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硅橡胶具有生物兼容性好且制作技术与微细加工工艺兼容的优点,采用硅橡胶作为MEMS驱动器中的振动膜具有较好的应用前景。研究了一种微型电磁驱动器,由内嵌永磁体阵列的柔性硅橡胶(PDMS)振动膜和线圈两层构成,采用电镀工艺制作线圈层;采用电镀方法制作磁体阵列,由甩胶机旋涂硅橡胶并进行固化,制作内嵌磁体阵列的硅橡胶膜,对磁体磁化后可作为双向驱动器。对该驱动器进行了理论分析与数值模拟,采用有限元分析工具ANSYS对微驱动器的电磁驱动力及其挠度进行分析,二者结果基本一致,振动膜中心最大挠度的分析误差为7.96%,其一阶固有频率的分析误差为16.1%。 相似文献
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当前流行的硅基做加工技术主要有体微加工(bulkmieromachining)和表面做加工(sutheemic。achini。)两种。它们之间的主要区别为:前者将微机械的运动部件制作在硅衬底里,后者则将微机械运动部件制作在硅衬底表面上的薄膜里”健体微加工技术目前用体微加工技术制作的主要产品有:某些压力传感器、加速度传感器。微泵、微阀、微沟槽等微传感器、微机械和微机械零件等,这些产品的微结构的显著特点是它们都有可运动的悬臂梁或桥、可振动的膜或硅衬底里的沟槽。这些微结构的形成主要利用腐蚀技术和光刻技术相结合,有选择地从硅衬底上挖去… 相似文献
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多孔硅作为一种新型材料,利用其疏松多孔的特性及与IC加工的兼容性,将其用于硅微质子交换膜燃料电池的研究中,作为其电极扩散层,对多孔硅膜的性能、制备工艺及多孔硅膜表面金属淀积工艺进行了研究,提出一套基于MEMS加工技术和薄膜淀积技术的制作硅微质子交换膜燃料电池的工艺。 相似文献
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赵忆王家畴陈方李昕欣 《微纳电子技术》2015,(6):390-395
介绍了一种新型单片集成电容式三轴微加速度计的加工方法,该方法采用非绝缘体上硅(SOI)的单硅片单面加工技术,易于与IC工艺兼容,而且成本低廉,成品率高,适用于批量生产,可替代传统的SOI工艺。该方法主要利用硅深度反应离子刻蚀(DRIE)技术结合普通(111)单晶硅片内部可选择性横向自停止腐蚀技术制作并释放得到悬浮可动的敏感结构。此外,创新的锚点设计不仅使检测电极之间相互电学隔离,而且便于引线键合与封装。最后基于开环接口电路对加工制造的三轴加速度计进行了测试,验证了该工艺的可行性。 相似文献
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提出了一种具有"8悬臂梁-质量块"结构的新型三明治式硅微机械电容式加速度计,用微机械加工工艺在(111)硅片上制作出了具有信号输出的器件.该加速度计的惯性质量块由同一(111)硅片上下表面对称分布的8根悬臂梁支撑.这些悬臂梁是利用(111)硅在KOH溶液中的各向异性腐蚀特性结合深反应离子刻蚀(DRIE)实现的,其尺度精确可控,保证了结构的对称性.该加速度计的谐振频率为2.08kHz,品质因子Q为21.4,灵敏度为93.7mV/g. 相似文献
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《Mechatronics》2020
The precise manipulation of fluid through pumping systems has been the technological challenge in microfluidic applications. The biomedical applications call for precise and accurate delivery of fluid through miniaturized pumping systems. This paper presents a novel valveless micropump for biomedical applications operated by the Amplified Piezo Actuator. Integrating the disposable chamber and reusable actuator with the proposed micropump allows the actuator to be reused and eliminates the possibility of infection or contagion. The micropump was fabricated using low-cost polymeric materials like Polymethylmethacrylate (PMMA), Silicone rubber through CNC milling, Laser Cutting, conventional moulding operation. The micropump chamber, nozzle/diffusers, and a bossed diaphragm constituted disposable part and Amplified Piezo Actuator with structural support formed the reusable part of the micropump. The bossed diaphragm of the pump chamber consists of a central cylindrical protrusion to reduce the force of adhesion on the diaphragm and transmit force required for micropump actuation. A theoretical analysis was performed to assess the effect of diaphragm thickness and the bossed region on the effective stiffness of the diaphragm, which in turn influences the deflection achieved. Besides, an analytical approach has been presented to address the effect of adhesive force on the diaphragm surface due to the residual fluid and chamber depth. The experimental characterization of the micropump was carried out to determine the optimal performance parameters with water, fluids mimicking blood plasma, and whole blood. Based on the experimental results, the pumping rate and head developed by the micropump have been significantly affected by factors such as bossed ratio, diaphragm thickness, depth of the micropump chamber, and viscosity of the fluid. The optimum configuration of the micropump cosidered silicone rubber diaphragm with thickness of 0.20 mm having a bossed ratio of 0.33 and a chamber depth of 1.25 mm. With the optimal operating parameters of 150 V sinusoidal input of frequency 5 Hz, the proposed micropump was capable of delivering 7.192 ml/min, 6.108 ml/min, and 5.013 ml/min of water and blood plasma, whole blood mimicking fluid with the maximum backpressure of 294.00 Pa, 226.243 Pa, and 204.048 Pa respectively. The corresponding resolution, i.e., pumping volume/stroke of the micropump was about 23.972 µl, 20.358 µl, and 16.708 µl, respectively. 相似文献
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《Microelectronics Journal》2007,38(6-7):791-799
The construction of a novel valveless microimpedance pump is proposed and the utilized electromagnetic actuator is designed and optimized in this study. The actuating mechanism comprises an electroplated permanent magnet mounted on a flexible PDMS diaphragm and electroplated Cu coils located on a glass substrate. The electromagnetic force between the magnet and the Cu coils causes the diaphragm to deflect and then creates the accumulative effects of wave propagation and reflection at the junction of the compressible and rigid sections. The resulting pressure gradient in the fluid drives the flow from the inlet to the outlet of the micropump. The constituent parts of the electromagnetic actuator, namely the diaphragm, the microcoils, and the magnet are modeled and analyzed in order to optimize the actuator design. The design models are verified both theoretically and numerically and the relationships between the magnetic force, diaphragm displacement, and diaphragm strength are established. The magnitude of the magnetic force acting on the flexible diaphragm are calculated using Ansoft/Maxwell3D FEA software and the resulting diaphragm deflection simulated by ANSYS FEA software are found to agree with the theoretical predictions. Different diaphragm shapes are investigated and their relative strength and flexibility are compared. It is found that a circular PDMS diaphragm represents the most appropriate choice for the actuating mechanism in the micropump. The desired diaphragm deflection of 15 μm is obtained using a compression force of 16 μN, generated by a coil input current of 0.9 A. The diaphragm deflection can be regulated by varying the current passed through the microcoil and hence the flow rate can be controlled. The valveless microimpedance pump proposed in this study is easily fabricated and can be readily integrated with existing biomedical chips due to its plane structure. The results of the present study provide a valuable contribution to the ongoing development of Lab-on-a Chip systems. 相似文献
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A novel valveless micropump with electrohydrodynamic enhancement for high heat flux cooling 总被引:3,自引:0,他引:3
Integrated microchannel cooling systems, with micropumps integrated into microchannels, are an attractive alternative to stand-alone micropumps for liquid-cooled microchannel heat sinks. A new micropump design capable of integration into microchannels and especially suited for electronics cooling is presented. It combines induction electrohydrodynamics (EHD) with a valveless nozzle-diffuser micropump actuated using a vibrating diaphragm. A comprehensive numerical model of the micropump has been developed to study the combined effect of EHD and valveless micropumping. The numerical model has been validated using theoretical and experimental results from the literature. The flow rate achievable from the new micropump is presented and the effect of several key parameters on the micropump performance investigated. 相似文献
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Valery M. Dubin 《Microelectronic Engineering》2003,70(2-4):461-469
Major scaling issues, which need to be addressed to continue scaling according to Moore’s law, include increase of transistor leakage due to use of thin gate oxide (about 1 nm limit for SiO2), power (reaching 100 W/cm2) and RC delay (dielectric constant limit is 1 for air and Cu resistivity increases with scaling down the feature sizes). Integration of new materials and technologies will allow us to continue scaling and improve device performance. Examples of new materials include high-k dielectrics and strained silicon in the frond end of wafer processing, low-k carbon-doped oxide and electroplated copper in the back end of wafer processing as well as electroplated bumps, high thermal conductivity interface, heat sink and heat spreader materials in packaging. Electrochemical technologies will play an increasingly important role in silicon technology due to low cost, use of self-assembly processing and self-aligned growth ability. New electrochemical technologies in silicon processing include copper electroplating (replaced Al interconnect to reduce RC delay and increase reliability), bump electroplating (replaced wire bonding to allow increased I/O and improve reliability), and porous silicon for silicon on isolator fabrication (to reduce transistor leakage). Copper electroplating allows a low R, an excellent gap fill capability and superior materials properties with (111) textured Cu films and large grain size, and a stable and controlled process. 相似文献
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This study examined imprint lithography with a two-step Ni stamp to solve the laser process problems and simultaneously form a blind via and layer pattern. The Ni stamp was fabricated by electroplating on a dry-etched Si mold, made from a SOI (silicon on insulator) wafer, and pattern replication. For the pattern transfer of the Ni stamp, hot embossing was performed on SU8-coated BT and Si wafer substrates. The residual layer was of a uniform thickness with an embossed shape of acceptable squareness. 相似文献
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为了探究泵腔结构参数对压电气体隔膜泵性能的影响,该文设计了一种压电气体隔膜泵的泵腔结构。首先简述了泵腔的结构设计与工作原理,推导出泵腔出口气流速度的表达式,通过仿真得出泵腔高度、气孔直径对腔体内的瞬时气压、气流速度及气体流量的影响。最后制作了泵腔样机并应用在压电气体隔膜泵中,进行了实验测试及理论分析对比。结果表明,实验结果与理论分析相吻合,输出流量随着腔高的增大而减小,随着气孔直径的增大而增大,这为压电气体微泵的腔体设计提供了理论参考。 相似文献
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Zhang Q. Zhang J. Yu M. Tan C. W. Lo G.-Q. Kwong D.-L. 《Photonics Technology Letters, IEEE》2010,22(5):269-271
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Bing-Liang Chen Pao-Cheng Huang Ling-Sheng Jang Ming-Kun Chen 《Microelectronics Reliability》2012,52(6):1080-1085
A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type. 相似文献