Toward a better understanding of synthesis and processing of ceramic/self-assembled monolayer bilayer coatings

Ceramic/self-assembled monolayer (SAM) bilayer coatings can provide adequate protection for silicon devices, or act as a multipurpose coating for other electronic applications, due to synergistic effects by forming a hybrid coating structure. The organic SAM layer acts as a “template” for the growth of the ceramic layer, while the ceramic layer can provide protection from environmental and mechanical impact. Low-temperature solution-based deposition techniques, namely, an in-situ solution method (biomimetic) and a hydrothermal method, have been employed in this study. Specifically, phosphonate-based (diethyl phosphatoethyl triethoxy silane) SAMs were used as a template to generate a zirconia ceramic layer at low temperatures. Other organic templates such as -SiCl₃-, -OH-, -HSO₃-, or -CH₃-terminated SAMs were also examined. The reactions to grow the ceramic film were found to be pH sensitive. The ceramic and SAM coatings were characterized by a variety of analytical techniques. A pathway for the formation of the ceramic coating is also discussed.     

Nanocrystalline Electroplated Cu–Ni: Metallic Thin Films with Enhanced Mechanical Properties and Tunable Magnetic Behavior

Nanocrystalline 3 µm thick Cu_1–xNi_x (0.45 ≤ x ≤ 0.87) films are electrodeposited galvanostatically onto Cu/Ti/Si (100) substrates, from a citrate‐ and sulphate‐based bath containing sodium lauryl sulphate and saccharine as additives. The films exhibit large values of reduced Young's modulus (173 < E_r < 192 GPa) and hardness (6.4 < H < 8.2 GPa), both of which can be tailored by varying the alloy composition. The outstanding mechanical properties of these metallic films can be ascribed to their nanocrystalline nature—as evidenced by X‐ray diffraction, transmission electron microscopy, and atomic force microscopy—along with the occurrence of stacking faults and the concomitant formation of intragranular nanotwins during film growth. Due to their nanocrystalline character, these films also show very low surface roughness (root mean square deviation of around 2 nm). Furthermore, tunable magnetic properties, including a transition from paramagnetic to ferromagnetic behavior, are observed when the Ni percentage is increased. This combination of properties, together with the simplicity of the fabrication method, makes this system attractive for widespread technological applications, including hard metallic coatings or magnetic micro/nano‐electromechanical devices.     

Microstructured ZnO coatings combined with antireflective layers for light management in photovoltaic devices

We describe microstructured ZnO coatings that improve photovoltaic (PV) device performance through their antireflective properties and their tendency to scatter incoming light at large angles. In many PV devices, reflection from the transparent conductive top contact significantly degrades performance. Traditional quarter‐wave antireflective (AR) coatings reduce surface reflection but perform optimally for only a narrow spectral range and incident illumination angle. Furthermore, in some types of devices, absorption far from the junction increases the rate of recombination, and light management strategies are required to remedy this. The randomly patterned, microstructured ZnO coatings described in this paper, formed via a simple wet etch process, serve as both an AR layer with superior performance to that of a thin film AR coating alone as well as a large angle forward scatterer. We model formation of the coatings and evaluate their AR properties. When combined with a traditional quarter‐wave MgF₂ coating, these microstructured ZnO coatings increase short circuit currents of example Cu(In,Ga)Se₂ (CIGS) devices by over 20% in comparison to those of uncoated devices at normal incidence. A similar improvement is observed for illumination angles of up to 60°. While demonstrated here for CIGS, these structures may prove useful for other PV technologies as well. Published 2016. This article is a U.S. Government work and is in the public domain in the USA. Progress in Photovoltaics: Research and Applications Published by John Wiley & Sons Ltd.     

Versatile Nanocomposite Coatings with Tunable Cell Adhesion and Bactericidity

TiO₂‐Ag nanocomposites are known for their bactericidal effect during exposure to appropriate UV radiation. While involving hazardous radiation, and limited to accessible areas, the bactericidity of these coatings is not persistent in the absence of UV light, which impedes their commercial application. Herein it is shown that TiO₂‐Ag nanocomposites can be made highly bactericidal without the need of irradiation. Beyond this, bactericidity can even be mitigated in the presence of pre‐irradiated coatings. Biocompatibility and cell adhesion are also negligibly small for the as‐processed, non‐irradiated coatings, and become fairly high when the coatings are irradiated prior to testing. This opens the possibility to pattern the coatings into areas with high and low cell adhesion properties. Indeed by irradiating the coating through a mechanical mask it is shown that fibroblast cell adherence is sharply confined to the irradiated area. These properties are achieved using TiO₂‐Ag thin films with high silver loadings of 50 wt%. The films are processed on stainless steel substrates using solution deposition. Microstructural characterization by means of X‐ray diffraction, Raman, and X‐ray photoelectron spectroscopy, high‐resolution scanning electron microscopy, and atomic force microscopy show a highly amorphous TiO₂‐Ag_xO nanocomposite matrix with scattered silver nanoparticles. UV irradiation of the films results in the precipitation of a high density of silver nanoparticles at the film surface. Bactericidal properties of the films are tested on α‐haemolyzing streptococci and in‐vitro biocompatibility is assessed on primary human fibroblast cultures. The results mentioned above as to the tunable bactericidity and biocompatibility of the TiO₂‐Ag coatings developed herein, are amenable to silver ion release, to catalytic effects of silver nanoparticles, and to specific wettabilities of the surfaces.     

TiO2 DLAR coatings for planar silicon solar cells

In this paper we demonstrate that a double‐layer anti‐reflection (DLAR) coating can be fabricated using only titanium dioxide (TiO₂). Two TiO₂ thin films were deposited onto planar silicon wafers using a simple atmospheric pressure chemical vapour deposition (APCVD) system under different deposition conditions. Weighted average reflectances of 6.5% (measured) and 7.0% (calculated) were achieved for TiO₂ DLAR coatings in air and under glass, respectively. An increase in the short‐circuit current density of Δ J_sc = 2.5 mA/cm² can be expected for an optimised TiO₂ DLAR coating when compared with a commercial TiO₂ single‐layer anti‐reflection coating. Copyright © 2003 John Wiley & Sons, Ltd.     

Bottom‐Up Engineering of Subnanometer Copper Diffusion Barriers Using NH2‐Derived Self‐Assembled Monolayers

A 3‐aminopropyltrimethoxysilane‐derived self‐assembled monolayer (NH₂SAM) is investigated as a barrier against copper diffusion for application in back‐end‐of‐line (BEOL) technology. The essential characteristics studied include thermal stability to BEOL processing, inhibition of copper diffusion, and adhesion to both the underlying SiO₂ dielectric substrate and the Cu over‐layer. Time‐of‐flight secondary ion mass spectrometry and X‐ray spectroscopy (XPS) analysis reveal that the copper over‐layer closes at 1–2‐nm thickness, comparable with the 1.3‐nm closure of state‐of‐the‐art Ta/TaN Cu diffusion barriers. That the NH₂SAM remains intact upon Cu deposition and subsequent annealing is unambiguously revealed by energy‐filtered transmission electron microscopy supported by XPS. The SAM forms a well‐defined carbon‐rich interface with the Cu over‐layer and electron energy loss spectroscopy shows no evidence of Cu penetration into the SAM. Interestingly, the adhesion of the Cu/NH₂SAM/SiO₂ system increases with annealing temperature up to 7.2 J m^?2 at 400 °C, comparable to Ta/TaN (7.5 J m^?2 at room temperature). The corresponding fracture analysis shows that when failure does occur it is located at the Cu/SAM interface. Overall, these results demonstrate that NH₂SAM is a suitable candidate for subnanometer‐scale diffusion barrier application in a selective coating for copper advanced interconnects.     

Barrier Properties of Amorphous Binary Ta-Ni Thin Films for Cu Interconnection

Highly thermally stable amorphous Ta _x Ni_1–x (x = 0.25 and 0.75) thin films were deposited on Si and Si/SiO₂ substrate by magnetron dc sputtering, and the performance of films (20-nm thick) as barriers for copper (Cu) interconnection was evaluated. The failure behaviors of the films were elucidated using a four-point probe, x-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Auger emission spectrometry (AES). A highly (111) textured Cu film could be obtained when Cu was deposited on Si/Ta_0.25Ni_0.75 and Si/SiO₂/Ta_0.25Ni_0.75 substrates. The failure temperatures of Si/Ta_0.25Ni_0.75/Cu- and Si/Ta_0.75Ni_0.25/Cu-stacked films were 550°C and 600°C, respectively. Failure of the studied films initiated the penetration of Cu into the Si/Ta _x Ni_1–x interface and triggered the partial dissociation of the Ta _x Ni_1–x barrier layer, forming Cu₃Si precipitates, Ni-silicide and Ta-silicide. Increasing the Ta content enhanced the microstructural and thermal stability of the stacked films, markedly improving barrier properties. The experimental findings demonstrated that the barrier characteristic of Ta_0.75Ni_0.25 was substantially superior to that of Ta_0.25Ni_0.75.     

Photocatalytic activity of TiO2/Ti composite coatings fabricated by mechanical coating technique and subsequent heat oxidation

Titanium (Ti) coatings were fabricated on alumina (Al₂O₃) balls by mechanical coating technique (MCT) with Ti powder. The Ti coatings were then oxidized to titanium dioxide (TiO₂) coatings at different temperatures. The oxidation behavior and microstructure evolution of these coatings were investigated. The results showed that the inner and surface layers of the Ti coatings were oxidized simultaneously. When oxidizing at a relatively low temperature for a short time, TiO₂/Ti composite coatings were obtained. Increasing the oxidation temperature or time increased the thickness of the TiO₂ layer and eventually Ti coatings were totally oxidized to TiO₂ coatings. During oxidation, TiO₂ needles formed at a lower temperature grew to generate columnar crystals. The photocatalytic activity of these coatings was examined. Compared with TiO₂ coatings, the TiO₂/Ti composite coatings showed much higher photocatalytic activity. The highest activity was observed for the TiO₂/Ti composite coatings prepared by MCT and subsequent oxidation at 1073 K for 15 h and then the thickness of the TiO₂ layer was 27 μm.     

Characterization of Epitaxial Indium Nitride Interlayers for Ohmic Contacts to Silicon Carbide

Ohmic contacts to n-type 4H- and 6H-SiC without postdeposition annealing were achieved using an interlayer of epitaxial InN beneath a layer of Ti. The InN films were grown by reactive dc magnetron sputtering at 450°C, whereas the Ti films were deposited by electron-beam evaporation at room temperature. The InN films were characterized by x-ray diffraction (XRD), secondary electron microscopy (SEM), cross-sectional transmission electron microscopy (TEM), and Hall-effect measurements. Both XRD and TEM observations revealed that the Ti and InN films have epitaxial relationships with the 6H-SiC substrate as follows: (0001)[]_Ti∥(0001)[]_InN∥(0001)[]_6H-SiC. The Ti/InN/SiC contacts displayed ohmic behavior, whereas Ti/SiC contacts (without an InN interlayer) were nonohmic. These results suggest that InN reduces the Schottky barrier height at the SiC surface via a small conduction-band offset and support previous reports of an electron accumulation layer at the surface of InN.     

Carbon Coated Fe3O4 Nanospindles as a Superior Anode Material for Lithium‐Ion Batteries

Carbon‐coated Fe₃O₄ nanospindles are synthesized by partial reduction of monodispersed hematite nanospindles with carbon coatings, and investigated with scanning electron microscopy, transmission electron microscopy, X‐ray diffraction, and electrochemical experiments. The Fe₃O₄? C nanospindles show high reversible capacity (～745 mA h g^?1 at C/5 and ～600 mA h g^?1 at C/2), high coulombic efficiency in the first cycle, as well as significantly enhanced cycling performance and high rate capability compared with bare hematite spindles and commercial magnetite particles. The improvements can be attributed to the uniform and continuous carbon coating layers, which have several functions, including: i) maintaining the integrity of particles, ii) increasing the electronic conductivity of electrodes leading to the formation of uniform and thin solid electrolyte interphase (SEI) films on the surface, and iii) stabilizing the as‐formed SEI films. The results give clear evidence of the utility of carbon coatings to improve the electrochemical performance of nanostructured transition metal oxides as superior anode materials for lithium‐ion batteries.     

Interfacial reactions of cobalt thin films on (001) GaAs

Interfacial reactions between cobalt thin films and (001) GaAs have been studied by transmission electron microscopy, energy-dispersive analysis of x-rays in a scanningTEM, Auger electron spectroscopy and x-ray photoelectron spectroscopy. The completely reacted layer was found to be “β-Ga₂0₃/(CoGa, CoAs)/GaAs.” The formation of a surface layer ofβ-Ga₂O₃ and the use of encapsulated samples minimized As loss from the reacted layer. Both CoGa and CoAs were found to grow epitaxially on (001) GaAs. The orientation relationships between CoGa and GaAs were determined to be [001] CoGa//[001] GaAs and (220) CoGa//(220) GaAs. The Burgers vectors of interfacial dislocations were identified as 1/2 〈101〉 and 1/2 〈011〉 which are inclined to the (001) GaAs surface. Almost all of the CoGa films were found to be epitaxially related to the surface. No interfacial dislocations were observed in most of the epitaxial CoAs films which are considered to be pseudomorphic with respect to GaAs. The orientation relationships between CoAs and GaAs were determined to be [101] CoAs//[011] GaAs and (020) CoAs//(220) GaAs. Two-step annealing was found to be effective in promoting epitaxial growth.     

Protein‐Enabled Layer‐by‐Layer Syntheses of Aligned,Porous‐Wall,High‐Aspect‐Ratio TiO2 Nanotube Arrays

An aqueous, protein‐enabled (biomimetic), layer‐by‐layer titania deposition process is developed, for the first time, to convert aligned‐nanochannel templates into high‐aspect‐ratio, aligned nanotube arrays with thin (34 nm) walls composed of co‐continuous networks of pores and titania nanocrystals (15 nm ave. size). Alumina templates with aligned open nanochannels are exposed in an alternating fashion to aqueous protamine‐bearing and titania precursor‐bearing (Ti(IV) bis‐ammonium‐lactato‐dihydroxide, TiBALDH) solutions. The ability of protamine to bind to alumina and titania, and to induce the formation of a Ti–O‐bearing coating upon exposure to the TiBALDH precursor, enables the layer‐by‐layer deposition of a conformal protamine/Ti–O‐bearing coating on the nanochannel surfaces within the porous alumina template. Subsequent protamine pyrolysis yields coatings composed of co‐continuous networks of pores and titania nanoparticles. Selective dissolution of the underlying alumina template through the porous coating then yields freestanding, aligned, porous‐wall titania nanotube arrays. The interconnected pores within the nanotube walls allow enhanced loading of functional molecules (such as a Ru‐based N719 dye), whereas the interconnected titania nanoparticles enable the high‐aspect‐ratio, aligned nanotube arrays to be used as electrodes (as demonstrated for dye‐sensitized solar cells with power conversion efficiencies of 5.2 ± 0.4%).     

Titania Nanotubes: Protein‐Enabled Layer‐by‐Layer Syntheses of Aligned,Porous‐Wall,High‐Aspect‐Ratio TiO2 Nanotube Arrays (Adv. Funct. Mater. 9/2011)

An aqueous, protein‐enabled (biomimetic), layer‐by‐layer titania deposition process is developed, for the first time, to convert aligned‐nanochannel templates into high‐aspect‐ratio, aligned nanotube arrays with thin (34 nm) walls composed of co‐continuous networks of pores and titania nanocrystals (15 nm ave. size). Alumina templates with aligned open nanochannels are exposed in an alternating fashion to aqueous protamine‐bearing and titania precursor‐bearing (Ti(IV) bis‐ammonium‐lactato‐dihydroxide, TiBALDH) solutions. The ability of protamine to bind to alumina and titania, and to induce the formation of a Ti–O‐bearing coating upon exposure to the TiBALDH precursor, enables the layer‐by‐layer deposition of a conformal protamine/Ti–O‐bearing coating on the nanochannel surfaces within the porous alumina template. Subsequent protamine pyrolysis yields coatings composed of co‐continuous networks of pores and titania nanoparticles. Selective dissolution of the underlying alumina template through the porous coating then yields freestanding, aligned, porous‐wall titania nanotube arrays. The interconnected pores within the nanotube walls allow enhanced loading of functional molecules (such as a Ru‐based N719 dye), whereas the interconnected titania nanoparticles enable the high‐aspect‐ratio, aligned nanotube arrays to be used as electrodes (as demonstrated for dye‐sensitized solar cells with power conversion efficiencies of 5.2 ± 0.4%).     

Surface and Interface Properties of Metal-Organic Chemical Vapor Deposition Grown a -Plane Mg x Zn1– x O (0?≤ x ≤?0.3) Films

The a-plane Mg _x Zn_1−x O (0 ≤ x ≤ 0.3) films were grown on r-plane () sapphire substrates using metal-organic chemical vapor deposition (MOCVD). Growth was done at temperatures from 450°C to 500°C, with a typical growth rate of ∼500 nm/h. Field emission scanning electron microscopy (FESEM) images show that the films are smooth and dense. X-ray diffraction (XRD) scans confirm good crystallinity of the films. The interface of Mg _x Zn_1−x O films with r-sapphire was found to be semicoherent as characterized by high-resolution transmission electron microscopy (HRTEM). The Mg _x Zn_1−x O surfaces were characterized using scanning tunneling microscopy (STM) in ultrahigh vacuum (UHV). Low-energy electron diffraction (LEED) shows well-ordered and single-crystalline surfaces. The films have a characteristic wavelike surface morphology with needle-shaped domains running predominantly along the crystallographic c-direction. Photoluminescence (PL) measurements show a strong near-band-edge emission without observable deep level emission, indicating a low defect concentration. In-plane optical anisotropic transmission was observed by polarized transmission measurements.     

Epitaxial Growth of High-J c NdBa2Cu3O7−δ Films on RABiTS by Pulsed Laser Deposition

NdBa₂Cu₃O_7−δ (NdBCO) films were grown on rolling-assisted biaxially textured substrates (RABiTS) via pulsed laser deposition. c-Axis-oriented epitaxial NdBCO films with high performance were obtained under optimal deposition conditions. Transmission electron microscopy analysis shows that the NdBCO film grown on RABiTS has a clear interface with a CeO₂ cap layer and a nearly perfect lattice structure. The NdBCO film exhibits higher T _c of 93.7 K and better in-field J _c in magnetic fields and at all field orientations, compared to pure YBCO films.     

Laser processing of TiSi2 and CoSi2 thin films on silicon (100) substrates

We have investigated the formation of TiSi₂ and CoSi₂ thin films on Si(100) substrates using laser (wave length 248 nm, pulse duration 40 ns and repetition rate 5 Hz) physical vapor deposition (LPVD). The films were deposited from solid targets of TiSi₂ and CoSi₂ in vacuum with the substrate temperature optimized at 600° C. The films were characterized using x-ray diffraction, scanning electron microscopy (SEM), transmission electron microscopy (TEM) and four point probe ac resistivity. The films were found to be polycrystalline with a texture. The room temperature resistivity was found to be 16 μΩ-@#@ cm and 23 μΩ-cm for TiSi₂ and CoSi₂ films, respectively. We optimized the processing parameters so as to get particulate free surface. TEM results show that the silicide/silicon interface is quite smooth and there is no perceptible interdiffusion across the interface.     

Liquid‐Infused Smooth Coating with Transparency,Super‐Durability,and Extraordinary Hydrophobicity

Liquid‐infused coatings are because of their fluidity of considerable technological importance for hydrophobic materials with multifunctional properties, such as self‐healing, transmittance, and durability. However, conventional coatings absorb viscous liquid into their sponge‐like structured surface, causing uncontrollable liquid layer formation or liquid transport. In addition, a hydrophobic‐liquid‐retained surface can cause instability and lead to limitation of the hydrophobicity, optical properties, and flexibility due to liquid layer evaporation. Here, we report a strategy for controllable liquid‐layer formation on smooth surfaces (R _rms < 1 nm) by π ‐electron interactions. Using this technology, superoleophilic wetting of decyltrimethoxysilane results in the design of a surface with π ‐interaction liquid adsorption, smoothness, and hydrophobicity (SPLASH), that shows extraordinary hydrophobicity (CAH = 0.75°), and stable repellence for various water‐based solutions including micrometer‐sized mist. The smoothness of the solid under a liquid layer enabled the SPLASH to exhibit stable hydrophobicity, transparency (>90%), structure damage durability and flexibility, regardless of the liquid layer thickness by bending or evaporation. Furthermore, the patterned π ‐electrons' localization on the smooth coating enables controlled liquid‐layer formation and liquid transport. This strategy may provide new insights into designing functional liquid surfaces and our designed surface with multifunctional properties could be developed for various applications.     

Chemically Homogeneous Complex Oxide Thin Films Via Improved Substrate Metallization

A long‐standing challenge to the widespread application of complex oxide thin films is the stable and robust integration of noble metal electrodes, such as platinum, which remains the optimal choice for numerous applications. By considering both work of adhesion and stability against chemical diffusion, it is demonstrated that the use of an improved adhesion layer (namely, ZnO) between the silicon substrate and platinum bottom electrode enables dramatic improvements in the properties of the overlying functional oxide films. Using BaTiO₃ and Pb(Zr,Ti)O₃ films as test cases, it is shown that the use of ZnO as the adhesion layer leads directly to increased process temperature capabilities and dramatic improvements in chemical homogeneity of the films. These result in significant property enhancements (e.g., 300% improvement to bulk‐like permittivity for the BaTiO₃ films) of oxide films prepared on Pt/ZnO as compared to the conventional Pt/Ti and Pt/TiO_x stacks. A comparison of electrical, structural, and chemical properties that demonstrate the impact of adhesion layer chemistry on the chemical homogeneity of the overlying complex oxide is presented. Collectively, this analysis shows that in addition to the simple need for adhesion, metal‐oxide layers between noble metals and silicon can have tremendous chemical impact on the terminal complex oxide layers.     

Optical Properties and Durability of Al2O3-NiP/Al Solar Absorbers Prepared by Electroless Nickel Composite Plating

A simple and low-cost method, electroless nickel composite plating, was used to deposit an Al₂O₃-NiP composite coating on an Al substrate to form an Al₂O₃-NiP/Al solar absorber. The effects of the Al₂O₃ content in the Al₂O₃-NiP composite coating, the thickness of the coating, and the use of a double-layer Al₂O₃-NiP composite coating and a TiO₂ antireflection (AR) layer on the optical characteristics of the Al₂O₃-NiP/Al absorbers were studied. The absorptance (α) and thermal emittance (ε) of the Al₂O₃-NiP/Al absorbers increased with the Al₂O₃ content in the Al₂O₃-NiP composite coating and decreased as the thickness of the coating increased. A double-layer Al₂O₃-NiP/Al absorber with 2:1 thickness ratio of the top layer (Al₂O₃-NiP with 25 vol.% Al₂O₃) to the inner layer (Al₂O₃-NiP with 7 vol.% Al₂O₃) had the best optical properties (α/ε = 0.746/0.103). The optimal double-layer Al₂O₃-NiP/Al absorber with a 106-nm-thick TiO₂ AR layer achieved absorptance of 0.893 and thermal emittance of 0.111. The results of a thermal stability test and a condensation test revealed that the TiO₂-coated double-layer Al₂O₃-NiP/Al absorbers had excellent thermal stability, and their failure time in the condensation test exceeded 100 h.     

Biofunctional Polyelectrolyte Multilayers and Microcapsules: Control of Non‐Specific and Bio‐Specific Protein Adsorption

Layers of the polyelectrolytes poly(allylamine hydrochloride) (PAH, polycationic) and poly(styrene sulfonate) (PSS, polyanionic) are consecutively adsorbed on flat silicon oxide surfaces, forming stable, ultrathin multilayer films. Subsequently, a final monolayer of the polycationic copolymer poly(L ‐lysine)‐graft‐poly(ethylene glycol) (PLL‐g‐PEG) is adsorbed onto the PSS‐terminated multilayer in order to impart protein resistance to the surface. The growth of each of the polyelectrolyte layers and the protein resistance of the resulting [PAH/PPS]_n(PLL‐g‐PEG) multilayer (n = 1–4) are followed quantitatively ex situ using X‐ray photoelectron spectroscopy and in situ using real‐time optical‐waveguide lightmode spectroscopy. In a second approach, the same type of [PAH/PSS]_n(PLL‐g‐PEG) multilayer coatings are successfully formed on the surface of colloidal particles in order to produce surface‐functionalized, hollow microcapsules after dissolution of the core materials (melamine formaldehyde (MF) and poly(lactic acid) (PLA; colloid diameters: 1.2–20 μm). Microelectrophoresis and confocal laser scanning microscopy are used to study multilayer formation on the colloids and protein resistance of the final capsule. The quality of the PLL‐g‐PEG layer on the microcapsules depends on both the type of core material and the dissolution protocols used. The greatest protein resistance is achieved using PLA cores and coating the polyelectrolyte microcapsules with PLL‐g‐PEG after dissolution of the cores. Protein adsorption from full serum on [PAH/PPS]_n(PLL‐g‐PEG) multilayers (on both flat substrates and microcapsules) decreases by three orders of magnitude in comparison to the standard [PAH/PPS]_n layer. Finally, biofunctional capsules of the type [PAH/PPS]_n(PLL‐g‐PEG/PEG‐biotin) (top copolymer layer with a fraction of the PEG chains end‐functionalized with biotin) are produced which allow for specific recognition and immobilization of controlled amounts of streptavidin at the surface of the capsules. Biofunctional multilayer films and capsules are believed to have a potential for future applications as novel platforms for biotechnological applications such as biosensors and carriers for targeted drug delivery.