溶胶—凝胶制备TiO2／SiO2复合薄膜的FT—IR表征

ＦＴ－ＩＲ吸收谱用来研究具有多孔结构的ＴｉＯ２／ＳｉＯ２复合薄膜；薄膜在１２００ｃｍ＾－１有一较强的肩峰，其强度与峰位随热处理温度度而生变化。在９５５ｃｍ＾－１的吸收峰是由于Ｓｉ－Ｏ－Ｔｉ和Ｓｉ－ＯＨ的结果，并随着热处理 度的提高其吸收峰完全是Ｓｉ－Ｏ－Ｔｉ振动所引起的，其峰位随着ＴｉＯ２的增加，向低频区域移动。     

Al2O3—SiO2—TiO2复合陶瓷薄膜的制备与结构

本文利用Ｓｏｌ－Ｇｅｌ法制备了Ａｌ２Ｏ－ＳｉＯ２－ＴｉＯ２复合陶瓷薄膜，讨论了主要内容是体系成分（Ａｌ：Ｓｉ：Ｔｉ摩尔比）对落膜制备过程及结构的影响。通过分步水解法可以得到稳定的Ａｌ２Ｏ３－ＳｉＯ２－ＴｉＯ２复合溶胶，进而制备复合陶瓷薄膜。组分间的静电作用是溶胶凝结的原因。三组分中，Ｓｉ／Ｔｉ摩尔比是决定溶胶稳定性的主要因素。通过ＸＲＤ对薄膜的相组成进行了分析，表明复合薄膜由Ａｌ４Ｔｉ２ＳｉＯ１２     

医用NiTi合金表面溶胶-凝胶法制备TiO2-SiO2薄膜

采用溶胶－凝胶法在ＮｉＴｉ形状记忆合金表面制备了ＴｉＯ_２－ＳｉＯ_２复合薄膜,在提高医用ＮｉＴｉ合金的抗腐蚀性方面,收到了显著的效果．运用电化学方法对不同组成的ＴｉＯ_２－ＳｉＯ_２薄膜在模拟体液中的腐蚀行为进行了研究,结果表明,随薄膜中 Ｔｉ／Ｓｉ比的增加,ＴｉＯ_２－ＳｉＯ_２薄膜的抗腐蚀性增强．划痕试验表明 ＴｉＯ_２－ＳｉＯ_２（Ｔｉ／Ｓｉ＝４：１）膜与ＮｉＴｉ合金基体具有较高的界面结合强度．用原子力显微镜（ＡＦＭ）对ＴｉＯ_２－ＳｉＯ_２薄膜的表面形貌及表面粗糙度进行观察和分析,解释并讨论了ＴｉＯ_２－ＳｉＯ_２薄膜的配方组成与其抗腐蚀性的关系,ＳｉＯ_２含量较少时,薄膜结构致密,膜层均匀平滑,且膜基结合力好,作为医用ＮｉＴｉ合金的表面保护层,可以使其耐腐蚀性有显著提高．     

Bi4Ti3O12铁电薄膜的I—V特性测量及导电机理

Ｂｉ４Ｔｉ３Ｏ１２薄膜是一种具有广泛应用前景的典型的铁电薄膜。本文报道了用ＭＯＣＶＤ方法制备的Ｂｉ４Ｔｉ３Ｏ１２薄膜的Ｉ－Ｖ特性测量及其导电机理。结果表明，在低场下，Ｂｉ４Ｔｉ３Ｏ１２薄的Ｉ－Ｖ特性表现为欧姆性质，在中强场下，薄膜的导电机理遵从ＳＣＬＣ理论。     

溶胶—凝胶法制备有机改性SiO2—TiO2涂层的研究

用溶胶－凝胶法在ＰＭＭＡ上制得ＳｉＯ２－ＴｉＯ２涂层。溶胶粘度分析表明，溶胶以线性生长方式凝胶，适宜于制备薄膜。ＦＴＩＲ对涂层的干燥和热处理过程研究表明，涂层中形成Ｓｉ－Ｏ－Ｔｉ－Ｏ－Ｓｉ无机网络结构。扫描电镜对涂层中Ｔｉ－Ｓｉ元素的分布进行了能谱分析，发现无机网络主要分布于涂层的表面及界面处。     

超亲水TiO_2/SiO_2复合薄膜的制备与表征

通过 ｓｏｌ－ｇｅｌ工艺在普通钠钙玻璃表面制备了均匀透明的 ＴｉＯ２／ＳｉＯ２复合薄膜．实验结果表明：在 ＴｉＯ２薄膜中添加 ＳｉＯ２,可以抑制薄膜中 ＴｉＯ２晶粒的长大,同时薄膜表面的羟基含量增加,水在复合薄膜表面的润湿角下降,亲水能力增强．当 ＳｉＯ２含量为 １０～２０ ｍｏｌ％时获得了润湿角为０°的超亲水性薄膜．     

Bi_4Ti_3O_（12）铁电薄膜的I－V特性测量及导电机理

Ｂｉ＿４Ｔｉ＿３Ｏ＿（１２）薄膜是一种具有广泛应用前景的典型的铁电薄膜。本文报道了用ＭＯＣＶＤ方法制备的Ｂｉ＿４Ｔｉ＿３Ｏ＿（１２）薄膜的Ｉ－Ｖ特性测量及其导电机理。结果表明，在低场下，Ｂｉ＿４Ｔｉ＿３Ｏ＿（１２）薄膜的Ｉ－Ｖ特性表现为欧姆性质，在中强场下，薄膜的导电机理遵从ＳＣＬＣ理论。     

TiO2—K2O—Y2O3—SiO2陶瓷薄膜结露元件的制备及其湿敏性能研究

采用淀粉产法制备了ＴｉＯ２－Ｋ２Ｏ－Ｙ２Ｏ３－ＳｉＯ２（Ｔｉ：Ｋ：Ｙ：Ｓｉ＝１：０．１＋０．０４＋０．０５,摩尔比）陶瓷薄膜结露元件,研究了陶瓷粉末和薄膜的结构以及元件的感湿性能。６００℃热处理后,陶瓷粉末和薄膜主要由锐钛矿型Ｔdisplay status     

高取向锐钛矿TiO2薄膜的MOCVD法制备与表征

采用热壁低压ＭＯＣＶＤ方法，以Ｔｉ（ＯＣ４Ｈ９）４为源在ＳｉＯ２／Ｓｉ衬底上制备出高取向锐钛矿ＴｉＯ２薄膜。用Ｘ射线衍射技术研究了沉积温度和衬底对薄膜的结构和相组成的影响规律，采用ＸＰＳ和ＳＥＭ分别研究了薄膜的组成和形貌，结果表明，当沉积温度为５００＾０Ｃ和６００＾０Ｃ时，薄膜为锐钛矿结构，３００＾０Ｃ和４００＾０Ｃ地，薄膜以无定形结构为主，薄膜的组成为ＴｉＯ２，衬底影响薄膜的相组成，不同沉积温度     

多孔陶瓷薄膜表面形貌研究

用原子力显微镜（ＡＦＭ）观察Ａｌ２Ｏ３、Ａｌ２Ｏ３－ＳｉＯ２及Ａｌ２Ｏ３－ＳｉＯ２－ＴｉＯ２复合陶瓷薄膜的表面形貌,Ｘ射线衍射（ＸＲＤ）分析表明,Ａｌ２Ｏ３薄膜的上为γ－Ａｌ２Ｏ３;Ａｌ２Ｏ３－ＳｉＯ２薄由γ－Ａｌ２Ｏ３和非晶诚ＳｉＯ２组成;而Ａｌ２Ｏ３－ＳｉＯ２－ＴｉＯ２薄膜的相成分为Ａｌ２Ｏ３、ＴｉＯ２、Ａｌ４Ｔｉ２ＳｉＯ１２和非晶态ＳｉＯ２,各相的含量随化学成分变化而变化,ＡＦＭ观察结果表明     

Role of oxygen in enhancing N-type conductivity of CuInS2 thin films

Post-growth treatments in air atmosphere were performed on CuInS₂ films prepared by the single-source thermal evaporation method. Their effect on the structural, optical and electrical properties of the films was studied by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), optical reflection and transmission and resistance measurements. The films were annealed from 100 to 350 °C in air. The stability of the observed N-type conductivity after annealing depends strongly on the annealing temperature. Indeed it is shown that for annealing temperatures above 200 °C the N-type conductivity is stable. The resistance of the N-CuInS₂ thin films correlates well with the corresponding annealing temperature. The samples after annealing have direct bandgap energies of 1.45-1.50 eV.     

Insulating properties of rapid thermally processed Bi2Ti2O7 thin films by a chemical solution decomposition technique

Crack-free Bi₂Ti₂O₇ thin films on silicon substrates were prepared using chemical solution decomposition technique, and then treated by rapid thermal annealing. The microstructure of the films was studied by scanning electron microscopy. The effects of different fabricating procedures and various annealing temperatures and times on the leakage current density were investigated. The results show that the leakage current density decreases with increasing annealing temperature, while increases with increasing annealing time. Annealing temperature has a much stronger effect on the insulating properties of Bi₂Ti₂O₇ thin films than that of annealing time.     

Structural, thermal and optical characterization of TiO2:ZrO2 thin films prepared by sol-gel method

We have studied the structural and optical properties of thin films of TiO₂, doped with 5% ZrO₂ and deposited on glass substrate (by the sol-gel method). The dip-coated thin films have been examined at different annealing temperatures (350 to 450 °C) and for various layer thicknesses (63-286 nm). Refractive index and porosity were calculated from the measured transmittance spectrum. The values of the index of refraction are in the range of 1.62-2.29 and the porosity is in the range of 0.21-0.70. The coefficient of transmission varies from 50 to 90%. In the case of the powder of TiO₂, doped with 5% ZrO₂, and aged for 3 months in ambient temperature, we have noticed the formation of the anatase phase (tetragonal structure with 14.8 nm grains). However, the undoped TiO₂ exhibits an amorphous phase. After heat treatments of thin films, titanium oxide starts to crystallize at the annealing temperature 350 °C. The obtained structures are anatase and brookite. The calculated grain size, depending on the annealing temperature and the layer thickness, is in the range (8.58-20.56 nm).     

Electrical characterization of Ta2O5 films deposited by laser reactive ablation of metallic Ta

Tantalum oxide films have been deposited by 355 nm pulsed laser ablation of metallic Ta target in O₃/O₂ ambient. The structure and the composition of as-deposited and annealed films were examined by X-ray diffraction and Fourier transform infrared spectroscopy. The measurements of the current–voltage and capacitance–voltage characteristics of the Al/Ta₂O₅/Si capacitors were performed to reveal the electrical properties of the Ta₂O₅ films. The effects of annealing temperature on the characteristics of thin films have been studied. The results suggest that the films annealed above 700°C have the structure of orthorhombic β-Ta₂O₅, thc annealing treatment at high temperature decreases the bulk trap charge, the border trap, and the interface trap densities of as-deposited films, and improves significantly the dielectric and electrical properties of Ta₂O₅ film.     

Fabrication and characterization of (1−x)SrBi2Ta2O9–xBi3TaTiO9 layered structure solid solution thin films for ferroelectric random access memory (FRAM) applications

We report on the properties of (1−x)SrBi₂Ta₂O₉–xBi₃TaTiO₉ solid solution thin films for ferroelectric non-volatile memory applications. The solid solution thin films fabricated by modified metalorganic solution deposition technique showed much improved properties compared to SrBi₂Ta₂O₉. A pyrochlore free crystalline phase was obtained at a low annealing temperature of 600°C and grain size was found to be considerably increased for the solid solution compositions. The film properties were found to be strongly dependent on the composition and annealing temperatures. The measured dielectric constant of the solid solution thin films was in the range 180–225 for films with 10–50% of Bi₃TaTiO₉ content in the solid solution. Ferroelectric properties of (1−x)SrBi₂Ta₂O₉–xBi₃TaTiO₉ thin films were significantly improved compared to SrBi₂Ta₂O₉. For example, the observed remanent polarization (2P_r) and coercive field (E_c) values for films with 0.7SrBi₂Ta₂O₉–0.3Bi₃TaTiO₉ composition, annealed at 650°C, were 12.4 μC/cm² and 80 kV/cm, respectively. The solid solution thin films showed less than 5% decay of the polarization charge after 10¹⁰ switching cycles and good memory retention characteristics after about 10⁶ s of memory retention. The improved microstructural and ferroelectric properties of (1−x)SrBi₂Ta₂O₉–xBi₃TaTiO₉ thin films compared to SrBi₂Ta₂O₉, especially at lower annealing temperatures, suggest their suitability for high density FRAM applications.     

Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films

Y₂O₃ thin film waveguides were prepared by RF magnetron sputtering. The effects of post-deposition annealing on the structure and optical properties have been investigated. The structural evolution of Y₂O₃ films with annealing temperature was investigated by X-ray diffraction (XRD). Spectroscopic ellipsometry was employed to determine the optical properties of Y₂O₃ films annealed at various temperatures. It was found that with increasing annealing temperature, the refractive index (n) of Y₂O₃ films increases. The optical band gap of Y₂O₃ films shifts to higher energy after higher temperature annealing, which is likely due to the reduction of defects and the change of crystalline structure in Y₂O₃ films.     

Optical, electrical properties and reproducible resistance switching of GeO2 thin films by sol-gel process

Electrical, optical properties and microstructures of GeO₂ thin films prepared by the sol-gel method on ITO substrates at different preheating and annealing temperatures have been investigated. All films exhibited GeO₂ (101) orientations perpendicular to the substrate surface and the grain size increased with increasing preheating and annealing temperature. The dependence of the microstructure, optical transmittance spectra, optical bandgap and dielectric characteristics on preheating and annealing temperatures was also investigated. Considering the primary memory switching behavior of GeO₂, ReRAM based on GeO₂ shows promise for future nonvolatile memory applications.     

Ti O2纳米管阵列基底退火温度对CdSe/Ti O2异质结薄膜光电化学性能的影响

通过电化学沉积法以TiO2纳米管阵列(TNTs)为基底制备CdSe/TiO2异质结薄膜。研究TiO2纳米管阵列基底不同退火温度(200,350,450,600℃)对CdSe/TiO2异质结薄膜光电化学性能的影响。采用SEM,XRD,UV-Vis,电化学测试等方法对样品的微观形貌、晶体结构、光电化学性能等进行表征。结果表明:立方晶型的CdSe纳米颗粒均匀沉积在TiO2纳米管阵列管口及管壁上。TiO2纳米管阵列未经退火及退火温度为200℃时,为无定型态,在TiO2纳米管阵列上沉积的CdSe纳米颗粒数量少,尺寸小,异质结薄膜光电性能较差,光电流几乎为零。随着退火温度升高到350℃,TiO2纳米管阵列基底开始向锐钛矿转变;且沉积在TiO2纳米管上的CdSe颗粒增多,尺寸增大,光电化学性能提高。退火温度为450℃时光电流值达到最大,为4.05mA/cm^2。当退火温度达到600℃时,TiO2纳米管有金红石相出现,CdSe颗粒变小,数量减少,光电化学性能下降。     

Effect of annealing on microstructural and optoelectronic properties of nanocrystalline TiO2 thin films

In this study, semi-transparent nanostructured titanium oxide (TiO₂) thin films have been prepared by sol–gel technique. The titanium isopropoxide was used as a source of TiO₂ and methanol as a solvent and heat treated at 60°C. The as prepared powder was sintered at various temperatures in the range of 400–700°C and has been deposited onto a glass substrate using spin coating technique. The effect of annealing temperature on structural, morphological, electrical and optical properties was studied by using X-ray diffraction (XRD), high resolution transmittance electron microscopy (HRTEM), atomic force microscopy (AFM), scanning electron microscopy (SEM), dc resistivity measurement and optical absorption studies. The XRD measurements confirmed that the films grown by this technique have good crystalline nature with tetragonal-mixed anatase and rutile phases and a homogeneous surface. The HRTEM image of TiO₂ thin film (annealed at 700°C) showed grains of about 50–60?nm in size with aggregation of 10–15?nm crystallites. Electron diffraction pattern shows that the TiO₂ films exhibited a tetragonal structure. SEM images showed that the nanoparticles are fine and varies with annealing temperature. The optical band gap energy decreases with increasing annealing temperature. This means that the optical quality of TiO₂ films is improved by annealing. The dc electrical conductivity lies in the range of 10^?6 to 10^?5?Ω?cm^?1 and it decreases by the order of 10 with increase in annealing temperature from 400°C to 700°C. It is observed that the sample Ti700°C has a smooth and flat texture suitable for different optoelectronic applications.     

Preparation of LiMn2O4 thin films by aqueous solution deposition

Cathode material LiMn₂O₄ thin films were prepared by aqueous solution deposition using lithium acetate and manganese acetate as starting materials. The structures, morphologies, and the first discharge specific capacity of the thin films were investigated as a function of annealing temperature and time. The cycling properties of the thin films were also examined. The results show that LiMn₂O₄ thin films prepared by this method are homogenous and crack-free. The thin film annealed at 750°C for 30 min has good rechargeability. The capacity loss per cycle is about 0.05% after being cycled 100 times.