新型移相量块干涉仪的研制

研制了一台用于0.5~100 mm量块测量的新型移相量块干涉仪,分别以波长为633 nm和543 nm的两台稳频激光器作为测量光源,通过一根单模光纤引入到干涉仪内。高精密移相器实现5步移相干涉测量,CCD相机采集干涉条纹并计算干涉条纹小数,被测量块长度采用多波长的小数重合法计算。移相量块干涉仪的测量不确定度达到U=0.015μm+0.07×10~(-6)L(L为量块长度,mm)。     

可调合成波长链绝对距离干涉测量

本文提出一种利用半导体激光器的波长调谐特性实现的可调合成波长链绝对距离干涉测量方法 ,针对不同的待测距离 ,可选择不同的合成波长链 ,完成对待测距离的由粗测到精测的整个过程。文中基于这种方法构建了干涉测量系统 ,该系统利用压电陶瓷调制的在一条直线上的两个双光束干涉仪 ,使待测距离被包含于一个交流信号的相位项中 ,从而使小数条纹的测量转化为相位测量 ,合成波干涉条纹的小数级次由单波长干涉信号的相位测量值计算得到。文中以外尺寸测量为例描述了实验装置 ,实验结果表明 ,在现有的测量系统和实验条件下 ,待测距离小于 5mm时的测量极限偏差优于 2 0μm。     

双波长激光量块干涉仪研制

本文介绍了双波长激光量块干涉仪的工作原理,详细描述了仪器的光学,机械设计以及干涉图象处理和量块中心长度自动判读技术,该干涉仪满足1等量块的测量不确定度要求,目前已用于高等级量块的自动化测量。     

半导体激光端点干涉长法原理探讨

阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别二其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入的研究的问题。     

引入平板系统对量块长度测量结果的影响

以光谱辐射线的波长作为标准、以光波干涉条纹小数部分重合的原理设计的光波干涉仪、用直接测量的方法测量量块长度时，必须引入一系列大孔径（Φ≥５０ｍｍ）的平板干涉系统，本文讨论各平板各自的平面度在干涉仪光学系统中的相互叠加对量块长度的测量结果的影响     

半导体激光端点干涉测长法原理探讨

阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别于其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入研究的问题。     

双波长激光量块干涉仪减小量块中心长度测量不确定度的措施

该文总结了双波长激光干涉仪研制过程中减小量块中心长度测量不确定度的几项重要措施,该干涉仪对量块中心长度的测量不确定度达到(0.02±0.2L)μm,并已成功应用于高等级量块的自动测量。     

试析光干涉测量几何长度的相对不确定度极限

随着稳频激光和现代干涉仪的发展，光波波长在空气中的不确定性已成为限制用光学方法测量几何长度相对不确定度的主要因素。本回顾了现代干涉测长精度的提高；探讨了用Ｅｄｌｅｎ公式修正空气中波长及其在高精度实际应用中的限制，用折射率干涉仪修正空气中波长的技术关键和可达到的精度极限；最后介绍了在真空中测长的实用性以及可能达到的精度。     

光谱共焦传感器多参数高准确度校准

针对高准确度光谱共焦传感器缺乏相应校准装置及方法的问题,提出了一种基于激光干涉测量的校准方法,并研制了相应的校准装置。一方面,提出了一种波长倍数间隔测量法,通过位移反馈控制将位移间隔设置为激光波长的整数倍,以减小激光干涉仪非线性误差对测量的影响;另一方面,提出了测点修正算法,消除了受检点处位移标准值因校准装置定位准确度限制不重合对测量的影响。实验结果表明：在0～100μm的测量范围内,示值误差为±23 nm,重复性为5 nm,示值误差测量结果的扩展不确定度U₂=7.0 nm(k=2)。构建的校准装置在0～50 mm的测量范围内的示值误差测量结果不确定度为U₁=3.0 nm+2×10^-7L(k=2)。     

标准环规溯源问题探讨

提出一种新的标准环规溯源方法。用 63 3 nm和 5 43 nm激光 ,通过干涉测量和小数重合法 ,得到标准环规内尺寸 ,其不确定度可以达到或优于 0 .0 5μm 0 .5× 10 - 6 L     

Multiple wavelengths in oblique-incidence interferometer for rough-surface measurement using laser diodes

Abstract

Two interferometers for the measurement of the topography of rough surfaces using laser diodes and oblique incidence are described. Phase stepping is accomplished by using the wavelength shift. The compensations of the dispersion of the prism when multiple wavelengths are used in the interferometer is described. The effective wavelength for the interferometer with one wavelength is 4.3 μm and with the multiple wavelength it is 106 μm, allowing the measurement of objects with different surface roughnesses.     

Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement

An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to +/- 140 microm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.     

Heterodyne wavelength meter for continuous-wave lasers

A wavelength meter based on a heterodyne interferometer is presented. A single-wavelength test laser beam is modulated to two orthogonal linearly polarized components with different frequencies by a pair of acousto-optic modulators. Then the modulated laser beam and a two-wavelength laser beam are sent to a heterodyne interferometer in a common path. The ratio of two laser interference phase shifts in the heterodyne interferometer is equal to the ratio of their wavelengths. The heterodyne technique measures the heterodyne interference phase but not the interference intensity, which means that it could measure a light source whose intensity is not stable. The heterodyne interference signal is an alternating signal that can easily magnify and process the circuit that makes up the heterodyne wavelength meter and could be used to measure the low-intensity light source even when there are environmental disturbances. A tunable diode laser wavelength range of 630-637 nm has been measured to an accuracy of 5 parts in 10(7).     

Length Determination of a Fixed-Path Cylindrical Resonator with the Dual Wavelength Laser Interference Method

The length is one of the key parameters for a cylindrical acoustic resonator used for measurement of the Boltzmann constant. A research project has been conducted in the National Institute of Metrology (NIM), China, for the re-determination of the Boltzmann constant with a fixed-path cylindrical acoustic resonator. This paper describes the procedure for the length determination. The excess fraction method was applied to accurately obtain the length of the resonator. This method is performed in a two-step procedure. First, the length is coarsely determined as L ₁ with an uncertainty of 1.5 ??m in the length division of NIM. Second, the result of the coarse measurement is further interpolated by the dual wavelength laser interferometer with a resolution of 1 nm, which is composed of a 633 nm He?CNe laser and a 657 nm semiconductor laser. A Michelson wavemeter has been constructed for calibration of the wavelength of the semiconductor laser. The length variation of the resonator has to be measured from room temperature to the triple point of water (TPW). As a result, the laser interferometer can be also used as a precise dilatometer. The result and the measurement uncertainty of the length measurement are given in this paper.     

The Extension of the Electronic Speckle Photography to the Measurement of In-Plane Displacement

In this paper, a modified speckle photography technique is demonstrated for the measurement of a variable range of the in-plane displacement. The modification focuses on coupling the diode pump solid state laser DPSS with the conventional speckle photography technique. The DPSS laser emerges different wavelengths to provide speckle patterns of suitable size to measure the desired range of the in-plane displacement. The second harmonic generation in a nonlinear crystal of wavelength 532 nm and the principle diode laser wavelength 808 nm are employed in identifying the object positions within a lateral displacement made by a standard linear stage in the range from few microns up to 1.2 mm. The sensitivity and the correlation of the speckles formed by both wavelengths suit both small and large movements. A continues measurement by the modified technique can be achieved by identifying a scale factor in the uniform area in which both wavelengths are effective, and high correlation between the results obtained by 532 and 808 nm is maintained. The uncertainty in measuring 1.2 mm lateral movement by the modified speckle photography is found to be 26.8 μm.     

Beam displacement as a function of temperature and turbulence length scale at two different laser radiation wavelengths

Narrow laser beams directed from aircraft may at times pass through the exhaust plume of the engines and potentially degrade some of the laser beam characteristics. This paper reports on controlled studies of laser beam deviation arising from propagation through turbulent hot gases, in a well-characterized laboratory burner, with conditions of relevance to aircraft engine exhaust plumes. The impact of the temperature, laser wavelength, and turbulence length scale on the beam deviation has been investigated. It was found that the laser beam displacement increases with the turbulent integral length scale. The effect of temperature on the laser beam angular deviation, σ, using two different laser wavelengths, namely 4.67 μm and 632.8 nm, was recorded. It was found that the beam deviation for both wavelengths may be semiempirically modeled using a single function of the form, σ=a(b+(1/T)(2))(-1), with two parameters only, a and b, where σ is in microradians and T is the temperature in °C.     

Axial-scanning low-coherence interferometer method for noncontact thickness measurement of biological samples

We investigated a high-precision optical method for measuring the thickness of biological samples regardless of their transparency. The method is based on the precise measurement of optical path length difference of the end surfaces of objects, using a dual-arm axial-scanning low-coherence interferometer. This removes any consideration of the shape, thickness, or transparency of testing objects when performing the measurement. Scanning the reference simplifies the measurement setup, resulting in unambiguous measurement. Using a 1310?nm wavelength superluminescent diode, with a 65?nm bandwidth, the measurement accuracy was as high as 11.6?μm. We tested the method by measuring the thickness of both transparent samples and nontransparent soft biological tissues.     

半导体激光端点测长干涉仪实验系统

半导体激光端点干涉测长法是利用半导体激光频率调制特性的一种在长度的两个端点干涉测量长度的新方法。本文介绍基于这种测长方法研制的半导体激光端点测长干涉仪实验的基本原理,构成,定标方法和测量结果。     

A new optical wavelength ratio measurement apparatus: the fringecounting sigmameter

A new, compact and achromatic Michelson-type interferometer with a variable path difference is presented. This “fringe-counting” sigmameter allows measurement of optical wavelength ratios between a laser of unknown wavelength and a reference laser of known wavelength. This apparatus, maintained in a vacuum, measures interference order variations in two stages: integer counting of around 400000 and fractional counting (also called “excess fraction”) with an uncertainty of 10^-3. From these measurements, this “sigmameter” can determine laser wavelength from 0.36 μm to 1.5 μm with an accuracy of 1.10^-8 using a reference stabilized He-Ne laser     

Bismuth-based Brillouin/erbium fiber laser

A multi-wavelength Brillouin/erbium-doped fiber laser (BEFL) operating in the 1573 nm region is proposed and demonstrated. The system employs both linear and nonlinear gain from a bismuth-based erbium-doped fiber (Bi-EDF) approximately 215 cm long and a single mode fiber (SMF) of various lengths to generate an optical comb with a spacing of approximately 0.089 nm. Two 3 dB couplers were used to form a looping arm in the system in order to produce cascaded Brillouin Stokes waves as internal feedback for multi-wavelength operation. A stable output laser comb with 10 lines at more than ??13 dBm was obtained with 4.85 dBm Brillouin pump power and two 140 mW pumps at 1480 nm. The 1480 nm pumps' power and SMF length have a significant effect on the number of wavelengths and on the output power of the generated wavelength comb.