscopy and X‐ray Absorption Spectroscopy

Since hard coating such as ta:C films are of growing interest for protecting surfaces of industrial machines and high capacity tools against wear and friction or for biomedical applications, more information about the structure‐to‐property relation is required. Therefore, core level X‐ray photoelectron sprectroscopy and X‐ray absorption spectroscopy and spectromicroscopy are used to derive chemical information about selected carbon species.     

热老化聚丙烯薄膜宏观力学性能及微观结构的研究

通过对热老化处理的聚内稀薄膜进行X射线衍射实验.对测得的实验数据采用X射线衍射线形分析理论处理,同时对热老化聚丙烯薄膜进行拉仲形变测量,得到材料的力学性质和微晶尺寸及内部点阵畸变的变化规律.从而将热老化聚丙烯材料宏观性质变化与微观结构联系起来,找出材料聚集态精细结构随老化时问而改变的微观规律.     

Silver Iodide Formation in Methyl Ammonium Lead Iodide Perovskite Solar Cells with Silver Top Electrodes

Silver is a low‐cost candidate electrode material for perovskite solar cells. However, in such cells the silver electrodes turn yellow within days of device fabrication. The color change is also accompanied by a dramatic decrease in the power conversion efficiency when compared to otherwise identical devices using gold electrodes. Here, it is shown that the color change results from silver oxidation to silver iodide, due to a reaction with iodine in methyl ammonium lead perovskite. The change in X‐ray diffraction and X‐ray photo­electron spectroscopy is discussed. Exposure to air accelerates corrosion of the Ag electrodes when compared to dry nitrogen gas exposure. However, iodine not reacted with silver is observed by X‐ray photoelectron spectroscopy even for the perovskite solar cell kept in dry nitrogen gas. It is proposed that silver iodide is formed when methyl ammonium iodide migration is facilitated by the small pinholes in the hole transport layer spiro‐MeOTAD.     

应用感蓝增感染料以降低X线胶片的银耗

研制Ｘ线胶片，降银是焦点，应用感蓝增感染料是有效手段．合成并试验了零甲川丹宁份菁染料，在保持现有产品照相性能条件下，涂银量可从６．５ｇ／ｍ２降低到５．５ｇ／ｍ２．     

A Living‐Dead Magnetic Layer at the Surface of Ferrimagnetic DyTiO3 Thin Films

When ferromagnetic films become ultrathin, key properties such as the Curie temperature and the saturation magnetization are usually depressed. This effect is thoroughly investigated in magnetic oxides such as half‐metallic manganites, but much less in ferrimagnetic insulating perovskites such as rare‐earth titanates RTiO₃, despite their appeal to design correlated 2D electron gases. Here, the magnetic properties of epitaxial DyTiO₃ thin films are reported. While films thicker than about 50 nm show a bulk‐like response, at low thickness a surprising increase of the saturation magnetization is observed. This behavior is described using a classical model of a “dead layer” but assuming that this layer is actually “living,” that is, it responds to the magnetic field with a strong paramagnetic susceptibility. Through depth‐dependent X‐ray absorption and photoemission spectroscopy, it is shown that the “living‐dead layer” corresponds to surface regions where magnetic (S = 1/2) Ti³⁺ ions are replaced by nonmagnetic Ti⁴⁺ ions. Hysteresis cycles at the Dy M₅ and Ti L₃ edges indicate that the surface Ti⁴⁺ ions decouple the Dy³⁺ ions, thus unleashing their strong paramagnetic response. Finally, it is shown how capping the DyTiO₃ film can help increase the Ti³⁺ content near the surface and thus recover a better ferrimagnetic behavior.     

The effect of thermal oxidation on the luminescence properties of nanostructured silicon

Herein is reported a detailed study of the luminescence properties of nanostructured Si using X-ray excited optical luminescence (XEOL) in combination with X-ray absorption near-edge structures (XANES). P-type Si nanowires synthesized via electroless chemical etching from Si wafers of different doping levels and porous Si synthesized using electrochemical method are examined under X-ray excitation across the Si K-, L(3,2) -, and O K-edges. It is found that while as-prepared Si nanostructures are weak light emitters, intense visible luminescence is observed from thermally oxidized Si nanowires and porous Si. The luminescence mechanism of Si upon oxidation is investigated by oxidizing nanostructured Si at different temperatures. Interestingly, the two luminescence bands observed show different response with the variation of absorption coefficient upon Si and O core-electron excitation in elemental silicon and silicon oxide. A correlation between luminescence properties and electronic structures is thus established. The implications of the finding are discussed in terms of the behavior of the oxygen deficient center (OCD) and non-bridging oxygen hole center (NBOHC).     

Si片上PbTiO3薄膜的XPS研究

用溶胶 凝胶方法在Si上成功地制备了钙钛矿型的PbTiO3薄膜。X射线衍射结果显示 ,在热处理温度为 750～ 90 0℃范围内 ,随温度升高 ,薄膜由多晶结构转变为定向结晶。X射线光电子能谱分析发现 ,薄膜表面存在SiO2 薄层 ,其厚度大约为 0 6nm ,该薄层是在制膜过程中衬底Si通过PbTiO3薄膜扩散到表面与大气中的O2 反应而形成的。在 750℃热处理的薄膜 ,膜层中不含SiO2 ,但温度升高 ,膜层中存在SiO2 成分 ,这可能是Si在向表面扩散过程中与膜中的O反应生成的。表面SiO2 可通过Ar离子的轻微溅射而消除 ,而膜内SiO2 成分只能通过调节工艺参数来消除     

Anatomy of Skyrmionic Textures in Magnetic Multilayers

Room temperature magnetic skyrmions in magnetic multilayers are considered as information carriers for future spintronic applications. Currently, a detailed understanding of the skyrmion stabilization mechanisms is still lacking in these systems. To gain more insight, it is first and foremost essential to determine the full real‐space spin configuration. Here, two advanced X‐ray techniques are applied, based on magnetic circular dichroism, to investigate the spin textures of skyrmions in [Ta/CoFeB/MgO]_n multilayers. First, by using ptychography, a high‐resolution diffraction imaging technique, the 2D out‐of‐plane spin profile of skyrmions with a spatial resolution of 10 nm is determined. Second, by performing circular dichroism in resonant elastic X‐ray scattering, it is demonstrated that the chirality of the magnetic structure undergoes a depth‐dependent evolution. This suggests that the skyrmion structure is a complex 3D structure rather than an identical planar texture throughout the layer stack. The analyses of the spin textures confirm the theoretical predictions that the dipole–dipole interactions together with the external magnetic field play an important role in stabilizing sub‐100 nm diameter skyrmions and the hybrid structure of the skyrmion domain wall. This combined X‐ray‐based approach opens the door for in‐depth studies of magnetic skyrmion systems, which allows for precise engineering of optimized skyrmion heterostructures.     

3D Nanoprinted Plastic Kinoform X‐Ray Optics

High‐performance focusing of X‐rays requires the realization of very challenging 3D geometries with nanoscale features, sub‐millimeter‐scale apertures, and high aspect ratios. A particularly difficult structure is the profile of an ideal zone plate called a kinoform, which is manufactured in nonideal approximated patterns, nonetheless requires complicated multistep fabrication processes. Here, 3D fabrication of high‐performance kinoforms with unprecedented aspect ratios out of low‐loss plastics using femtosecond two‐photon 3D nanoprinting is presented. A thorough characterization of the 3D‐printed kinoforms using direct soft X‐ray imaging and ptychography demonstrates superior performance with an efficiency reaching up to 20%. An extended concept is proposed for on‐chip integration of various X‐ray optics toward high‐fidelity control of X‐ray wavefronts and ultimate efficiencies even for harder X‐rays. Initial results establish new, advanced focusing optics for both synchrotron and laboratory sources for a large variety of X‐ray techniques and applications ranging from materials science to medicine.