改进的CMOS电荷灵敏前放噪声优化设计方法

CMOS专用集成电荷灵敏前放的噪声性能对于辐射探测非常关键.提出了一种改进的CMOS电荷灵敏前放低噪声设计方法,通过实例计算得到的噪声结果比现有方法都有不同程度的提高.     

适用于高计数率下的放大甄别一体化电路

介绍一种由电荷灵敏前置放大器、主放大器、甄别器、成形电路所组成的一体化电路.该仪器主要用于高计数测量中,最高计数率可达106/s,它主要适应于高灵敏度的3He中子探测器,同时也可以用于其他重离子探测器,该仪器的输出脉冲可直接与CMOS或TTL逻辑电平兼容.它有功耗低,体积小,灵敏度高,便于野外使用等特点.     

CMOS low-noise switched charge sensitive preamplifier for CdTe andCdZnTe X-ray detectors

CdTe and CdZnTe X-ray detector arrays for imaging and spectroscopy provide low capacitance current sources with low leakage currents. The optimal shaping time for low-noise operation is relatively high in CMOS analog channels that provide the readout for these detectors. The shaper is centered at lower frequencies, and thus the 1/f noise from the electronics is the main noise source that limits the resolution of the channel. The optimal dimensions of the input stage MOSFET are determined by this noise. In this paper a design criterion for the optimization of the resolution and the power consumption in a 1/f noise dominated readout is introduced. A readout based on CMOS switched charge sensitive preamplifier without feedback resistor has been designed and fabricated in the CMOS 2-μ low-noise analog process provided by MOSIS. This design provides high sensitivity and the possibility to integrate a large number of channels with low power consumption. Measurements of the performance of a first prototype chip are presented     

CMOS工艺X射线图像传感器设计

本文设计了一种不需闪烁体或增感屏,直接对X射线进行探测成像的线阵图像传感器,对其电荷收集进行了理论分析,设计了辐射加固的光敏元结构。采用0.5 μm DPTM CMOS工艺,针对单个像元内含不同个数光敏元的结构进行了流片和X射线实验测试。测试结果表明：该图像传感器暗信号电压约为1 V,随像元内光敏元个数的增加暗信号电压增大;饱和输出电压为2.4 V;随光敏元个数的增加,电荷收集总量增加,总寄生电容也同时增加,所设计的单个像元含3个光敏元的结构能得到相对更大的有效输出电压。     

Investigation of Radiation Effects and Hardening Procedures for CMOS/SOS

Ionizing radiation effects and hardening procedures have been investigated using simple CMOS/SOS circuits fabricated with SiO2 gate insulators. A modified gate oxidation process using steam and HCl has resulted in improved gate oxide hardness -- with threshold voltage shifts of less than two volts up to a total dose of 106 rads(Si). Radiation-induced n-channel leakage currents were reduced by more than two orders of magnitude by using a deep boron ion implant and appropriate process ing techniques. Post-irradiation values of less than 0.5?A/mil have been obtained using this procedure. Studies of charge buildup at the silicon-sapphire interface indicate an effective positive charge in the range of 1011 cm-2 to 1012 cm-2 - peaking at a total dose of about 105 rads (Si). This effective charge decreases for increasing doses above 5×105 rads(Si). The decrease is attributed to radiation-induced interface states.     

Device simulation study of the SEU sensitivity of SRAMs to internalion tracks generated by nuclear reactions

Single-event upsets (SEUs) in static random access memories (SRAMs) are investigated using three-dimensional (3-D) full cell device simulations for tracks that do not cross the OFF n-channel MOSFET drain. These tracks are representative of the most probable geometrical cases when the ions are generated inside the device by nuclear reactions, and then address one important part of neutron- or protons-induced soft errors. It is found that the duration and magnitude of the ion-induced current pulse strongly depends on the track location. As a result, the flipping of the memory cell is delayed, and the critical charge involved during the upset is no longer constant. A linear relationship between the critical charge and the delay is found and is explained by the contribution of the ON p-channel MOSFET. The increase of the ion current pulse delay and broadening when the track is moved away from the drain is explained on the basis of the diffusion-collection mechanism. Indications on the size of the sensitive regions are derived     

CMOS APS光电器件单粒子效应电荷收集特性仿真分析

卫星在轨飞行期间,星载电子器件将不可避免地遭受空间带电粒子的辐射,随着半导体技术的不断进步,电子器件的单粒子效应敏感性越来越高,已经成为一个影响其可靠性的重要因素。互补金属氧化物半导体(Complementary Metal Oxide Semiconductor Active Pixel Sensor,CMOS APS)光电器件因其低功耗、小体积和微重量的优点已成为遥感卫星成像的重要发展方向。为获取CMOS APS光电器件在遭受带电粒子辐射后性能变化的特征,在分析SOI MOSFET(Silicon on Insulator Metal-Oxide-Semiconductor Field-Effect Transistor)结构和特性的基础上,通过理论分析和数值模拟,分析了重离子在CMOS APS光电器件中引起的辐射损伤,分析晶体管和光电二极管的电荷收集机理。通过TCAD(Technology Computer Aided Design)模拟了电荷收集过程,分析了影响漏电流变化的直接因素,获得了重离子LET(Linear Energy Transition)值、入射位置以及器件偏置电压与漏电流的相互关系,为后续CMOS APS的重离子模拟试验以及抗辐射加固设计提供了理论支撑。     

A versatile 16-channel front-end integrated circuit for semiconductor radiation detectors

A CMOS front-end integrated circuit consisting of 16 identical analog channels is proposed for semiconductor radiation detectors. Each of the 16 channels has a low noise charge sensitive amplifier, a pulse shaper, a peak detect and hold circuit and a discriminator, while analog voltage and channel address are routed off the chip. It can accommodate both electron and hole collection with selectable gain and peaking time. Sequential and sparse readout, combining with self-trigger and external trigger, makes four readout modes. The circuit is implemented in a 0.35 μm DP4M (double-poly-quad-metal) CMOS technology with an area of 2.5×1.54 mm2 and power dissipation of 60 mW. A single channel chip is tested with Verigy 93000. The gain is adjustable from 13 to 130 mV·fC–1 while the peaking time varies between 0.7 and 1.6 μs. The linearity is more than 99% and the equivalent noise charge is about 600e.     

p-n结脉冲激光诱发电荷收集试验研究

测量了脉冲激光诱发半导体p-n结的瞬态脉冲电流,研究瞬态脉冲幅值和收集电荷与能量、偏压及入射位置的相关性。研究结果表明,瞬态脉冲信号幅值和收集到的总电荷随脉冲激光能量的增大而增多,与激光能量呈指数关系;收集电荷随偏压而增大;敏感区内的收集电荷数相差不大,远离敏感区的收集电荷明显减小。另外,将研究结果与重离子试验数据进行比对,两者有一定的相似性,但电荷收集脉冲幅值、脉冲波形有一定的差异。其结果为深入研究激光模拟单粒子效应技术奠定了基础。     

Mapping ion beam induced current changes in a commercial MOSFET

We demonstrate a novel nuclear microprobe imaging and analysis modality for micrometre-scale field effect transistor devices probed with focused beams of MeV ions. By recording the drain current as a function of time during ion irradiation it is possible to identify current transients induced by the passage of single ions through the sensitive structures of the device. This modality takes advantage of the fact that the ionization produced by the passage of a single ion acts in an equivalent way to a transient change in the gate bias which therefore modulates the drain current as a function of time. This differs from the traditional ion beam induced charge technique where the ionization drifts in an internal electric field and induces a single charge pulse in an electrode applied to the device. Instead a richer variety of phenomena are observed, with different time constants which depend on the proximity of the ion strike to the channel of the device. The signals may be used to examine device function, radiation sensitivity or to count ion impacts within the channel.     

Single event effects in static and dynamic registers in a 0.25μm CMOS technology

We have studied single event effects in static and dynamic registers designed in a quarter micron CMOS process. In our design, we systematically used guardrings and enclosed (edgeless) transistor geometry to improve the total dose tolerance. This design technique improved both the SEL and SEU sensitivity of the circuits. Using SPICE simulations, the measured smooth transition of the cross-section curve between LET threshold and saturation has been traced to the presence of four different upset modes, each corresponding to a different critical charge and sensitive area. A new architecture to protect the content of storage cells has been developed, and a threshold LET around 89 MeV cm ² mg^-1 has been measured for this cell at a power supply voltage of 2 V     

基于物理的体硅CMOS存储器多位翻转特性电路级仿真分析

本文提出了一种电路级仿真方法,对体硅CMOS存储器中由单粒子效应引发的多位翻转特性进行了建模分析。该方法综合考虑了扩散效应及寄生双极放大效应引发的电荷共享收集机制,能基于版图特征重构多节点电荷收集的电流源,实现对单粒子效应位翻转截面的预估计算。针对一款65 nm工艺体硅CMOS存储器,对不同能量及角度入射的重离子引发的多位翻转效应（MCU）进行了仿真计算,并与试验结果进行了对比。     

半导体阵列微剂量探测器前端读出电路设计

根据三维Si SOI PIN像素微剂量探测器特性参数,设计了一种基于GF chrt018IC CMOS工艺的前端读出电路。该读出电路主要包括PMOS输入的电荷灵敏前前置放大器,有源整形滤波电路,电压比较器及基准电流源等,可实现对微剂量信号的放大、滤波降噪、甄别输出等功能。仿真测试表明:能量探测范围为5~500 fC,单通道功耗约为2 mW,总噪声性能为0.05 f C+1.6×10~(-3)fC/pF。     

Medium-energy heavy-ion single-event-burnout imaging of powerMOSFETs

We present the first experimental determination of the SEB sensitive area in a power MOSFET irradiated with a high-LET heavy-ion microbeam. We used a spectroscopy technique to perform coincident measurements of the charge collected in both source and drain junctions together, with a nondestructive technique (current limitation). The resulting charge collection images are related to the physical structure of the individual cells. These experimental data reveal the complex 3-dimensional behavior of a real structure, which can not easily be simulated using available tools. As the drain voltage is increased, the onset of burnout is reached, characterized by a sudden change in the charge collection image. “Hot spots” are observed where the collected charge reaches its maximum value. Those spots, due to burnout triggering events, correspond to areas where the silicon is degraded through thermal effects along a single ion track. This direct observation of SEB sensitive areas as applications for, either device hardening, by modifying doping profiles or layout of the cells, or for code calibration and device simulation     

基于3D Si PIN阵列热中子探测器的变增益宽动态前端读出电子学设计

基于Si CMOS技术的前端读出ASIC主要是根据3D Si PIN阵列热中子探测器的输出信号特性设计的。所设计的读出ASIC的主要电路模块包括电荷灵敏放大器（CSA）、模拟开关设计、具有三级电荷灵敏自动转换的自动增益控制模块（AGC）、相关双采样（CDS）和基准电流源电路。仿真结果表明,前端电路的输入动态范围为10 fC~80 pC。根据热中子探测器输出信号特性设计的ASIC的3个增益系数分别为19 V/pC、039 V/pC和94 mV/pC。所设计的ASIC的积分非线性小于 1%。单通道静态功耗约为 536 mW。零输入探测器电容时的等效噪声电荷为2416e-。计数率可达1 MHz 。     

Pulsed extraction of ionization from helium buffer gas

The migration of intense ionization created in helium buffer gas under the influence of applied electric fields is considered. First the chemical evolution of the ionization created by fast heavy-ion beams is described. Straight forward estimates of the lifetimes for charge exchange indicate a clear suppression of charge exchange during ion migration in low pressure helium. Then self-consistent calculations of the migration of the ions in the electric field of a gas-filled cell at the National Superconducting Cyclotron Laboratory (NSCL) using a particle-in-cell computer code are presented. The results of the calculations are compared to measurements of the extracted ion current caused by beam pulses injected into the NSCL gas cell.     

金属真空弧离子源引出强流离子束的数值模拟

为了引出更高强度、更高亮度的铀离子束,以满足重离子研究中心(Gesellschaft für SchwerionenforschungmbH,GSI)重离子同步加速器的需求,本文用三维的计算机程序KOBRA3-INP对金属真空弧离子源(Metalvapor vacuum arcion source,MEVVA)引出强流铀离子束在引出系统和后加速系统中的动力学特性进行了研究,讨论了离子源发射束流密度对引出束性能的影响.结果表明,束流损失主要发生在引出系统和后加速系统之间的漂移区;在假设漂移区束流被空间电荷中和的情况下,模拟结果和实验结果符合;在发射束流密度为180-230 mA/cm2范围内,经后加速的束流强度变化不大.     

Design and test results of a low-noise readout integrated circuit for high-energy particle detectors

A low-noise readout integrated circuit for high-energy particle detector is presented.The noise of charge sensitive amplifier was suppressed by using single-side amplifier and resistors as source degeneration.Continuous-time semi-Gaussian filter is chosen to avoid switch noise.The peaking time of pulse shaper and the gain can be programmed to satisfy multi-application.The readout integrated circuit has been designed and fabricated using a 0.35 μm double-poly triple-metal CMOS technology.Test results show the functions of the readout integrated circuit are correct.The equivalent noise charge with no detector connected is 500–700 e in the typical mode,the gain is tunable within 13–130 mV/fC and the peaking time varies from 0.7 to 1.6 μs,in which the average gain is about 20.5 mV/fC,and the linearity reaches 99.2%.     

2.45GHz单电荷态电子回旋共振离子源

描述了一台2．45GHz单电荷态电子回旋共振（ECR）离子源的原理、结构与应用。介绍了其微波系统与磁场结构。在微波输入功率约600W,引出高压22kV,引出孔径为φ6mm时,该离子源的总束流I（H1^ H2^ H3^ )可达90mA。     

新型电荷-频率转换电路设计

设计了一种用于兰州重离子治癌系统中剂量监测的新型电荷-频率转换电路。该电路将输入的电流信号直接转换为脉冲输出,通过计数器对脉冲个数进行计数实现对输入电荷的测量,从而实现对照射剂量的实时监测。实验表明:该电路可实现0.01 n A~1μA范围内双极性电流的测量,在整个测量范围内线性度好于2.71%。