共查询到20条相似文献,搜索用时 234 毫秒
1.
设计了一种基于单惯性质量块的一体化结构三维加速度传感器。采用一种特殊结构的弹性体元件,实现了三维加速度量都利用剪切应变测量。利用有限元工具对传感器静态和动态特性进行了分析,给出了弹性体的应变分布、固有频率等。有限元分析计算和实验结果表明:所设计的传感器在3个正交方向上都有较高的灵敏度,各加速度分量互相干扰小。其交差灵敏度小于6.5%,非线性误差小于2%,固有频率大于1700Hz。 相似文献
2.
3.
针对六维加速度传感器在工作过程中其弹性体结构可能处于奇异位形的问题,以可重构六维加速度传感器的四种构型为例,分析了构型奇异与基座加速度之间的映射关系。首先,通过建立正向动力学方程和正向运动学方程,构建了基座加速度与质量块相对位姿之间的函数关系。接着,基于Gosselin奇异分析法,推导了弹性体结构的雅可比矩阵,并绘制了奇异曲面散点图。进一步地,分析了质量块的质量与奇异曲面之间的关系。结果表明,12-4、12-6构型可适用较大的加速度范围,而9-3、9-4构型可适用的加速度范围相对较小。研究结论及方法为六维加速度传感器的构型选择及参数优化提供了理论基础。 相似文献
4.
5.
6.
为了改善现有六维力传感器的动态性能,提出了一种新型的六维力传感器弹性体结构。建立了结构模型,并采用有限元方法进行了静力学分析以及模态分析,分析了该传感器弹性体在各工况下的应变分布特征;随后对弹性体的关键尺寸参数进行了详细的设计,基于响应面分析法对数值计算结果进行拟合,建立了各工况下响应值与弹性体关键尺寸的回归方程。分析结果表明,该传感器具有良好的动态性能,其一阶固有频率高达3196.3 Hz,各个力分量的灵敏度均有提高,其中x方向力的灵敏度提高了26.09%。通过实验验证了该设计方案的可行性,该传感器的研制为高速作业机器人用多维力传感器的发展奠定了基础。 相似文献
7.
8.
9.
10.
11.
12.
Single- and Triaxis Piezoelectric-Bimorph Accelerometers 总被引:1,自引:0,他引:1
This paper describes the novel single- and triaxis piezoelectric-bimorph accelerometers that are built on parylene beams with ZnO films. The unamplified sensitivity and the minimum detectable signal of the fabricated single-axis accelerometer are measured to be 7.0 mV/g and 0.01 g, respectively, over a frequency range from 60 Hz to subhertz. The linearity of the sensitivity as a function of acceleration is measured to be 0.9% in the full scale. A highly symmetric quad-beam bimorph structure with a single proof mass is used for triaxis acceleration sensing and is demonstrated to produce high sensitivity, low cross-axial sensitivity, and good linearity, all in a compact size. The unamplified sensitivities of the X-, Y-, and Z-axis electrodes (of the triaxis accelerometer) in response to the accelerations in X-, Y-, and Z-axes are 0.93, 1.13, and 0.88 mV/g, respectively. The worst-case minimum detectable signal of the triaxis accelerometer is measured to be 0.04 g over a bandwidth ranging from subhertz to 100 Hz. The cross-axial sensitivity among the X-, Y-, and Z-axis electrodes is less than 15% in the triaxis accelerometer. The theoretical analyses of the charge sensitivities and resonant frequencies along with the effects of residual stress on the charge sensitivities are presented for both the single- and triaxis accelerometers. 相似文献
13.
三轴高g加速度计的测试方法及实验研究 总被引:2,自引:1,他引:1
研究了高g加速度计的校准测试方法,并针对一种量程为105gn的三轴高g加速度计,测试标定了其主要性能参数。分别利用自由落杆绝对法和比较法测试了三轴高g加速度计的灵敏度;分析了影响交叉轴灵敏度测试的两种影响因素,进而分别指出了解决方法,并测试了其交叉轴灵敏度;通过提取叠加在主波上的锯齿波波形,测试出其谐振频率;最后利用东菱冲击机标定了三轴高g加速度计的非线性度。 相似文献
14.
Fiber Bragg grating accelerometer with enhanced sensitivity 总被引:4,自引:0,他引:4
N. BasumallickAuthor VitaeI. ChatterjeeAuthor Vitae P. BiswasAuthor VitaeK. DasguptaAuthor Vitae S. BandyopadhyayAuthor Vitae 《Sensors and actuators. A, Physical》2012,173(1):108-115
A cantilever based optical accelerometer with enhanced performance characteristics has been proposed. The sensitivity of the accelerometer has efficiently been enhanced by about twice as compared to the conventional design by tailoring the effective distance between the sensor axis to the neutral axis of the cantilever. The sensitivity enhancement has been done without affecting the characteristic resonant frequency of the system. A sensitivity of about 450 pm/g is achieved for a specific cantilever-mass arrangement. The architecture requires much simpler design as compared to optical accelerometers based on similar working principle and having sensitivities of this order. 相似文献
15.
通过实验研究了梳齿电容微加速度计器件在大过载冲击下的失效模式,发现了失效的主要原因是由于弹性梁的断裂,并对实验现象进行了分析和讨论,指出了微加工工艺的不确定性对器件失效的影响。检验了在结构设计中对可动质量块进行限位的作用,可以明显提高器件的抗冲击能力。提出了金属橡胶这一新材料在微加速度计冲击防护中的应用,并对其作用进行了实验验证,结果表明金属橡胶除了靠金属螺旋卷接触点之间的相互摩擦来耗散能量外,还可以明显增加冲击脉冲的宽度,有效的缓冲和吸收冲击能,提高器件的抗冲击能力和可靠性。 相似文献
16.
17.
加速度计是惯性导航系统测量载体加速度和影响惯性导航系统精度的主要元器件.为提高惯性导航系统的精度,在使用加速度计以前需要进行加速度计的标定测试[1].主要介绍了微机电(Micro Electro Mechanical Systems,简称MEMS)加速度计的六位置标定法,以便从MEMS加速度计的误差模型中分离出MEMS加速度计的各项标定参数.这些参数包括MEMS加速度计的标度因数、零位漂移以及安装误差系数.并且在得到MEMS加速度计的各项标定参数后将其封装在C函数中进行了验证实验.实验结果表明MEMS加速度计的六位置标定法的原理简单并且在工程应用中容易实现,所得到的MEMS加速度计的输出不但反映了MEMS加速度计的实际输出,而且使MEMS加速度计的线性度得到改善. 相似文献
18.
A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes 总被引:1,自引:0,他引:1
A three-axis capacitive accelerometer based on silicon-on-insulator is designed and fabricated. In the accelerometer, totally
eight groups of capacitors are compactly arranged around an octagonal proof mass. The four groups of capacitors along orthogonal
direction with in-plane comb electrodes detect XY acceleration, while the other four groups of capacitors along diagonal direction with vertical comb electrodes detect Z acceleration.
Measurements of in-plane and vertical motion by the respective in-plane and vertical comb electrodes enable direct detection
for all the three axes with differential capacitive sensing scheme. For the fabricated accelerometer in the size of 4 × 4 mm2, the capacitance sensitivities of in-plane and out-of-plane accelerometers are 145.3 and 9.1 fF/g, respectively. 相似文献
19.
20.
This paper presents a new micromachined z-axis accelerometer as well as a new method to sense the out-of-plane displacement capacitively via comb finger arrays. The new design built the z-accelerometer using eight folded beam suspension to minimize the off axis sensitivities in both the x- and y- directions. The proposed method implements the sensing electrode as a comb finger arrays surrounding the sensor. This method enables the realization of the sensor by bulk micromachining process, increases the sense capacitance and reduces the off-axis sensitivity. This process allows building the micromachined accelerometer with large inertial mass. This work introduces the design and simulation for this accelerometer. The introduced method results in a high sense capacitance as well as high sensitivity. The simulated sense capacitance is 19.6627 pF. The sensor sensitivity is 2.037 μm/g with a very small total noise equivalent acceleration of 3.096 μg/ $ \sqrt {Hz} $ . 相似文献