掩模投影成像干涉光刻研究

掩模投影成像干涉光刻技术以在很小或几乎不增加光刻系统成本的基础上来提高光刻分辨率为目的,充分利用系统的有限孔径,将掩模图形不同的空间频率分别进行传递,最终以高分辨率对掩模成像。本文阐述了IIL的基本原理,介绍了一种实验系统,并给出了部分模拟和实验结果。研究结果表明,掩模投影成像干涉光刻技术比传统投影光刻能够得到更高的光刻分辨率。     

空间太阳望远镜成像镜调焦机构设计与分析

 根据空间太阳望远镜成像调焦的要求，设计了一成像镜调焦机构。给出了设计的基本原理及设计方法，即步进电机驱动滚珠丝杠，丝杠通过连接杆和转向关节带动内筒，并根据设计加工制作了实物缩尺模型，进行了误差分析，最后给出了机构在锁定状态，16g重力加速度作用下的力学分析。     

Measurement and calibration of interferometric imaging aberrations

Phase-shifting interferometry is the standard method for testing figure error on optical surfaces. Instruments measuring spheres and flats are readily available, but the accurate measurement of aspheres requires null correction. One problem with the general (nonull) testing of aspheres is the loss of common path. Systematic errors are introduced into the measurement by the fringe imaging optics. The sources and types of error are reviewed, as well as their effect on a wave-front measurement. These nonnull errors are predicted generally, with third-order analytic expressions derived for a tilted or a defocused test surface. An interferometer is built to test the expressions. The imaging system is a single lens, nominally image telecentric. Measurements are performed on a test surface defocused from -5 to 5 mm. The resulting measurement bias is shown to be in good agreement with third-order aberration theory predictions.     

Improved interferometric detection of scattered light with a 4f imaging system

We analyze the performance of three imaging systems to detect near-forward scattered light interferometrically by using a Mach-Zehnder geometry. The alignment of each system is demonstrated by measurement of the heterodyne efficiency and correlation of the angular width and field 1/e radius measurements of the sample beam. Measurements of angular-scattering data demonstrate the range of angles over which each system is effective. Of the three systems analyzed, the 4f imaging system is determined to be most effective, because it accurately reproduces both the phase and the amplitude of the scattered field at the detector.     

天文学自适应光学成像望远镜的模拟

为分析天文学自适应光学(AO)望远镜中AO系统的校正性能,利用Matlab仿真其成像过程。采用正交基为Zernike多项式的自相关法产生符合大气统计特性的大气相位屏,仿真平行光通过大气后的瞬时畸变波前相位;采用快速傅里叶变换仿真哈特曼-夏克波前传感器的成像光斑,根据实际成像与参考平面波成像的质心坐标之差,计算波前传感器子孔径内的平均波前斜率。模拟比较了1.2m望远镜两种AO系统布局的校正性能,结果表明,子孔径为正六边形AO系统的校正性能略优于子孔径为正方形AO系统的校正性能,两种AO系统的SR比(StrechlRatio)分别为0.872和0.859。     

Correction for detector uniformity of a gamma-ray telescope using coded aperture imaging

A hard X-ray/medium energy gamma-ray telescope is being developed using coded aperture imaging. The image recorded on the detector has to be corrected before being cross-correlated, because it suffers from nonuniformity which generates large defects in the reconstructed image. A correction method has been developed and tested with the help of a laboratory model of the experiment.     

Charge collection imaging of a monolithic DeltaE-E telescope for radiation protection applications

The development of microdosimeters and particle telescopes is important for risk assessment in space and aviation applications. The charge collection properties of a monolithic particle telescope, suitable for both microdosimetry and fluence based approaches, were studied using an ion microprobe.     

Characterization of the supermirror hard-x-ray telescope for the InFOCmuS balloon experiment

A hard-x-ray telescope is successfully produced for balloon observations by making use of depth-graded multilayers, or so-called supermirrors, with platinum-carbon (Pt/C) layer pairs. It consists of four quadrant units assembled in an optical configuration with a diameter of 40 cm and a focal length of 8 m. Each quadrant is made of 510 pieces of coaxially and confocally aligned supermirrors that significantly enhance the sensitivity in an energy range of 20-40 keV. The configuration of the telescope is similar to the x-ray telescope onboard Astro-E, but with a longer focal length. The reflectivity of supermirrors is of the order of 40% in the energy range concerned at a grazing angle of 0.2 deg. The effective area of a fully assembled telescope is 50 cm2 at 30 keV. The angular resolution is 2.37 arc min at half-power diameter 8.0 keV. The field of view is 12.6 arc min in the hard-x-ray region, depending somewhat on x-ray energies. We discuss these characteristics, taking into account the figure errors of reflectors and their optical alignment in the telescope assembly. This hard-x-ray telescope is unanimously afforded in the International Focusing Optics Collaboration for muCrab Sensitivity balloon experiment.     

1.8 m太阳望远镜偏振标定单元设计

中国1.8 m太阳望远镜(Chinese large solar telescope, CLST)致力于对太阳偏振的高精度及高灵敏度测量。然而其系统本身会引入仪器偏振, 并且在望远镜运行的过程中, 仪器偏振会随其指向的变化而变化。这就降低了系统的测量精度。因此, 需要一个偏振标定单元对其仪器偏振进行标定。为此, 本文对偏振标定的原理和方法进行了研究, 并且给出了针对CLST的偏振标定单元设计方案。     

Influence of Seidel distortion on combining beams from a phased telescope array

When beams from an array of afocal telescopes are presented to a beam-combining telescope, tilt errors of the beam wave fronts with respect to the combined wave front place limits on the achievable field of view (FOV); these limits, to the best of our knowledge, have not previously been correctly described in the literature. We show that if the front-end telescopes have just the right Seidel distortion coefficient, then tilt error does not limit the FOV. If this is not the case, at least small FOV's can still be obtained, even if the FOV is not centered on the on-axis direction.     

Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

A noncontact, nonmechanical scanning, wide-field spectral interference microscope is developed for simultaneous measurement of three-dimensional step-height of discontinuous objects and tomographic imaging. A superluminescent diode (SLD) is used as a broadband light source and a liquid-crystal Fabry-Perot interferometer (LC-FPI) as a frequency-scanning device. By means of changing the injection current to the SLD, the spectral profile of the SLD is equalized, and a constant light input to the interferometer is achieved over the entire frequency-scan range. The Fourier-transform technique is used to determine both the amplitude and the phase of spectral fringe signals. Three-dimensional height distribution of a discontinuous object is obtained from the phase information, whereas optically sectioned images of the object are obtained either from the amplitude information alone or from the combination of both the amplitude and phase information. Experimental results with submicrometer resolution are presented for both step-height measurement and tomographic sectioning.     

Analytic diffraction analysis of a 32-m telescope with hexagonal segments for high-contrast imaging

Large segmented telescopes cannot be modeled accurately with fast-Fourier-transform techniques since small features such as gaps between the segments will be inadequately sampled. An analytic Fourier-transform method can be used to model any pupil configuration with straight edges, including tolerance analysis and some types of apodization. We analytically investigated a 32-m segmented primary with 18 hexagonal segments for high-contrast imaging. There are significant regions in the image in which extrasolar planets could be detected. However, the hexagonal profile of the pupil was not as useful as expected. The gaps between the segments, the secondary obscuration, and the secondary spiders must be as small as possible and their edges must be apodized. Apodizing the edges of the individual segments reduced the useful regions in the image since the gaps appeared to be wider.     

The chemistry of micrometeoroid and space debris remnants captured on hubble space telescope solar cells

Prior to the retrieval in 1993 from low Earth orbit (LEO), the “—V2” Solar Array wing of the Hubble Space Telescope was exposed to hypervelocity impacts (micrometre to millimetre scale) from both micrometeoroids and space debris. The initial survey of the damage (100–3500μm diameter sized craters) identified that micrometeoroid remnants dominated the flux in the 100–1000μm size regime, with debris dominating>1000μm. These residues were composed of remnants of silicate minerals, calcite, metal sulfides and metals that often appeared as complex poly-mineralic melts within melt pits. A further survey of 10–100μm diameter craters identified that the most common chemistry was space debris with the crossover from meteoroids to debris being at around 30μm D_CO. Residues include remnants of specialised steels and paint fragments but the dominant type is aluminium and aluminium oxide, which are almost certainly remnants of solid rocket motor operations. It is found that the relative contribution of debris as a function of size, agrees remarkably with a prediction derived using flux data from Long Duration Exposure Facility and a meteoroid model.     

Solid-immersion imaging interferometric nanoscopy to the limits of available frequency space

Imaging interferometric nanoscopy (IIN) is a synthetic aperture approach offering the potential of optical resolution to the linear-system limit of optics (~λ/4n). The immersion advantages of IIN can be realized if the object is in close proximity to a solid-immersion medium with illumination and collection through the substrate and coupling this radiation to air by a grating on the medium surface opposite the object. The spatial resolution as a function of the medium thickness and refractive index as well as the field-of-view of the objective optical system is derived and applied to simulations.     

Simulation of the effects of atmospheric turbulence on mid-infrared visibility measurements with the mid-infrared interferometric instrument for the very large telescope interferometer

The mid-infrared interferometric instrument is one of three instruments that will equip the focus of the Very Large Telescope Interferometer. During the design phase of the instrument we made use of a program of simulations to define the constraints imposed by atmospheric turbulence. We present our results for the estimated fringe motion, during a typical sampling time of 100 ms, and for the estimated fringe visibility with and without tip-tilt correction. Our simulations were run assuming an outer scale of turbulence of 25 m against an infinite value as strictly implied by Kolmogorov statistics. The results show that this has positive consequences for our applications, above all as far as fringe motion is concerned. We also take into consideration the effect of background noise on the accuracy of the fringe visibility measurements and the effect of self-fringe tracking, which has been simulated by a linear fringe-tracker algorithm.     

Effect of telescope alignment on a stellar interferometer

For a ground-based stellar interferometer, we investigate the effect of wave-front distortions that are due to telescope alignment errors and other factors. We apply the results to the IR/Optical Telescope Array (IOTA) interferometer. We present the computational method used in our simulation program to calculate explicitly the wave-front shape from an arbitrarily misaligned telescope. We calculate the wave-front shape and variance for a suite of misalignment conditions and interpret these results to find allowable tolerances on the positions and tilts of the telescope mirrors. We calculate the expected Strehl ratios from a total of ten types of factor, including telescope alignment, that are expected to be important in a real interferometer. Ranking the expected wave-front perturbations, we find that three of them, the wave-front curvature from atmospheric turbulence, the servo system time constant, and the flatness of the relay optics surfaces, are more significant than the telescope alignment factor. We compare observational experience at IOTA with our model estimate of the overall Strehl ratio in the visual and the infrared, finding moderately good agreement and, more important, a guide for future instrumental improvements.     

Validation of arrayed imaging reflectometry biosensor response for protein-antibody interactions: cross-correlation of theory, experiment, and complementary techniques

One of the critical steps in the development of an analytical technique is to confirm that its experimental response correlates with predictions derived from the theoretical framework on which it is based. This validates the technique quantitatively and, in the case of a biosensor, facilitates a correlation of the sensor's output signal to the concentration of the analyte being tested. Herein we report studies demonstrating that the quantitative response of arrayed imaging reflectometry (AIR), a highly sensitive label-free biosensing method, is a predictable function of the probe and analyte properties. We first incorporated a standard one-site Langmuir binding model describing probe-analyte interactions at the surface into the theoretical model for thickness-dependent reflectance in AIR. This established a hypothetical correlation between the analyte concentration and the AIR response. Spectroscopic ellipsometry, surface plasmon resonance, and AIR were then used to validate this model for two biomedically important proteins, fibroblast growth factor-2 and vascular endothelial growth factor. While our studies demonstrated that the 1:1 one-site Langmuir model accurately described the observed response of macrospot AIR arrays, either a two-site Langmuir model or a Sips isotherm better described the behavior of AIR microarrays. These studies confirmed the quantitative performance of AIR across a range of probe-analyte affinities. Furthermore, the methodology developed here can be extended to other label-free biosensing platforms, thus facilitating a more accurate and quantitative interpretation of the sensor response.     

Investigation of a laser interferometric goniometer

The optico-mechanical circuit of an interference goniometer is presented. It is shown that the error of the goniometer in the range ±10° does not exceed 0.08″. Translated from Izmeritel'naya Tekhnika, No. 6, pp. 33–35, June, 1996.