3D and 2D structural characterization of 1D Al/Al2O3 biphasic nanostructures

1D Al/Al₂O₃ nanostructures have been synthesized by chemical vapour deposition (CVD) of the molecular precursor [^tBuOAlH₂]₂. The deposited nanostructures grow chaotically on the substrate forming a layer with a high porosity (80%). Depending on the deposition time, diverse nanostructured surfaces with different distribution densities were achieved. A three‐dimensional (3D) reconstruction has been evaluated for every nanostructure density using the Focus Ion Beam (FIB) tomography technique and reconstruction software tools. Several structural parameters such as porosity, Euler number, geometrical tortuosity and aspect ratio have been quantified through the analysis with specified software of the reconstructions. Additionally roughness of the prepared surfaces has been characterized at micro‐ and nanoscale using profilometry and AFM techniques, respectively. While high aspects ratio around 20–30 indicates a strong anisotropy in the structure, high porosity values (around 80%) is observed as a consequence of highly tangled geometry of such 1D nanostructures.     

Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography

Three‐dimensional (3D) data represent the basis for reliable quantification of complex microstructures. Therefore, the development of high‐resolution tomography techniques is of major importance for many materials science disciplines. In this paper, we present a novel serial sectioning procedure for 3D analysis using a dual‐beam FIB (focused ion beam). A very narrow and reproducible spacing between the individual imaging planes is achieved by using drift correction algorithms in the automated slicing procedure. The spacing between the planes is nearly of the same magnitude as the pixel resolution on scanning electron microscopy images. Consequently, the acquired stack of images can be transformed directly into a 3D data volume with a voxel resolution of 6 × 7 × 17 nm. To demonstrate the capabilities of FIB nanotomography, a BaTiO₃ ceramic with a high volume fraction of fine porosity was investigated using the method as a basis for computational microstructure analysis and the results compared with conventional physical measurements. Significant differences between the particle size distributions as measured by nanotomography and laser granulometry indicate that the latter analysis is skewed by particle agglomeration/aggregation in the raw powder and by uncertainties related to calculation assumptions. Significant differences are also observed between the results from mercury intrusion porosimetry (MIP) and 3D pore space analysis. There is strong evidence that the ink‐bottle effect leads to an overestimation of the frequency of small pores in MIP. FIB nanotomography thus reveals quantitative information of structural features smaller than 100 nm in size which cannot be acquired easily by other methods.     

Thermal stability of Ti and Pt nanowires manufactured by Ga+ focused ion beam

Ti and Pt nanowires have been produced by ultra high‐vacuum molecular beam epitaxy deposition of Ti thin films and focused ion beam (FIB) deposition of Pt thin films, followed by cross‐sectional FIB sputtering to form electron‐transparent nanowires. The thermal stability of the nanowires has been investigated by in situ thermal cycling in a transmission electron microscope. Epitaxial single crystal Ti nanowires on (0001)Al₂O₃ substrates are microstructurally stable up to 550–600 °C, above which limited dislocation motion is activated shortly before the Ti‐wires oxidize. The amorphous FIB‐deposited Pt wires are stable up to 580–650 °C where partial crystallization is observed in vacuum. Faceted nanoparticles grow on the wire surface, growing into free space by surface diffusion and minimizing contact area with the underlying wire. The particles are face‐centred cubic (fcc) Pt with some dissolved Ga. Continued heating results in particle spheroidization, coalescence and growth, retaining the fcc structure.     

The Effect of Steel Hardness on the Performance of ZDDP Antiwear Films: A Multi-Technique Approach

X-ray absorption near-edge structure (XANES) analysis has been used to characterize the chemistry of antiwear films formed in a mineral base oil containing a zinc dialkyl dithiophosphate (ZDDP) additive. These films were formed by rubbing the AISI 1095 steel samples under a reciprocating boundary contact. The steel samples were tempered to produce different Vickers hardness values. The phosphorus L-edge XANES spectra show that these films differ slightly in their chemical nature, with longer chain polyphosphates being formed on samples with higher hardness value. The surface morphology of the films was investigated using Atomic force microscopy (AFM) and the film thickness was probed by Focussed ion beam and Scanning electron microscopy (FIB/SEM) techniques. Furthermore, the nanomechanical properties of these antiwear films were investigated by nanoindentation methods. Tribological measurements of the coefficient of friction (μ) and wear scar width (WSW) indicate that the poorest antiwear film was formed on the softest substrate, which exhibited the largest WSW and the highest average μ. FIB/SEM images show that the thicknesses of the antiwear pads and the degree of damage on the substrates both change with the hardness value of the samples.     

Focused ion beam scanning electron microscopy in biology

Since the end of the last millennium, the focused ion beam scanning electron microscopy (FIB‐SEM) has progressively found use in biological research. This instrument is a scanning electron microscope (SEM) with an attached gallium ion column and the 2 beams, electrons and ions (FIB) are focused on one coincident point. The main application is the acquisition of three‐dimensional data, FIB‐SEM tomography. With the ion beam, some nanometres of the surface are removed and the remaining block‐face is imaged with the electron beam in a repetitive manner. The instrument can also be used to cut open biological structures to get access to internal structures or to prepare thin lamella for imaging by (cryo‐) transmission electron microscopy. Here, we will present an overview of the development of FIB‐SEM and discuss a few points about sample preparation and imaging.     

Evolution of residual stress and crack morphologies during 3D FIB tomographic analysis of alumina

Three‐dimensional focused ion beam (FIB) tomography is increasingly being used for 3D characterization of microstructures in the 50 nm–20 μm range. FIB tomography is a destructive, invasive process, and microstructural changes may potentially occur during the analysis process. Here residual stress and crack morphologies in single‐crystal sapphire samples have been concurrently analyzed using Cr³⁺ fluorescence spectroscopy and FIB tomography. Specifically, maps of surface residual stress have been obtained from optically polished single‐crystal alumina [surface orientation (1 ī 0 2)], from FIB milled surface trenches, from Vickers micro‐indentation sites (loads 50 g–300 g), and from Vickers micro‐indentation sites during FIB serial sectioning. The residual stress maps clearly show that FIB sputtering generates residual stress changes. For the case of the Vickers micro‐indentations, FIB sputtering causes significant changes in residual stress during the FIB tomographic serial sectioning. 3D reconstruction of the crack distribution around micro‐indentation sites shows that the cracks observed are influenced by the location of the FIB milled surface trenches due to localized stress changes.     

Surface damage induced by FIB milling and imaging of biological samples is controllable

Focused ion beam (FIB) techniques are among the most important tools for the nanostructuring of surfaces. We used the FIB/SEM (scanning electron microscope) for milling and imaging of digestive gland cells. The aim of our study was to document the interactions of FIB with the surface of the biological sample during FIB investigation, to identify the classes of artifacts, and to test procedures that could induce the quality of FIB milled sections by reducing the artifacts. The digestive gland cells were prepared for conventional SEM. During FIB/SEM operation we induced and enhanced artifacts. The results show that FIB operation on biological tissue affected the area of the sample where ion beam was rastering. We describe the FIB-induced surface major artifacts as a melting-like effect, sweating-like effect, morphological deformations, and gallium (Ga(+)) implantation. The FIB induced surface artifacts caused by incident Ga(+) ions were reduced by the application of a protective platinum strip on the surface exposed to the beam and by a suitable selection of operation protocol. We recommend the same sample preparation methods, FIB protocol for milling and imaging to be used also for other biological samples.     

Sub-micrometer scale patterning on single-crystal diamond surface using focused ion beam and deep ultraviolet laser irradiations

In this study, a novel method is proposed for patterning the surface of a single-crystal diamond in the sub-micrometer scale using a combination of focused ion beam (FIB) and deep ultraviolet (DUV) laser irradiations. The surface area of the diamond irradiated by the FIB was selectively machined using a low-power DUV laser, whereas the non-FIB-irradiated area was hardly machined. Hence, diamonds can be patterned at the sub-micrometer scale by selectively machining the FIB-irradiated area using lasers. To investigate the machining characteristics in this process, the effects of the FIB and DUV laser-irradiation parameters were investigated. Consequently, the shape of the DUV-irradiated area was improved by applying the gallium removal step; debris was not formed. In addition, a structure with a maximum depth of approximately 80 nm was fabricated. The damage density induced by the FIB irradiation was employed to determine the depth induced by the FIB; the depth obtained using this method is more than twice that of the heating technique in air. A concave structure was fabricated based on these results. The results indicate that the proposed method is effective for fabricating sub-micrometer-scale structures on diamond surfaces.     

Dopant profiling of focused ion beam milled semiconductors using off-axis electron holography; reducing artifacts,extending detection limits and reducing the effects of gallium implantation

Focused ion beam (FIB) milling is one of the few specimen preparation techniques that can be used to prepare parallel-sided specimens with nm-scale site specificity for examination using off-axis electron holography in the transmission electron microscope (TEM). However, FIB milling results in the implantation of Ga, the formation of amorphous surface layers and the introduction of defects deep into the specimens. Here we show that these effects can be reduced by lowering the operating voltage of the FIB and by annealing the specimens at low temperature. We also show that the electrically inactive thickness is dependent on both the operating voltage and type of ion used during FIB milling.     

Imaging of soft and hard materials using a Boersch phase plate in a transmission electron microscope

Using two levels of electron beam lithography, vapor phase deposition techniques, and FIB etching, we have fabricated an electrostatic Boersch phase plate for contrast enhancement of weak phase objects in a transmission electron microscope. The phase plate has suitable dimensions for the imaging of small biological samples without compromising the high-resolution capabilities of the microscope. A micro-structured electrode allows for phase tuning of the unscattered electron beam, which enables the recording of contrast enhanced in-focus images and in-line holograms. We have demonstrated experimentally that our phase plate improves the contrast of carbon nanotubes while maintaining high-resolution imaging performance, which is demonstrated for the case of an AlGaAs heterostructure. The development opens a new way to study interfaces between soft and hard materials.     

Surface damage formation during ion-beam thinning of samples for transmission electron microscopy

All techniques employed in the preparation of samples for transmission electron microscopy (TEM) introduce or include artifacts that can degrade the images of the materials being studied. One significant cause of this image degradation is surface amorphization. The damaged top and bottom surface layers of TEM samples can obscure subtle detail, particularly at high magnification. Of the techniques typically used for TEM sample preparation of semiconducting materials, cleaving produces samples with the least surface amorphization, followed by low-angle ion milling, conventional ion milling, and focused ion beam (FIB) preparation. In this work, we present direct measurements of surface damage on silicon produced during TEM sample preparation utilizing these techniques. The thinnest damaged layer formed on a silicon surface was measured as 1.5 nm thick, while an optimized FIB sample preparation process results in the formation of a 22 nm thick damaged layer. Lattice images are obtainable from all samples.     

Effect of temperature on friction and oscillating sliding wear of dense and porous 3Y-TZP zirconia ceramics

Microstructures of 3 mol% Y₂O₃-ZrO₂ (3Y-TZP) with systematically varying porosity up to about 15% were produced by sintering. Hardness and fracture toughness of the ceramics as well as the amount of tetragonal, cubic and monoclinic phase were measured. Wear tests were carried out on the different self-mated microstructures under dry reciprocating sliding contact using ring-on-block geometries in air at five different contact temperatures up to 500°C. The microstructures and worn surfaces were extensively analysed using scanning electron microscopy (SEM) and X-ray diffraction techniques. The experimental results revealed a reduction of the amount of wear (independent of porosity) by more than one order of magnitude compared with room temperature if the test temperature was increased to 250°C. Between room temperature and 250°C, wear increased with increasing porosity while at 500°C the highest wear was measured on the dense structure. Microscopic observations showed that plastic deformation, surface layers consisting of compacted wear debris and also intercrystalline, transcrystalline or delamination type fracture influenced friction and wear.     

Deposition and focused ion beam milling of anticorrosive CrC coatings on tool steel substrates

For micro replication, the base of a die should be ductile and the surface layer that will undergo processing should have a good machining response to various tool-making processes. At the same time, the resulting working surfaces of the tooling cavities should be hard; having low roughness, low wettability and high erosion resistance. To achieve such diverse properties, nano-crystalline CrC coatings deposited onto 12% Cr tool steel were investigated in this research. To verify the properties of such coatings various metallographic techniques were applied. In particular, the corrosion resistance was studied by means of potentiodynamic anodic polarisation. A scanning transmission electron microscopy analysis of the structure was performed on samples prepared with focused ion beam (FIB) machining. The mechanical properties and grain size distribution were determined and statistically analysed. In addition, X-ray diffraction, scanning electron microscopy and atomic force microscopy were used in studying the surface properties of these coatings. To investigate the response of the CrC coatings to micro- and nano-structuring technologies with high specific energy, a series of rectangular trenches were produced by FIB milling. The effects of the ion beam current, exposure time and ion fluence on the sputtering yield and roughness of the produced micro-structures were especially investigated. Some essential parameter windows for performing FIB milling with relatively high sputtering rates, higher than 1?µm/min, and at the same time achieving the best possible surface integrity were determined during the experiments.     

In Situ Mechanical and Electrical Characterization of Individual TiO(2) Nanofibers Using a Nanomanipulator System

Young's modulus and electrical resistivity of individual titanium dioxide (TiO₂) nanofibers were characterized using a nanomanipulator system installed in a focused ion beam‐scanning electron microscope (FIB‐SEM) dual‐beam Scanning Electron Microscope system. Young's modulus of individual nanofibers was deduced from the analysis of their in situ resonance behavior in response to an oscillating electric field. The electrical behavior of a single nanofiber was also analyzed by a two‐point method probed by a nanomanipulator. These results will contribute to the design of devices based on single TiO₂ nanofibers, as well as devices based on nanofiber networks. The methods presented here can also be applied to characterize other one‐dimensional nanostructures. SCANNING 34: 341–346, 2012. © 2012 Wiley Periodicals, Inc.     

Microstructural characterization of laser surface melted AISI M2 tool steel

We describe the microstructure of Nd:YAG continuous wave laser surface melted high‐speed steel, namely AISI M2, treated with different laser scanning speeds and beam diameters on its surface. Microstructural characterization of the remelted surface layer was performed using light optical and scanning electron microscopy and X‐ray diffraction. The combination of the three techniques provided new insights into the substantial changes induced by laser surface melting of the steel surface layer. The advantage of the method is that it avoids the difficult and tedious work of preparing samples of this hard material for transmission electron microscopy, which is the technique normally used to study these fine microstructures. A melted zone with a dendritic structure and a partially melted zone with a heterogeneous cellular structure were observed. M₂C carbides with different morphologies were identified in the resolidified surface layer after laser melting.     

TEM sample preparation by FIB for carbon nanotube interconnects

A powerful method to study carbon nanotubes (CNTs) grown in patterned substrates for potential interconnects applications is transmission electron microscopy (TEM). However, high-quality TEM samples are necessary for such a study. Here, TEM specimen preparation by focused ion beam (FIB) has been used to obtain lamellae of patterned samples containing CNTs grown inside contact holes. A dual-cap Pt protection layer and an extensive 5 kV cleaning procedure are applied in order to preserve the CNTs and avoid deterioration during milling. TEM results show that the inner shell structure of the carbon nanotubes has been preserved, which proves that focused ion beam is a useful technique to prepare TEM samples of CNT interconnects.     

Electron and ion imaging of gland cells using the FIB/SEM system

The FIB/SEM system was satisfactorily used for scanning ion (SIM) and scanning electron microscopy (SEM) of gland epithelial cells of a terrestrial isopod Porcellio scaber (Isopoda, Crustacea). The interior of cells was exposed by site-specific in situ focused ion beam (FIB) milling. Scanning ion (SI) imaging was an adequate substitution for scanning electron (SE) imaging when charging rendered SE imaging impossible. No significant differences in resolution between the SI and SE images were observed. The contrast on both the SI and SE images is a topographic. The consequences of SI imaging are, among others, introduction of Ga⁺ ions on/into the samples and destruction of the imaged surface. These two characteristics of SI imaging can be used advantageously. Introduction of Ga⁺ ions onto the specimen neutralizes the charge effect in the subsequent SE imaging. In addition, the destructive nature of SI imaging can be used as a tool for the gradual removal of the exposed layer of the imaged surface, uncovering the structures lying beneath. Alternative SEM and SIM in combination with site-specific in situ FIB sample sectioning made it possible to image the submicrometre structures of gland epithelium cells with reproducibility, repeatability and in the same range of magnifications as in transmission electron microscopy (TEM). At the present state of technology, ultrastructural elements imaged by the FIB/SEM system cannot be directly identified by comparison with TEM images.     

Analysis of FIB‐induced damage by electron channelling contrast imaging in the SEM

We have investigated the Ga⁺ ion‐damage effect induced by focused ion beam (FIB) milling in a [001] single crystal of a 316 L stainless steel by the electron channelling contrast imaging (ECCI) technique. The influence of FIB milling on the characteristic electron channelling contrast of surface dislocations was analysed. The ECCI approach provides sound estimation of the damage depth produced by FIB milling. For comparison purposes, we have also studied the same milled surface by a conventional electron backscatter diffraction (EBSD) approach. We observe that the ECCI approach provides further insight into the Ga⁺ ion‐damage phenomenon than the EBSD technique by direct imaging of FIB artefacts in the scanning electron microscope. We envisage that the ECCI technique may be a convenient tool to optimize the FIB milling settings in applications where the surface crystal defect content is relevant.     

Investigation of Tibetian Plateau varnish: new findings at the nanoscale using focused ion beam and transmission electron microscopy techniques

Dual-beam focused ion beam microscopy (FIB/SEM) preparation of rock varnish for high-resolution transmission electron microscopy (HR-TEM) has enabled us to characterize unreported nanostructures. Fossils, unreported textures, and compositional variability were observed at the nanoscale. These techniques could provide a method for studying ancient terrestrial and extra-terrestrial environments to better understand geological processes at the nanoscale.