垂直布里奇曼法生长碲锌镉晶体的工艺条件优化

分析了利用垂直布里奇曼法生长碲锌镉晶体的工艺条件,如坩埚的材质和形状、炉体温场、固液界面形状、生长速率以及采用籽晶等生长条件对晶体单晶率和质量的影响,并提出了优化垂直布里奇曼法生长CdZnTe晶体的条件。     

PBN坩埚生长碲锌镉单晶的性能与缺陷研究

采用垂直布里奇曼法,利用热解氮化硼(PBN)坩埚生长碲锌镉单晶(CdZnTe),并对晶体进行定向、切割与磨抛制成(111)面碲锌镉晶片。采用傅里叶红外透过光谱仪、红外透射显微镜、金相显微镜、X射线形貌仪、X射线衍射仪和X射线双晶衍射仪等仪器系统地检测和研究了碲锌镉晶体的性能与缺陷。研究发现:相比于石英坩埚,采用PBN坩埚生长的碲锌镉晶体单晶率和出片率均大幅增加,孪晶、小角晶界和位错密度明显减少。     

碲锌镉晶体中微观缺陷分析

碲锌镉晶体(CdZnTe)是一种性能优异的红外焦平面探测器衬底材料,其质量的优劣将直接影响外延层的结构与性能,而晶体中的微观缺陷常常是影响衬底材料质量的主要因素之一.本文采用红外透射显微镜、金相显微镜、X射线形貌仪、扫描电镜、白光干涉仪等仪器系统地检测和研究了碲锌镉晶体中存在的微观缺陷.研究发现碲锌镉晶体样品中主要存在层错、孪晶界和包裹物等微观缺陷,结合晶体缺陷理论详细地分析了碲锌镉晶体中微观缺陷的形成机制.     

碲锌镉晶体中夹杂问题的实验研究

采用红外透射显微镜检测和研究了热解氮化硼(PBN)坩埚生长碲锌镉晶体(CdZnTe)中的缺陷—夹杂,并对夹杂的影响因素进行了分析。研究发现:不同原料的化学配比、自由空间体积、饱和蒸汽压、晶体生长温场对晶体中夹杂的种类、形状、密度和尺寸都存在着影响,通过一系列工艺的改进可以获得夹杂合格的碲锌镉晶体。     

碲锌镉衬底晶向对碲镉汞薄膜表面形貌的影响

利用定向仪对原生晶片及加工后的碲锌镉衬底的晶向进行比较,观察不同晶向衬底液相外延碲镉汞薄膜的表面形貌,考察了衬底晶向偏差对液相外延碲镉汞薄膜表面形貌的影响。通过进一步的追踪碲锌镉衬底在加工过程中的晶向变化,研究衬底晶向变化的原因和解决方法。研究发现,碲锌镉晶体在初次定向切割后的加工过程中晶向会发生明显变化,而在厚度减薄较大的粗磨工艺后不会发生较大晶向偏差,因此,可将粗磨后衬底的再次定向结果作为进一步筛选碲锌镉衬底的依据,以保证液相外延碲镉汞薄膜的质量。     

CdZnTe(211)B衬底对MBE外延碲镉汞材料的影响分析

碲锌镉 CdZnTe（211）B 衬底广泛应用于碲镉汞（HgCdTe）分子束外延生长,其性能参数在很大程度上决定了碲镉汞分子束外延材料的质量。主要讨论了 CdZnTe（211）B 衬底几个关键性能参数对碲镉汞外延材料的影响,包括 Zn 组分及均匀性、缺陷（位错、孪晶及晶界和碲沉淀）以及表面状态（粗糙度和化学组成）,并且分析了对 CdZnTe（211）B 衬底进行筛分时各性能参数的评价方法和指标。     

碲锌镉晶片精密抛光效果的影响因素分析

碲锌镉(CZT,CdZnTe)晶片是生长红外焦平面列阵所用碲镉汞(HgCdTe)薄膜的衬底材料.为了满足碲镉汞液相外延的性能要求,采用化学机械抛光可获得平面度高、粗糙度低、无损伤层的碲锌镉晶片表面。通过对抛光结构的机械运动分析,建立了抛光过程中各参数对工艺指标的影响,通过实验优化工艺参数获得高质量的抛光效果。     

软脆碲锌镉衬底的新型化学抛光技术研究

碲锌镉(CdZnTe)是液相外延碲镉汞(HgCdTe)薄膜的最佳衬底材料。获得高质量的CdZnTe衬底表面对于提升红外探测器的性能有着十分重大的意义。针对CdZnTe表面加工技术进行了研究,开发出一种新的化学抛光技术,使得抛光后的CdZnTe表面粗糙度Ra可达0.3 nm。     

碲锌镉衬底晶面极性对水平液相外延碲镉汞薄膜的影响

研究了碲锌镉衬底（111）晶面的不同极性对水平推舟液相外延生长碲镉汞薄膜的影响。实验结果显示,（111）A面碲锌镉衬底水平液相外延生长碲镉汞薄膜材料组分和厚度均与常规（111）B面碲锌镉衬底碲镉汞薄膜材料相当;碲镉汞母液在采用（111）A面、（111）B面衬底进行液相外延生长的碲镉汞薄膜上接触角分别为（50±2）°和（30±2）°,结合微观模型分析确认碲镉汞母液在碲镉汞薄膜（111）A面存在更大的表面张力;观察并讨论了（111）A面碲镉汞与（111）B面碲镉汞薄膜材料表面微观形貌的差别;实验获得的（111）A面碲镉汞薄膜XRD半峰宽为33.1arcsec。首次报道了（111）晶面选择对母液残留的影响,研究结果表明,采用（111）A面碲锌镉衬底进行碲镉汞水平推舟液相外延生长,能够在不降低晶体质量的情况下,大幅减小薄膜表面母液残留。     

原位退火对碲锌镉晶体第二相夹杂缺陷的影响

采用传统布里奇曼法生长碲锌镉晶体,在配料过程中添加适当过量的Cd,并在晶体生长结束阶段的降温过程中加入晶锭原位退火工艺,晶体的第二相夹杂缺陷得到了有效抑制.根据晶体第二相夹杂缺陷的形成机理,结合热扩散理论和碲锌镉晶体的P-T相图,研究了退火温度对晶体第二相夹杂缺陷密度和粒度(尺寸)的影响,获得了抑制碲锌镉晶体第二相夹杂...     

The Effect of Subbandgap Illumination on the Bulk Resistivity of CdZnTe

The variation in bulk resistivity during infrared (IR) illumination above 950 nm of state-of-the-art CdZnTe (CZT) crystals grown using the traveling heating method or the modified Bridgman method is documented. The change in steady-state current with and without illumination is also evaluated. The influence of secondary phases (SP) on current–voltage (I–V) characteristics is discussed using IR transmission microscopy to determine the defect concentration within the crystal bulk. SP present within the CZT are connected to the existence of deep, IR-excitable traps within the bandgap.     

碲锌镉晶体生长炉自主设计与控温性能实验

针对直径4英寸碲锌镉单晶材料生长的需求,在研究国外碲锌镉晶体材料生长取得的成果基础上,自主设计了一种基于移动炉体技术的碲锌镉晶体生长炉.炉体由4种规格的六段温控加热单元组成,采用工控机控制伺服电机来驱动滚珠丝杆直线导轨实现炉体升降,炉体内腔设置有刚玉陶瓷管及高温金属热管组成的加热炉管,通过高精度铂铑铂热电偶、欧陆、变压...     

Light-Induced Tellurium Enrichment on CdZnTe Crystal Surfaces Detected by Raman Spectroscopy

CdZnTe (CZT) crystals can be grown under controlled conditions to produce high-quality crystals to be used as room-temperature radiation detectors. Even the best crystal growth methods result in defects, such as tellurium secondary phases, that affect the crystal’s performance. In this study, CZT crystals were analyzed by micro-Raman spectroscopy. The growth of Te rich areas on the surface was induced by low-power lasers. The growth was observed versus time with low-power Raman scattering and was observed immediately under higher-power conditions. The detector response was also measured after induced Te enrichment.     

红外光热吸收成像技术在碲锌镉材料检测中的应用

红外光热吸收效应作为一种无损伤非接触的检测技术,已经被广泛用于硅等半导体材料中的微缺陷表征分析.采用光热吸收技术对碲锌镉晶体中的缺陷进行扫描成像分析时发现了一种连续性的光貌相条纹,并对这些条纹的形成机理进行了研究.研究表明碲锌镉晶体中的这种连续性条纹源自于光热测试系统中入射光的干涉,这种干涉和入射光参数、测试样品的厚度、禁带宽度以及热导率等材料特性密切相关.最后,实验通过优化红外光热吸收测量系统获得了碲锌镉材料中的微缺陷结构及其在样品深度方向的三维分布图像.     

High-energy X-ray diffraction and topography investigation of CdZnTe

High-energy transmission x-ray diffraction techniques have been applied to investigate the crystal quality of CdZnTe (CZT). CdZnTe has shown excellent performance in hard x-ray and gamma detection; unfortunately, bulk nonuniformities still limit spectroscopic properties of CZT detectors. Collimated high-energy x-rays, produced by a superconducting wiggler at the National Synchrotron Light Source’s X17B1 beamline, allow for a nondestructive characterization of thick CZT samples (2–3 mm). In order to have complete information about the defect distribution and strains in the crystals, two series of experiments have been performed. First, a monochromatic 67 keV x-ray beam with the size of 300×300 μm² was used to measure the rocking curves of CZT crystals supplied by different material growers. A raster scan of a few square centimeter area allowed us to measure the full-width at half-maximum (FWHM) and shift in the peak position across the crystal. The rocking curve peak position and its FWHM can be correlated with local stoichiometry variations and other local defects. Typically, the FWHM values ranging from 8.3 arcsec to 14.7 arcsec were measured with the best crystal used in these measurements. Second, transmission white beam x-ray topography (WBXT) was performed by using a 22 mm×200 μm beam in the energy range of 50 keV to 200 keV. These types of measurements allowed for large area, high-resolution (50 μm) scans of the samples. Usually, this technique is used to visualize growth and process-induced defects, such as dislocations, twins, domains, inclusions, etc. the difference in contrast shows different parts of the crystal that could not be shown otherwise. In topography, good contrast is indicative of a high quality of the sample, while blurred gray shows the presence of defects. Correlation with other techniques (e.g., infrared (IR) mapping and gamma mapping) was also attempted. Our characterization techniques, which use highly penetrating x-rays, are valid for in-situ measurements, even after electrical contacts have been formed on the crystal in a working device. Thus, these studies may lead to understanding the effects of the defects on the device performance and ultimately to improving the quality of CZT material required for device fabrication. It is important to study crystals from different ingot positions (bottom, center, and top); consequently, more systematic studies involving scans from center to border are planned.     

碲镉汞的液相外延生长

设计了一种使用良好的石墨舟 ,建立了一套能进行开管液相外延的系统 ,并利用此系统在 Cd Zn Te衬底上和在富 Te的生长条件下生长了不同 x值的 Hg Cd Te外延薄膜 .通过对外延生长工艺的控制 ,外延薄膜的表面形貌有很大的改善 ,残留母液大为减少 ,外延薄膜的组分比较均匀 ,其电学性能得到较大改善 ,Hg Cd Te外延薄膜与Cd Zn Te衬底之间的互扩散非常少 ,外延膜的晶体结构也较完整 .     

CdZnTe衬底对碲镉汞气相外延表面形貌的影响

利用气相外延技术在CdZnTe衬底上生长Hg1-xCdxTe薄膜材料,通过在不同晶向、不同极性、不同晶向偏离角度CdZnTe衬底上的外延结果发现,CdZnTe衬底对外延形貌的影响非常大。(111)面衬底上外延形貌明显优于(211)面衬底的外延形貌。对于同是<111>CdZnTe晶向的衬底,(111)Cd面CdZnTe衬底上的外延形貌明显优于(111)Te面。对于(111)Cd面CdZnTe衬底,当晶向偏离角度不同时,其外延形貌也有差异,晶向偏离角越小表面形貌越好。     

CZT面元像素探测器的研制及其幅度修正技术的实现

根据CdZnTe（CZT）面元像素探测器基本原理,测试分析了像素阵列CZT晶体漏电流特性。建立了基于数字脉冲处理方式的11 mm×11 mm×3 mm尺寸4×4像素阵列CZT探测系统。采用137Cs 662 keV伽玛源测试得到探测系统响应脉冲幅度谱,平均能量分辨率为3.3%,全能谱峰（FWHM）为21.85 keV。...     

Structural analyses of seeded thin film microcrystalline silicon solar cell

This contribution investigates the effect of seeding the growth of thin film microcrystalline silicon (µc‐Si : H) deposited by radio frequency plasma‐enhanced chemical vapor deposition on the material properties of µc‐Si : H film and the device performance of p‐i‐n and n‐i‐p µc‐Si : H solar cells. By means of Raman measurement, x‐ray diffraction (XRD) and transmission electron microscopy (TEM), we investigate the structure of seeded µc‐Si : H. In particular, the effect of seed layers on the crystallinity development is investigated. Measurements of the depth profile of the crystalline mass fraction using Raman spectroscopy show that seed layers lead to a more rapid and uniform crystallinity development in growth direction. The amorphous incubation layer is suppressed and crystallization begins directly from onset of film growth without evolving through the intermediate growth phases. From TEM analyses, we observe that crystal sizes are not affected by seed layers. Horizontal cracks are however observed to dominate the early growth of µc‐Si : H in p‐i‐n solar cell and this is reduced upon seeding. For the n‐i‐p cells, these cracks are not affected by seeding. XRD results also indicate that the use of seed layers does not affect the crystal sizes but affects the direction of preferential orientation. Solar cell external parameters show that seeding of p‐i‐n solar cells leads mainly to increase in short‐circuit current density, J_sc with a slight drop in open‐circuit voltage, V_oc. For the n‐i‐p cells, a reverse effect is observed. In this case, the V_oc increases and the J_sc decreases. Copyright © 2012 John Wiley & Sons, Ltd.     

Growth characteristics of CdZnTe layers grown by metalorganic vapor phase epitaxy using dimethylzinc, dimethylcadmium, diethyltelluride, and dimethyltelluride as precursors

Growth characteristics of (100)-oriented CdZnTe layers grown by atmospheric-pressure metalorganic vapor phase epitaxy have been studied using dimethylzinc (DMZn), dimethylcadmium (DMCd), diethyltelluride (DETe), and dimethyltelluride (DMTe) as precursors. Variations of Zn composition and layer growth rate were examined by changing the DMZn supply ratio, defined as DMZn/(DMCd+DMZn), where the precursors are expressed in appropriate units of flow rate, from 0 (no DMZn) to 1.0 (no DMCd), while keeping the total group II supply rate constant. The growth rate of CdZnTe layers was found to decrease monotonically with increase of the DMZn supply ratio. On the other hand, the Zn composition x of grown layers increased gradually up to x=0.04 with increase of the DMZn supply ratio from 0 to 0.8, beyond which the Zn composition increased abruptly to ZnTe. The abrupt transition of Zn composition was suppressed by increasing the VI/II ratio. The growth mechanism of CdZnTe layers was studied based on the observed growth characteristics of CdTe and ZnTe. A higher desorption rate from the growth surface for Zn species than for Cd species, and a higher rate of CdTe formation than ZnTe formation are believed to cause the observed growth characteristics. CdZnTe layers with high crystal quality were grown in a wide range of Zn compositions. The full-width at half-maximum values for x-ray double-crystal rocking-curve measurements were lower than 320 arc-sec for x<0.3 and x>0.75.