140W高功率非对称宽波导980nm半导体激光器

为了提高半导体激光器(LD)的出光功率,优化了P型波导层以及限制层的厚度。将光场的对称分布变成非对称分布,降低了有源区的光限制因子,从而降低了器件腔面的功率密度,避免器件出现腔面灾变损伤(COD);提高LD的电光转换效率,减小器件的散热路径,降低器件的热阻,从而有效抑制了器件的热饱和。设计并制作了非对称宽波导980 nm高功率LD。器件的综合测试性能为:当器件的注入电流为161 A时,器件的输出功率达到139.6 W,对应的斜率效率、电压和电光转换效率分别为0.91 W/A、1.79 V和48.4%。     

980nm大功率基横模分布反馈激光器

980 nm波段的大功率半导体激光器作为抽运源有很重要的应用,但目前该类器件存在光束质量差和谱宽较宽的问题,影响其抽运效率和稳定性。为提高大功率半导体激光器的抽运效率,就要减小其光谱宽度,提升光束质量。而大功率基横模分布反馈激光器(DFB)通过在器件内部引入分布反馈光栅可以实现窄线宽激光的波长稳定输出,并通过优化脊型波导条件来实现基横模模式输出,提升光束质量。测试该器件的光电特性,1000μm腔长器件的阈值电流约为6 m A,斜率效率为0.71 W/A,最大稳定输出功率为130 m W。该激光器的波长随温度漂移系数为0.064 nm/K;对其远场发散角进行测量,得到快轴发散角为34°,慢轴发散角为6.3°。     

一种高效率的1060 nm半导体激光器设计

设计了一种高效的1060 nm大功率半导体激光器,该激光器包含有源层、波导层和光限制层。其中有源层采用InGaAs/GaAs量子阱（QW）结构,将该层控制在临界厚度范围内,提高腔内量子效率;波导层采用非故意掺杂GaAs材料非对称大光学腔结构,减小空腔损耗;光限制层采用掺杂的Al0.25Ga0.75As材料形成线性的过渡,以减小串联电阻。应用MOCVD对器件结构进行优化,外延,制作和封装测试,获得功率效率为47.4％的1060 nm半导体激光器。实验结果表明,腔内量子效率达到98.57％,腔损仅为0.273 cm-1。在室温下,QCW脉冲条件下制备的器件具有4 mm腔长和100μm条宽的器件,效率达到47.4％,峰值波长为1059.4 nm。     

高功率1060 nm半导体激光器波导结构优化

针对高功率1060 nm半导体激光器的外延结构,分析了影响器件功率进一步提高的原因.根据分析,优化了激光器的量子阱结构和波导结构,并理论模拟了波导宽度对模式和输出功率的影响.根据不同模式的光场分布,对量子阱有源区的位置进行了优化,并设计了非对称、宽波导结构.对不同模式的限制因子进行了计算,结果表明,优化后的非对称波导结构能够在降低基模的限制因子的同时,增加高阶模式的损耗.     

新型大功率双波长半导体激光器的研制

提出了一种新结构半导体双波长激光器 ,即用隧道结把两个发射不同波长的激光器结构通过外延生长的方法连接起来。通过计算和设计 ,制备了性能良好的大功率激射的双波长半导体激光器。双波长器件的实际激射波长分别为 95 1 nm和 987nm,为基模激射。器件在 5 3 0 m A直流工作时输出功率达到 5 0 0 m W,斜率效率为1 .3 3 W/A。在 2 A电流时功率达 2 .4W,斜率效率为 1 .3 8W/A;3 A电流时功率达 3 .1 W,斜率效率为 1 .2 1 W/A。     

非对称异质波导半导体激光器结构

提出了一种非对称异质波导半导体激光器外延结构,即通过优化选择材料体系和结构厚度,对器件外延层的P侧限制结构和N侧限制结构分别设计,从而降低器件的电压损耗,使其满足高输出功率以及高的电光转换效率的要求.从载流子的输运和限制等微观机制出发,对器件的主要输出特性进行了理论分析和数值模拟,并以此为根据设计和制作了一种1060 nm In Ga As/Ga As单量子阱非对称异质波导结构半导体激光器,并对器件的主要输出特性进行了测试.实验结果表明,非对称异质结构是降低器件的电压降、增大限制结构对注入载流子的限制,提高半导体激光器电光转换效率的有效措施.     

高性能976 nm宽条半导体激光芯片

设计并制作了波长为976nm的宽条大功率半导体激光芯片。采用非对称宽波导外延结构设计及金属有机化学气相外延技术生长了低损耗、高效率的外延材料。制备了190μm发光区宽度、4mm腔长、976nm波长的半导体激光芯片,并将其封装为COS器件。测试结果表明:封装器件在室温下的阈值电流为1.05 A,斜率效率为1.12 W/A,最高电光转换效率可达到68.5%;在40℃、19.5 W功率输出时的电光转换效率可以达到60%;9个器件在40℃和15A电流下老化4740h后,无一失效,而且老化前后的功率-电流曲线和光谱没有变化,证明该激光芯片具极高的稳定性和可靠性。     

大功率体光栅外腔半导体激光器的输出特性

宽条形大功率半导体激光器(LD)存在光谱温漂系数大、光谱宽度宽的缺点,为了改善宽条形大功率半导体激光器的光谱特性,采用一种体光栅(VBG)离轴外腔方法实现了宽条形大功率半导体激光器光谱特性的明显改善和高效率工作.宽条形半导体激光器的外腔结构主要包括激光器输出光束的快、慢轴准直光学透镜和离轴放置的体光栅.宽条形半导体激光器的激射条宽为100μm,当激光器工作电流为4.0 A时,外腔激光器的输出功率高达3.4 W,斜率效率为1.0 W/A,光谱宽度由自由出射条件下的2~3 nm减少为0.2 nm,峰值波长的温漂系数小于0.015 nm/℃.     

大功率低阈值半导体激光器研究

针对大光腔结构往往导致阈值电流密度增大的矛盾,设计了一种具有较高势垒高度的三量子阱有源区。采用非对称宽波导结构的半导体激光器,该激光器在实现大光腔结构的同时保持阈值电流密度不增加。通过金属有机物化学气相沉积(MOCVD)生长InGaAs/AlGaAs三量子阱有源区以及3.6μm超大光腔半导体激光器的外延结构。结合后期工艺,制备了980nm脊形边发射半导体激光器。在未镀膜情况下,4mm腔长半导体激光器阈值电流为1105.5mA,垂直发散角为15.6°,注入电流为25A时的最大输出功率可达到15.9 W。测试结果表明:所设计的半导体激光器在有效地拓展光场,实现大光腔结构的同时,保证了激光器具有较低的阈值电流。     

976 nm锥形半导体激光器结构设计与优化

锥形半导体激光器具有高亮度、高光束质量等特点。通过借助数值模拟仿真软件Lastip,优化设计了976 nm锥形半导体激光器结构。在低光限制因子Г条件下,确定了InGaAs/AlGaAs量子阱厚度及非对称波导厚度比值关键参数,并分析了主振荡器的注入光功率和耦合进锥形区的基侧模衍射分布特性。研究结果表明:与传统的单量子阱器件结构相比,当光限制因子Г相同均为2%时,在工作电流为3 A条件下,优化设计的非对称双量子阱结构主振荡器的基侧模分布更为集中。其注入光功率由2.76 W提升至3.67 W,同时耦合进锥形区的基侧模衍射分布更为均匀,并具有稳定的电光转换效率。     

High-power high-efficiency 0.98-μm wavelengthInGaAs-(In)GaAs(P)-InGaP broadened waveguide lasers grown by gas-sourcemolecular beam epitaxy

We describe the design and experimental results for high-power, high-efficiency, low threshold current, 0.98-μm wavelength, broadened waveguide (BW) aluminum-free InGaAs-(In)GaAs(P)-InGaP lasers. The decrease in the internal losses with an increase in the width of the waveguide layer for a separate-confinement heterostructure multiple-quantum-well (SCW-MQW) structure is attributed to lower free-carrier absorption due to the reduced overlap of the optical mode with the highly doped cladding regions. The BW lasers grown with both InGaAsP and GaAs waveguides show lower internal losses and similar threshold currents than those designed for an optimum optical confinement factor within the QW region. We report a record-low internal loss of 1.8±0.2 cm^-2 for (In)GaAs(P)-InGaP lasers grown by gas-source molecular beam epitaxy (GSMBE). The temperature dependence of internal loss suggests that optical loss from free-carrier absorption in the waveguide dominates at T>40°C, while near room temperature, the residual loss is attributed to scattering and free-carrier absorption in the QW's. The relative insensitivity of internal loss near room temperature has enabled the use of a simplified InGaAs-GaAs-InGaP BW structure to achieve very high CW and quasi-CW (QCW) power operation. We report the highest CW output power of 6.8 W for a GaAs-InGaP laser, and the highest quasi-continuous output power of 13.3 W measured for a single 100-μm-wide aperture, 0.8-0.98-μm wavelength Al-free laser diode grown by GSMBE     

Ultralow internal optical loss in separate-confinement quantum-well laser heterostructures

Internal optical loss in separate-confinement laser heterostructures with an ultrawide (>1 smm) waveguide has been studied theoretically and experimentally. It is found that an asymmetric position of the active region in an ultrawide waveguide reduces the optical confinement factor for higher-order modes and raises the threshold electron density for these modes by 10–20%. It is shown that broadening the waveguide to above 1 μm results in a reduction of the internal optical loss only in asymmetric separate-confinement laser heterostructures. The calculated internal optical loss reaches ∼0.2 cm⁻¹ (for λ≈1.08 μm) in an asymmetric waveguide 4 μm thick. The minimum internal optical loss has a fundamental limitation, which is determined by the loss from scattering on free carriers at the transparency carrier density in the active region. An internal optical loss of 0.34 cm⁻¹ was attained in asymmetric separate-confinement laser heterostructures with an ultrawide (1.7 μm) waveguide, produced by MOCVD. Lasing in the fundamental transverse mode has been obtained owing to the significant difference in the threshold densities for the fundamental mode and higher-order modes. The record-breaking CW output optical power of 16 W and wallplug efficiency of 72% is obtained in 100-μm aperture lasers with a Fabry-Perot cavity length of ∼3 mm on the basis of the heterostructures produced. __________ Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 38, No. 12, 2004, pp. 1477–1486. Original Russian Text Copyright ? 2004 by Slipchenko, Vinokurov, Pikhtin, Sokolova, Stankevich, Tarasov, Alferov.     

High-power laser diodes (λ = 808–850 nm) based on asymmetric separate-confinement heterostructures

Symmetric and asymmetric separate-confinement AlGaAs/GaAs heterostructures have been grown by MOCVD in accordance with the concept of design of high-power semiconductor lasers. High-power laser diodes with a 100-μm aperture, emitting in the 808–850-nm range, were fabricated from these structures. The internal optical loss in asymmetric separate-confinement heterostructures with broadened waveguide is reduced to 0.5 cm⁻¹. In the lasers with 1.7-μm-thick waveguide, the output optical power of 7.5 W in CW mode was achieved owing to reduction of the optical emission density at the cavity mirror to 4 mW/cm². Original Russian Text ? A.Yu. Andreev, A.Yu. Leshko, A.V. Lyutetskiĭ, A.A. Marmalyuk, T.A. Nalyot, A.A. Padalitsa, N.A. Ptkhtin, D.R. Sabitov, V.A. Simakov, S.O. Slipchenko, M.A. Khomylev, I.S. Tarasov, 2006, published in Fizika i Tekhnika Poluprovodnikov, 2006, Vol. 40, No. 5, pp. 628–632.     

GaInAsP/GaInP/AlGaInP MOCVD-grown diode lasers emitting at 808 nm

The MOCVD epitaxy has been used to grow the GaInAsP/GaInP/AlGaInP laser heterostructures with a narrow symmetric waveguide and broad asymmetric waveguide. Mesa stripe 100 μm aperture diode lasers emitting at 808 nm were manufactured. It is shown that a SiO₂/Si dielectric mirror coating of Fabry-Perot faces of Al-free semiconductor lasers does not result in catastrophic optical mirror damage. It is found that the maximum optical output power of Al-free diode lasers is limited by catastrophic optical damage of the laser heterostructure. Maximum values of optical output power of 5.1 and 9.9 W have been attained in diode lasers with a narrow symmetric waveguide and broad asymmetric waveguide, respectively.

     

1.06 μm high-power InGaAs/GaAsP quantum well lasers

The high power and low internal loss 1.06 μm InGaAs/GaAsP quantum well lasers with asymmetric waveguide structure were designed and fabricated. For a 4000 μm cavity length and 100 μm stripe width device, the maximum output power and conversion efficiency of the device are 7.13 W and 56.4%, respectively. The cavity length dependence of the threshold current density and conversion efficiency have been investigated theoretically and experimentally; the laser diode with 4000 μm cavity length shows better characteristics than that with 3000 and 4500 μm cavity length:the threshold current density is 132.5 A/cm², the slope efficiency of 1.00 W/A and the junction temperature of 15.62 K were achieved.     

多单元半导体激光器的高亮度光纤耦合输出

设计并研制了一种多单元半导体激光器的高亮度光纤耦合输出模块.激光器芯片采用分子束外延(MBE)方法生长的宽波导、双量子阱结构AlGaAs/GaAs激光器外延材料,激光器模块采用4只准直的单条形大功率半导体激光器,器件腔长为2 mm,发光区宽度为100μm,单条形器件的连续输出功率为5.0 W,每两只单条形器件的准直输出光束经过空间合束后再通过偏振合束,实现了多单元器件输出的高光束质量功率合成,采用简单的平凸透镜实现了合束光束与100μm芯径、数值孔径(NA)0.22石英光纤的高效耦合,耦合效率高达79%,输出功率达10.17 W,光纤端面功率密度达1.0×105W/cm2.     

1.8-μm laser diodes based on quantum-size AlInGaAs/InP heterostructures

The concept of power semiconductor lasers based on asymmetric separate confinement heterostructures is applied to the AlInGaAs/InP heterostructures. The laser heterostructures emitting at the wavelength 1.75–1.8 μm are fabricated by metal-organic chemical vapor deposition. Based on the heterostructures grown, high-power multimode laser diodes of the mesa-strip design with the maximum emission power 2.0 W in the continuous mode at room temperature and 20 W in the pulsed operation mode are fabricated. The internal optical losses in the lasers were reduced to 2.2 cm^?1.     

High-power laser diodes based on asymmetric separate-confinement heterostructures

Asymmetric separate-confinement laser heterostructures with ultrawide waveguides based on AlGaAs/GaAs/InGaAs solid solutions, with an emission wavelength of ～1080 nm, are grown by MOCVD. The optical and electrical properties of mesa-stripe lasers with a stripe width of ～100 μm are studied. Lasers based on asymmetric heterostructures with ultrawide (>1 μm) waveguides demonstrate lasing in the fundamental transverse mode with an internal optical loss of as low as 0.34 cm^?1. In laser diodes with a cavity length of more than 3 mm, the thermal resistance is reduced to 2°C/W, and the characteristic temperature T ₀= 10°C is obtained in the range 0–100°C. A record-breaking wallplug efficiency of 74% and an output optical power of 16 W are reached in CW mode. Mean-time-between-failures testing for 1000 h at 65°C with an operation power of 3–4 W results in the power decreasing by 3–7%.     

A novel SAL-PINSCH quantum-well laser structure for a pinched beamdivergence

Summary form only given. An edge-emitting strained AlGaAs/InGaAs/GaAs quantum-well laser structure is reported. It has a periodic index separate confinement heterostructure (PINSCH) optical confinement layers for a small beam divergence and high output power. Preliminary measurements of AR/HR-coated self-aligned ridge waveguide lasers show a CW output power of up to 350 mW and a 20° transverse beam divergence at a 980-nm lasing wavelength. This low beam divergence results in a high coupling efficiency of 51% into single-mode fibers. The expanded optical field in PINSCH confinement layers significantly pinches the transverse beam divergence and increases the maximum output power