透明陶瓷保护膜的研究

对黄铜基材装饰件表面先采用高能级磁控溅射离子镀(专利号:85102600.1)技术镀不锈钢代替电镀钯-镍合金,再采用等离子体型阴极弧源-磁控溅射镀(专利号:ZL98236950.6)技术在不锈钢镀膜表面上镀制TiN/Au/透明陶瓷保护膜SiO2、TiO2.对其硬度、耐蚀性及耐磨性进行分析.     

Corrosion behaviour of TiN films obtained by plasma-assisted chemical vapour deposition

Titanium nitride (TiN) coatings with a dense structure were prepared on high-speed steel by plasma-assisted chemical vapour deposition (PACVD). The electrochemical polarization measurement of TiN coating was compared with that of the uncoated substrate. It was found that the TiN coating had a higher corrosion potential, and a lower corrosion rate (current density), about three orders of magnitude less than for the steel substrate. The major corrosion mechanism of TiN was pitting corrosion through surface defects and/or open pores. The number and size of pits decreased with the chlorine content of the film. The TiN coating deposited by PACVD, regardless of the amount of residual chlorine, proved to be a good anti-corrosion coating on a steel substrate.     

28CrMo钢表面磁控溅射TiN涂层的组织结构及耐腐蚀性能

为了提高28CrMo钢表面的致密性和耐腐蚀性能,采用磁控溅射技术在28CrMo钢表面制备TiN涂层,通过光学显微镜、X射线衍射仪(XRD)、电化学测试等手段分析了TiN涂层的显微结构及其在3.5%NaCl溶液中的耐腐蚀性能。结果表明:采用磁控溅射技术在28CrMo钢表面制备了厚约0.5μm的TiN涂层,涂层与基体结合良好,没有出现明显的裂纹,涂层表面N的原子分数明显高于Ti;电化学Nyquist谱得到高频区的容抗弧可能是由电荷转移电阻引起和膜层引起,中频区的容抗弧由基体金属溶解时的传质弛豫引起,低频区的感抗弧由基体表面吸附物的弛豫过程引起;3.5%NaCl溶液中腐蚀96 h后TiN涂层表面有蚀坑,吸附有白色疏松的腐蚀产物,并出现大小不一的腐蚀坑;TiN涂层能够明显改善基体的耐蚀性能,对改进高铬钢表面特性具有重要的作用。     

表面处理对TC16钛合金和18Ni钢电偶对的腐蚀防护

为了有效控制航空工业中TC16钛合金与18Ni钢的电偶腐蚀,分别采用真空电弧离子镀TiN层和微弧氧化技术对TC16钛合金进行表面处理,并对18Ni钢化学氧化,分析了不同表面处理的电偶对的腐蚀等级、阻抗特征及腐蚀形态.结果表明:TC16钛合金与18Ni钢之间存在显著的电偶腐蚀,仅对18Ni钢化学氧化不能解决其与TC16钛...     

黑色氮钛膜的制备与性能

介绍了利用多弧离子镀工艺制备黑色氮钛膜，并对其耐磨损，耐腐蚀，热稳定性及太阳光谱吸收等性能进行了研究，结果表明，其耐磨损，耐腐蚀性能均高于氧化和磷化黑色膜层。     

铀表面非平衡磁控溅射离子镀Ti基薄膜的组织结构与腐蚀性能

金属铀的化学性质十分活泼,极易发生氧化腐蚀。本文采用磁过滤多弧离子镀在金属铀表面制备Ti过渡层,然后采用非平衡磁控溅射离子镀技术制备了Ti、TiN单层膜及Ti/TiN多层薄膜,以期改善基体的抗腐蚀性能。采用X射线衍射、极化曲线、盐雾腐蚀试验对镀层的结构、表面形貌、抗腐蚀性能进行了分析。结果表明,采用磁控溅射在金属铀表面制备一层Ti/TiN多层膜后,多层膜界面较清晰,大量的界面可终止柱状晶的生长,细化晶粒,提高镀层的致密性,有效地改善了基体的抗腐蚀性能。     

CN<em>x/TiN多层复合涂层抗水蚀性能的研究

采用多弧-磁控溅射镀膜机在不锈钢2Cr13衬底上沉积CN_<em>x/TiN多层复合涂层。利用光电子能谱仪(XPS)和透射电子衍射(TED)对涂层的组成和结构进行分析。利用自行研制的高压水蚀试验装置对不锈钢、高铬铸铁、司太立合金以及CN_<em>x/TiN多层复合涂层的抗水蚀性能进行对比试验,最后对涂层的水蚀失效机理进行了探讨。试验结果表明:CN_<em>x/TiN多层复合涂层具有较高的硬度、附着力、抗热冲击性能以及优异的抗水蚀性能,是一种优良的汽轮机末级叶片抗水蚀用涂层。     

MBE growth and characterization of buried silicon oxide films on Si(100)

Silicon molecular beam epitaxy (Si-MBE) has been used to produce silicon oxide (SiO_x) films by evaporating Si on a heated Si(100) substrate in an ultra high vacuum system with an O₂ pressure of 10⁻⁶ to 10⁻⁴ mbar. Then the SiO_x films were overgrown with pure Si. The influence of the substrate temperature, the O₂ pressure and the Si deposition rate on the oxygen content in the SiO_x films and on the crystalline quality of the Si top-layer was investigated by Rutherford backscattering spectrometry and ion channeling. Epitaxial growth of the Si top-layer was observed up to a maximum concentration of ≈20 at.% oxygen content in the SiO_x film. Cross-sectional transmission electron microscopy shows that the structure of the SiO_x film changes duringa subsequent annealing procedure. Electron energy loss spectrometry proves that amorphous SiO₂ is formed and the development of holes indicates that the density of the as-grown SiO_x film is much lower than that of SiO₂. The specific for the as-grown SiO_x films was determined by I–V measurements.     

Corrosion behaviour of decorative and wear resistant coatings on steel deposited by reactive magnetron sputtering - Tests and improvements

Depositions of decorative and wear resistant single layer coatings like TiN, Ti(B,N), CrN, NbN, NbON, (Ti,Mg)N and multilayer coatings like Cr/CrN, Nb/NbN, CrN/NbN and NbN/Nb-C:H were performed using reactive magnetron sputtering. The corrosion behaviour of the coated high speed steel substrates was studied in sodium chloride containing media by open-circuit-potential measurements, potentiodynamic corrosion tests and salt spray tests. Up to now, the best improvements with respect to the corrosion resistance in salt spray tests could be obtained for the system (Ti,Mg)N/high speed steel.     

稀土铈对热作模具钢TiN系离子镀涂层性能的改进

为了解决TiN涂层的膜/基结合力不够高和高温抗氧化性不足等问题,综合利用电弧离子镀和涂层合金化技术,在4Cr5MoV热作模具钢基体上制备了添加稀土元素Ce的TiN系涂层,测定了涂层的显微硬度、孔隙率、耐磨性及膜/基结合力,并做了恒温氧化试验和抗热震性试验,以研究稀土元素Ce对TiN,Ti(Al,V)N涂层的改性作用.试验结果表明,Ce的加入能提高涂层的耐磨性,显著提高涂层的膜/基结合力,使其高温抗氧化性和抗热震性明显改善,可大大提高4Cr5MoV钢涂层热作精密模具的使用寿命和使用效果.     

Corrosion behavior of nanolayered TiN/NbN multilayer coatings prepared by reactive direct current magnetron sputtering process

TiN, NbN and TiN/NbN multilayer coatings were deposited on tool steel substrates using a reactive DC magnetron sputtering process. The coatings were characterized using X-ray diffraction, nanoindentation, atomic force microscopy, scanning electron microscopy (SEM) and energy-dispersive X-ray analysis. The corrosion behavior of TiN/NbN multilayer coatings was studied in 0.5 M HCl and 0.5 M NaCl solutions using potentiodynamic polarization and compared with single layered TiN and NbN coatings. Approximately 1.5 μm thick coatings of TiN, NbN and TiN/NbN multilayers showed good corrosion protection of the tool steel substrate and multilayer coatings performed better than single layered coatings. The corrosion behavior of the multilayers improved with total number of interfaces in the coatings. In order to conclusively demonstrate the positive effect of layering, corrosion behavior of 40-layer TiN/NbN multilayers was studied at lower coating thicknesses (32–200 nm) and compared with single layer TiN coatings of similar thicknesses. The polarization data and SEM studies of these coatings indicated that the corrosion behavior improved with coating thickness and multilayers showed better corrosion resistance as compared to the single layer coatings. Other studies such as intrinsic corrosion, effects of Ti interlayer and post-deposition annealing on the corrosion behavior of the multilayer coatings are also presented in this paper. The results of this study demonstrate that nanolayered multilayers can effectively improve the corrosion behavior of transition metal nitride hard coatings.     

多层复合真空离子镀膜技术的新发展

本文回顾了多弧——磁控溅射多功能离子镀膜设备的结构和功能，并且对该设备在氮化钛掺金离子镀（IPG）方面的典型应用，做了较为详细的膜层性能分析。同时，本文了对近年来一种新型的多功能离子镀设备——复合式离子镀膜设备的结构及特点做了介绍，给出了该类型设备的典型应用场合，并且向读者介绍了使用该设备镀制的金属/金属陶瓷多层膜的优异性能。     

离子镀硬质膜技术的最新进展和展望

电弧离子镀至今仍是硬质膜的主流技术,但是,其内容与８０年代比已大为丰富。首先,镀层材料由单一氮化钛,发展到氮化钛与碳氮化钛,氮化钛铝,氮化铬等多种材料并用。然后,又进一步发展为多层复合镀层。远离平衡态过程听低温沉积技术日趋成熟。使各种机械零件的需磨损磨腐蚀底层逐步走向实用化,促进了机械戒严水平全面提高。低温沉积技术大幅度降低镀层内应力,使镀层的厚度能够达到数十,甚至上百微米,满足了发展高性能特性镀     

A wear-resistant coating—Oxidized graded multilayer TiN/W coating

Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO₃ successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.     

SiO2粒径对Ni-Co-SiO2复合镀层性能的影响

长期暴露在海洋环境中的钢质紧固件的腐蚀问题严重影响了海洋工程装备和设施的服役安全性。电镀合金镀层是紧固件常用的防护方法,其中,镍钴合金镀层具有较好的耐蚀性。通过向Ni-Co镀液中添加不同粒径的SiO₂颗粒,利用电沉积技术在45钢基体上制备Ni-Co-SiO₂复合镀层。之后,分析了SiO₂粒径对复合镀层表面形貌和显微结构的影响,评价了复合镀层在3.5%（w）的NaCl溶液中的耐蚀性能,并对复合镀层的显微硬度和摩擦系数进行了测试。结果表明,随着镀液中SiO₂粒径的增大,复合镀层表面的SiO₂分布均匀性先增大后减小,当SiO₂粒径为70 nm时,镀层表面形成较完整的SiO₂膜层。动电位极化和电化学阻抗谱测试表明,掺杂70 nm的SiO₂的复合镀层具有最好的耐蚀性。随着镀液中SiO₂粒径增大,复合镀层的硬度逐渐降低,但其对摩擦系数的影响较小。      

Characterization of multilayer films of Ti---Al---O---C---N system prepared by pulsed d.c. plasma-enhanced chemical vapor deposition

TiAlN/TiN, TiAlCN/TiAlN/TiN and TiAlON/TiAlN/TiN multilayer films were prepared on steel substrates by pulsed d.c. plasma-enhanced chemical vapor deposition (PECVD) at 823 K using gas mixtures of TiCl₄, AlCl₃, H₂, N₂, CH₄, O₂ and Ar. We studied the structural, compositional, mechanical and chemical properties of these films. Fracture cross-sections of the TiAlN and TiAlCN films showed columnar structure. On the other hand, those of the TiAlON films showed amorphous-like dense structure. X-Ray diffraction (XRD) analyses showed that the TiAlN, TiAlCN and TiAlON films had NaCl structure. The XRD peaks of the TiAlON films were broad. Glow discharge optical emission spectroscopy (GDOS) analyses proved that these films had multilayer structure. The Vickers hardness of the TiAlN/TiN, TiAlCN/TiAlN/TiN and TiAlON/TiAlN/TiN multilayer films were 2608, 2815 and 1444 Hv, respectively. These multilayer films had higher oxidation resistance and better tribological properties than the TiN single-layer films. The TiAlCN/TiAlN/TiN multilayer films showed the best wear resistance. Furthermore, these multilayer films demonstrated superior corrosion resistance in a molten aluminum alloy at 953 K. The TiAlON/TiAlN/TiN multilayer films indicated the best corrosion resistance.     

NdFeB永磁材料表面防护技术研究

研究ＮｄＦｅＢ永磁材料电镀Ｎｉ、离子镀Ｔｉ、ＴｉＮ等工艺及对材料抗腐蚀能力的改善。试验结果显示经过上述处理后，ＮｄＦｅＢ抗腐蚀能力、表面耐磨性、美观性均大大提高。同时也探讨了镀层工艺     

Self-catalytic degradation of iron-bearing chemical conversion coating on magnesium alloys ---- Influence of Fe content

A number of industrial and biomedical fields, such as hydraulic fracturing balls for gas and petroleum exploitation and implant materials, require Mg alloys with rapid dissolution. An iron-bearing phosphate chemical conversion (PCC) coating with self-catalytic degradation function was fabricated on the Mg alloy AZ31. Surface morphologies, chemical compositions and degradation behaviors of the PCC coating were investigated through FE-SEM, XPS, XRD, FTIR, electrochemical and hydrogen evolution tests. Results indicated that the PCC coating was characterized by iron, its phosphates and hydroxides, amorphous Mg(OH)₂ and Mg_3−n(H_nPO₄)₂. The self-catalytic degradation effects were predominately concerned with the Fe concentration, chemical composition and microstructure of the PCC coating, which were ascribed to the galvanic corrosion between Fe in the PCC coating and the Mg substrate. The coating with higher Fe content and porous microstructure exhibited a higher degradation rate than that of the AZ31 substrate, while the coating with a trace of Fe and compact surface disclosed a slightly enhanced corrosion resistance for the AZ31 substrate.     

Maßgeschneiderte Schicht-Interfacesysteme mittels ionenstrahlgestützter Beschichtung

Custom-Tailored Coating-Interface Systems by Means of lon Beam Assisted Deposition A coated sample represents in its most simple form a threefold junction consisting of substrate interface and top layer. In many cases the top layer consists again of several sublayers or the interface contains a modified substrate surface and an interconnection between top layer and interface. An ideal coating technique is evaporation under simultaneous ion bombardment with an ion source it is possible because of several free parameters to come close to an ideal system. For the coating Al/Al₂O₃ on steel it is shown that the width of a composition gradient between the sublayers Al and Al₂O₃ can be optimized with respect to excellent corrosion resistance. The example Cr_xN coating on steel or corrosion and wear resistence demonstrate the ability to optimize the corrosion and wear resistence by modifying the microstructure via variation of the parameters ion energy, ion impact angle, ion to atom ratio and process temperature. Finally, TiN layers on steel were chosen to show that the ion beam parameters influence the porosity and the crystal structure of the coatings. This fact can be used to optimize the corrosion protection or wear reduction obtained by the coating. Especially the multilayer Ti/TiO₂/TiN exhibits very interesting properties.     

Mechanical properties of a-C:H and a-C:H/SiOx nanocomposite thin films prepared by ion-assisted plasma-enhanced chemical vapor deposition

a-C:H and a-C:H/SiO_x nanocomposite thin films were deposited on silicon, aluminum and polyimide substrates at 25 °C in an asymmetric 13.56 MHz r.f.-driven plasma reactor under heavy ion bombardment. Fourier transform infrared spectra of the films indicate that the nanocomposite filmsappears to consist of an atomic scale random network of a-C:H and SiO_x. Raman spectroscopy revealed that the sp² carbon fraction in the nanocomposite film was reduced compared with the a-C:H film. The intrinsic stress of both films increased with increasing negative bias voltage (−V_dc) at the substrate. However, the nanocomposite films exhibited lower intrinsic stress compared w with a-C:H-only films. Especially, a thin SiO_x-rich interlayer was very effective in reducing the film stress and enhancing the bonding strength at the interface. The interlayer allowed deposition of thick films of up to 5 μm. Also, the nanocomposite films were stable in 0.1 M NaOH solution and showed good microhardness.