卷绕式海绵材料真空磁控溅射镀膜设备的研制

本文介绍了海绵卷绕真空磁控溅射镀膜设备的结构及其特点，采用独特的传动机构，靶极结构及控制方式实现了海绵连续卷绕真空磁控溅射镀膜。     

卷绕镀膜工艺研讨会通知

应部分单位要求,机械电子工业部沈阳真空技术研究所、中国真空学会获得专业委员会及《真空》编辑部共同发起召开卷绕镀膜(如镀遮阳膜,彩虹膜、镀铝纸、包装膜、电容器膜、装饰膜……)工艺研讨会,邀请有关专家和卷绕镀膜设备生产厂解答当前在卷绕镀膜生产中存在的问题,并进行技术交流。 请有关单位特别是卷绕镀膜设备生产厂及用户大力支持,踊跃参加,团结一致。华夏赤子安能拱手相让国外设备及产品占领我国市场。《真空》编辑部愿为马前卒,参与筹备全国大型的卷绕镀膜工艺研讨会,首先编集出荟萃国内外近十年来卷绕镀膜技术新进展的论文集 (《…     

多室镀膜机的结构特点与工业应用

首先介绍镀膜技术的分类、软硬衬底涂层设备的结构特点及多室系统、现代卷绕镀膜机单室、双室及三室的真空设计,其次介绍直线式与集束式多室镀膜机的结构特点,最后叙述大型真空镀膜设备工业应用及进展情况。(1 Torr=133 Pa)     

大型宽幅高真空连续卷绕镀膜设备的研制

本文详细介绍了ZZL-2200/2.5大型高真空连续卷绕镀膜设备的工作原理、结构组成、性能特点和创新设计要点及推广应用前景.分析并指出影响镀膜质量、生产效益的主要因素和解决途径.重点论述了双冷却镀膜辊悬空平展镀膜技术的技术原理和结构特性,及其在解决CPP流延塑料薄膜基材表面镀制铝膜时出现亮暗条纹线难题中的显著效果.并提出独特的蒸发机构冷却和自流式蒸发舟没置的特殊设计对提高大型宽幅高真空连续卷绕镀膜设备生产效率的重要性.     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空     

《真空镀膜技术》和《真空镀膜设备》出版发行

<正>由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空     

《真空镀膜技术》和《真空镀膜设备》出版发行

正由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃     

《真空镀膜技术》和《真空镀膜设备》出版发行

正由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析     

海绵卷绕真空磁控溅射镀膜过程中的传动控制

根据磁控溅射中海绵的传动特性，建立了传动控制的数学模型，采用带有矢量的变频调速器实现了海绵卷绕真空镀膜过程中的张力控制，满足了磁控溅射中海绵卷绕的传动要求。     

Herstellung funktionaler organischer Dünnschichten durch Vakuumverdampfung

Depositing of functional organic thin films by vacuum evaporation Material evaporation under high or ultra‐high vacuum conditions has been a well known method of thin film coating since nearly a hundred years. Since discovery of semiconducting organics in the 1970s and 1980s, this technology has been increasingly applied to deposit organic molecular compounds. At the moment especially materials for organic LEDs (OLEDs) and for thin‐film solar cells are in the focus of interest. While organics evaporation makes use of advantages of high‐vacuum coating (purity, compatible processing, masking etc.) there are also dedicated demands on process control coming up. The article describes basic requirements, capabilities of present temperature‐controlled evaporation sources, material‐related features, as well as typical applications.     

Adsorption and desorption properties on the fluorine-doped tin oxide film surface on a glass substrate under UV light irradiation in vacuum

Various functional metal-oxide coatings on glass substrate have the possibility to be used for many applications in these days. For keeping the high performance of these applications, it is very important to understand the adsorption property on those coating surfaces. However, there are few reports about such properties of metal-oxide film surface in vacuum state, especially the carbon adsorption property on fluorine-doped tin oxide (SnO₂:F) film in vacuum.In this study, we have investigated the chemical state on SnO₂:F film in vacuum with XPS analysis. From the results of the SnO₂:F film surface analysis, the adsorbed carbon (C1s orbit) on the SnO₂:F film surface and the adsorbed carbon dependence of heat treatment in vacuum were observed. Also, it was found that the adsorbed carbon distribution on the SnO₂:F film existed after the heat treatment at low temperature in vacuum, uniformly spread in large area with UV light irradiation. Besides, the influence of UV light irradiation with respect to the carbon contents in the SnO₂:F film was observed by SIMS analysis. As the result, it was implied that the carbon state in the SnO₂:F film remained unchanged under UV light irradiation and the carbon adsorption and desorption occurred only on the surface of the SnO₂:F film.     

立式双开门汽车灯具高真空镀膜设备的研制

阐述了一种立式双开门汽车灯具高真空镀膜机的系统原理及结构特点,重点介绍了离子轰击、清洗系统在该设备中的应用,并对最终产品进行了测试和分析。测试表明:灯具反射镜在波长390～770 nm段的反射率高达92%,达到并超过国家标准80%的要求;灯具反射镜劣化试验显示:保护膜对镀铝膜的保护效果良好,样品在30min内无腐蚀现象;胶带附着力及百格试验测试没有观察到膜层脱落现象。     

一种新型的幅宽1500 mm的卷绕式真空镀膜机

幅宽1500mm卷绕式真空镀膜机，是为了满足1500mm幅宽的聚脂薄膜（PET）、定向聚丙烯薄膜（OPP）、聚丙烯流涎薄膜（CPP）、聚乙烯薄膜（PVC）的真空镀铝而设计的。和通常的卷绕式真空镀膜机相比，具有真空度高，抽真空的时间短，卷取性能好，镀膜幅度宽，镀膜速度快。跑偏量小，镀膜层牢固、均匀等优点。是一种理想的卷绕式真空镀膜机。     

Beschichten transparenter Kunststoffe mit Kratzschutz und AR in einer kombinierten InLine‐Anlage

For the last decades, both the ophthalmic and the precision optics industries have been relying on vacuum evaporation on the production floor. This particular thin film process is not very suitable for mass production. A major problem in mass production of high quality consumer products is the lack of automatic operation in single chamber evaporation coaters. This article describes a new coating process for lenses which uses both PECVD and sputtering technologies. A new InLine machine equipped with these technologies is presented. This machine meets all requirements with respect to process stability and automation for the respective industry. With its modular design concept, this coating machine can be totally integrated into an InLine factory floor. It can also easily be scaled up or down for a wide range of applications. Given the excellent quality that has been achieved for hardcoat and antireflective coating of plastic eyeglass lenses, similar results can be expected in other thin film applications for a wide range of temperature sensitive substrates in precision optics.     

Plasmaunterstütztes Aufdampfverfahren eröffnet neue Perspektiven in der Brillen- und Feinoptik

Plasma-ion assisted deposition, a newly developed evaporation technique for the production of optical coatings results, in outstanding film properties even at a low substrate temperature. The results of single layer investigations in comparison with conventional evaporation demonstrate the physical effects that improve the film properties. The combination of hard- and anti reflexion coating in one vacuum process for plastic eye glass lenses reduces the production time drastically while the quality of the finished product is secured. The production of ultra stable interference filters for fiber optic communication applications demonstrates the superior ability of this technology.     

低辐射卷绕镀膜工艺在线透过率监控技术

介绍了卷绕镀膜生产线中镀膜工艺的透过率在线监控仪原理与实现方法,同时描述了透过率监控仪在低辐射卷绕镀膜中的应用.     

Beschichtungen für Life Science

Coatings for Life Science Thin film technologies being well known from semiconductor industry and corresponding technologies for microstructures are successfully used in Life Science (medical technology, pharmaceutical research or biology). These technologies are the base of the complex and miniaturized life science products. Life Science is a strongly growing part of microsystems technology enabling innovations like the cochlear implant replacing the human ear or new products like the retina implant, the latter being shortly before market entrance. Since 1960 the use of plastic material in this field grew rapidly and still today it is a growing market for plastic material manufacturers. The reasons are cheap production and easy way to sterilize plastic material disposables.Unfortunately in many cases plastic materials do not possess the desired surface properties. But an additional (functional) coating may lead to the necessary properties. Low pressure vacuum technology as a sub group of vacuum coating technology is well suited for this surface modification. Normally process temperatures are only between 20 °C – 60 °C. Ceramic and metal based products in Life Science can be modified, too. There is a wide range of coating applications e.g. diamond like coatings on stents leading to decreased thrombus formation. In this overview basics of vacuum coating technology and plasma technology are described and examplarily some aspects and applications in Life Science are shown.     

高阻隔透明陶瓷膜蒸镀技术

对高阻隔透明陶瓷膜的发展概况及应用进行了综述,介绍了陶瓷膜的真空蒸镀技术、PECVD蒸镀技术的原理、特点和应用,并对陶瓷膜蒸镀技术的发展趋势进行了展望.