光学面形绝对检测的数字干涉新方法

本文提出一种光学面形绝对实时检测与控制的新方法。从干涉图中可将干涉仪的系统误差与参考面误差分离出来,从而高精度地、实时地获得被检面的绝对数据。这对光学加工,实时检测以及提高光学系统质量具有理论和实际意义。本文给出实测结果,其测量精度可达到λ/50∽λ/100。     

半导体双波长透射式红外干涉仪的研制及应用

采用635nm波长半导体可见光激光和10.5μm波长半导体红外激光作为干涉光源,设计了635nm和10.5μm双波段共光路透射式红外干涉仪,实现了可见光波段干涉测试与红外光波段干涉测试共光路,且双光路共用可见光对准。双波段共用机械式相移系统,并采用635nm测试光分段驻点标定10.5μm测试时相移器的长行程误差。研制的双波长红外干涉仪系统的红外测试精度达到PV优于0.05λ,RMS优于0.02λ,系统重复性RMS优于0.001λ。采用该干涉仪测试口径为400mm×400mm,离轴量为800mm的离轴非球面,得到边缘最大偏差值为21.9μm,能够实现大口径离轴非球面从粗磨到精磨高精度加工面形的全过程干涉测试。     

泰曼-格林型静态便携式干涉仪的设计

基于经典泰曼一格林干涉理论提出了一种改进的干涉仪光路设计方案.与经典干涉理论对比,该方案具有共光路、结构紧凑、对环境因素不敏感、系统使用效率高等特点.通过对光学系统及标准平面的优化设计,其理论精度极值档(PV)<1/12λ(λ=632.8 nm).对具体的光学系统、微调机构组件进行了三维设计,对干涉仪进行了实际装配调整,并与Moiler像移式干涉仪做了比对测试实验,结果表明,该小型干涉仪的实际测量精度PV值<1/10λ.     

Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜

针对大口径非球面反射镜在研磨阶段后期其面形与理想面形存在较大偏差,且表面粗糙度较大、反射率较低,采用轮廓仪和普通干涉仪检测无法满足测试要求等问题,提出采用动态范围大且精度高的Shack-Hartmann波前传感器来检测大口径非球面反射镜.研究分析了Shack-Hartmann波前传感器检测系统的原理及系统误差并编写了相应的数据处理软件.为了验证该方法的可行性,对已经加工完成的350 mm口径旋转对称双曲面面形进行了检测,测量得到的面形误差PV值、RMS值分别为0.388λ、0.043λ(λ=632.8 nm);与干涉测量的标准结果进行了对比,得到的面形偏差PV值、RMS值分别为0.014λ和0.001λ.对比结果表明,Shack-Hartmann波前传感器的测量结果正确可靠,从而验证了Shack-Hartmann波前传感器检测大口径非球面反射镜的可行性.     

非等臂Twyman干涉仪准直物镜的系统误差

用波面变形传播观点讨论了非等臂Twyman干涉仪中准直物镜的系统误差。准直物镜造成的系统误差与干涉仪两光臂平均光程长度的差、以及准直物镜波面像差的平方成正比。     

基于光强自标定移相算法检测光学面形

考虑菲佐型波长移相干涉仪中波长可调谐激光器光强与调节电压之间的关系会对相位计算精度造成影响,本文提出了一种基于光强自标定的波长移相算法。首先,分析了波长可调谐激光器调节电压与输出光强之间的关系,建立了数学模型;然后,依据最小二乘判据,推导出了波长移相干涉仪的光强自标定移相算法。最后,实施了仿真实验,通过计算机生成背景光强具有一定变化的12幅干涉图,利用所提出的算法进行了相位恢复。结果表明,提出的算法可以很好地免疫激光器的光强变化,实现高精度的相位恢复。对口径为100mm的平面镜的测量结果显示RMS为0.005λ,PV为0.073λ。与ZYGO干涉仪测量结果的比较显示,两次测量面形的偏差RMS为0.0014λ,PV为0.022λ。得到的结果证明了算法的可行性及在菲佐型波长移相干涉仪中的实用性。     

变剪切干涉仪及干涉图形的波面转换计算

本文首先对剪切干涉灵敏度进行讨论,得出宜用变剪切干涉仪进行检测的结论。通过各种形式的变剪切干涉仪,确定了立方棱镜变剪切干涉仪是适用于实际检测的。利用推导出的剪切波面参数之间的关系,得到了这种棱镜参数的选择公式。用这种干涉仪,成功地进行了实际检测。在波面重构方法中,首次引入最佳参考球的概念,得出合理的定量计算结果。通过对剪切棱镜的误差分析,给出该干涉仪精度为λ/30的结果。     

数字莫尔移相干涉仪误差多点标定与修正研究

干涉测量在现有的光学元件面形检测方法中具有测量精度高的优势,应用相对广泛。但干涉仪元件的加工和装调误差会降低面形检测精度。提出一种利用夏克哈特曼波前传感器对实际干涉仪系统进行多点标定的方法,利用波前标定数据在光学设计软件ZEMAX中实现对虚拟干涉仪系统的修正,结合数字莫尔移相算法,消除实际干涉仪加工和装调误差的影响。选取平面镜和可变形镜作为待测镜分别进行面形测量实验,结果表明,标定和修正后的数字莫尔移相干涉仪系统检测精度提高,与Zygo干涉仪的检测结果相比,面形趋势保持一致且峰谷值(PV)值误差相差在0.07λ(λ=532 nm)以内。     

大口径高次、离轴非球面干涉测量中投影畸变的标定方法

提出了运用干涉仪的Fiducial功能确定干涉仪CCD的测量坐标系与非球面镜面坐标系的对应关系,然后对两者关系进行正交化拟合,从而标定出非球面干涉检验中的投影畸变,并用于某高次、离轴非球面进行干涉检验中的投影畸变标定,拟合精度为1.964 53μm.根据标定结果对干涉测量面形图重构,进行了数控抛光实验,最终面形精度达到均方根值λ/20(λ=0.632 8 μm),证明拟合精度完全满足数控抛光的要求.     

光学系统的杂光计算分析

探讨了光学系统杂光分析方法,[提出了鬼像判别依据,在修改小镜面散射理论中几何遮挡因子(Geometrical Masking-shadowing Factor)基础上,抽象出光学系统中表面粗糙度σ_m/λ≥1.0,的表面双向反射分布函数(BRDF)模型,同时应用矢量微扰理论给出表面粗糙度σ_m/λ<<1.0的 BRDF 模型,并编制杂光分析程序     

Measurement of a Michelson Interferometer Mirror Velocity

ABSTRACT

This article documents the design, construction, and implementation of a time interval analyzer (TIA) for measurement of the mirror velocity in a Michelson interferometer. The TIA, a precision counter measures the dynamic variation in the time intervals (i.e. frequency) of a signal. The helium-neon (HeNe) laser signal from the servo mirror control circuitry of a Michelson interferometer provides a nearly constant frequency source. The HeNe signal frequency is directly proportional to the interferometer mirror velocity. A constant mirror velocity is crucial to the proper operation of a Michelson interferometer which modulates the infrared radiation in a Fourier transform spectrometer. The TIA permits a critical evaluation of velocity variations in a single interferometer mirror scan via the time interval analysis of the HeNe laser signal.     

An Infrared Interferometer for Studying a Plasma-Filled Relativistic Diode

An infrared interferometer built according to the Mach–Zehnder design without a frame is described. The interferometer was used in measurements of the plasma-density dynamics inside a plasma-filled diode under conditions of intense vibrations. Such measurements can be performed under conditions of a quite short plasma lifetime, compared to the characteristic vibration period of the interferometer elements.     

A Dispersion Interferometer Based on a CO<Subscript>2</Subscript> Laser

A double-pass dispersion interferometer based on a 9.6-μm CO₂ laser with a sensitivity of 〈 n _e l〉_min ∼ 1 × 10¹³ cm⁻² and a temporal resolution of ∼50 μ s, designed to measure linear plasma density, is described. A ZnGeP₂ nonlinear crystal is used as the frequency doubler. The main advantages of the interferometer are its compactness and a low sensitivity to vibrations of optical elements. The interferometer requires no special vibration isolation. Its main components are arranged compactly on an optical bench outside the apparatus, except for a window for radiation injection and a retroreflector; these are mounted on the wall of the experimental facility's vacuum chamber. The advantages of the dispersion interferometer have been demonstrated in an experiment with a gas-dynamic trap. __________ Translated from Pribory i Tekhnika Eksperimenta, No. 5, 2005, pp. 96–106. Original Russian Text Copyright ? 2005 by Solomakhin, Bagryanskii, Voskoboinikov, Zubarev, Kvashnin, Lizunov, Maksimov, Khil'chenko.     

An infrared interferometer for investigating subthermonuclear plasma in the GOL-3 multimirror trap

A simple Michelson CO₂ interferometer for measuring the high-temperature plasma density within one interference fringe (n _e l = 10¹⁶ cm^?2) at two points (0.8 and 9.0 m) of the long (L = 12 m) GOL-3 corrugated trap was used. A piezoelectric element that provides displacements of the mirror in the reference arm of the interferometer is used to calibrate the interferometer and perform remote control of the initial measurement phase. The interferometer is manufactured from dielectric materials, thus excluding a mechanical action of stray magnetic fields on its elements. The time resolution of the interferometer is determined by a HgCdTe diode and equals ??1 ns. The sensitivity of the interferometer is ??5 × 10^?4 of a fringe (n _e l = 2 × 10¹³ cm^?2).     

使用红外干涉仪测量非球面面形

提出用红外干涉仪在长波工作(λ=10.6μm)的优点检测非球面面形。首先,通过移相算法,使用泰曼型红外干涉仪测量出非球面与标准拟合球面之间的波像差;然后,根据非球面的矢高方程计算出非球面与标准拟合球面之间波像差的理论值,通过比较这两个值,计算出非球面的面形偏差。实验结果表明,使用红外干涉仪测量的非球面与标准拟合球面之间的波像差为8.64μm(PV),与理论波像差(8.11μm)比较接近,测得非球面面形偏差为1.20μm(PV)。为了验证这一方法的准确性,使用计算全息图(CGH)作为补偿镜在可见光干涉仪上测量了同一块非球面,两者测量结果比较吻合。结果表明,此方法有比较强的通用性,可以用于非球面在加工过程中的测试。     

NSTX far infrared tangential interferometer/polarimeter electronics upgrade

New electronics for the multichannel far infrared tangential interferometer/polarimeter system employed on the National Spherical Torus Experiment (NSTX) have greatly extended its capability to monitor high frequency density fluctuations. Such measurements are essential in understanding transport physics issues in NSTX as well as for the coming ITER device. The electronics, which were previously limited to ～250?kHz, have been upgraded with a video bandwidth that extends to 4 MHz when operating as an interferometry-only configuration, and to ～500?kHz when operating as a simultaneous interferometer/polarimeter system. Experimental details and test results of the new electronics are presented.     

An interferometer with time-and-frequency signal compression for studying properties of materials in shock wave experiments

A two-channel infrared (1.55 μm) laser interferometer intended for measuring velocities of free surfaces in shock-wave experiments is described. Characteristics of the device and comparison results with the VISAR interferometer are given. A combination of Photonic Doppler Velocimetry (PDV) and PDV-Pivot interferometric schemes allows one to implement operation in four different modes and efficiently use capabilities of up-to-date digital oscilloscopes. A 4-GHz bandwidth oscilloscope enables one to measure velocities in a range of 0–6 km/s. The proposed interferometer is efficient for studies of the properties of structural materials, inner ballistics, detonation kinetics, and projectile ability of explosives.     

Mirror Velocity Sampling Errors in a Michelson Interferometer

ABSTRACT

Mirror velocity variations in a continuous mirror drive Michelson interferometer result in erroneous interferogram sampling. The effects of both systematic and random mirror fluctuations are evaluated. Four methods of evaluation provide a means to quantify the importance of mirror velocity errors in the Fourier spectrometer's performance as a spectroradiometer. The four methods are time interval signal analysis, sine wave test, optical chopper modulation, and examination of consecutive interferograms. Examination of consecutive interferograms includes the monitoring of a constant blackbody infrared radiation source as well as an interposed ammonia sample cell for wavenumber axis registration. Each method furnishes a known input to the interferometer modulation equation (i.e. 2uv=f) and permits an internal validation of the interferometer mirror velocity evaluation results.     

光纤傅里叶变换光谱术在光纤光栅传感解调中的应用

介绍了光纤Mach-Zehnder干涉仪的基本原理和光纤傅里叶变换光谱仪(FFTS)的结构;基于光纤Mach-Zehnder干涉仪,采用傅里叶变换光谱算法对光纤Bragg光栅传感器的波长进行了解调。宽带光源发出的光经过光纤耦合器进入光纤Bragg光栅,其反射光由耦合器返回进入到FFTS中进行测量,FFTS的最高光谱分辨率达到0.05 cm-1,即在近红外1 550 nm波长处分辨率为0.012 nm。分别对光纤Bragg光栅的应变特性和温度特性进行了测量。测量显示:光纤Bragg光栅的应变灵敏度为0.833 pm/με,温度灵敏度为19.78 pm/℃。得到的结果表明FFTS系统具有高分辨率、大测量范围的特点,可满足光纤Bragg光栅传感器波长解调的需求。