FTIR法测量中水汽吸收对测量精度影响的初步研究

水汽吸收线分布于整个中红外波段,它的存在干扰红外光谱的定量分析.分析了水汽谱吸收对测量精度的影响.利用傅里叶变换红外光谱法分别测量了经过干燥处理的待测气体和未经干燥处理的待测气体,并分别对两次测量中CO、CO2、N2O和CH4浓度的测量精度及检测限进行了比较.实验表明:对样气进行干燥预处理可以提高测量精度和检测限.     

红外光学气体检测中的参数修正函数浓度计算与补偿方法

从红外光谱吸收理论出发,提出了一种高精度的红外光学气体传感器气体浓度信号处理方法。重点阐述了气体浓度计算模型的建立和各参数的实验确定方法。从气体浓度计算的原理分析入手,通过逐步修正郎伯-比尔定律得到了一个有效的气体浓度函数关系式,供计算气体浓度用。为了减少外界温度对传感器检测结果的影响,实施了温度补偿,使得传感器能在不同温度条件下使用。经测试,传感器达到了10010-6的分辨能力,具有良好的稳定性,能够满足许多场合的使用。     

一种新型的双模式红外传感器热电元件温度测量方法

传统的红外温度测量传感器由热电元件和热敏电阻两种传感器构成,其中热电元件用于测量待测物体的目标温度,热敏电阻用于测量环境温度。本论文提出了一种新型的温度测量方法,通过使用单一的热电元件及其AD(analog-digital)模块和PMOS(positive channel metal oxide semiconductor)电路实现双模式的切换,在一个测量周期内实现红外传感器测温和环境温度补偿的作用。采用TSMC (Taiwan Semiconductor Manufacturing Company)0.35μm CMOS(complementary metal oxide semiconductor)工艺制造红外传感器,对红外传感器进行温度校准后按照双模式切换方法进行测试和实验,经过温度补偿后温度测量平均误差小于0.01℃,极大地提高了测量精度和环境温度补偿精度,减小动态温度测量误差,同时简化了红外温度传感器的设计制造过程,具有很好的实用价值。     

红外气体分析器非线性误差和温度效应误差修正方法

在红外气体分析器中，微机测控系统对改善仪器性能、提高仪器精度都具有重要作用。分析了传感器的非线性误差和温度效应误差对测量精度的影响，提出了三点定标修正接收器非线性误差，用二次拟合多项式补偿温度效应误差的方法，从而使传感器非线性误差减少到2％以下，温度每10℃变化，温度漂移小于满全程浓度的4‰[1]     

多通道SPR影像传感器及其对DNA的特异性检测

SPR传感器的响应包括多种成份,除了待测分子与探针分子相互结合引起的响应(特异性响应)外,还有样液中其它成份及其浓度的变化、温度变化以及非待测分子与敏感膜的相互作用引起的响应(非特异性响应).后者的存在会严重影响SPR传感器的测量精度.本文提供了一种提高检测精度的方法,即采用多通道SPR影像传感器结构,通过不同通道之间的比较,提取出待测分子与探针分子之间相互作用所引起的响应,在真正意义上实现了对生物分子相互作用的实时、动态检测.通过对DNA的检测,证明这种方法对生物分子相互作用的特异性检测是行之有效的.     

非色散红外CO2传感器温度补偿方法研究

针对非色散红外CO₂传感器受温度影响导致测量精度低的问题,设计了单光路双通道的非色散红外CO₂传感器,提出一种BP神经网络补偿气室温度的新方法。本文分析了温度对传感器的光源、探测器以及对气体吸收系数的影响,并将BP神经网络补偿气室温度方法与其他补偿方法进行了实验对比。实验结果表明,BP神经网络补偿气室温度方法优于其他补偿方法,在测量10%～20%浓度范围内的CO₂时,最大相对误差为2.98%,重复性实验显示RSD为1.22%,为非色散红外CO₂传感器补偿温度提供借鉴意义。     

用于二氧化碳浓度红外检测的温度补偿研究

二氧化碳(carbon dioxide,CO₂)浓度监测是实现碳达峰、碳中和的重要基础,非分散红外(non-dispersive infrared,NDIR)检测技术作为温室气体测量领域应用最为广泛的技术之一,如何有效抑制温度漂移、确保长期监测数据的稳定性和可靠性是研究重点。实验表明,光源光功率、气体吸收线强、滤光片中心波长等容易受到环境温度影响。文中提出一种红外气体检测的温度补偿方法,研制了用于大气二氧化碳浓度红外检测的分析仪。选取以4.26μm为中心波长的CO₂气体吸收线;利用高低温试验箱,对分析仪进行温度补偿实验研究;配置标准CO₂气体浓度,对分析仪进行浓度标定实验研究。测量结果表明,红外CO₂气体分析仪浓度测量稳定,温度补偿显著,具有快速响应、应用范围广等优点。该红外CO₂气体分析仪为陆地生态系统碳收支监测等领域提供可靠数据支撑。     

基于改进BP网络的甲烷传感器温度影响试验研究

温漂会影响催化甲烷传感器检测精度,为减小这种影响,提高传感器检测精度,本文在不同温度环境下进行甲烷传感器环境影响实验,并利用一种基于主成分分析的BP神经网络温度补偿模型对实验数据进行处理,补偿温漂对检测精度的影响,结果表明:本文提出的模型能提高甲烷传感器的稳定性和准确性,减少温漂的影响.     

基于宽带光源与相关光谱技术的CH4传感器研究

针对传统光学传感技术气体选择性不高与激光光源在气体检测中需严格控温的缺点,采用红外宽带光源进行CH4气体的检测,并结合实验所用气室与光电探测器件参数,利用HITRAN数据库对CH4吸收进行仿真计算,得出了系统理论探测下限与光强信号之间的变化规律。在不同CH4浓度梯度的实际测量中,采用快速傅里叶变换(FFT)与Savitzky-Golay数字滤波相结合的方法对系统噪声进行处理,将外部因素引起的噪声干扰降低了1个数量级,在不同CH4浓度梯度的实际测量中,利用CH4浓度和光强调制系数的对应关系对系统进行了标定,并通过数据拟合得到CH4浓度的反演曲线,相关系数达到0.998 83,测量灵敏度低至20×10-6,系统检测下限约为50×10-6;与传统化学传感器相比,系统测量误差小于1.5~7.0%,实现了CH4浓度的精确检测。     

基于GWO-BP神经网络补偿的SF6红外气体传感器

为实现电力系统中SF 6气体的有效监测与控制,本文基于非色散红外原理(NDIR),设计了一种SF 6气体传感器。但是,在实际的测量中,环境的温度与气压差异性容易影响SF 6气体浓度检测装置的检测精度,因此需要采取适当的方法消除环境引起的测量误差。本文采用灰狼智能优化算法—误差反向传播(GWO-BP)神经网络对环境温度与气压变化引起的测量误差进行了补偿,并与其他补偿方法作了比较。分析得出:进行补偿后的浓度数据在0~2000 ppm范围内误差为±15 ppm,满量程误差为0.75%FS,有效提升了传感器的测量精度与稳定性。相较于电路补偿法,该方法有更高的测量精度,并且降低了传感器的体积和成本。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.