溶胶–凝胶法制备BaTiO3薄膜的研究

以醋酸钡和钛酸丁酯为原料,应用溶胶–凝胶法在 Al2O3基片上制备了 BaTiO3薄膜。具体分析了原料、溶剂、催化剂、溶液的 pH 值、螯合剂和表面活性剂对溶胶–凝胶体系的影响,以及加水量、乙二醇加入量和醋酸对溶胶–凝胶黏度的影响。并且可以把掺杂离子加入到溶胶–凝胶中,为调节 BaTiO3薄膜的性能打下了良好的基础。     

水热法制备一维钛酸锶钡晶体

用钛酸丁酯为原料,通过溶胶-凝胶法制备钛酸锶钡前驱体,进行水热处理,得到钛酸锶钡纳米粉体;在凝胶前驱体中加入10%的纳米锐钛矿TiO2,再进行水热处理,水热产物中有大量的一维钛酸锶钡晶体生成。用傅里叶变换红外光谱仪(FTIR)、X线衍射仪(XRD)、场发射扫描电镜(FESEM)、透射电镜(TEM)以及电子衍射(SAED)对前驱体和其对应的水热产物进行物相和形貌的表征,并对一维钛酸锶钡的生长机理进行探讨。结果表明一维钛酸锶钡晶体的生长机理是原位生长。     

电镜在BaTiO3晶相转化机理研究中的应用

钛酸钡是重要的铁电、压电陶瓷材料,主要用来生产高介电的陶瓷电容器等电子元件.近年来人们对该材料的合成方法及物理性质进行了较为详细的研究,出现了一些新的合成方法,如水热法等[1].目前由水热法合成电性能优异的四方相钛酸钡最引人注目,先后有人报导了在较为温和的水热条件下用不同的钡源与钛源制备出四方相BaTiO3[2,3].也有人研究了原料的钛钡比对产物晶相的影响.但关于钛酸钡从立方相到四方相转化机理方面的研究还较少见,而该方面的研究对产物电学性质的控制及工艺条件的选择具有非常重要的意义.本工作以Ba(OH)2和 Ti(OC4H9) 为原料,辅以无机矿化剂OH-,用水热法制得含量较高的四方相钛酸钡,采用电子显微方法结合其它必要的手段,初步探讨了水热条件对产物晶相的影响及晶相转化机理.     

钛酸锶钡薄膜微细图形的制备

采用化学修饰的溶胶凝胶工艺,制备了具有紫外光感应特性的钛酸锶钡(Ba0.8Sr0.2TiO3)溶胶及其凝胶薄膜.提出了钛酸锶钡薄膜微细加工的新方法,即以苯酰丙酮(BzAcH)为化学修饰剂,乙酸钡、氯化锶、钛酸丁酯为原料,甲醇为溶剂,乳酸为催化剂,合成了具有螯合物结构的前驱溶胶体系.其螯合物的特征吸收峰在358nm附近,该溶胶及其凝胶薄膜在室温下有较好的化学稳定性;高压汞灯产生的紫外光照射可以分解薄膜中的螯合物结构,伴随着这种螯合物结构的分解,薄膜在乙醇中的溶解性迅速降低,从而表现出紫外光感应特性.利用这种光感应特性,采用紫外光通过掩膜照射薄膜,然后在乙醇中溶洗,获得了凝胶薄膜的微细图形,进一步通过600℃晶化热处理,最后得到了具有钙钛矿相结构和铁电特性的钛酸锶钡薄膜的微细图形.     

钛酸锶钡薄膜微细图形的制备

采用化学修饰的溶胶凝胶工艺,制备了具有紫外光感应特性的钛酸锶钡(Ba0.8Sr0.2TiO3)溶胶及其凝胶薄膜.提出了钛酸锶钡薄膜微细加工的新方法,即以苯酰丙酮(BzAcH)为化学修饰剂,乙酸钡、氯化锶、钛酸丁酯为原料,甲醇为溶剂,乳酸为催化剂,合成了具有螯合物结构的前驱溶胶体系.其螯合物的特征吸收峰在358nm附近,该溶胶及其凝胶薄膜在室温下有较好的化学稳定性;高压汞灯产生的紫外光照射可以分解薄膜中的螯合物结构,伴随着这种螯合物结构的分解,薄膜在乙醇中的溶解性迅速降低,从而表现出紫外光感应特性.利用这种光感应特性,采用紫外光通过掩膜照射薄膜,然后在乙醇中溶洗,获得了凝胶薄膜的微细图形,进一步通过600℃晶化热处理,最后得到了具有钙钛矿相结构和铁电特性的钛酸锶钡薄膜的微细图形.     

溶胶-凝胶法制备钛酸锶钡薄膜

采用溶胶-凝胶(Sol-Gel)法制备钛酸锶钡(BST)薄膜,采用快速热处理(RTA)对薄膜进行烧结。利用DSC、XRD、SEM等技术分析了钛酸锶钡凝胶的热解过程,以及不同溶胶浓度下薄膜的晶粒、晶相、介温特性。实验表明:低浓度的溶胶(0.05mol/L)所制备的薄膜具有较大的介电反常,其晶相具有(111)取向性;而用0.3mol/L的溶胶制备的BST薄膜,晶粒没有(111)取向;用0.05mol/L溶胶制备,使BST薄膜的介温特性得到很大的改善,介温变化率dε(ε·dT)在11°C左右可达6%。     

溶胶 凝胶法制备Sr2+取代Co2Z及性能研究

为了制备性能优良的Sr2+掺杂的Co2Z型六角钡铁氧体（Ba1.5Sr1.5Co2Fe24O41）,利用溶胶 凝胶自蔓延法,通过改变烧结温度制备了Co2Z钡铁氧体粉末,对其相成分、微观形貌和磁性能进行了研究。结果表明,采用溶胶 凝胶自蔓延法在1 200 ℃烧结时可制备较纯的Co2Z相,此时材料杂相最少,晶粒生长均匀,结构致密,起始磁导率为3.3,截止频率大于1.8 GHz,品质因数Q在1 GHz时为3.6。     

水热条件下钛酸钡在海泡石上生长习性的SEM研究

电子陶瓷用钛酸盐是电子工业的重要原料。其中钛酸钡又是电子陶瓷中最重要的一种 ,是具有压电性和极高介电常数的电子功能材料[1] 。但钛酸钡具有立方相、四方相两种不同的晶型 ,只有后者才具有压电性和较高的介电常数。随着研究的深入 ,在水热条件下可直接得到四方相钛酸钡[2 ] 。但一般在温度较低时 ,水热法得到立方相钛酸钡 ,随着温度的提高和原料中钡 钛摩尔比的增加 ,生成四方相钛酸钡的可能性增加[3 ] 。但产物的原始粒径通常为10 0ｎｍ左右 ,难以满足压电陶瓷的需要。本研究采用在水热体系中加入海泡石的办法 ,在较低的温度下 ,得到…     

无机溶胶凝胶法制备铝酸盐对钡钨阴极性能的影响研究

针对高性能、长寿命空间行波管对阴极性能的苛刻需求,本文采用一种新型无机溶胶凝胶法制备钡钨阴极用铝酸盐,利用扫描电镜、X射线衍射仪分析铝酸盐的微观形貌、物相结构,并研究不同工艺路径制备铝酸盐对阴极发射性能、蒸发性能、寿命的影响。相比固相法制备的铝酸盐及阴极,无机溶胶凝胶法制备的铝酸盐烧结温度低、结晶性好、颗粒尺寸小(约1μm)且均匀性分散;无机溶胶凝胶法制备的阴极发射得到提高,发射拐点电流密度约为32.91 A/cm2,发射斜率约为1.403(1050℃(光亮温度));阴极蒸发速率较低,为2.5×10^-10 g/cm²·s(1050℃),同时阴极寿命提高了1.43倍。     

纳米晶钛酸钡粉体制备及陶瓷烧结性能的研究

采用硬脂酸钡和钛酸丁酯为原料的凝胶方法制备了纳米晶钛酸钡粉。ＸＲＤ分析表明晶体为立方相钙钛矿结构,扫描电镜图像显示一次粒子粒径约２０ｎｍ。纳米粉体烧结温度比普通微米粉体烧结温度低,陶瓷显微结构分析表明在陶瓷中晶粒仍保持纳米尺寸,约为１００ｎｍ。所得材料具有良好的热稳定性,在１１９０～１２８０℃的烧结温度范围内,陶瓷体内晶粒无明显长大,且始终维持在纳米尺寸。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.